CN207894854U - A kind of X-ray wafer detection device - Google Patents
A kind of X-ray wafer detection device Download PDFInfo
- Publication number
- CN207894854U CN207894854U CN201820342185.8U CN201820342185U CN207894854U CN 207894854 U CN207894854 U CN 207894854U CN 201820342185 U CN201820342185 U CN 201820342185U CN 207894854 U CN207894854 U CN 207894854U
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- China
- Prior art keywords
- control cabinet
- detection case
- guide rail
- axis guide
- ray
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Abstract
The utility model discloses a kind of X-ray wafer detection devices, including control cabinet and detection case, the control cabinet and detection case lower end are both provided with multiple pulleys, it is provided with scanner on the left of the control cabinet upper end, the control cabinet upper center is provided with keyboard, it is provided with mouse on the right side of the control cabinet upper end, is disposed with emergency button, control switch and master switch on the right side of the control cabinet front panel from top to bottom, middle part is provided with display screen on front side of the detection case.The utility model reasonable design in structure, use it is easy to operate, can automatic identification product, testing result Real-time Feedback, high practical value；Pulley can facilitate the movement of equipment, time saving and energy saving, be provided conveniently for the transfer of equipment；In dark, fluorescent tube can provide illumination, it is made not influence testing result；X-ray check device can X-axis guide rail and Y-axis guide rail do up and down, move left and right, be not present check frequency.
Description
Technical field
The utility model is related to a kind of detection device, specifically a kind of X-ray wafer detection device.
Background technology
Wafer (Wafer) is the carrier for producing used in integrated circuits, refers to monocrystalline silicon wafer more.Monocrystalline silicon wafer is by common
Silica sand, which is drawn, to be refined, and silicon single crystal rod is made by dissolving, purification, distillation a series of measures, silicon single crystal rod is by polishing, being sliced it
Afterwards, just become wafer.Wafer is most common semi-conducting material.Wafer is bigger, and producible IC is more on same disk,
Cost can be reduced；But it is required that material technology and production technology higher.
Since wafer is smaller, whether qualification just needs special detection device to the product after production, currently, X-ray check is
More commonly used method, however, present detection device is unable to automatic identification product；Sometimes to testing result shadow when dark
Sound is larger；There are blind areas for detection device.Therefore, those skilled in the art provide a kind of X-ray wafer detection device, in solution
State the problem of being proposed in background technology.
Invention content
The purpose of this utility model is to provide a kind of X-ray wafer detection devices, to solve to propose in above-mentioned background technology
The problem of.
To achieve the above object, the utility model provides the following technical solutions：
A kind of X-ray wafer detection device, including control cabinet and detection case, the control cabinet and detection case lower end are both provided with
Multiple pulleys, the control cabinet upper end left side are provided with scanner, and the control cabinet upper center is provided with keyboard, the control
It is provided with mouse on the right side of case upper end, is disposed with emergency button on the right side of the control cabinet front panel from top to bottom, control is opened
It closes and master switch, detection case front side middle part is provided with display screen, the detection case right side opening is equipped with translot and is slidably connected
Movable plate, the movable plate right end are provided with baffle, and the movable plate upper end is provided with multiple fixed blocks, and the fixed block is common
It is fixedly connected with discharge plate；
X-axis guide rail is both provided with inside the detection case at left and right sides of movable plate, the detection case is on the right side of X-axis guide rail
Side is provided with the second servo motor, and the X-axis guide rail slidably connects the first sliding block, and first upper end of slide block is fixedly connected with
Y-axis guide rail, the Y-axis guide rail right end are provided with first servo motor, and the second sliding block, institute are slidably connected in the Y-axis guide rail
It states the second sliding block lower end and is provided with fixed plate, the fixed plate lower end is provided with X-ray check device, passes through on rear side of the detection case
Screw is fixedly connected with access panel, is provided with inclined plate on the left of the detection case inner tip, the side of the inclined plate is provided with lamp
Pipe, detection case inside top are provided with locator.
As further program of the utility model：The pulley quantity is at least 4.
As the utility model further scheme：Power supply, circuit board and list are respectively arranged with inside the control cabinet
Piece machine；The power supply is electrically connected with circuit board, and microcontroller, the microcontroller and control switch, display are equipped on circuit board
Screen, scanner, first servo motor, the second servo motor and locator are electrically connected, the microcontroller model
AT89C51。
As the utility model further scheme：The block-shaped fixation is L-shaped.
