CN203911787U - Novel power supply device for polysilicon hydrogenation furnace - Google Patents
Novel power supply device for polysilicon hydrogenation furnace Download PDFInfo
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- CN203911787U CN203911787U CN201420333027.8U CN201420333027U CN203911787U CN 203911787 U CN203911787 U CN 203911787U CN 201420333027 U CN201420333027 U CN 201420333027U CN 203911787 U CN203911787 U CN 203911787U
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- direct current
- hydrogenation furnace
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- power supply
- conversion circuit
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Abstract
The utility model discloses a novel power supply device for a polysilicon hydrogenation furnace. The novel power supply device comprises an alternating current-direct current conversion circuit for supplying power for a hydrogenation furnace and a direct current chopping voltage regulator used for changing a voltage of a heating resistor R in the hydrogenation furnace. The alternating current-direct current conversion circuit comprises a rectification transformer UT equipped with four secondary sides with a mutual difference of 15 degrees, four diode rectifier bridges and a direct current support capacitor C1. Each secondary side of the rectification transformer UT is connected with one diode rectifier bridge. The diode rectifier bridges connected with the secondary sides are different from each other. The four diode rectifier bridges are in parallel connection and then supply power for the direct current support capacitor C1. The wire outlet end of the direct current support capacitor C1 is connected with the wiring end of the hydrogenation furnace in order to supply power for the hydrogenation furnace. The novel power supply device can supply power for a plurality of polysilicon hydrogenation furnaces, saves the production cost and decreases the device occupation space.
Description
Technical field
The utility model relates to a kind of supply unit, particularly a kind of polysilicon hydrogenation furnace novel power supply device.
Background technology
Polysilicon hydrogenation furnace is the exit gas silicon tetrachloride of polycrystalline silicon reducing furnace to be synthesized to the chemical-reacting furnace of polycrystalline silicon reducing furnace inlet gas trichlorosilane.Polysilicon hydrogenation furnace is exactly in order to make temperature in hydrogenation furnace reach the heating power supply of the reaction temperature of regulation with power supply.What existing polysilicon hydrogenation furnace power acquisition was used is to exchange lamination pressure regulation scheme, thereby in order to guarantee three phase supply balance, polysilicon hydrogenation furnace domestic demand is installed three heating resistors, therefore there are two shortcomings in existing polysilicon hydrogenation furnace power supply: three heating resistors of (1) each polysilicon hydrogenation furnace, need draw 6 and follow the long distance join of copper bar to electric panel room, cause cost to increase; (2) each polysilicon hydrogenation furnace needs a corresponding high-tension switch cabinet and the three-phase transformer of being equipped with, and not only cost is high, and floor space is large.
Utility model content
For the deficiencies in the prior art, the purpose of this utility model is to provide a kind of polysilicon hydrogenation furnace novel power supply device, met that to adopt a supply unit be the demand of a plurality of polysilicon hydrogenation furnaces power supply, three phase supply balance can not only be guaranteed, hold facility site area can also be reduced production costs and reduce.
The technical solution of the utility model is achieved in that a kind of polysilicon hydrogenation furnace novel power supply device, is included as the alternating current-direct current conversion circuit of hydrogenation furnace power supply and for changing the DC chopped-wave voltage-regulating device of the voltage of heating resistor R in hydrogenation furnace;
Alternating current-direct current conversion circuit comprises the rectifier transformer UT of 4 secondary mutual deviations 15 degree, 4 diode rectifier bridges and direct current support capacitor C1, each secondary of rectifier transformer UT is connected with a diode rectifier bridge, the diode rectifier bridge that each secondary connects is different, 4 diode rectifier bridge parallel connections are direct current support capacitor C1 power supply afterwards, and the leading-out terminal of direct current support capacitor C1 is connected with the terminals of hydrogenation furnace to power to hydrogenation furnace;
DC chopped-wave voltage-regulating device comprises capacitor C2, IGBT field effect transistor G, damper diode D1, diode D2 and inductor L; The positive pole of alternating current-direct current conversion circuit is connected with the negative electrode of damper diode D1 with the positive pole of capacitor C2, the collector electrode of IGBT field effect transistor G respectively, the emitter of IGBT field effect transistor G with after the anodic bonding of damper diode D1, be connected with the negative electrode of diode D2 with the input of inductor L respectively, the exit of inductor L is connected with the one end of heating resistor R in hydrogenation furnace, and the other end of heating resistor R is connected with the negative pole of alternating current-direct current conversion circuit with the anode of diode D2, the negative pole of capacitor C2 respectively.
