CN207877857U - The rooms Leng Zhou when a kind of section of PECVD system - Google Patents

Abstract

The utility model discloses the rooms Leng Zhou when a kind of section of PECVD system, including room body, platform in room body, exhaust outlet on platform and the cooling blower being connect with exhaust outlet, exhaust outlet includes air exhaust passage and the polylith flow distribution plate in air exhaust passage, air exhaust passage vertically extends, polylith flow distribution plate in the horizontal direction arrange so that air exhaust passage to be divided into a plurality of runner in parallel successively by spacing distance, every piece of flow distribution plate is movably connected on air exhaust passage so that the water conservancy diversion direction of every runner is adjustable, the rooms Leng Zhou further include the control device for driving the driving device of flow distribution plate action and controlling the driving device when section.The rooms Leng Zhou when the section of PECVD system disclosed by the utility model reduce boat cooling time, improve production capacity, keep boat cooling section uniform, reduction boat part silicon chip is because inhomogeneous cooling is even, temperature drift, it avoids adsorbing loosely when automatic blanking, piece is led to the problem of, to improve yield.

Description

The rooms Leng Zhou when a kind of section of PECVD system

Technical field

The utility model is related to area of solar cell, and in particular to the rooms Leng Zhou when a kind of section of PECVD system.

Background technology

Graphite boat is in plasma enhanced chemical gaseous phase deposition（PECVD）To by works such as making herbs into wool and diffusions in tube furnace It is thin that the surface using plasma enhanced chemical gaseous phase deposition technique of skill treated polycrystalline or monocrystalline silicon piece carries out silicon nitride The carrying tool of film coating.After coating process, graphite boat temperature is excessively high, needs to carry out cooling treatment to graphite boat.

Currently, the prior art mainly carries graphite boat using graphite boat small handcart, it will be right in the rooms graphite boat push-in Leng Zhou Graphite boat is cooled down, and the rooms Leng Zhou include room body, the platform in room body, the exhaust outlet on platform and and exhaust outlet The cooling blower of connection, existing exhaust outlet generally use board-like air port or three-port type air port or ditrysian type air port, board-like air port Cause airflow diversion big, cooling time is long, three-port type air port, and an intermediate hole is blocked by the pallet of small handcart, substantially useless, both sides Hole is kept to the side very much, and can not uniformly be cooled down, and ditrysian type air port can not uniformly cool down.

With the increase of the market demand, PECVD improves production capacity, very urgent, technique knot as production capacity " bottleneck " process The cooling time of beam, graphite boat directly affects production capacity；Inhomogeneous cooling is even, boat part silicon chip temperature drift, and when automatic blanking is adsorbed Loosely, piece is will produce, yield is influenced.

Invention content

The rooms Leng Zhou when the purpose of this utility model is to provide a kind of section of PECVD system, not only can reduce cooling time, Production capacity is improved, uniform cooling can also be allowed to, improves yield.

In order to achieve the above objectives, the technical solution adopted in the utility model is：The rooms Leng Zhou when a kind of section of PECVD system, It platform including room body, in the room body, the exhaust outlet on the platform and is connect with the exhaust outlet cold But wind turbine, the exhaust outlet include air exhaust passage and the polylith flow distribution plate in the air exhaust passage, the air exhaust passage edge Upper and lower directions extends, and the polylith flow distribution plate in the horizontal direction arrange so that the air exhaust passage to be divided into simultaneously successively by spacing distance The a plurality of runner of connection, every piece of flow distribution plate is movably connected on the air exhaust passage so that the water conservancy diversion of every runner Direction is adjustable, and the rooms Leng Zhou further include the driving device of the driving flow distribution plate action and control the driving device when section Control device.

In above-mentioned technical proposal, every piece of flow distribution plate rotatably connects the air exhaust passage by first level axis, The driving device is connected with a control-rod to drive the control-rod to be acted along horizontal axis, and the control-rod passes through the second water Flat axis rotatably connects every piece of flow distribution plate, and described first, in two trunnion axis, one of which is located on the upside of another one, and two Person is mutually parallel and vertical with the direction of action of the control-rod.

