CN207853556U - Dual power supply system and semiconductor production equipment - Google Patents
Dual power supply system and semiconductor production equipment Download PDFInfo
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- CN207853556U CN207853556U CN201721637983.5U CN201721637983U CN207853556U CN 207853556 U CN207853556 U CN 207853556U CN 201721637983 U CN201721637983 U CN 201721637983U CN 207853556 U CN207853556 U CN 207853556U
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- main electricity
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 22
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- 230000005611 electricity Effects 0.000 claims abstract description 79
- 238000009434 installation Methods 0.000 claims abstract description 45
- 238000012546 transfer Methods 0.000 claims abstract description 13
- 230000005540 biological transmission Effects 0.000 claims description 20
- 238000006243 chemical reaction Methods 0.000 claims description 17
- 230000009466 transformation Effects 0.000 claims description 17
- 238000012545 processing Methods 0.000 claims description 6
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
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- 238000011982 device technology Methods 0.000 description 1
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- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
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Abstract
A kind of dual power supply system of the utility model offer and semiconductor production equipment, dual power supply system include：For provide alternating current always for electric installation；For after always being converted for the alternating current that electric installation provides into the main electricity of load supplying；For after always being converted for the alternating current that electric installation provides into the back-up power source of load supplying；The automatic transfer switch being always electrically connected with back-up power source for electric installation is always electrically connected or realized with main electricity for electric installation for being realized by itself switching, automatic transfer switch includes switch, switchs and is always connected for electric installation, main electricity and back-up power source.The dual power supply system of the utility model by being arranged main electricity and back-up power source simultaneously, it is load supplying that can be switched to when main electricity breaks down by back-up power source, and proof load can still be worked normally in main electricity failure.
Description
Technical field
The utility model is related to semi-conductor device technology fields, more particularly to a kind of dual power supply system and semiconductor
Production equipment.
Background technology
In existing semiconductor production equipment, equipment, which passes piece communication system, to be interrogated using single-pass, and the equipment passes piece communication
System has PMC (process module controller, technical module controller) and TMC (transfer module
Controller, delivery module controller) composition, wherein the PMC and TMC has the same PS (power
System) power supply is powered, once the PS power failures, it will lead to entirely to transmit hardware and is stopped (shut
Down), to cause, device hardware damages or so that the wafer handled falls fragmentation and leads to wafer loss.
Utility model content
In view of the foregoing deficiencies of prior art, the purpose of this utility model is to provide a kind of dual power supply systems
And semiconductor production equipment, once for solving to use a PS power supply for institute caused by PMC and TMC power supplies in the prior art
State PS power failures, it will lead to entirely to transmit hardware being stopped, to cause device hardware to damage or wafer loss
The problem of.
In order to achieve the above objects and other related objects, the utility model provides a kind of dual power supply system, described double
Electric supply system includes：
For provide alternating current always for electric installation；
For by it is described always converted for the alternating current that electric installation provides after into the main electricity of load supplying；
For by it is described always converted for the alternating current that electric installation provides after into the back-up power source of load supplying；
For by itself switching realize it is described be always electrically connected or realize with the main electricity for electric installation it is described always
For the automatic transfer switch that electric installation is electrically connected with the back-up power source, the automatic transfer switch includes switch, described
Switch is always connected for electric installation, the main electricity and the back-up power source with described.
Preferably, described to include for electric installation always：
Total power supply for providing alternating current；
Point electric cabinet that alternating current for providing total power supply carries out transformation conversion and distributes, it is described to divide electric cabinet
It is connected with total power supply and the switch.
Preferably, the switch is single-pole double-throw switch (SPDT).
Preferably, the switch includes：
About two the first hard contacts being intervally arranged, wherein first hard contact and the main power supply
Power supply is connected, another described first hard contact is connected with the back-up power source；
It is at least one to move up and down between two first hard contacts to be touched with wherein 1 first metal
Second hard contact of point contact connection, second hard contact are always connected for electric installation with described.
