CN207907819U - More physics quantity detection sensors based on graphene and strain transducer - Google Patents

More physics quantity detection sensors based on graphene and strain transducer Download PDF

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Publication number
CN207907819U
CN207907819U CN201820408566.1U CN201820408566U CN207907819U CN 207907819 U CN207907819 U CN 207907819U CN 201820408566 U CN201820408566 U CN 201820408566U CN 207907819 U CN207907819 U CN 207907819U
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China
Prior art keywords
graphene
film
lid
dielectric base
strain transducer
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Expired - Fee Related
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CN201820408566.1U
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Chinese (zh)
Inventor
孙云飞
胡伏原
班建民
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Suzhou University of Science and Technology
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Suzhou University of Science and Technology
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Abstract

The utility model discloses more physics quantity detection sensors and strain transducer based on graphene, it includes mainly dielectric base, dielectric base is circumferentially evenly equipped with multiple graphene films, each graphene film both ends are respectively arranged with electrode, the dielectric base is closed by a lid, seal chamber is formed between lid and dielectric base, gas is filled in the seal chamber, the gas is CO or NO, the lid includes top and side, the top of the lid is made of the material with certain elasticity, graphene strain transducer film is provided at the top of the lid, the graphene strain transducer film is provided at both ends with electrode, the side of the lid is provided with graphene temperature sensor film, the graphene temperature sensor film is provided at both ends with electrode.The utility model arranges multiple sensors using comprehensive architecture, is effectively saved space.And sensitivity is higher.It is applied widely.

