CN207820298U - A kind of arc plasma source of efficient stable - Google Patents
A kind of arc plasma source of efficient stable Download PDFInfo
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- CN207820298U CN207820298U CN201721855171.8U CN201721855171U CN207820298U CN 207820298 U CN207820298 U CN 207820298U CN 201721855171 U CN201721855171 U CN 201721855171U CN 207820298 U CN207820298 U CN 207820298U
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Abstract
The utility model discloses a kind of arc plasma sources of efficient stable, including anode, anode copper ring electrode, inner ceramic cylinder, intermediate ceramic cylinder, external ceramic cylinder, cathode, tough cathode ring electrode, molybdenum air injection pipe, cathodic ceramic lid, introducing electrode intermediate insulation, ceramic washer, energy to introduce crimping copper nose, ceramic insulation box, anode ceramic cap and molybdenum washer；Cathode and the coaxial assembly of anode, with the alternately folded filling of ceramic washer and molybdenum washer between cathode and anode, inner ceramic jacket casing is in bead outward, inner ceramic cylinder both ends are respectively embedded into the groove of cathode and anode, intermediate ceramic cylinder is put on again outside inner ceramic cylinder, the both ends of intermediate ceramic cylinder connect with the internal end surface of cathode and anode, are provided with the external ceramic jacket casing of pilot hole outside intermediate ceramic cylinder.The utility model only needs pulse gas injection, reduces the neutral operation matter gas in plasma, reduces as received basis gas usage amount, is conducive to the parameter for improving plasma when using under vacuum.
Description
Technical field
The utility model belongs to basic plasma research field, and in particular to a kind of arc-plasma of efficient stable
Source.
Background technology
Plasma source mainly has helicon wave plasma source and oxide-coated cathode plasma source at present.However helicon
Plasma source and oxide-coated cathode plasma source, generated plasma temperature density is low, resource utilization is low, cannot
Stable generation plasma, and generate the shortcomings of plasma mode is dumb；
1, helicon and oxide-coated cathode plasma source are required for continuing gas injection to ensure the generation of plasma, and it
Degree of ionization again it is not high, the plasma temperature and density generated in this way is all relatively low, and for the energy of gas and power supply
The utilization rate of amount is low, causes the waste of resource；
2, Helicon wave plasma needs that just completion energy coupling, ionized gas generate plasma by adaptation matching
Body, and with plasma parameter and gas Parameters variation, matching will change, so there is some to ask for energy coupling
Topic, the generation plasma that cannot stablize,；
3, oxide-coated cathode is to generate a small amount of electronics by heating cathode material, then increases electronics by accelerating grid
Energy, the electronics after being accelerated generate plasma with neutral gas collision, and this plasma temperature density is low, Er Qieyin
A large amount of impurity is entered, and the huge heat that heated oxide object generates also is unfavorable for Physical Experiment progress, in addition oxide
Preparation is also comparatively laborious, and this mode is very dumb；
4, since helicon has energy coupling, and there is also energy coupling problems for oxide-coated cathode, so the two
Capacity usage ratio it is very low；
Based on problem above, energy and resource profit are needed in basic plasma physics research and plasma application field
With rate it is high, can flexibly and the plasma source of the generation plasma of efficient stable.
Utility model content
The purpose of this utility model be to overcome existing Helicon wave plasma need continue gas injection, plasma temperature
Degree and low density disadvantage, temperature and the density for aoxidizing cathode plasma are low, and the shortcomings of introducing impurity, design a energy
Enough efficient stables generate the good and pure plasma source of plasma parameter.