In above-mentioned technical proposal, every piece of flow distribution plate is equipped with an avoid holes, and the internal diameter size of the avoid holes is more than institute The outer diameter of control-rod is stated, the control-rod passes through the avoid holes and rotatably connected by second trunnion axis The avoid holes.

In above-mentioned technical proposal, the driving device is servo motor, and the servo motor is connected by crank and rocker mechanism Connect the control-rod.

In above-mentioned technical proposal, the rooms Leng Zhou include two exhaust outlets when the section, two exhaust outlets with wait for it is cold But the small handcart pallet of graphite boat is staggered.

In above-mentioned technical proposal, the flow distribution plate of two exhaust outlets shares a driving device.

In above-mentioned technical proposal, the driving device is installed on the platform.

In above-mentioned technical proposal, the driving device is located on the downside of the small handcart pallet column of graphite boat to be cooled.

Since above-mentioned technical proposal is used, the utility model has following advantages compared with prior art：The utility model The rooms Leng Zhou when the section of disclosed PECVD system reduce boat cooling time, improve production capacity, keep boat cooling section uniform, reduce boat office Portion's silicon chip is because inhomogeneous cooling is even, temperature drift, avoids adsorbing loosely when automatic blanking, leads to the problem of piece, good to improve Rate.

Description of the drawings

The main structure diagram in the rooms Leng Zhou when Fig. 1 is section disclosed by the utility model.

Fig. 2 is the overlooking structure diagram of Section A-A in Fig. 1.

Fig. 3 is the side structure schematic view of section B-B in Fig. 2.

Wherein：10, platform；20, exhaust outlet；21, air exhaust passage；22, flow distribution plate；22a, first level axis；22b, evacuation Hole；23, runner；30, control-rod；30a, the second trunnion axis.

Specific implementation mode

The utility model is further described in conjunction with accompanying drawings and embodiments：

Referring to Fig. 1 to Fig. 3, as shown in legend therein, the rooms Leng Zhou when a kind of section of PECVD system, including room body（In figure Not depending on going out）, the platform 10 in room body, the exhaust outlet 20 on platform 10 and the cooling blower being connect with exhaust outlet 20 （Not depending on going out in figure）, exhaust outlet 20 includes air exhaust passage 21 and the polylith flow distribution plate 22 in air exhaust passage 21, air exhaust passage 21 vertically extend, and polylith flow distribution plate 22 in the horizontal direction arrange so that air exhaust passage 21 to be divided into simultaneously successively by spacing distance The a plurality of runner 23 of connection, every piece of flow distribution plate 22 are movably connected on air exhaust passage 21 the water conservancy diversion direction so that every runner 23 Adjustable, the rooms Leng Zhou further include the driving device for driving flow distribution plate 22 to act when section（Not depending on going out in figure）With control the driving device Control device（Not depending on going out in figure）.

In a kind of embodiment, every piece of flow distribution plate 22 rotatably connects air exhaust passage 21 by first level axis 22a, drives Dynamic device is connected with a control-rod 30 to drive control-rod 30 to be acted along horizontal axis, and control-rod 30 passes through the second trunnion axis 30a Rotatably connect every piece of flow distribution plate 22, in first, two trunnion axis 22a, 30a, one of which is located on the upside of another one, the two phase It is mutually parallel and vertical with the direction of action of control-rod 30.

In a kind of embodiment, every piece of flow distribution plate 22 is equipped with an avoid holes 22b, and the internal diameter size of avoid holes 22b is more than control The outer diameter of bar 30 processed, control-rod 40 pass through avoid holes 22b and rotatably connect avoid holes by the second trunnion axis 30a 22b。

In a kind of embodiment, driving device is servo motor, and servo motor (is not regarded by crank and rocker mechanism in figure Go out) connection control-rod 30.