Above-mentioned polysilicon hydrogenation furnace novel power supply device, the control cycle of DC chopped-wave voltage-regulating device is 3.3ms.
The beneficial effects of the utility model are: adopt the utility model to power to polysilicon hydrogenation furnace, each polysilicon hydrogenation furnace only needs a heating resistor, draw two copper bars, and when a plurality of polysilicon hydrogenation furnaces are powered, only need a utility model just can complete a plurality of polysilicon hydrogenation furnaces are powered, not only save production cost, also reduced equipment occupation space.
Accompanying drawing explanation
Fig. 1 is the alternating current-direct current conversion circuit operating circuit schematic diagram of novel power supply device for the utility model polysilicon hydrogenation furnace;
Fig. 2 is the operating circuit schematic diagram of the DC chopped-wave voltage-regulating device of novel power supply device for the utility model polysilicon hydrogenation furnace;
Fig. 3 is the fundamental diagram of novel power supply device for the utility model polysilicon hydrogenation furnace.
Embodiment
As shown in Figure 3, the utility model polysilicon hydrogenation furnace novel power supply device, be included as the alternating current-direct current conversion circuit of hydrogenation furnace power supply and for changing the DC chopped-wave voltage-regulating device of the voltage of heating resistor R in hydrogenation furnace, wherein, alternating current-direct current conversion circuit is converted into galvanic current by three-phase high-voltage alternating current, this direct current is polysilicon hydrogenation furnace power supply, and DC chopped-wave voltage-regulating device is used for changing the voltage at heating resistor two ends in polysilicon hydrogenation furnace, thereby adjust the reaction temperature in polysilicon hydrogenation furnace.
As shown in Figure 1, alternating current-direct current conversion circuit comprises the rectifier transformer UT of 4 secondary mutual deviations 15 degree, 4 diode rectifier bridges and direct current support capacitor C1, each secondary of rectifier transformer UT is connected with a diode rectifier bridge, the diode rectifier bridge that each secondary connects is different, 4 diode rectifier bridge parallel connections are direct current support capacitor C1 power supply afterwards, and the leading-out terminal of direct current support capacitor C1 is connected to power to hydrogenation furnace with the terminals of hydrogenation furnace.
As shown in Figure 2, DC chopped-wave voltage-regulating device comprises capacitor C2, IGBT field effect transistor G, damper diode D1, diode D2 and inductor L; The positive pole of alternating current-direct current conversion circuit is connected with the negative electrode of damper diode D1 with the positive pole of capacitor C2, the collector electrode of IGBT field effect transistor G respectively, the emitter of IGBT field effect transistor G with after the anodic bonding of damper diode D1, be connected with the negative electrode of diode D2 with the input of inductor L respectively, the exit of inductor L is connected with the one end of heating resistor R in hydrogenation furnace, and the other end of heating resistor R is connected with the negative pole of alternating current-direct current conversion circuit with the anode of diode D2, the negative pole of capacitor C2 respectively.The utility model polysilicon hydrogenation furnace is 3.3ms with the control cycle of the DC chopped-wave voltage-regulating device in novel power supply device.
As shown in Figure 3, voltage regulator first terminals of DC chopped-wave voltage-regulating device are connected with DC bus first terminals of alternating current-direct current conversion circuit, and the voltage regulator of DC chopped-wave voltage-regulating device the 4th terminals are connected with DC bus second terminals of alternating current-direct current conversion circuit.
In the present embodiment, as shown in Figure 3, three-phase high-voltage alternating current becomes direct current by the rectifier transformer UT of 4 secondary mutual deviations, 15 degree and the transformation rectification of diode rectifier bridge, this direct current is powered to polysilicon hydrogenation furnace after IGBT field effect transistor G, inductor L, wherein, an outlet port of polysilicon hydrogenation furnace is connected with voltage regulator the second terminals, and another outlet port of polysilicon hydrogenation furnace is connected with voltage regulator the 3rd terminals.The circuit of alternating current-direct current conversion circuit of the present utility model contains 24 commutating phase structures, this 24 commutating phase structure has guaranteed that circuit harmonizing wave has reached international standard, and meet instructions for use, diode rectifier bridge can make power factor of the present utility model be more than or equal to 0.97, and can adjust the voltage at the heating resistor two ends in polysilicon hydrogenation furnace by DC chopped-wave voltage-regulating device, the control cycle of DC chopped-wave voltage-regulating device is 3.3ms, and it can also suppress grid side harmonic current noise effectively.