The technical solution adopted in the utility model is：A kind of arc plasma source of efficient stable, including anode, anode
Copper ring electrode, inner ceramic cylinder, intermediate ceramic cylinder, external ceramic cylinder, cathode, tough cathode ring electrode, molybdenum air injection pipe, cathodic ceramic
Lid introduces electrode intermediate insulation, ceramic washer, energy introducing crimping copper nose, ceramic insulation box, anode ceramic cap and molybdenum washer,
Cathode and the coaxial assembly of anode, with ceramic washer and molybdenum washer, alternately folded filling, inner ceramic jacket casing exist between cathode and anode
Bead outward, inner ceramic cylinder both ends are respectively embedded into the groove of cathode and anode, put on intermediate ceramics outside inner ceramic cylinder again
Cylinder, the both ends of intermediate ceramic cylinder connect with the internal end surface of cathode and anode, and finally, the external ceramic jacket casing for being provided with pilot hole exists
Outside intermediate ceramic cylinder, both ends are concordant with the outer end face of cathode and anode respectively, have the cathodic ceramic lid of pilot hole to be laid in cathode
Outer end face and coaxial with cathode, there is the anode ceramic cap of pilot hole to be laid in anode outer end face and coaxial with anode, adjust cloudy
Pole ceramic cap and anode ceramic cap keep their pilot hole coaxial with the pilot hole of external ceramic cylinder, are fixed using lead screw entire
Plasma source.
Further, above-mentioned anode copper ring electrode is the copper ring of an internal diameter 70mm outer diameters 90mm, and circle ring center position is equal
Even opens 12 countersunk head threaded holes, and there are two symmetrical horns in the outside of ring.
Further, above-mentioned anode is made by metal molybdenum, is the U-shaped structure of a cylinder, and outer end face opens that there are one loudspeaker
Shape exports, and anode outer end face is also opened there are one internal diameter 70mm outer diameter 90mm, the annular groove of thickness 3mm, in slot middle circle uniformly
12 threaded holes of distribution, anode copper ring electrode just assembles on this annular groove.
Further, above-mentioned anode copper ring electrode is the copper ring of an internal diameter 70mm outer diameters 90mm, and circle ring center position is equal
Even opens 12 countersunk head threaded holes, and there are one horns in the outside of ring.
Further, above-mentioned cathode has metal molybdenum to make, and inner cylinder opens horn mouth, is opened between interior cylinder and outside cylinder
There are one the fixed notch consistent with inner ceramic barrel thickness, and open a gas injection coaxial with cathode among entire cathode
Hole is also opened in cathode outer end face there are one internal diameter 70mm outer diameter 90mm, the annular groove of thickness 3mm, uniform in slot middle circle
12 threaded holes are distributed, tough cathode ring electrode just assembles on this annular groove.
Further, crimping copper lug is the hole that one end is provided with diameter 8mm depths 15mm, and other end is the spiral shell of a M8
Column.
Further, the horn of tough cathode ring electrode and anode copper ring electrode is all opened there are one 8mm through-holes, crimping copper nose
Son is connected by this hole with copper ring electrode, and external energy is introduced for generating plasma.
Further, above-mentioned molybdenum air injection pipe is connected by screw thread with cathode injecting hole, other side and external insulation material
The air injection pipe of matter is connected, and is connected with gas injection stop valve, and as received basis gas is injected ionization channels in a pulsed mode.
The advantages of the utility model and good effect are：
(1) a kind of arc plasma source of efficient stable of the utility model works in the pulsing mode, it is only necessary to pulse
Gas injection reduces the neutral operation matter gas in plasma, reduces as received basis gas usage amount, is conducive to when using under vacuum
Improve the parameter of plasma.
(2) it is to use arc discharge mould that a kind of arc plasma source of efficient stable of the utility model, which generates plasma,
Formula, capacity usage ratio is high and oxide-coated cathode is compared and do not need cooling device, and operation is easy, energy consumption is few, and plasma
In impurity it is few.
(3) the plasma beam intensity that a kind of arc plasma source of efficient stable of the utility model generates is high, ginseng
Number is high, and parameter can be controlled according to gas injection and external power supply, be conducive to the state modulator in physical study and commercial Application.
(4) a kind of arc plasma source of efficient stable of the utility model and Helicon wave plasma and oxidation cathode etc.
Gas ions etc., which are compared, wants structure dexterous, can convenient scaled size according to demand.
Description of the drawings
Fig. 1 is a kind of assembly diagrammatic cross-section of the arc plasma source of efficient stable of the utility model.
Fig. 2 is a kind of anode of the arc plasma source of efficient stable of the utility model.
Fig. 3 is a kind of cathode of the arc plasma source of efficient stable of the utility model.
Fig. 4 is a kind of anode copper ring electrode of the arc plasma source of efficient stable of the utility model.
Fig. 5 is a kind of tough cathode ring electrode of the arc plasma source of efficient stable of the utility model.