Preferably, the switch further includes the switch main body that cross sectional shape is " I " fonts, and the switch main body includes：The
One horizontal part, the second horizontal part and vertical portion, wherein the first horizontal portion with second horizontal part arrange up and down by parallel interval
Cloth, the vertical portion between the first horizontal portion and second horizontal part, and with the first horizontal portion and described
Second horizontal part is connected；The quantity of second hard contact is two, and two second hard contacts are located at institute
State the upper and lower surface of the second horizontal part.
Preferably, the main electricity includes：
The first transformer for the alternating current always provided for electric installation to be carried out to transformation processing, first transformation
Device is connected with the switch；
It is described for by the first conversion module of the first transformer transformation treated alternating current is converted into direct current
First conversion module is connected with first transformer.
Preferably, the back-up power source includes：
The second transformer for the alternating current always provided for electric installation to be carried out to transformation processing, second transformation
Device is connected with the switch；
It is described for by the second conversion module of the second transformer transformation treated alternating current is converted into direct current
Second conversion module is connected with second transformer.
Preferably, the automatic transfer switch further includes controller, and the controller includes：
Voltage for being exported to the main electricity carries out the acquisition module of sample detecting, the acquisition module and institute
Main electricity is stated to be connected；
The judgment module that the voltage of main electricity output for being acquired to the acquisition module is judged, institute
Judgment module is stated with the acquisition module to be connected；
The switch is controlled when electric voltage exception for judging main electricity output in the judgment module to cut
It changes so that the control module being always electrically connected with the back-up power source for electric installation, the control module are sentenced with described
Disconnected module and the switch are connected.
The utility model also provides a kind of semiconductor production equipment, and the semiconductor equipment includes：
Dual power supply system as described in above-mentioned either a program；
Transmission control system is connected with the main electricity and the back-up power source, the main electricity
And the back-up power source is used to power for the transmission control system.
Preferably, the transmission control system includes：
Technical module controller, the technical module controller and the main electricity and the back-up power source phase
Connection, the main electricity and the back-up power source are used to power for the technical module controller；
Delivery module controller, the delivery module controller and the main electricity and the back-up power source phase
Connection, the main electricity and the back-up power source are used to power for the delivery module controller.
As described above, the dual power supply system and semiconductor production equipment of the utility model, have the advantages that：
The dual power supply system of the utility model by being arranged main electricity and back-up power source, Ke Yi simultaneously
It is load supplying to be switched to when main electricity breaks down by back-up power source, and proof load is in main electricity failure
It can still work normally；
The semiconductor production equipment of the utility model is by using pair for being provided with main electricity and back-up power source
Electric supply system is powered for transmission control system, and it is transmission to be can switch in main electricity failure by back-up power source
Control system is powered, and ensures that transmission control system can still be worked normally in main electricity failure, to avoid causing crystalline substance
Round damage is scrapped and is damaged to device hardware.
Description of the drawings
Fig. 1 to Fig. 4 is shown as the structure diagram of the dual power supply device provided in the utility model embodiment one.
Fig. 5 is shown as the structure diagram of the semiconductor production equipment provided in the utility model embodiment two.
Component label instructions
1 twin voltage power supply system
11 always for electric installation
111 total power supplies
112 points of electric cabinets
12 main electricities
121 first transformers
122 first conversion modules
13 back-up power sources
131 second transformers
132 second conversion modules
14 automatic transfer switch
141 switches
1411 first hard contacts
1412 second hard contacts
1413 switch main bodies
14131 first horizontal portions
14132 second horizontal parts
14133 vertical portions
142 controllers
1421 acquisition modules
1422 judgment modules
1423 control modules
2 transmission control systems
21 technical module controllers
22 delivery module controllers
Specific implementation mode
Illustrate that the embodiment of the utility model, those skilled in the art can be by this theorys below by way of specific specific example
Content disclosed by bright book understands other advantages and effect of the utility model easily.The utility model can also be by addition
Different specific implementation modes are embodied or practiced, and the various details in this specification can also be based on different viewpoints and answer
With carrying out various modifications or alterations under the spirit without departing from the utility model.
