CN207847882U - A kind of high cryogenic pump for occluding the limit - Google Patents
A kind of high cryogenic pump for occluding the limit Download PDFInfo
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- CN207847882U CN207847882U CN201721241662.3U CN201721241662U CN207847882U CN 207847882 U CN207847882 U CN 207847882U CN 201721241662 U CN201721241662 U CN 201721241662U CN 207847882 U CN207847882 U CN 207847882U
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- cryogenic pump
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Abstract
The utility model discloses a kind of high cryogenic pumps for occluding the limit, it is installed in vacuum chamber, it includes shell, low temperature cold source, the cryopanel component for radiating cold screen and being radiated cold screen encirclement in shell, the low temperature cold source includes cryocooler cold head, the cryocooler cold head includes the two level cooling bench and level-one cooling bench of arranged coaxial, the cold screen of radiation is thermally connected with level-one cooling bench, the cryopanel component is thermally connected with two level cooling bench, the shell is equipped with air inlet, its airintake direction is orthogonal with the axial direction of cryocooler cold head, the cryopanel component is movably installed on two level cooling bench and can be rotated around the two level cooling bench.The cryopanel component of cryogenic pump provided by the utility model can be closer to air entry by its rotary motion, realize good condensation and absorption to air-breathing gas.
Description
Technical field
The utility model belongs to low-temperature refrigeration technology field, and in particular to a kind of to adsorb and condense the low of the limit with higher
Temperature pump.
Background technology
Cryogenic pump is the vacuum pump using low-temperature surface condensed gas, also known as condenser pump.Cryogenic pump can obtain pumping speed
The cleaning vacuum that rate is maximum, limiting pressure is minimum is widely used in research and production and the molecule of semiconductor and IC
Beam research, vacuum coating equipment, vacuum surface analytical instrument, ion implantation apparatus and space simulation facility etc..
Under routine use state, cryogenic pump is installed in the vacuum chamber of vacuum treatment installation.Since cryogenic pump is using cold
Head absorption, worked after a period of time, and the cryopanel on cold head is covered by the solid that gas condenses, and surface temperature increases, to gas
Body suction-operated, which weakens, even to be stopped, and air-extraction function is lost, and entire cryogenic pump has reached the attached limit of aspiration.
Analysis and test result show to determine that the condensation of cryopanel and the principal element of adsorption effect exist in cryogenic pump
In：The distance between opening area, gas access and cryopanel of gas access relative to the cryopanel and angle position etc..
Under conditions of the opening area of gas access is relatively limited, for the cryopanel of cryogenic pump inner cavity depths, since it is far from suction
Gas port, the absorption of gas, condensation effect are poor, and then affect the absorption limit of entire cryogenic pump.
Utility model content
Problem makes improvements the utility model in view of the prior art, i.e., the technical problem to be solved is that carry for utility model
For a kind of cryogenic pump with the higher absorption limit.
The technical solution of considerable low-temperature pump provided by the utility model is as follows：
A kind of high cryogenic pump for occluding the limit, is installed in vacuum chamber comprising shell, is located at shell at low temperature cold source
The interior cold screen of radiation and the cryopanel component surrounded by the cold screen of radiation, the low temperature cold source includes cryocooler cold head, the refrigeration
Machine cold head includes the two level cooling bench and level-one cooling bench of arranged coaxial, and the cold screen of radiation is thermally connected with level-one cooling bench, institute
It states cryopanel component and two level cooling bench to be thermally connected, the shell is equipped with air inlet, airintake direction and cryocooler cold head
Axial orthogonal, the cryopanel component is movably installed on two level cooling bench and can be rotated around the two level cooling bench.
Further, the high cryogenic pump for occluding the limit further include with the first Magnetic driving disk of the cold head arranged coaxial,
Second Magnetic driving disk, and the driving device of the first Magnetic driving disc spins is driven, the first Magnetic driving disk is configured at institute
The left of shell left side is stated, the second Magnetic driving disk is fixedly connected with cryopanel component, the first Magnetic driving disk and
The opposite surface of two Magnetic driving disks is equipped with magnetic patch, and the Magnetic driving disc side for being each disposed with magnetic patch is configured to：Magnetic patch is at least
Two, positioned at being equally spaced at Magnetic driving plate edge and circumferentially, the magnetic pole line directions N-S of each magnetic patch perpendicular to
The Magnetic driving disk, the magnetic pole line directions N-S of adjacent magnetic patch are on the contrary, between the first Magnetic driving disk and the second Magnetic driving disk
The shell that is covered, the cold screen region of radiation material be non-magnet material, by the first Magnetic driving disk and the second Magnetic driving disk it
Between magnetic patch magneticaction, the second Magnetic driving disc spins movement described in the rotational movement of the first Magnetic driving disk.