In figure：01 anode, 02 anode copper ring electrode, 03 inner ceramic cylinder, 04 intermediate ceramic cylinder, 05 external ceramic cylinder, 06
Cathode, 07 tough cathode ring electrode, 08 molybdenum air injection pipe, 09 cathodic ceramic lid, 10 introducing electrode intermediate insulations, 11 ceramic washers, 12
Energy introduces crimping copper nose, 13 ceramic insulation boxes, 14 anode ceramic caps, 15 molybdenum washers.
Specific implementation mode
Below in conjunction with drawings and embodiments, elaborate to technical solution.
As shown in Figure 1, a kind of arc plasma source of efficient stable, including 01 anode, 02 anode copper ring electrode, in 03
Portion's ceramic cylinder, 04 intermediate ceramic cylinder, 05 external ceramic cylinder, 06 cathode, 07 tough cathode ring electrode, 08 molybdenum air injection pipe, 09 cathode pottery
Porcelain lid, 10 introduce electrode intermediate insulation, 11 ceramic washers, and 12 energy introduce crimping copper nose, 13 ceramic insulation boxes, 14 anodes pottery
Porcelain lid, 15 molybdenum washers, with the alternately folded filling of ceramic washer 11 and molybdenum washer 15, inner ceramic cylinder 03 between cathode 06 and anode 01
It is sleeved on bead outward, 03 both ends of inner ceramic cylinder are respectively embedded into the groove of cathode 06 and anode 01, outside inner ceramic cylinder 03 again
Intermediate ceramic cylinder 04 is put on, the both ends of intermediate ceramic cylinder 04 connect with the internal end surface of cathode 06 and anode 01, finally, are provided with dress
The external ceramic cylinder 05 of distribution is sleeved on outside intermediate ceramic cylinder 04, and both ends are concordant with the outer end face of cathode 06 and anode 01 respectively, have
The cathodic ceramic lid 09 of pilot hole is laid in the outer end face of cathode 06 and coaxial with cathode 06, there is the anode ceramic cap 14 of pilot hole
Be laid in 01 outer end face of anode and coaxial with anode 01, adjust cathodic ceramic lid 09 and anode ceramic cap 14 make their pilot holes with
The pilot hole of external ceramic cylinder 05 is coaxial, and entire plasma source is fixed using lead screw.
The ceramic component is process using boron nitride as material.
The lead screw is the 316 stainless steel lead screws of M8, passes through anode ceramic cap 14, external ceramic cylinder 05 and cathodic ceramic
6 through-holes on lid 09 on cathode 06 and anode 01 are screwed on nut and are fixed, and ceramic insulation is finally added.
The energy, which introduces crimping copper lug 12, to be made by red copper, and the electrode wires of external introducing are pressed in one end, in addition
The horn that one end introduces copper ring electrode 02 or cathode introducing copper ring electrode 07 with anode is pressed by nut.
The introducing electrode intermediate insulation 10 is two panels boron nitride ceramics slot, is sleeved on cathode and introduces copper ring electrode 07 or sun
Excessive insulating effect is played on the horn of pole introducing copper ring electrode 02, two panels introduces electrode intermediate insulation and is bonded in by ceramic glue
Together.
The ceramic insulation box 13 is made by boron nitride ceramics, is symmetrically spliced by two panels, per a piece of side
Square groove is opened, adjacent side open semicircle slot thus can introduce copper ring electrode 07 in cathode or anode introduces copper ring electrode
02 horn and energy plays excessive insulating effect between introducing crimping copper nose 12, and two panels ceramic insulation box is bonded in by ceramic glue
Together.
Examples detailed above is illustrative, is not limitation property, other variations belong to protection domain.