In a kind of embodiment, the rooms Leng Zhou include two exhaust outlets 20, two exhaust outlets 20 and graphite boat to be cooled when section Small handcart pallet be staggered.

In a kind of embodiment, the flow distribution plate 22 of two exhaust outlets 20 shares a driving device 30.

In a kind of embodiment, driving device is installed on platform 20.

In a kind of embodiment, driving device is located on the downside of the small handcart pallet column of graphite boat to be cooled.

Driving device drives control-rod 30 to be axially moveable, and control-rod pushes flow distribution plate 22 where first level axis 22a Axis rotates, meanwhile, control-rod 30 controls the driving device rotation around axis rotation, control device where the second trunnion axis 30a, into And so that control-rod 30 is axially moved along it, the water conservancy diversion direction of runner 23 is adjusted, so that the rooms Leng Zhou uniform throughout cools down.

The foregoing description of the disclosed embodiments enables professional and technical personnel in the field to realize or use this practicality new Type.Various modifications to these embodiments will be apparent to those skilled in the art, and determine herein The General Principle of justice can be realized in other embodiments without departing from the spirit or scope of the present utility model.Cause This, the utility model is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein The widest range consistent with features of novelty.

Claims (8)

1. the rooms Leng Zhou when a kind of section of PECVD system, including room body, the platform in the room body（10）, be set to it is described flat Platform（10）On exhaust outlet（20）And with the exhaust outlet（20）The cooling blower of connection, the exhaust outlet（20）Including air draft Channel（21）With set on the air exhaust passage（21）In polylith flow distribution plate（22）, the air exhaust passage（21）Prolong along the vertical direction It stretches, the polylith flow distribution plate（22）In the horizontal direction successively spacing distance arrangement with by the air exhaust passage（21）It is divided into parallel connection A plurality of runner（23）, which is characterized in that every piece of flow distribution plate（22）It is movably connected on the air exhaust passage（21）On with Make every runner（23）Water conservancy diversion direction it is adjustable, the rooms Leng Zhou further include the driving flow distribution plate when section（22）It is dynamic The driving device of work and the control device for controlling the driving device.

2. the rooms Leng Zhou when section according to claim 1, which is characterized in that every piece of flow distribution plate（22）Pass through first level Axis（22a）Rotatably connect the air exhaust passage（21）, the driving device is connected with a control-rod（30）Described in drive Control-rod（30）It is acted along horizontal axis, the control-rod（30）Pass through the second trunnion axis（30a）Rotatably connect every piece of institute State flow distribution plate（22）, described first, two trunnion axis（22a, 30a）In, one of which is located on the upside of another one, and the two is mutually parallel And with the control-rod（30）Direction of action it is vertical.

3. the rooms Leng Zhou when section according to claim 2, which is characterized in that every piece of flow distribution plate（22）Equipped with an avoid holes （22b）, the avoid holes（22b）Internal diameter size be more than the outer diameter of the control-rod (30), the control-rod (30) wears Cross the avoid holes（22b）And pass through second trunnion axis（30a）Rotatably connect the avoid holes（22b）.

4. the rooms Leng Zhou when section according to claim 2, which is characterized in that the driving device is servo motor, described to watch It takes motor and the control-rod (30) is connected by crank and rocker mechanism.

5. the rooms Leng Zhou when section according to claim 1, which is characterized in that the rooms Leng Zhou include two air drafts when the section Mouth (20), two exhaust outlets (20) and the small handcart pallet column of graphite boat to be cooled are staggered.

6. the rooms Leng Zhou when section according to claim 5, which is characterized in that the flow distribution plate of two exhaust outlets (20) shares One driving device.

7. the rooms Leng Zhou when section according to claim 1, which is characterized in that the driving device is installed on the platform (10) On.

8. the rooms Leng Zhou when section according to claim 7, which is characterized in that the driving device is located at graphite boat to be cooled On the downside of small handcart pallet column.