When adopting the utility model to power to the individual polysilicon hydrogenation furnace of n (n > 1), do not need the polysilicon hydrogenation furnace for newly adding to add new three-phase transformer, the polysilicon hydrogenation furnace that is only required to be new interpolation is equipped with joins DC chopped-wave voltage-regulating device with original polysilicon hydrogenation furnace and institute thereof after a DC chopped-wave voltage-regulating device and carries out in parallel, after only the polysilicon hydrogenation furnace newly adding need being connected according to circuit shown in Fig. 2 with for the DC chopped-wave voltage-regulating device of its outfit, then the voltage regulator of this DC chopped-wave voltage-regulating device the first terminals are connected with DC bus first terminals of alternating current-direct current conversion circuit, the voltage regulator of this DC chopped-wave voltage-regulating device the 4th terminals are connected with DC bus second terminals of alternating current-direct current conversion circuit simultaneously, can realize the heating power supply to the polysilicon hydrogenation furnace of new interpolation, thereby saved the installation cost that adds new three-phase transformer, and then hold facility ground or the space of new three-phase transformer have been saved.
Above-described embodiment is only for the invention example is clearly described, and the not restriction to the invention embodiment.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here exhaustive without also giving all execution modes.All any apparent variations of being extended out within spirit of the present utility model and principle or change are still among the protection range in the invention claim.
Claims (2)
1. a polysilicon hydrogenation furnace novel power supply device, is characterized in that, is included as the alternating current-direct current conversion circuit of hydrogenation furnace power supply and for changing the DC chopped-wave voltage-regulating device of the voltage of heating resistor R in hydrogenation furnace;
Alternating current-direct current conversion circuit comprises the rectifier transformer UT of 4 secondary mutual deviations 15 degree, 4 diode rectifier bridges and direct current support capacitor C1, each secondary of rectifier transformer UT is connected with a diode rectifier bridge, the diode rectifier bridge that each secondary connects is different, 4 diode rectifier bridge parallel connections are direct current support capacitor C1 power supply afterwards, and the leading-out terminal of direct current support capacitor C1 is connected with the terminals of hydrogenation furnace to power to hydrogenation furnace;
DC chopped-wave voltage-regulating device comprises capacitor C2, IGBT field effect transistor G, damper diode D1, diode D2 and inductor L; The positive pole of alternating current-direct current conversion circuit is connected with the negative electrode of damper diode D1 with the positive pole of capacitor C2, the collector electrode of IGBT field effect transistor G respectively, the emitter of IGBT field effect transistor G with after the anodic bonding of damper diode D1, be connected with the negative electrode of diode D2 with the input of inductor L respectively, the exit of inductor L is connected with the one end of heating resistor R in hydrogenation furnace, and the other end of heating resistor R is connected with the negative pole of alternating current-direct current conversion circuit with the anode of diode D2, the negative pole of capacitor C2 respectively.
2. polysilicon hydrogenation furnace according to claim 1 novel power supply device, is characterized in that, the control cycle of DC chopped-wave voltage-regulating device is 3.3ms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420333027.8U CN203911787U (en) | 2014-06-20 | 2014-06-20 | Novel power supply device for polysilicon hydrogenation furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420333027.8U CN203911787U (en) | 2014-06-20 | 2014-06-20 | Novel power supply device for polysilicon hydrogenation furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203911787U true CN203911787U (en) | 2014-10-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420333027.8U Expired - Fee Related CN203911787U (en) | 2014-06-20 | 2014-06-20 | Novel power supply device for polysilicon hydrogenation furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203911787U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104848698A (en) * | 2015-05-15 | 2015-08-19 | 成都中冶节能环保工程有限公司 | Warning type coke oven waste heat power generation system based on boosting power supply circuit |
| CN110247562A (en) * | 2019-06-14 | 2019-09-17 | 中冶赛迪工程技术股份有限公司 | A kind of power supply unit and method of supplying power to of direct current electric arc furnace |
-
2014
- 2014-06-20 CN CN201420333027.8U patent/CN203911787U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104848698A (en) * | 2015-05-15 | 2015-08-19 | 成都中冶节能环保工程有限公司 | Warning type coke oven waste heat power generation system based on boosting power supply circuit |
| CN110247562A (en) * | 2019-06-14 | 2019-09-17 | 中冶赛迪工程技术股份有限公司 | A kind of power supply unit and method of supplying power to of direct current electric arc furnace |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141029 Termination date: 20160620 |