Compared with prior art, the utility model has the beneficial effects that：
The utility model reasonable design in structure, uses easy to operate, energy automatic identification product, and testing result is real
When feed back, high practical value；Pulley can facilitate the movement of equipment, time saving and energy saving, be provided conveniently for the transfer of equipment；In light
When line is dark, fluorescent tube can provide illumination, it is made not influence testing result；X-ray check device can be in X-axis guide rail and Y-axis guide rail
It above and below doing, moves left and right, check frequency is not present.
Description of the drawings
Fig. 1 is a kind of front view of X-ray wafer detection device.
Fig. 2 is a kind of vertical view of X-ray wafer detection device.
Fig. 3 is a kind of structural schematic diagram of detection case in X-ray wafer detection device.
In figure：1- control cabinets, 2- pulleys, 3- detection cases, 4- scanners, 5- keyboards, 6- mouses, 7- emergency buttons, 8- controls
Make switch, 9- master switch, 10- movable plates, 11- baffles, 12- fixed blocks, 13- display screens, 14- discharge plates, 15-X axis rails,
The first sliding blocks of 16-, 17-Y axis rails, the second sliding blocks of 18-, 19- fixed plates, 20-X optical detection devices, 21- first servo motors,
The second servo motors of 22-, 23- screws, 24- access panels, 25- inclined plates, 26- fluorescent tubes, 27- locators.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
The every other embodiment obtained, shall fall within the protection scope of the present invention.
Please refer to Fig.1~3, in the utility model embodiment, a kind of X-ray wafer detection device, including control cabinet 1 and detection
Case 3, the control cabinet 1 and 3 lower end of detection case are both provided with multiple pulleys 2, and scanner is provided on the left of 1 upper end of the control cabinet
4,1 upper center of the control cabinet is provided with keyboard 5, is provided with mouse 6 on the right side of 1 upper end of the control cabinet, before the control cabinet 1
Emergency button 7, control switch 8 and master switch 9,3 front side middle part of the detection case are disposed on the right side of side panel from top to bottom
It is provided with display screen 13,3 right side opening of the detection case is equipped with translot and the movable plate 10 that is slidably connected, and 10 right end of the movable plate is set
It is equipped with baffle 11,10 upper end of the movable plate is provided with multiple fixed blocks 12, and the fixed block 12 is fixedly connected with blowing jointly
Disk 14；
It is both provided with X-axis guide rail 15 in 10 left and right sides of movable plate inside the detection case 3, the detection case 3 is led in X-axis
The right side of rail 15 is provided with the second servo motor 22, and the X-axis guide rail 15 slidably connects the first sliding block 16, first sliding block
16 upper ends are fixedly connected with Y-axis guide rail 17, and 17 right end of the Y-axis guide rail is provided with first servo motor 21, the Y-axis guide rail 17
On slidably connect the second sliding block 18,18 lower end of the second sliding block is provided with fixed plate 19, the setting of 19 lower end of the fixed plate
There are X-ray check device 20,3 rear side of the detection case to be fixedly connected with access panel 24,3 inside top of the detection case by screw 3
End left side is provided with inclined plate 25, and the side of the inclined plate 25 is provided with fluorescent tube 26, and 3 inside top of the detection case is provided with positioning
Device 27.
2 quantity of the pulley is at least 4.
Power supply, circuit board and microcontroller are respectively arranged with inside the control cabinet 1；The power supply electrically connects with circuit board
It connects, microcontroller, the microcontroller and control switch 8, display screen 13, scanner 4, first servo motor is installed on circuit board
21, the second servo motor 22 and locator 27 are electrically connected, the microcontroller model AT89C51.
12 shape of the fixed block is L-shaped.
The operation principle of the utility model is：
The utility model is related to a kind of X-ray wafer detection devices to be first turned on control cabinet 1 when user uses the equipment
On master switch 9, then by control button 8 by equipment other machines opening be allowed to operate, reuse scanner 4 to putting
Wafer in charging tray 14 is scanned, and the coding of at this moment equipment meeting automatic identification wafer simultaneously generates corresponding file；Then will
Discharge plate 14 is fixed on using fixed block 12 on movable plate 10, and movable plate 10 is pushed into inside detection case 3, and locator 27 can be to crystalline substance
Member positioning, X-ray check device 20 can up and down move freely in X-axis guide rail and Y-axis guide rail to detect wafer, by meeting
Be reflected on display screen 13, can will be apparent that whether observe wafer qualified.