Further, the cold screen of radiation is cylindrical shape in both ends cover plate and coaxial with the cold head, the radiation
Cold screen is movably installed on level-one cooling bench and can be rotated around level-one cooling bench, the high cryogenic pump for occluding the limit further include with
The first Magnetic driving disk, the second Magnetic driving disk of the cold head arranged coaxial, and drive the drive of the first Magnetic driving disc spins
Dynamic device, the first Magnetic driving disk are configured at the left of the shell left side, the second Magnetic driving disk and low temperature board group
Part is fixedly connected, and the first Magnetic driving disk and the opposite surface of the second Magnetic driving disk are equipped with magnetic patch, the cold screen of radiation
Left cover be the embedded third Magnetic driving disk for being equipped with magnetic patch, the Magnetic driving disk for being each disposed with magnetic patch is configured to：Magnetic patch is extremely
It is two less, is equally spaced at close Magnetic driving plate edge and circumferentially, the N-S magnetic pole lines direction of each magnetic patch is hung down
Directly in the Magnetic driving disk, the magnetic pole line directions N-S of adjacent magnetic patch are on the contrary, the first Magnetic driving disk and third Magnetic driving disk
Between the material of shell that is covered be non-magnet material, pass through the magnetic of magnetic patch between the first Magnetic driving disk and third Magnetic driving disk
Force effect, the movement of third Magnetic driving disc spins, passes through third Magnetic driving described in the rotational movement of the first Magnetic driving disk
The magneticaction of magnetic patch between disk and the second Magnetic driving disk, the second magnetic described in the rotational movement of the third Magnetic driving disk drive
Moving plate rotary motion.
Further, cryopanel component described in the cryopanel component includes multiple be located at the second cooling bench periphery and low temperature
Pumping main shaft, coaxially and each other there are the low temperature cylinder in gap, the left end of the low temperature cylinder and the second Magnetic driving disks to fix and connect
It connects.
Further, the low temperature cylinder is equipped with the second through-hole, and the shape of second through-hole is round, rectangular, straight line
The slit that shape or curve-like extend.
Further, the shell is substantially in the cylindrical shape of both ends cover plate, and the cylindrical surface of shell is equipped with and vacuum chamber
The opening portion of body connection, which is cylindrical in shape and extending radially outwardly along cryogenic pump, and the top of opening portion is equipped with flange knot
Structure.
Further, square tube shape is called in the opening portion.
Under cryogenic pump working condition using the above structure, it is the knot that is connected to radiate cold screen, cryopanel component, cryocooler cold head
Structure, being movably installed in can in vivo and can be around cryogenic pump housing rotary motion.The cold screen of radiation, low temperature board group in compared with the prior art
Part, cryocooler cold head are fixedly installed in the mode in cryogenic pump, and cryopanel component each section can be compared with by its rotary motion
To approach air entry, preferably the gas of air entry is condensed and adsorbed.Radiating cold screen can also rotate around cryogenic pump main shaft,
So that its cylinder sides can the balanced portion gas to air entry condense.The utility model is simultaneously to the knot of cryopanel
Configuration formula is optimized, and has advanced optimized the absorption/condensation limit and absorption/condensation efficiency of cryopanel component.
Description of the drawings
Fig. 1 is the schematic diagram of the utility model first embodiment vacuum pump major part.
Fig. 2 is B-B views in Fig. 1.
Fig. 3 is the partial enlarged view in the portions A in Fig. 1.
Fig. 4 is the magnetic patch arrangement schematic diagram of Magnetic driving disk used by the utility model.
Specific implementation mode
It is described below for disclosing the utility model so that those skilled in the art can realize the utility model.It retouches below
Preferred embodiment in stating is only used as illustrating, it may occur to persons skilled in the art that other obvious modifications.
In order to describe conveniently, so-called " left side " " right side " is consistent with " left side " " right side " direction of attached drawing 1 itself in text.