It please refers to Fig.1 to Fig. 5.It should be noted that the diagram provided in the present embodiment only illustrates this in a schematic way
The basic conception of utility model, when only display is with related component in the utility model rather than according to actual implementation in schema then
Component count, shape and size are drawn, when actual implementation kenel, quantity and the ratio of each component can be a kind of random change
Become, and its assembly layout kenel may also be increasingly complex.
Embodiment one
It please refers to Fig.1 and Fig. 2, the present embodiment provides a kind of dual power supply system 1, the dual power supply system 1 wraps
It includes：For provide alternating current always for electric installation 11；After the alternating current always provided for electric installation 11 is converted
For the main electricity 12 of load supplying；For being supplied for load after being converted the alternating current always provided for electric installation 11
The back-up power source 13 of electricity；For by itself switching, realization is described to be always electrically connected for electric installation 11 and the main electricity 12
Connect or realize the automatic transfer switch 14 being always electrically connected with the back-up power source 13 for electric installation 11, it is described to cut automatically
It includes switch 141 to change switch 14, and the switch 141 is with described always for electric installation 11, the main electricity 12 and described spare
Power supply 13 is connected.
As an example, described include always for electric installation 11：Total power supply 111 for providing alternating current；For by institute
State total power supply 111 offer alternating current carry out transformation conversion and distribute point electric cabinet 112, it is described divide electric cabinet 112 with it is described
Total power supply 111 and the switch 141 are connected.
Specifically, total power supply 111 can be powered to be multiple for electric loading, and for example, total power supply electricity
Source 111 can provide the alternating current of 208V, and certainly, in other examples, total power supply 111 can be with any other
The alternating current of voltage value, does not limit herein.
Specifically, the alternating current that total power supply 111 provides can be converted into such as 120V by described point of electric cabinet 112
Alternating current, and by transformed alternating current distribution think that different loads is powered.Certainly, in other examples, described
Point electric cabinet 112 alternating current that total power supply 111 provides can be converted into it is arbitrary needed for voltage value alternating current, this
Place does not limit.
In one example, the switch 141 is single-pole double-throw switch (SPDT), and the single-pole double-throw switch (SPDT) includes input contact, the
One output contact, the second output contact and throwing sheet metal；Wherein, the input contact is connected with described point of electric cabinet 112；Institute
State and throw sheet metal one end and be rotationally connected with the input contact, the other end can as needed with the first output contact phase
Contact is in contact with second output contact；First output contact is connected with the main electricity 12, described
Second output contact is connected with the back-up power source 13.
In another example, as shown in Fig. 2, the switch 141 includes：About two the first hard contacts being intervally arranged
1411, wherein first hard contact 1411 is connected with the main electricity 12, another described first metal
Contact 1411 is connected with the back-up power source 13；It is at least one can be between two first hard contacts 1411
It moves up and down with the second hard contact 1412 connected with wherein 1 first hard contact 1411, second metal
Contact 1412 is always connected for electric installation 11 with described, specifically, second hard contact 1412 divides electric cabinet 112 with described
It is connected.
As an example, the switch 141 further includes the switch main body 1413 that cross sectional shape is " I " fonts, the switch master
Body 1413 includes：First horizontal portion 14131, the second horizontal part 14132 and vertical portion 14133, wherein the first horizontal portion
14131 arrange with second horizontal part, about 14132 parallel interval, and the vertical portion 14133 is located at the first horizontal portion
Between 14131 and second horizontal part 14132, and with the first horizontal portion 14131 and second horizontal part 14132
It is connected；The quantity of second hard contact 1412 is two, and two second hard contacts 1412 are located at described
The upper and lower surface of second horizontal part 14132.