Claims (8)
1. a kind of arc plasma source of efficient stable, it is characterised in that：Including anode, anode copper ring electrode, inner ceramic
Cylinder, external ceramic cylinder, cathode, tough cathode ring electrode, molybdenum air injection pipe, cathodic ceramic lid, introduces among electrode absolutely intermediate ceramic cylinder
Edge, ceramic washer, energy introduce crimping copper nose, ceramic insulation box, anode ceramic cap and molybdenum washer, cathode and the coaxial dress of anode
Match, with the alternately folded filling of ceramic washer and molybdenum washer between cathode and anode, inner ceramic jacket casing is in bead outward, inner ceramic
Cylinder both ends are respectively embedded into the groove of cathode and anode, put on intermediate ceramic cylinder outside inner ceramic cylinder again, and the two of intermediate ceramic cylinder
End connects with the internal end surface of cathode and anode, finally, is provided with the external ceramic jacket casing of pilot hole outside intermediate ceramic cylinder, external
The both ends of ceramic cylinder are concordant with the outer end face of cathode and anode respectively, have the cathodic ceramic lid of pilot hole to be laid in the outer end of cathode
Face is simultaneously coaxial with cathode, has the anode ceramic cap of pilot hole to be laid in anode outer end face and, adjusting cathodic ceramic coaxial with anode
Lid and anode ceramic cap keep their pilot hole coaxial with the pilot hole of external ceramic cylinder, and entire plasma is fixed using lead screw
Body source.
2. arc plasma source according to claim 1, it is characterised in that：Above-mentioned anode copper ring electrode is an internal diameter
12 countersunk head threaded holes are uniformly opened in the copper ring of 70mm outer diameters 90mm, circle ring center position, and there are two symmetrical in the outside of ring
Horn.
3. arc plasma source according to claim 1, it is characterised in that：Above-mentioned anode is made by metal molybdenum, is one
The U-shaped structure of a cylinder, outer end face are opened there are one flaring exit, and anode outer end face also opens that there are one internal diameter 70mm outer diameters
90mm, the annular groove of thickness 3mm are uniformly distributed 12 threaded holes in slot middle circle, and anode copper ring electrode just assembles this
On a annular groove.
4. arc plasma source according to claim 1, it is characterised in that：Above-mentioned anode copper ring electrode is an internal diameter
12 countersunk head threaded holes are uniformly opened in the copper ring of 70mm outer diameters 90mm, circle ring center position, and there are one horns in the outside of ring.
5. arc plasma source according to claim 1, it is characterised in that：Above-mentioned cathode has metal molybdenum to make, in
Portion's cylinder opens horn mouth, opened between interior cylinder and outside cylinder there are one with the thick consistent fixed notch of inner ceramic barrel, and
An injecting hole coaxial with cathode is opened among entire cathode, is also opened there are one internal diameter 70mm outer diameter 90mm in cathode outer end face,
The annular groove of thickness 3mm, 12 threaded holes are uniformly distributed in slot middle circle, and tough cathode ring electrode just assembles this annular
On slot.
6. arc plasma source according to claim 1, it is characterised in that：Crimping copper lug is that one end is provided with diameter
The hole of 8mm depths 15mm, other end are the studs of a M8.
7. arc plasma source according to claim 1, it is characterised in that：Tough cathode ring electrode and anode copper ring electrode
Horn all open there are one 8mm through-holes, crimping copper lug is connected by this hole with copper ring electrode, external energy introducing use
In generation plasma.
8. arc plasma source according to claim 1, it is characterised in that：Above-mentioned molybdenum air injection pipe passes through screw thread and cathode
Injecting hole is connected, and other side is connected with the air injection pipe of external isolation material, and is connected with gas injection stop valve, in a pulsed mode
As received basis gas is injected ionization channels.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721855171.8U CN207820298U (en) | 2017-12-27 | 2017-12-27 | A kind of arc plasma source of efficient stable |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721855171.8U CN207820298U (en) | 2017-12-27 | 2017-12-27 | A kind of arc plasma source of efficient stable |
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| CN207820298U true CN207820298U (en) | 2018-09-04 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107995767A (en) * | 2017-12-27 | 2018-05-04 | 中国科学技术大学 | A kind of arc plasma source of efficient stable |
| CN109951945A (en) * | 2019-03-14 | 2019-06-28 | 中国科学院合肥物质科学研究院 | A kind of platypelloid type large-area high-density DC arc discharge plasma source |
-
2017
- 2017-12-27 CN CN201721855171.8U patent/CN207820298U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107995767A (en) * | 2017-12-27 | 2018-05-04 | 中国科学技术大学 | A kind of arc plasma source of efficient stable |
| CN109951945A (en) * | 2019-03-14 | 2019-06-28 | 中国科学院合肥物质科学研究院 | A kind of platypelloid type large-area high-density DC arc discharge plasma source |
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