Embodiment one：
As shown in Figures 1 to 4, cryogenic pump is installed in vacuum chamber, for the indoor vacuum degree of vacuum chamber to be promoted to
Desirable rank.Cryogenic pump has the air entry 1 for receiving to come from vacuum chamber gas.Cryogenic pump include shell 2,
Radiate cold screen 3, low temperature cold source and cryopanel component 7.
The shell 2 of cryogenic pump is substantially in the cylindrical shape that both ends carry cover board 2b, 2c, and axis is cryogenic pump central shaft.Shell
The cylindrical surface of body is equipped with the opening portion 2a (i.e. the air entry of cryogenic pump) being connect with vacuum cavity.The opening portion is cylindrical in shape simultaneously
Along extending radially outwardly for cryogenic pump, the top of opening portion is equipped with flanged structure.The preferred square tube shape in opening portion.
Low temperature cold source is two-stage type GM refrigeration machines.Including helium compressor 10 and cold head 4, cold head 4 has the one of coaxial arrangement
Grade cooling bench 41 and two level cooling bench 42.The level-one cooling bench 41 and two level cooling bench 42 of cold head are along cryogenic pump central axis direction cloth
It sets, and stretches into the inside of cryogenic pump from right to left through shell.Shell right cover plate 2c is equipped with the through-hole passed through for cold head, and cold head
It is hermetically connected with the shell.It radiates cold screen 3 to be thermally connected with level-one cooling bench 41, cryopanel component 7 is thermally connected with two level cooling bench 42
And it can be around two level cooling bench rotary motion.Under working condition, the first cooling temperature of the first cooling bench 41 is 65 to 120K, preferably
80 to 100K, the second cooling temperature of the second cooling bench 42 is 10 to 20K.First cooling temperature and the second cooling temperature take
Value matches with gas absorption and the temperature of condensation, belongs to known technology, and which is not described herein again.Using the above structure, cryogenic pump
The inflow gas direction of air entry 1 is orthogonal to cryogenic pump axially (cold head is axial), when cryopanel component 7 is rotated around cold head, low temperature
Board group part 7 is adsorbed and is condensed along the inflow gas to air entry 1 that its circumferentially upper each surface can be balanced.Such as cryogenic pump air-breathing
The inflow gas direction of mouth 1 is smaller or even axially parallel with cold head with cold head axial angle, it is clear that cryopanel component rotary motion
Effect just do not embody.Further, the inflow gas direction face cold head of cryogenic pump air entry is axial, compared to the stream of air entry
Enter the non-face of gas direction and (be only orthogonal to) cold head axial direction, since the distance between gas access and cryopanel component 7 are closer to can
Take preferably absorption and condensation effect.
Cold screen 3 is radiated mainly for protecting influence, same of the cryopanel component from the radiant heat of the shell 2 from cryogenic pump
When condensation portion gas (such as water, carbon dioxide) and be arranged.It radiates cold screen 3 to be set between shell and cryopanel component, and will
Cryopanel component 7 surrounds.It radiates cold screen 3 and both may be configured as integral shape, or seperated shape.In the present embodiment, radiation is cold
Screen 3 carries the cylindrical shape coaxial with cryogenic pump of cover board for both ends.It is right to radiate air entry institute on the drum surface and shell of cold screen 3
The position answered is equipped with first through hole, and first through hole is multiple, and shape can be round, rectangular, linear or curvilinear extension
Slit.The purpose that first through hole is arranged is easy for the gas of cryogenic pump air entry 1 cold screen 3 is flowed into cryogenic pump inner cavity via radiation
It is come into full contact with internal cryopanel component 7.Certainly, it may also set up increasingly complex adjustable openings size on radiating cold screen
Shutter.