It is obvious to a person skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and
And without departing substantially from the spirit or essential attributes of the utility model, it can realize that this practicality is new in other specific forms
Type.Therefore, in all respects, the present embodiments are to be considered as illustrative and not restrictive, this practicality is new
The range of type is indicated by the appended claims rather than the foregoing description, it is intended that containing in the equivalent requirements of the claims will be fallen
All changes in justice and range are embraced therein.Any reference numeral in claim should not be considered as limitation
Involved claim.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiment being appreciated that.
Claims (4)
1. a kind of X-ray wafer detection device, including control cabinet (1) and detection case (3), which is characterized in that the control cabinet (1) and
Detection case (3) lower end is both provided with multiple pulleys (2), and scanner (4), the control are provided on the left of control cabinet (1) upper end
Case (1) upper center processed is provided with keyboard (5), and mouse (6), the control cabinet (1) are provided on the right side of control cabinet (1) upper end
Emergency button (7), control switch (8) and master switch (9), the detection case are disposed on the right side of front panel from top to bottom
(3) front side middle part is provided with display screen (13), and detection case (3) right side opening is equipped with translot and the movable plate that is slidably connected (10),
Movable plate (10) right end is provided with baffle (11), and movable plate (10) upper end is provided with multiple fixed blocks (12), described
Fixed block (12) is fixedly connected with discharge plate (14) jointly；
The detection case (3) is internal to be both provided with X-axis guide rail (15) at left and right sides of movable plate (10), and the detection case (3) is in X
The second servo motor (22) is provided on the right side of axis rail (15), the X-axis guide rail (15) slidably connects the first sliding block (16),
First sliding block (16) upper end is fixedly connected with Y-axis guide rail (17), and Y-axis guide rail (17) right end is provided with the first servo electricity
Machine (21) slidably connects the second sliding block (18) on the Y-axis guide rail (17), and the second sliding block (18) lower end is provided with fixation
Plate (19), fixed plate (19) lower end are provided with X-ray check device (20), and detection case (3) rear side is solid by screw (3)
Surely it is connected with access panel (24), inclined plate (25), the side of the inclined plate (25) are provided on the left of detection case (3) inner tip
It is provided with fluorescent tube (26), top is provided with locator (27) on the inside of the detection case (3).
2. a kind of X-ray wafer detection device according to claim 1, which is characterized in that pulley (2) quantity is at least
4.
3. a kind of X-ray wafer detection device according to claim 1, which is characterized in that inside the control cabinet (1) respectively
It is provided with power supply, circuit board and microcontroller；The power supply is electrically connected with circuit board, and microcontroller is equipped on circuit board, described
Microcontroller with control switch (8), display screen (13), scanner (4), first servo motor (21), the second servo motor (22) and
Locator (27) is electrically connected, the microcontroller model AT89C51.
4. a kind of X-ray wafer detection device according to claim 1, which is characterized in that fixed block (12) shape is L
Shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820342185.8U CN207894854U (en) | 2018-03-14 | 2018-03-14 | A kind of X-ray wafer detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820342185.8U CN207894854U (en) | 2018-03-14 | 2018-03-14 | A kind of X-ray wafer detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207894854U true CN207894854U (en) | 2018-09-21 |
Family
ID=63541648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820342185.8U Expired - Fee Related CN207894854U (en) | 2018-03-14 | 2018-03-14 | A kind of X-ray wafer detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207894854U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108398443A (en) * | 2018-03-14 | 2018-08-14 | 深圳市昱燊科技有限公司 | A kind of X-ray wafer detection device |
-
2018
- 2018-03-14 CN CN201820342185.8U patent/CN207894854U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108398443A (en) * | 2018-03-14 | 2018-08-14 | 深圳市昱燊科技有限公司 | A kind of X-ray wafer detection device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190401 Address after: 629000 No. 88 Hedong Avenue, Shehong Economic Development Zone, Suining City, Sichuan Province Patentee after: Shehong Yushen Technology Co., Ltd. Address before: Room 203, Building B3, 34 Changfa West Road, Dafapu, Bantian Street, Longgang District, Shenzhen City, Guangdong 518000 Patentee before: Shenzhen Yu sun Technology Co. Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180921 Termination date: 20190314 |