Description

More physics quantity detection sensors based on graphene and strain transducer
Technical field
The utility model is related to a kind of more physics quantity detection sensors and strain transducer based on graphene.
Background technology
Graphene have excellent optics, electricity, mechanical characteristic, materialogy, micro-nano technology, the energy, biomedicine and Drug delivery etc. is with important application prospects, it is considered to be a kind of future revolutionary material.
Currently, it is very more based on the thin film sensor type that graphene is developed, there are graphene temperature sensor film, stone Black alkene humidity sensor film, graphene strain transducer film etc..But the sensor of these existing types is typically all The sensor having a single function.When needing using multiple sensors, the arrangement of each sensor becomes a problem how Utmostly becoming one using space has problem to be solved.And currently, main research direction or graphene sensor Preparation method and how to improve sensitivity.Few correlative studys in terms of Rational graphene sensor.
Utility model content
The utility model solve the technical issues of be to provide it is a kind of be conducive to save more physics of the space-efficient based on graphene Quantity detection sensor.
Technical solution adopted by the utility model to solve its technical problems is:
More physics quantity detection sensors based on graphene, including dielectric base, dielectric base are circumferentially evenly equipped with multiple stones Black alkene film, each graphene film both ends are respectively arranged with electrode, and the dielectric base is closed by a lid, lid and insulation Form seal chamber between substrate, be filled with gas in the seal chamber, the gas is CO or NO, the lid include top and The top of side, the lid is made of the material with certain elasticity, and graphene strain is provided at the top of the lid and is passed Sensor film, the graphene strain transducer film are provided at both ends with electrode, and the side of the lid is provided with graphene Temperature sensor film, the graphene temperature sensor film are provided at both ends with electrode.
Further, the inner surface at the top of lid is arranged in the graphene strain transducer film.
Further, the graphene strain transducer film is styrene-acrylic emulsion/graphene composite film.
Further, the surface of the styrene-acrylic emulsion/graphene composite film is covered with nano gold layer.
Further, styrene-acrylic emulsion/the graphene composite film is mesh shape.
The utility model additionally provides a kind of strain transducer based on graphene, including styrene-acrylic emulsion/graphene is compound Film, the styrene-acrylic emulsion/graphene composite film are provided at both ends with electrode, the styrene-acrylic emulsion/graphene composite film Surface is covered with nano gold layer, and the styrene-acrylic emulsion/graphene composite film is mesh shape.
The utility model has the beneficial effects that:Multiple sensors are arranged using comprehensive architecture, are effectively saved space.And Sensitivity is higher.It is applied widely.
Description of the drawings
Fig. 1 is the schematic diagram that multiple graphene films are provided in dielectric base;
Fig. 2 is the schematic diagram that graphene strain transducer film is arranged after lid encapsulates dielectric base at the top of lid;
Fig. 3 is the schematic diagram that lid side is provided with graphene temperature sensor film;
Fig. 4 is the schematic diagram of reticulated film;
In figure label for:Dielectric base 1, graphene film 2, lid 3, graphene strain transducer film 4, top 5, stone Black alkene temperature sensor film 6, side 7.
Specific implementation mode
The utility model is further illustrated with reference to the accompanying drawings and detailed description.
As shown in Figure 1 to Figure 3, more physics quantity detection sensors based on graphene of the utility model, including insulation base Bottom 1, dielectric base 1 is circumferential to be evenly equipped with multiple graphene films 2, and 2 both ends of each graphene film are respectively arranged with electrode, described Dielectric base 1 is closed by a lid 3, forms seal chamber between lid 3 and dielectric base 1, gas is filled in the seal chamber, The gas is CO or NO, and the lid 3 includes top 5 and side 7, and the top 5 of the lid 3 is the material with certain elasticity Material is made, and the top 5 of the lid 3 is provided with graphene strain transducer film 4, the graphene strain transducer film 4 Be provided at both ends with electrode, the side 7 of the lid 3 is provided with graphene temperature sensor film 6, and the graphene temperature passes Sensor film 6 is provided at both ends with electrode.
The sensor of the utility model when in use, when by the sensor of the utility model towards a direction move, then it is close The gas concentration of envelope intracavitary can accordingly change, and its resistance can occur to change accordingly after graphene film adsorbed gas, Acceleration tested with this.Graphene strain transducer film at the top of lid can respond strain, side Graphene temperature sensor film can respond the variation of temperature.Based on above-mentioned framework, the utility model can be to multiple objects Reason amount is detected.Of course, if required, can also continue to add other film class sensings on the framework of the utility model Device.
The utility model takes full advantage of the space shared by its lid on the basis of acceleration transducer so that entire Sensor structure is compact, occupies little space, and can be detected simultaneously to multiple physical quantitys, application field is extensive.
Since graphene strain transducer film may be in direct contact with determinand, in order to protect graphene strain sensing Device film, existing way are usually to increase one layer of polymeric layer.Can also be according to shown in the present invention, the graphene strain passes The inner surface at the top of lid 35 is arranged in sensor film 4.Since the top 5 of lid 3 has certain elasticity, can will strain The graphene strain transducer film 4 for passing to inner surface, does not interfere with measurement.Certainly, sensitivity may be by certain It influences, for this purpose, its sensitivity, several method described below can be improved by other methods.
On the basis of the above, the film for adapting to test differently strained amount is produced for convenience, while increasing film correspondence Become the sensitivity of response, the graphene strain transducer film 4 is styrene-acrylic emulsion/graphene composite film.Styrene-acrylic emulsion/stone Black alkene laminated film is generally made by spray coating method.After this film is made, it will produce micro-crack thereon, help to improve in this way The sensitivity of strain-responsive, meanwhile, different quantity for sprays is different to the sensitivity of differently strained response, therefore can be according to reality It needs to make different classes of colorimetric sensor films.