Cryopanel component 7 can be used currently known any structure type, be movably installed in two in any well-known manner
On grade cooling bench.In the present embodiment：Cryopanel component 7 includes multiple is coaxially disposed with cryogenic pump and there are the low of gap each other
Warm cylinder 71.The outer surface of low temperature cylinder 71 is condenser zone, and inner surface is binding domain.It is opened in low temperature cylinder 71
There is the second through-hole, the low temperature cylinder of radially inner layer is flowed into convenient for low temperature cylinder of the gas through radial outer that air entry flows into.The
The shape of two through-holes can be the slit of round, rectangular, linear or curvilinear extension.Loop connecting is equipped between low temperature cylinder
Plate 72a, adjacent two low temperature cylinder are set in loop connecting by the 72a connections of loop connecting plate, the low temperature cylinder of radially innermost layer
On plate 72b, second bearing 8 is set on two level cooling bench 42.8 optional slidingtype bearing of second bearing or roller bearing.Two
Grade cooling bench 42 and the inner ring 8a of second bearing are connected, and loop connecting plate 72b is set in the outer ring 8b of second bearing and consolidates with it
Even.Connection type with this configuration, cryopanel component 7 are movably installed on two level cooling bench 42 and can be revolved around cryogenic pump main shaft
Turn.Meanwhile cryopanel component 7 keeps second cooling temperature consistent with two level cooling bench 42.Using the cryopanel of cylindrical shape,
Entire circumferential more balanced absorption and condensed gas when it may make to be rotated around cold head.
There are many rotation type of drive of cryopanel component 7, such as 7 rotary motion of motor direct-drive cryopanel component.For
So that cryopanel component 7 is stablized in the second extremely low cooling temperature, should avoid as possible other devices and cryopanel component 7 into
Row directly thermo-contact.The present embodiment drives cryopanel component rotary motion by the way of disk drive.Cryogenic pump further includes
A pair of of the Magnetic driving disk being made of the first Magnetic driving disk 5 and the second Magnetic driving disk 6.On a left side of low temperature pump case left cap plate 2b
Side is equipped with the first Magnetic driving disk 5, and the second Magnetic driving disk 6 is fixed in the left side of cryopanel component 7.First Magnetic driving disk 5, second
Magnetic driving disk 6 is configured using cryogenic pump central shaft as axis, and the second Magnetic driving is driven using the rotary motion of the first Magnetic driving disk 5
Disk 6 rotates, and then drives the rotary motion of cryopanel component 7.
First Magnetic driving disk 5 is disc, and 5 right lateral surface of the first Magnetic driving disk is equipped at least two along week close to edge
To the magnetic patch being equally spaced, the magnetic pole line directions N-S of each magnetic patch are perpendicular to Magnetic driving disk.The N-S magnetic of adjacent two magnetic patch
Pole line direction is opposite.Cryogenic pump further includes driving device 51, which drives Magnetic driving in any well-known manner
5 rotary motion of disk.For example, driving device is driving motor, output shaft is fixedly connected with 5 center of the first Magnetic driving disk, is exported
Axis is axially perpendicular to the first Magnetic driving disk 5.
Second Magnetic driving disk 6 is also disc, is located at the left end of cryopanel component 7, the directly left end with low temperature cylinder 71
It is fixedly connected.Magnetic patch distribution and installation form on second Magnetic driving disk, 6 left side is consistent with the second Magnetic driving disk.First magnetic drives
The side surface that Moving plate 5 and the second Magnetic driving disk 6 are equipped with magnetic patch configures in opposite directions.In order to preferably carry out magnetic transmission, shell left side
The material in the regions corresponding with first/second Magnetic driving disk cover board 3a is non-magnet material on the left of cover board 2b, the cold screen of radiation.When
So, radiating cover board region corresponding with Magnetic driving disk on the left of cold screen also can directly open up and the comparable through-hole of Magnetic driving disc area.
In Project Realization, can also by reasonably arranging, reduce as possible between the first Magnetic driving disk 5 and the second Magnetic driving disk 6 away from
From further enhancing the magnetic force before two disks.
The cryogenic pump of form using the above structure, under the drive of driving device 51, the first 5 turns of Magnetic driving disk passes through magnetic force
The second Magnetic driving disk 6 is driven to rotate, and then entire cryopanel component 7 is rotated around cold head.Simultaneously cryopanel component 7 not with the second magnetic
Structural member thermo-contact other than drive disk 6, two level cold head 42, is easy to keep the second extremely low cooling temperature.
Embodiment two：
The structure composition and connection relation and embodiment one of embodiment two are roughly the same.Unlike, radiate the knot of cold screen 3
Structure and difference with 41 connection type of level-one cooling bench.Cold screen 3 is radiated to be movably installed on level-one cooling bench 41, it also can be around low temperature
Center axis rotation movement is pumped, and its drum surface is entirely circumferentially with several first through hole.The right side cover board 3b for radiating cold screen 3 is logical
First bearing is crossed to be set on level-one cooling bench.Specific connection type is set in two with loop connecting plate 72b by second bearing
The mode of grade cooling bench 42 is the same, and which is not described herein again.
