CN207850900U - Three-dimensional mobile example platform in a kind of film growth experiment vacuum equipment - Google Patents
Three-dimensional mobile example platform in a kind of film growth experiment vacuum equipment Download PDFInfo
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- CN207850900U CN207850900U CN201820243329.4U CN201820243329U CN207850900U CN 207850900 U CN207850900 U CN 207850900U CN 201820243329 U CN201820243329 U CN 201820243329U CN 207850900 U CN207850900 U CN 207850900U
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Abstract
Three-dimensional mobile example platform in a kind of film growth experiment vacuum equipment, it is related to a kind of experimental facilities, the sample stage includes three cylindrical guides for being installed on vacuum chamber bottom, is set on cylindrical guide there are one fixed tablet, fixed tablet is connect with cylindrical guide with linear bearing；Fixed tablet is equipped with screw, with unification root feed screw；X-axis mobile pallet is installed below in fixed tablet, and X-axis mobile pallet is limited with a micron micrometer；X-axis mobile pallet is mounted below Y-axis mobile pallet, and Y-axis mobile pallet is equipped with a micron micrometer and limits；Y-axis mobile pallet is equipped with the support tube of three-dimensional sample platform, fixed three-dimensional sample platform, and support tube is arranged below one group of pottery envelope electrode, draws heating wires and temperature sensor connecting line.This three-dimensional sample platform does three-dimensional movement in vacuum equipment, provides possibility for online observation, is the experiment condition that research staff provides a convenient.
Description
Technical field
The utility model is related to a kind of experimental facilities, more particularly to three-dimensional in a kind of film growth experiment vacuum equipment
Mobile example platform.
Background technology
Currently, in film increment study field, either in a manner of magnetron sputtering or in a manner of molecular beam epitaxy
Film growth is carried out, researcher wishes directly to observe filminess in growth apparatus in the case where not destroying vacuum, but mesh
The sample stage installed in preceding above equipment can only be done rotation movement, and can not be controlled, be moved up and down, limit observation area, this reality
With it is novel be exactly in order to solve this problem, and specially to research and develop.
Invention content
The purpose of this utility model is to provide three-dimensional mobile example platforms in a kind of film growth experiment vacuum equipment, adopt
It replaces leading screw to do straight spur unit with accurate micrometer, reaches micron-sized slow feeding, provided easily for researcher
Study condition, this three-dimensional sample platform do three-dimensional movement in vacuum equipment, provide possibility for online observation, are that research staff carries
Convenient experiment condition is supplied.
The purpose of this utility model is achieved through the following technical solutions：
Three-dimensional mobile example platform in a kind of film growth experiment vacuum equipment, the sample stage include three and are installed on very
The cylindrical guide of empty room bottom is set on cylindrical guide there are one fixed tablet, and fixed tablet connects with cylindrical guide linear bearing
It connects；Fixed tablet is equipped with screw, with unification root feed screw；X-axis mobile pallet, X-axis movement is installed below in fixed tablet
Supporting plate is limited with a micron micrometer；X-axis mobile pallet is mounted below Y-axis mobile pallet, and Y-axis mobile pallet is equipped with
One micron micrometer limit；Y-axis mobile pallet is equipped with the support tube of three-dimensional sample platform, fixed three-dimensional sample platform, support tube
One group of pottery envelope electrode is arranged below, draws heating wires and temperature sensor connecting line；
Three-dimensional mobile example platform in a kind of film growth experiment vacuum equipment, the support tube outside set gold
Belong to bellows.
Three-dimensional mobile example platform in a kind of film growth experiment vacuum equipment, support tube outside set wavy metal
Pipe is in flexible, distortion, closed.
The advantages of the utility model is with effect：
The utility model does straight spur unit using accurate micrometer instead of leading screw, coordinates this department preferably driving journey
Sequence, can reach micron-sized slow feeding, and convenient study condition is provided for researcher；The sealing structure of the utility model is adopted
With metal bellows, the support construction of three-dimensional sample platform in metal bellows, ensure that the good seal performance of equipment entirely.Base
In the above feature, this three-dimensional sample platform can do three-dimensional movement in vacuum equipment, provide possibility for online observation, be research and development
The experiment condition that personnel provide a convenient.
Description of the drawings
Fig. 1 is the front view of the utility model；
Fig. 2 is the sectional view of the utility model；
Fig. 3 is the bottom view of the utility model；
Figure label title：1 sample stage, 2 support tubes, the bottom panel of 3 vacuum chambers, 4 metal bellows, 5 feed screws, 6
Tablet, 10Y axis precision feedings micrometer, 11 steppings are fixed in cylindrical guide, 7X axis precision feedings micrometer, 8 linear bearings, 9
Decelerating motor, 12X axis mobile pallet, 13X axis line slideway auxiliary, 14Y axis mobile pallet, 15, Y-axis moving guide rail pair, 16
Pottery envelope electrode.