Although above-mentioned its sensitivity of this film is relatively high, demand also cannot be satisfied sometimes, need thus further Sensitivity is improved, for this purpose, on the one hand can be according to described in the utility model, the surface of the styrene-acrylic emulsion/graphene composite film It is covered with nano gold layer.Nano gold layer can be generated with magnetron sputtering mode.Nanogold particle is distributed with to improve on film Sensitivity of the film to strain-responsive.
Meanwhile the utility model by experiment it has also been found that, film can be made and shown in Fig. 4 netted to improve sensitivity. And this reticulated film can generate synergistic effect with the micro-crack defect of styrene-acrylic emulsion/graphene composite film so that for answering The sensitivity for becoming test significantly improves.
Embodiment one:
More physics quantity detection sensors based on graphene, including dielectric base 1, dielectric base 1 are circumferentially evenly equipped with multiple Graphene film 2,2 both ends of each graphene film are respectively arranged with electrode, and the dielectric base 1 is closed by a lid 3, lid Seal chamber is formed between 3 and dielectric base 1, gas is filled in the seal chamber, and the gas is CO or NO, the lid 3 Including top 5 and side 7, the top 5 of the lid 3 is made of the material with certain elasticity, the top 5 of the lid 3 Outer surface or inner surface are provided with graphene strain transducer film 4, the both ends setting of the graphene strain transducer film 4 There are electrode, the side 7 of the lid 3 to be provided with graphene temperature sensor film 6, the graphene temperature sensor film 6 Be provided at both ends with electrode.
Embodiment two:
More physics quantity detection sensors based on graphene, including dielectric base 1, dielectric base 1 are circumferentially evenly equipped with multiple Graphene film 2,2 both ends of each graphene film are respectively arranged with electrode, and the dielectric base 1 is closed by a lid 3, lid Seal chamber is formed between 3 and dielectric base 1, gas is filled in the seal chamber, and the gas is CO or NO, the lid 3 Including top 5 and side 7, the top 5 of the lid 3 is made of the material with certain elasticity, and the top 5 of the lid 3 is set It is equipped with graphene strain transducer film 4, the graphene strain transducer film 4 is provided at both ends with electrode, the graphite Alkene strain transducer film 4 is styrene-acrylic emulsion/graphene composite film.The side 7 of the lid 3 is provided with graphene temperature biography Sensor film 6, the graphene temperature sensor film 6 are provided at both ends with electrode.
Embodiment three:
More physics quantity detection sensors based on graphene, including dielectric base 1, dielectric base 1 are circumferentially evenly equipped with multiple Graphene film 2,2 both ends of each graphene film are respectively arranged with electrode, and the dielectric base 1 is closed by a lid 3, lid Seal chamber is formed between 3 and dielectric base 1, gas is filled in the seal chamber, and the gas is CO or NO, the lid 3 Including top 5 and side 7, the top 5 of the lid 3 is made of the material with certain elasticity, and the top 5 of the lid 3 is set It is equipped with graphene strain transducer film 4, the graphene strain transducer film 4 is provided at both ends with electrode, the graphite Alkene strain transducer film 4 is styrene-acrylic emulsion/graphene composite film.The styrene-acrylic emulsion/graphene composite film surface is logical It crosses magnetron sputtering method and is provided with nano gold layer.The side 7 of the lid 3 is provided with graphene temperature sensor film 6, the stone Black alkene temperature sensor film 6 is provided at both ends with electrode.
Example IV:
More physics quantity detection sensors based on graphene, including dielectric base 1, dielectric base 1 are circumferentially evenly equipped with multiple Graphene film 2,2 both ends of each graphene film are respectively arranged with electrode, and the dielectric base 1 is closed by a lid 3, lid Seal chamber is formed between 3 and dielectric base 1, gas is filled in the seal chamber, and the gas is CO or NO, the lid 3 Including top 5 and side 7, the top 5 of the lid 3 is made of the material with certain elasticity, and the top 5 of the lid 3 is set It is equipped with graphene strain transducer film 4, the graphene strain transducer film 4 is provided at both ends with electrode, the graphite Alkene strain transducer film 4 is styrene-acrylic emulsion/graphene composite film.Styrene-acrylic emulsion/the graphene composite film is netted. The side 7 of the lid 3 is provided with graphene temperature sensor film 6, and the both ends of the graphene temperature sensor film 6 are set It is equipped with electrode.
Embodiment five:
More physics quantity detection sensors based on graphene, including dielectric base 1, dielectric base 1 are circumferentially evenly equipped with multiple Graphene film 2,2 both ends of each graphene film are respectively arranged with electrode, and the dielectric base 1 is closed by a lid 3, lid Seal chamber is formed between 3 and dielectric base 1, gas is filled in the seal chamber, and the gas is CO or NO, the lid 3 Including top 5 and side 7, the top 5 of the lid 3 is made of the material with certain elasticity, and the top 5 of the lid 3 is set It is equipped with graphene strain transducer film 4, the graphene strain transducer film 4 is provided at both ends with electrode, the graphite Alkene strain transducer film 4 is styrene-acrylic emulsion/graphene composite film.Styrene-acrylic emulsion/the graphene composite film is netted. The styrene-acrylic emulsion/graphene composite film surface is provided with nano gold layer by magnetron sputtering method.The side 7 of the lid 3 It is provided with graphene temperature sensor film 6, the graphene temperature sensor film 6 is provided at both ends with electrode.
Particular embodiments described above has carried out into one the purpose of this utility model, technical solution and advantageous effect Step is described in detail, it should be understood that the foregoing is merely specific embodiment of the utility model, is not limited to this Utility model, within the spirit and principle of the utility model, any modification, equivalent substitution, improvement and etc. done should all wrap Containing being within the protection scope of the utility model.