The left side cover board 3a for radiating cold screen is disc, close to edge, is circumferentially equipped with multiple leading to for magnetic patch insertion
Hole.The position of magnetic patch is similar with the position of magnetic patch on the first Magnetic driving disk 5 on the cover board 3a of left side, no longer superfluous here
It states.Preferably, the magnetic patch of the magnetic patch of the first Magnetic driving disk 5, the magnetic patch of left side cover board 3a of the cold screen of radiation, the second Magnetic driving disk 6
Distance away from cryogenic pump central shaft is identical.
Structure based on embodiment two and connection type, the first Magnetic driving disk 5 generate magnetic to radiating cover board 3a on the left of cold screen
Driving drives and radiates cold screen 3 around cryogenic pump center axis rotation.Magnetic driving disk 3 is further driven to the second magnetic on cryopanel component
Drive disk 6 rotates, final to drive cryopanel component rotary motion.Compared to embodiment two, the cylinder for radiating cold screen 3 may make
The more balanced condensation in side comes from the portion gas (such as water, carbon dioxide) of cryogenic pump air entry 1.
Based on above-mentioned two embodiment, under cryogenic pump working condition, the inflow gas direction of air entry 1 is orthogonal to cold head axis
To in conjunction with disk drive, cryopanel component 7 can be around cold head axis rotary motion.The cold screen of radiation, cryopanel in compared with the prior art
Component, cryocooler cold head are fixedly installed in the mode in cryogenic pump, and each piece of board member of cryopanel component is transported by its rotation
It is dynamic to be closer to air entry, realize good condensation and absorption to air-breathing gas.Meanwhile this disk drive mode is
Contactless, the extremely low temperature requirement of cryopanel component has been effectively ensured.Cold screen 3 is radiated in embodiment two also can be around cold head
Rotation, further such that the portion gas to air entry that the cylinder sides for radiating cold screen 3 can be balanced condenses.It needs
Bright, cryopanel component 7 is flexible connection relative to the two level cooling bench of cold head in the utility model, and cold head and low temperature
Pump case 2 is fixed seal connection, i.e., cold head and without rotation, evaded cold head around low temperature pump case rotating vacuum seals
The technical issues of.
The technology contents of the not detailed description of the utility model are known technology.
Basic principles, main features, and advantages of the present invention has been shown and described above.One's own profession
The technical staff of industry is it should be appreciated that the present utility model is not limited to the above embodiments, described in above embodiments and description
Only the principles of the present invention, on the premise of not departing from the spirit and scope of the utility model the utility model also have respectively
Kind of changes and improvements, as other than the structure of the cryopanel component described in embodiment one and embodiment two, in known range
It can also select the structure type of the cryopanel component of other forms.These changes and improvements both fall within this claimed practicality
In novel range.The scope of protection of the utility model is defined by appended claims and its equivalent.
Claims (7)
1. a kind of high cryogenic pump for occluding the limit, is installed in vacuum chamber comprising shell, is located in shell low temperature cold source
The cold screen of radiation and the cryopanel component that is radiated cold screen and surround, the low temperature cold source includes cryocooler cold head, the refrigeration machine
Cold head includes the two level cooling bench and level-one cooling bench of arranged coaxial, and the cold screen of radiation is thermally connected with level-one cooling bench, described
Cryopanel component is thermally connected with two level cooling bench, which is characterized in that the shell is equipped with air inlet, airintake direction and refrigeration
The axial direction of machine cold head is orthogonal, and the cryopanel component is movably installed on two level cooling bench and can be revolved around the two level cooling bench
Turn.
