CN207868984U - A kind of crystal growing furnace power supply device - Google Patents

A kind of crystal growing furnace power supply device Download PDF

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Publication number
CN207868984U
CN207868984U CN201820251567.XU CN201820251567U CN207868984U CN 207868984 U CN207868984 U CN 207868984U CN 201820251567 U CN201820251567 U CN 201820251567U CN 207868984 U CN207868984 U CN 207868984U
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power supply
transformer
supply unit
supply device
room
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郑庆红
张硕
杨舟
李建昭
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Baoding Jingxin Intelligent Technology Co.,Ltd.
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Baoding Jingxin Electric Co Ltd
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Abstract

本实用新型公开了一种晶体生长炉供电电源装置,包括供电单元箱,所述供电单元箱的内部安装有分隔板,分隔板将供电单元箱的内腔分隔为电源控制室和供电元件室;所述电源控制室内安装有开关电源、控制板和驱动板,所述供电元件室内安装有变压器、水冷散热器、平波电抗器和晶闸管整流器。本单晶生长炉供电装置,通过供电单元箱内安装的控制板和驱动板控制驱动开关电源的启闭,电流经由供电元件室内的各类供电元件的作用,使输出电流稳定、电能质量高,从而为单晶生长炉通过稳定、安全的电源供应。

The utility model discloses a power supply device for a crystal growth furnace, which comprises a power supply unit box, a partition plate is installed inside the power supply unit box, and the partition plate divides the inner cavity of the power supply unit box into a power supply control room and a power supply element room; the power supply control room is equipped with a switching power supply, a control board and a drive board, and a transformer, a water-cooled radiator, a smoothing reactor and a thyristor rectifier are installed in the power supply component room. The single crystal growth furnace power supply device controls the opening and closing of the driving switching power supply through the control board and the driving board installed in the power supply unit box, and the current passes through the action of various power supply components in the power supply component room, so that the output current is stable and the power quality is high. Thus, a stable and safe power supply is provided for the single crystal growth furnace.

Description

一种晶体生长炉供电电源装置A power supply device for a crystal growth furnace

技术领域technical field

本实用新型涉及供电技术领域,具体为一种晶体生长炉供电电源装置。The utility model relates to the technical field of power supply, in particular to a power supply device for a crystal growth furnace.

背景技术Background technique

为了给单晶生长炉提供稳定的电源供应,通常由两个电源柜,为主加热器和辅助加热供电或者由五个单元模块组成的直流电源,给单晶生长炉供电;由于第一种占地面积小、安装方便,第二种故障率低,保证生产安全运行;因此使用者可根据所需选择两种供电方式;但第二种供电电能质量较低、长时间工作使用下,电能利用率无法达到使用者的要求。In order to provide a stable power supply for the single crystal growth furnace, two power cabinets are usually used to supply power for the main heater and auxiliary heating or a DC power supply composed of five unit modules to supply power to the single crystal growth furnace; because the first type occupies The ground area is small, the installation is convenient, and the failure rate of the second type is low, which ensures the safe operation of production; therefore, users can choose two power supply methods according to their needs; but the power quality of the second type of power supply is low, and the power utilization of The rate cannot meet the user's requirements.

实用新型内容Utility model content

本实用新型的目的在于提供一种晶体生长炉供电电源装置,通过加装电抗改善电能质量,使得供电利用率大大提高,从而为单晶生长炉提供稳定的电源供应,解决了现有技术中的问题。The purpose of the utility model is to provide a power supply device for a crystal growth furnace, which improves the power quality by adding a reactance, so that the utilization rate of power supply is greatly improved, thereby providing a stable power supply for the single crystal growth furnace, and solving the problems in the prior art question.

为实现上述目的,本实用新型提供如下技术方案:一种晶体生长炉供电电源装置,包括供电单元箱,所述供电单元箱的内部安装有分隔板,分隔板将供电单元箱的内腔分隔为电源控制室和供电元件室;所述电源控制室内安装有开关电源、控制板和驱动板,所述供电元件室内安装有变压器、水冷散热器、平波电抗器和晶闸管整流器;变压器的上端还设置有电流互感器和快恢复二极管,所述电流互感器安装于变压器的零排上,所述快恢复二极管安装于变压器的输出母线上;水冷散热器的内测还设置有IGBT逆变器和RC阻容吸收器,所述IGBT逆变器固定安装于供电单元箱的内壁上,所述RC阻容吸收器对称安装于IGBT逆变器的两端。In order to achieve the above purpose, the utility model provides the following technical solutions: a crystal growth furnace power supply device, including a power supply unit box, the inside of the power supply unit box is installed with a partition plate, and the partition plate divides the inner cavity of the power supply unit box Separated into a power supply control room and a power supply component room; a switching power supply, a control board and a drive board are installed in the power control room, and a transformer, a water-cooled radiator, a smoothing reactor and a thyristor rectifier are installed in the power supply component room; the upper end of the transformer A current transformer and a fast recovery diode are also provided, the current transformer is installed on the zero row of the transformer, and the fast recovery diode is installed on the output bus of the transformer; the internal test of the water cooling radiator is also provided with an IGBT inverter and an RC resistance-capacity absorber, the IGBT inverter is fixedly installed on the inner wall of the power supply unit box, and the RC resistance-capacity absorber is symmetrically installed at both ends of the IGBT inverter.