As an example, the main electricity 12 includes：For always being carried out described for the alternating current that electric installation 11 provides
First transformer 121 of transformation processing, first transformer 121 are connected with the switch 141；For described first to be become
First conversion module 122 of 121 transformation of depressor treated alternating current is converted into direct current, first conversion module 122 with
First transformer 121 is connected.Specifically, first transformer 121 is connected with described point of electric cabinet 112, being used for will
The voltage of described point of electric cabinet 112 distribution is converted into the alternating current of for example 5V or 15V, and certainly, in other examples, described first becomes
The alternating current that described point of electric cabinet 112 provides can be converted into the alternating current of arbitrary required voltage value by depressor 112, not done herein
It limits.
As an example, the back-up power source 13 includes：For by the alternating current always provided for electric installation 11 into
Second transformer 131 of row transformation processing, second transformer 131 are connected with the switch 141；For by described second
Second conversion module 132 of 131 transformation of transformer treated alternating current is converted into direct current, second conversion module 132
It is connected with second transformer 131.Specifically, second transformer 131 is connected with described point of electric cabinet 112, it is used for
The voltage that described point of electric cabinet 112 is distributed is converted into the alternating current of for example 5V or 15V, certainly, in other examples, described second
The alternating current that described point of electric cabinet 112 provides can be converted into the alternating current of arbitrary required voltage value by transformer 131, herein not
It limits.
As an example, the automatic transfer switch 14 further includes controller 142, the controller 142 includes：For to institute
The voltage for stating the output of main electricity 12 carries out the acquisition module 1421 of sample detecting, the acquisition module 1421 and the main confession
Power supply 12 is connected；The voltage that the main electricity 12 for being acquired to the acquisition module 1421 exports judges
Judgment module 1422, the judgment module 1422 is connected with the acquisition module 1421；For in the judgment module
1422 judge that controlling the switch 141 when the electric voltage exception that the main electricity 12 exports is switched so that total confession
The control module 1423 that electric installation 11 is electrically connected with the back-up power source 13, the control module 1423 and the judgement
Module 1422 and the switch 141 are connected.
The operation principle of dual power supply device described in the present embodiment is：When the main electricity 12 is normal,
Positioned at 14132 upper surface of the second horizontal part of the switch 141 second hard contact 1412 with the main confession
First hard contact 1411 that power supply 12 is connected connects, and the main electricity 12 is load supplying, is such as schemed
Shown in 3；Meanwhile the voltage that main electricity 12 described in the 1421 real-time acquisition testing of acquisition module exports；When the acquisition
Module 1421 collects the electric voltage exception that the main electricity 12 exports, and (it is zero for example, to power off input voltage, under-voltage or mistake
Pressure) when, the control module 1423 controls the switching of the switch 141 so that be located at the switch 141 described second is horizontal
First gold medal that second hard contact 1412 of 14132 lower surface of portion is connected with the back-up power source 13
Belong to contact 1411 to connect, meanwhile, it is located at described the second of 14132 upper surface of the second horizontal part of the switch 141
First hard contact 1411 phase separation that hard contact 1412 is connected with the main electricity 12, at this point, described
Back-up power source 13 is load supplying, as shown in Figure 4.
The dual power supply system 1 of the utility model by being arranged the main electricity 12 and described spare simultaneously
Power supply 13, it is negative that can be automatically switched to when the main electricity 12 breaks down by the back-up power source 13
Power supply is carried, proof load can still be worked normally in 12 failure of main electricity.
Embodiment two
Referring to Fig. 5, the utility model also provides a kind of semiconductor production equipment, the semiconductor equipment includes：As above
The dual power supply system 1 described in either a program is stated, the concrete structure of the dual power supply system 1 please refers to embodiment
One, it is not repeated herein；Transmission control system 2, the transmission control system 2 and the main electricity 12 and the spare confession
Power supply 13 is connected, and the main electricity 12 and the back-up power source 13 are used to supply for the transmission control system 2
Electricity.