Claims (6)

1. more physics quantity detection sensors based on graphene, it is characterised in that:Including dielectric base (1), dielectric base (1) week To multiple graphene films (2) are evenly equipped with, each graphene film (2) both ends are respectively arranged with electrode, the dielectric base (1) It is closed by a lid (3), forms seal chamber between lid (3) and dielectric base (1), gas, institute are filled in the seal chamber It is CO or NO to state gas, and the lid (3) includes top (5) and side (7), and the top (5) of the lid (3) is with certain The material of elasticity is made, and the top (5) of the lid (3) is provided with graphene strain transducer film (4), and the graphene is answered Become colorimetric sensor films (4) is provided at both ends with electrode, and it is thin that the side (7) of the lid (3) is provided with graphene temperature sensor Film (6), the graphene temperature sensor film (6) are provided at both ends with electrode.
2. more physics quantity detection sensors based on graphene as described in claim 1, it is characterised in that:The graphene is answered The inner surface at the top (5) of lid (3) is arranged in change colorimetric sensor films (4).
3. more physics quantity detection sensors based on graphene as claimed in claim 1 or 2, it is characterised in that:The graphite Alkene strain transducer film (4) is styrene-acrylic emulsion/graphene composite film.
4. more physics quantity detection sensors based on graphene as claimed in claim 3, it is characterised in that:The phenylpropyl alcohol breast The surface of liquid/graphene composite film is covered with nano gold layer.
5. more physics quantity detection sensors based on graphene as claimed in claim 3, it is characterised in that:The phenylpropyl alcohol breast Liquid/graphene composite film is mesh shape.
6. the strain transducer based on graphene, it is characterised in that:Including styrene-acrylic emulsion/graphene composite film, the phenylpropyl alcohol Lotion/graphene composite film is provided at both ends with electrode, and the surface of the styrene-acrylic emulsion/graphene composite film is covered with nanometer Layer gold, the styrene-acrylic emulsion/graphene composite film are mesh shape.
CN201820408566.1U 2018-03-25 2018-03-25 More physics quantity detection sensors based on graphene and strain transducer Expired - Fee Related CN207907819U (en)

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Application Number Priority Date Filing Date Title
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108489377A (en) * 2018-03-25 2018-09-04 苏州科技大学 More physics quantity detection sensors based on graphene and strain transducer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108489377A (en) * 2018-03-25 2018-09-04 苏州科技大学 More physics quantity detection sensors based on graphene and strain transducer
CN108489377B (en) * 2018-03-25 2024-03-08 苏州科技大学 Graphene-based multi-physical-quantity detection sensor and strain sensor

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