优选的,所述变压器与水冷散热器之间还安装有TA300型号的互感器,且互感器串接在变压器和互感器的连接排上。Preferably, a transformer of TA300 type is also installed between the transformer and the water-cooled radiator, and the transformer is connected in series on the connecting row of the transformer and the transformer.

优选的,所述平波电抗器与晶闸管整流器之间还安装有平波电抗。Preferably, a smoothing reactor is installed between the smoothing reactor and the thyristor rectifier.

优选的,所述平波电抗器的上端还安装有MLC-LS 100UF 400V的滤波电容。Preferably, an MLC-LS 100UF 400V filter capacitor is installed on the upper end of the smoothing reactor.

与现有技术相比,本实用新型的有益效果如下:Compared with the prior art, the beneficial effects of the utility model are as follows:

本晶体生长炉供电电源装置,通过供电单元箱内安装的控制板和驱动板控制驱动开关电源的启闭,电流经由供电元件室内的各类供电元件的作用,使输出电流稳定、电能质量高,从而为单晶生长炉通过稳定、安全的电源供应。The power supply device of the crystal growth furnace controls the opening and closing of the driving switching power supply through the control board and the driving board installed in the power supply unit box, and the current passes through the action of various power supply components in the power supply component room, so that the output current is stable and the power quality is high. Thus, a stable and safe power supply is provided for the single crystal growth furnace.

附图说明Description of drawings

图1为本实用新型的供电单元箱内部装配图;Fig. 1 is the internal assembly diagram of the power supply unit box of the present utility model;

图2为本实用新型的供电单元箱主视图。Fig. 2 is a front view of the power supply unit box of the present invention.

图中:1供电单元箱、2分隔板、3电源控制室、4开关电源、5控制板、6驱动板、7供电元件室、8变压器、9水冷散热器、10平波电抗器(直流电抗)、11晶闸管整流器、12电流互感器、13快恢复二极管、14 IGBT逆变器、15 RC阻容吸收器、16互感器、17平波电抗、18滤波电容。In the figure: 1 power supply unit box, 2 partition board, 3 power control room, 4 switching power supply, 5 control board, 6 driver board, 7 power supply component room, 8 transformer, 9 water cooling radiator, 10 smoothing reactor (DC Reactor), 11 thyristor rectifier, 12 current transformer, 13 fast recovery diode, 14 IGBT inverter, 15 RC absorber, 16 transformer, 17 smoothing reactance, 18 filter capacitor.

具体实施方式Detailed ways

下面将结合本实用新型实施例中的附图,对本实用新型实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本实用新型一部分实施例,而不是全部的实施例。基于本实用新型中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本实用新型保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. example. Based on the embodiments of the present utility model, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of the present utility model.

请参阅图1-2,一种晶体生长炉供电电源装置,包括供电单元箱1,供电单元箱1的内部安装有分隔板2,分隔板2将供电单元箱1的内腔分隔为电源控制室3和供电元件室7;电源控制室3内安装有开关电源4、控制板5和驱动板6,通过控制板5和驱动板6控制驱动开关电源4的启闭;供电元件室7内安装有变压器8、水冷散热器9、平波电抗器10和晶闸管整流器11,并且变压器8与水冷散热器9之间还安装有TA300型号的互感器16,互感器16串接在变压器8和互感器16的连接排上,波电抗器10与晶闸管整流器11之间还安装有平波电抗17,平波电抗器10的上端还安装有MLC-LS 100UF 400V的滤波电容18;变压器8的上端还设置有电流互感器12和快恢复二极管13,电流互感器12安装于变压器8的零排上,快恢复二极管13安装于变压器8的输出母线上;水冷散热器9的内测还设置有IGBT逆变器14和RC阻容吸收器15,IGBT逆变器14固定安装于供电单元箱1的内壁上,RC阻容吸收器15对称安装于IGBT逆变器14的两端,基于上述供电元件使输出电流稳定、电能质量高,从而为单晶生长炉通过稳定、安全的电源供应。Please refer to Figure 1-2, a crystal growth furnace power supply device, including a power supply unit box 1, a partition plate 2 is installed inside the power supply unit box 1, and the partition plate 2 divides the inner cavity of the power supply unit box 1 into a power supply Control room 3 and power supply element room 7; switching power supply 4, control board 5 and drive board 6 are installed in power control room 3, and the opening and closing of driving switching power supply 4 are controlled by control board 5 and drive board 6; power supply element room 7 A transformer 8, a water-cooled radiator 9, a smoothing reactor 10 and a thyristor rectifier 11 are installed, and a transformer 16 of the TA300 type is installed between the transformer 8 and the water-cooled radiator 9, and the transformer 16 is connected in series between the transformer 8 and the mutual inductor. On the connection row of the device 16, a smoothing reactance 17 is also installed between the surge reactor 10 and the thyristor rectifier 11, and a filter capacitor 18 of MLC-LS 100UF 400V is also installed on the upper end of the smoothing reactor 10; the upper end of the transformer 8 is also installed A current transformer 12 and a fast recovery diode 13 are provided, the current transformer 12 is installed on the zero row of the transformer 8, and the fast recovery diode 13 is installed on the output bus of the transformer 8; the internal test of the water cooling radiator 9 is also provided with an IGBT inverter transformer 14 and RC absorber 15, the IGBT inverter 14 is fixedly installed on the inner wall of the power supply unit box 1, and the RC absorber 15 is symmetrically installed at both ends of the IGBT inverter 14, based on the above power supply elements The output current is stable and the power quality is high, so that the single crystal growth furnace can be supplied with stable and safe power.