As an example, the transmission control system 2 includes：Technical module controller (PMC) 21, the technical module control
Device 21 is connected with the main electricity 12 and the back-up power source 13, the main electricity 12 and the spare confession
Power supply 13 is used to power for the technical module controller 21；Delivery module controller (TMC) 22, the delivery module control
Device 22 is connected with the main electricity 12 and 13 power supply of the stand-by power supply, the main electricity 12 and the spare confession
Power supply 13 is used to control the power supply of 22 devices for the delivery module.The technical module controller 21 and delivery module control
The concrete structure of device 22 is well known to those skilled in the art, and is not repeated herein.
As an example, the semiconductor production equipment can be but be not limited only to ion implantation device, in other examples
In, the semiconductor production equipment can also be etching apparatus etc..
The semiconductor production equipment of the utility model is by using being provided with the main electricity 12 and the spare confession
The dual power supply system 1 of power supply 13 is powered for the transmission control system 2, can in 12 failure of main electricity
It is that the transmission control system 2 is powered to switch to by the back-up power source 13, ensures the transmission control system 2 described
It can still be worked normally when 12 failure of main electricity, to avoid causing the damage of wafer from scrapping and cause to damage to device hardware
It is bad.
In conclusion a kind of dual power supply system of the utility model offer and semiconductor production equipment, the dual power supply
Power supply system includes：For provide alternating current always for electric installation；For always being carried out described for the alternating current that electric installation provides
Into the main electricity of load supplying after converting；For by it is described always converted for the alternating current that electric installation provides after for load
The back-up power source of power supply；For by itself switching realize it is described be always electrically connected with the main electricity for electric installation or
Realize that the automatic transfer switch being always electrically connected with the back-up power source for electric installation, the automatic transfer switch include
Switch, the switch are always connected for electric installation, the main electricity and the back-up power source with described.This practicality is new
By the way that main electricity and back-up power source is arranged simultaneously in main electricity event can occur for the dual power supply system of type
It is load supplying to be switched to when barrier by back-up power source, and proof load can still be worked normally in main electricity failure；
The semiconductor production equipment of the utility model is by using the dual power supply for being provided with main electricity and back-up power source
System is powered for transmission control system, and it is transmission control system to be can switch in main electricity failure by back-up power source
Power supply ensures that transmission control system can still be worked normally in main electricity failure, to avoid causing the damage of wafer
It scraps and device hardware is damaged.
The above embodiments are only illustrative of the principle and efficacy of the utility model, new not for this practicality is limited
Type.Any person skilled in the art can all carry out above-described embodiment under the spirit and scope without prejudice to the utility model
Modifications and changes.Therefore, such as those of ordinary skill in the art without departing from the revealed essence of the utility model
All equivalent modifications completed under refreshing and technological thought or change, should be covered by the claim of the utility model.
Claims (10)
1. a kind of dual power supply system, which is characterized in that the dual power supply system includes：
For provide alternating current always for electric installation；
For by it is described always converted for the alternating current that electric installation provides after into the main electricity of load supplying；
For by it is described always converted for the alternating current that electric installation provides after into the back-up power source of load supplying；
For by itself switching, realization is described to be always electrically connected or realize total power supply with the main electricity for electric installation
The automatic transfer switch that device is electrically connected with the back-up power source, the automatic transfer switch include switch, the switch
Always it is connected for electric installation, the main electricity and the back-up power source with described.
2. dual power supply system according to claim 1, it is characterised in that：It is described to include for electric installation always：
Total power supply for providing alternating current；
Point electric cabinet that alternating current for providing total power supply carries out transformation conversion and distributes, it is described to divide electric cabinet and institute
It states total power supply and the switch is connected.
3. dual power supply system according to claim 1, it is characterised in that：The switch is single-pole double-throw switch (SPDT).