2. the high cryogenic pump for occluding the limit according to claim 1, which is characterized in that the high cryogenic pump for occluding the limit
Further include and the first Magnetic driving disk of the cold head arranged coaxial, the second Magnetic driving disk, and driving the first Magnetic driving disk
The driving device of rotation, the first Magnetic driving disk are configured at the left of the shell left side, the second Magnetic driving disk with
Cryopanel component is fixedly connected, and the first Magnetic driving disk and the opposite surface of the second Magnetic driving disk are equipped with magnetic patch,
Each Magnetic driving disc side for being disposed with magnetic patch is configured to：Magnetic patch at least two is located at Magnetic driving plate edge
And be circumferentially equally spaced, the magnetic pole line directions N-S of each magnetic patch are perpendicular to the Magnetic driving disk, the N-S of adjacent magnetic patch
Magnetic pole line direction on the contrary,
The material of the shell, the cold screen region of radiation that are covered between the first Magnetic driving disk and the second Magnetic driving disk is non-magnetic
Material,
By the magneticaction of magnetic patch between the first Magnetic driving disk and the second Magnetic driving disk, the rotation of the first Magnetic driving disk is transported
It is dynamic to drive the second Magnetic driving disc spins movement.
3. the high cryogenic pump for occluding the limit according to claim 1, which is characterized in that the cold screen of radiation is in both ends
Cover plate and the cylindrical shape coaxial with the cold head, the cold screen of radiation are movably installed on level-one cooling bench and can be cold around level-one
But platform rotates,
The high cryogenic pump for occluding the limit further includes the first Magnetic driving disk, the second Magnetic driving with the cold head arranged coaxial
Disk, and the driving device of the first Magnetic driving disc spins is driven, the first Magnetic driving disk is configured on the left of the shell
The left in face, the second Magnetic driving disk are fixedly connected with cryopanel component, the first Magnetic driving disk and the second Magnetic driving disk
Opposite surface is equipped with magnetic patch, and the left cover of the cold screen of radiation is the embedded third Magnetic driving disk for being equipped with magnetic patch,
Each Magnetic driving disk for being disposed with magnetic patch is configured to：Magnetic patch at least two, is located at Magnetic driving plate edge and edge
It is circumferentially equally spaced, the magnetic pole line directions N-S of each magnetic patch are perpendicular to the Magnetic driving disk, the N-S magnetic poles of adjacent magnetic patch
Line direction on the contrary,
The material of the shell covered between the first Magnetic driving disk and third Magnetic driving disk is non-magnet material,
By the magneticaction of magnetic patch between the first Magnetic driving disk and third Magnetic driving disk, the rotation of the first Magnetic driving disk is transported
It is dynamic to drive the third Magnetic driving disc spins movement,
By the magneticaction of magnetic patch between third Magnetic driving disk and the second Magnetic driving disk, the rotation of the third Magnetic driving disk is transported
It is dynamic to drive the second Magnetic driving disc spins movement.
4. the high cryogenic pump for occluding the limit according to any one of claim 2 to 3, which is characterized in that the cryopanel
Cryopanel component described in component include it is multiple be located at the coaxial with cryogenic pump main shaft of the second cooling bench periphery and each other there are
The low temperature cylinder of gap, the left end of the low temperature cylinder are fixedly connected with the second Magnetic driving disk.
5. the high cryogenic pump for occluding the limit according to claim 4, which is characterized in that the low temperature cylinder is equipped with second
Through-hole, the shape of second through-hole are the slits of round, rectangular, linear or curvilinear extension.
6. the high cryogenic pump for occluding the limit according to any one of claim 1 to 3, which is characterized in that the shell is big
The cylindrical shape in both ends cover plate, the cylindrical surface of shell is caused to be equipped with the opening portion being connect with vacuum cavity, which is in
The top of tubular and extending radially outwardly along cryogenic pump, opening portion is equipped with flanged structure.
7. the high cryogenic pump for occluding the limit according to claim 6, which is characterized in that call square tube shape in the opening portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721241662.3U CN207847882U (en) | 2017-09-26 | 2017-09-26 | A kind of high cryogenic pump for occluding the limit |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721241662.3U CN207847882U (en) | 2017-09-26 | 2017-09-26 | A kind of high cryogenic pump for occluding the limit |
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| Publication Number | Publication Date |
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| CN207847882U true CN207847882U (en) | 2018-09-11 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107605700A (en) * | 2017-09-26 | 2018-01-19 | 安徽万瑞冷电科技有限公司 | A kind of cryogenic pump of the high occlusion limit |
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2017
- 2017-09-26 CN CN201721241662.3U patent/CN207847882U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107605700A (en) * | 2017-09-26 | 2018-01-19 | 安徽万瑞冷电科技有限公司 | A kind of cryogenic pump of the high occlusion limit |
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