本晶体生长炉供电电源装置,通过供电单元箱1内安装的控制板5和驱动板6控制驱动开关电源4的启闭,电流经由供电元件室7内的各类供电元件的作用,使输出电流稳定、电能质量高,从而为单晶生长炉通过稳定、安全的电源供应。The crystal growth furnace power supply device controls the opening and closing of the drive switching power supply 4 through the control board 5 and the drive board 6 installed in the power supply unit box 1, and the current passes through the effects of various power supply elements in the power supply element chamber 7 to make the output current Stable and high power quality, so that the single crystal growth furnace can be supplied with stable and safe power.

综上所述:本晶体生长炉供电电源装置,通过安装的平波电抗17改善电能质量,使得供电利用率大大提高;基于各类供电元件的作用,从而为单晶生长炉提供稳定的电源供应;因此,本装置、可提供可靠、安全、稳定电源供应,满足使用者对电能高利用率、高电能质量的需求。To sum up: the crystal growth furnace power supply device improves the power quality through the installed smoothing reactance 17, which greatly improves the power supply utilization rate; based on the functions of various power supply components, it provides a stable power supply for the single crystal growth furnace ; Therefore, the device can provide a reliable, safe and stable power supply to meet the needs of users for high power utilization and high power quality.

尽管已经示出和描述了本实用新型的实施例,对于本领域的普通技术人员而言,可以理解在不脱离本实用新型的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型,本实用新型的范围由所附权利要求及其等同物限定。Although the embodiments of the present invention have been shown and described, those skilled in the art can understand that various changes and modifications can be made to these embodiments without departing from the principle and spirit of the present invention , replacements and modifications, the scope of the present utility model is defined by the appended claims and their equivalents.

Claims (4)

1. a kind of crystal growing furnace power supply device, including power supply unit case (1), it is characterised in that:Said supply unit case (1) inside is equipped with demarcation strip (2), demarcation strip (2) by the inner cavity of power supply unit case (1) be divided into power control room (3) and Power supply component room (7);Switching Power Supply (4), control panel (5) and driving plate (6) are installed in the power control room (3), it is described Transformer (8), water-filled radiator (9), smoothing reactor (10) and silicon controlled rectifier are installed in power supply component room (7) (11);The upper end of transformer (8) is additionally provided with current transformer (12) and fast recovery diode (13), the current transformer (12) it is installed in the zero-emission of transformer (8), the fast recovery diode (13) is installed on the output busbar of transformer (8); The interior survey of water-filled radiator (9) is additionally provided with IGBT inverters (14) and RC rc absorbers (15), the IGBT inverters (14) it is fixedly installed on the inner wall of power supply unit case (1), the RC rc absorbers (15) are symmetrically arranged on IGBT inverters (14) both ends.
2. a kind of crystal growing furnace power supply device according to claim 1, it is characterised in that:The transformer (8) The mutual inductor (16) of TA300 models is also equipped between water-filled radiator (9), and mutual inductor (16) is serially connected in transformer (8) On the connection row of mutual inductor (16).
3. a kind of crystal growing furnace power supply device according to claim 1, it is characterised in that:The smoothing reactor (10) flat wave reactance (17) is also equipped between silicon controlled rectifier (11).
4. a kind of crystal growing furnace power supply device according to claim 1, it is characterised in that:The smoothing reactor (10) upper end is also equipped with the filter capacitor (18) of MLC-LS 100UF 400V.
CN201820251567.XU 2018-02-02 2018-02-02 A kind of crystal growing furnace power supply device Active CN207868984U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109713915A (en) * 2019-03-07 2019-05-03 阳光电源股份有限公司 A kind of electric machine controller

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109713915A (en) * 2019-03-07 2019-05-03 阳光电源股份有限公司 A kind of electric machine controller

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