4. dual power supply system according to claim 1, it is characterised in that：The switch includes：
About two the first hard contacts being intervally arranged, wherein first hard contact and the main electricity
It is connected, another described first hard contact is connected with the back-up power source；
It is at least one to move up and down between two first hard contacts to be connect with wherein 1 first hard contact
The second hard contact of connection is touched, second hard contact is always connected for electric installation with described.
5. dual power supply system according to claim 4, it is characterised in that：The switch further includes that cross sectional shape is
The switch main body of " I " fonts, the switch main body include：First horizontal portion, the second horizontal part and vertical portion, wherein described
Parallel interval is arranged up and down for one horizontal part and second horizontal part, and the vertical portion is located at the first horizontal portion and described the
Between two horizontal parts, and it is connected with the first horizontal portion and second horizontal part；The quantity of second hard contact
It it is two, two second hard contacts are located at the upper and lower surface of second horizontal part.
6. dual power supply system according to claim 1, it is characterised in that：The main electricity includes：
The first transformer for the alternating current always provided for electric installation to be carried out to transformation processing, first transformer with
The switch is connected；
For by the first conversion module of the first transformer transformation treated alternating current is converted into direct current, described first
Conversion module is connected with first transformer.
7. dual power supply system according to claim 1, it is characterised in that：The back-up power source includes：
The second transformer for the alternating current always provided for electric installation to be carried out to transformation processing, second transformer with
The switch is connected；
For by the second conversion module of the second transformer transformation treated alternating current is converted into direct current, described second
Conversion module is connected with second transformer.
8. dual power supply system according to any one of claim 1 to 7, it is characterised in that：The automatic switchover is opened
Pass further includes controller, and the controller includes：
Voltage for being exported to the main electricity carries out the acquisition module of sample detecting, the acquisition module and the master
Power supply is connected；
The judgment module that the voltage of main electricity output for being acquired to the acquisition module is judged, it is described to sentence
Disconnected module is connected with the acquisition module；
Controlled when electric voltage exception for judging main electricity output in the judgment module switching with
Make the control module being always electrically connected with the back-up power source for electric installation, the control module and the judgement mould
Block and the switch are connected.
9. a kind of semiconductor equipment, which is characterized in that the semiconductor equipment includes：
Such as dual power supply system described in any item of the claim 1 to 8；
Transmission control system is connected with the main electricity and the back-up power source, the main electricity and institute
State back-up power source for for the transmission control system power supply.
10. semiconductor equipment according to claim 9, it is characterised in that：The transmission control system includes：
Technical module controller, the technical module controller are connected with the main electricity and the back-up power source
It connects, the main electricity and the back-up power source are used to power for the technical module controller；
Delivery module controller, the delivery module controller are connected with the main electricity and the back-up power source
It connects, the main electricity and the back-up power source are used to power for the delivery module controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721637983.5U CN207853556U (en) | 2017-11-30 | 2017-11-30 | Dual power supply system and semiconductor production equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721637983.5U CN207853556U (en) | 2017-11-30 | 2017-11-30 | Dual power supply system and semiconductor production equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207853556U true CN207853556U (en) | 2018-09-11 |
Family
ID=63423011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721637983.5U Expired - Fee Related CN207853556U (en) | 2017-11-30 | 2017-11-30 | Dual power supply system and semiconductor production equipment |
Country Status (1)
| Country | Link |
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| CN (1) | CN207853556U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114277341A (en) * | 2021-12-24 | 2022-04-05 | 北京北方华创微电子装备有限公司 | Power supply assembly, power supply control method and sputtering apparatus |
-
2017
- 2017-11-30 CN CN201721637983.5U patent/CN207853556U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114277341A (en) * | 2021-12-24 | 2022-04-05 | 北京北方华创微电子装备有限公司 | Power supply assembly, power supply control method and sputtering apparatus |
| CN114277341B (en) * | 2021-12-24 | 2023-09-08 | 北京北方华创微电子装备有限公司 | Power supply assembly, power supply control method and sputtering equipment |
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| GR01 | Patent grant | ||
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180911 |