Specific implementation mode
The present invention is described in detail for illustrated embodiment below in conjunction with the accompanying drawings.
The utility model is equipped with three cylindrical guides for being installed on vacuum chamber bottom, sets that there are one solid on three cylindrical guides
Plate is allocated, fixed tablet is connect with cylindrical guide with linear bearing, and fixed tablet is equipped with screw, with the use of a feeding silk
Bar drives the up and down of sample stage with decelerating step motor（Z axis）, fixed tablet two groups of the linear guides are arranged below, use
In installation X-axis mobile pallet, X-axis mobile pallet is limited with a micron micrometer, with manual+electronic driven in two modes.
It is again provided with two groups of the linear guides below X-axis mobile pallet, Y-axis mobile pallet is installed, is installed on Y-axis mobile pallet
There is a micron micrometer, with manual+electronic driven in two modes, limitation Y-axis position.Three are equipped on Y-axis mobile pallet
The support tube for tieing up sample stage, for fixing three-dimensional sample platform, support tube is arranged below one group of pottery envelope electrode, is led for drawing heating
Line and temperature sensor signal.One, which is set, outside support tube root metal bellows, scalable using bellows, can distort, not leak
The characteristic of gas is with reaching the mesh of three-dimensional movement and closing vacuum chamber.
Embodiment
The utility model includes three cylindrical guides being installed on vacuum chamber bottom panel 36, is equipped on cylindrical guide 6
Fixed tablet 9, cylindrical guide 6 are connected with the fixed linear bearing 8 of tablet 9, in 11 band of feed screw 5+ steppings decelerating motor
Under dynamic, move up and down.Two groups of X-axis line slideway auxiliaries 13 are arranged below in fixed tablet 9, X-axis line slideway auxiliary 13 connects X-axis
Mobile pallet 12 is positioned by the precision feeding micrometer 7 being installed on X-axis mobile pallet 12, and micrometer 7 has manual and electric
Dynamic two kinds of type of drive carry out precision positioning.It is straight that two groups of Y-axis line slideway auxiliaries 15, Y-axis are arranged below in X-axis mobile pallet 12
Line guideway 15 be mounted on Y-axis mobile pallet 14 on, positioned by Y-axis precision feeding micrometer 10, Y-axis precision into
There are manual and electronic two kinds of type of drive to carry out precision positioning to micrometer 10.The above mechanism pushes sample stage 1 by support tube 2
Do three-dimensional movement.Metal bellows 4 is welded on 2 outside of support tube, is moved with support tube 2, and support tube 2 is wrapped up, with
Extraneous air is isolated, and pottery envelope electrode 16 is arranged below, for drawing heating wires and temperature sensor signal in support tube 2.In reality
In testing, research is all by manipulating three-dimensional mobile example platform, so that it may easily to pass through microscopic to the life of each point of film
Long situation.
Claims (3)
1. three-dimensional mobile example platform in a kind of film growth experiment vacuum equipment, which is characterized in that the sample stage includes three
Root is installed on the cylindrical guide of vacuum chamber bottom, is set on cylindrical guide there are one fixed tablet, fixed tablet is used with cylindrical guide
Linear bearing connects；Fixed tablet is equipped with screw, with unification root feed screw；X-axis movement support is installed below in fixed tablet
Plate, X-axis mobile pallet are limited with a micron micrometer；X-axis mobile pallet is mounted below Y-axis mobile pallet, and Y-axis is moved
Dynamic supporting plate is equipped with a micron micrometer and limits；Y-axis mobile pallet is equipped with the support tube of three-dimensional sample platform, fixed three-dimensional sample
Sample platform, support tube are arranged below one group of pottery envelope electrode, draw heating wires and temperature sensor connecting line.
2. three-dimensional mobile example platform, feature exist in a kind of film growth experiment vacuum equipment according to claim 1
In the support tube outside sets metal bellows.
3. three-dimensional mobile example platform, feature exist in a kind of film growth experiment vacuum equipment according to claim 2
In it is in stretch, distort, closed to set metal bellows outside support tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820243329.4U CN207850900U (en) | 2018-02-11 | 2018-02-11 | Three-dimensional mobile example platform in a kind of film growth experiment vacuum equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820243329.4U CN207850900U (en) | 2018-02-11 | 2018-02-11 | Three-dimensional mobile example platform in a kind of film growth experiment vacuum equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207850900U true CN207850900U (en) | 2018-09-11 |
Family
ID=63408727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820243329.4U Active CN207850900U (en) | 2018-02-11 | 2018-02-11 | Three-dimensional mobile example platform in a kind of film growth experiment vacuum equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207850900U (en) |
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2018
- 2018-02-11 CN CN201820243329.4U patent/CN207850900U/en active Active
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