CN207788736U - Substrate fixture and substrate bearing device - Google Patents
Substrate fixture and substrate bearing device Download PDFInfo
- Publication number
- CN207788736U CN207788736U CN201820006587.0U CN201820006587U CN207788736U CN 207788736 U CN207788736 U CN 207788736U CN 201820006587 U CN201820006587 U CN 201820006587U CN 207788736 U CN207788736 U CN 207788736U
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- Prior art keywords
- clamping part
- fluid
- chamber
- pipeline
- substrate
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- 239000000758 substrate Substances 0.000 title claims abstract description 53
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000012530 fluid Substances 0.000 claims description 41
- 230000005540 biological transmission Effects 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 238000013467 fragmentation Methods 0.000 abstract description 15
- 238000006062 fragmentation reaction Methods 0.000 abstract description 15
- 238000000034 method Methods 0.000 abstract description 6
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 229920003266 Leaf® Polymers 0.000 description 17
- 239000011521 glass Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- 206010044565 Tremor Diseases 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model is related to a kind of substrate fixture, including pedestal and supporting rod, the middle part of the supporting rod is articulated in by articulated section on the pedestal, and one end of the supporting rod is provided with the first clamping part, and the other end of the supporting rod is provided with drive connection portion；It is provided with the second clamping part corresponding with first clamping part on the pedestal, the pressure-driven structure being sequentially connected with the drive connection portion is provided on the pedestal；Wherein, under the control of the pressure-driven structure, the supporting rod is swung around the articulated section, so that first clamping part is moved to the direction closer or far from second clamping part.The utility model has the beneficial effects that：Using lever-type method of clamping, and using pressure-actuated mode control first clamping part for substrate to be clamped and second clamping part closer or far from, the stability of the clamping force of clamping substrate is improved, service life is long, effectively reduces fragmentation risk.
Description
Technical field
The utility model is related to show production technical field more particularly to a kind of substrate fixture and base plate carrying dress
It sets.
Background technology
Glass substrate will take piece, lacing film and intracavitary plated film during Sputter (spraying plating) by Robot (robot)
Etc. processes, the carrying of glass substrate be to be clamped in the Spring (spring leaf) of frame perimeter by frame and being arranged, by
The larger and very thin thickness in glass substrate, it is easy to fragmentation occur, significant proportion is accounted for Spring (spring leaf) relevant fragmentation.
Glass substrate is clamped using Spring at present, is primarily present problems with：
1) problem on deformation：During use, spring leaf is easy hair into deformation, generates intermediate the problems such as tilting, is crooked, is easy
Cause fragmentation；
2) elastic problem：When thimble is supported substrate, process be easy to cause spring leaf flexibility missing, in transmit process
In, glass substrate is easy to shake to be occurred friction or jumps out Spring to cause fragmentation with spring leaf；
3) structure problem：There are spring leafs contacted with glass substrate line even point contact the case where, be easy to happen stress collection
Middle generation fragmentation；Due to technological problems, had a certain difference between spring leaf individual, the spring leaf of significant proportion it is partially long or
It is partially short, it cannot be guaranteed that homogeneity；
4) cost problem：The service life of spring leaf, each bearing frame needed 32 spring leafs, daily life at 1000 times or so
Need frequent maintenance, maintenance cost huge in production；
5) other problems：Frequently replace spring leaf, be easy to happen facing damage, broken screw the problems such as, waste of manpower at
This, since transport trolley is higher, there are greater risks for operation.
Utility model content
In order to solve the above-mentioned technical problem, a kind of substrate fixture of the utility model offer and substrate bearing device, solve base
Plate is easy the problem of fragmentation.
In order to achieve the above object, the technical solution adopted in the utility model is：A kind of substrate fixture, including pedestal and folder
Bar is held,
The middle part of the supporting rod is articulated in by articulated section on the pedestal, and one end of the supporting rod is provided with first
The other end of clamping part, the supporting rod is provided with drive connection portion；
The second clamping part corresponding with first clamping part is provided on the pedestal, be provided on the pedestal with
The pressure-driven structure that the drive connection portion is sequentially connected；
Wherein, under the control of the pressure-driven structure, the supporting rod is swung around the articulated section, so that described
First clamping part is moved to the direction closer or far from second clamping part.
Further, the pressure-driven structure includes：
It is used to provide power the pressure source in source；
The fluid-powered cylinder being connect with the pressure source by fluid circuit, the fluid-powered cylinder with it is described
Drive connection portion connects；
And it is set to the control switch module on the fluid circuit, for controlling in the fluid-powered cylinder
Fluid flows to, so that first clamping part is moved to the direction closer or far from second clamping part.
Further,
The fluid-powered cylinder includes first chamber and second chamber, and the control switch module includes commutation electromagnetism
Valve, the fluid circuit include the first pipeline being connected between the first chamber and the reversing solenoid valve and are connected to
The second pipeline between the second chamber and the reversing solenoid valve；
The reversing solenoid valve has first state and the second state；
In first state, the pressure source is connected the reversing solenoid valve by first pipeline and the first chamber
Logical, the fluid that the pressure source is provided enters the first chamber, so that first clamping part is pressed from both sides to close to described second
Hold the direction movement in portion；
In the second state, the pressure source is connected the reversing solenoid valve by second pipeline and the second chamber
Logical, the fluid that the pressure source is provided enters the second chamber, so that first clamping part is pressed from both sides to far from described second
Hold the direction movement in portion.
Further, the control switch module includes being set on first pipeline and/or second pipeline
Flow control valve, for controlling the flow into the fluid of the first chamber.
Further, the control switch module includes the check valve being set on second pipeline.
Further, the control switch module further includes being set between the pressure source and the reversing solenoid valve
Overflow valve on third pipeline, for controlling the fluid pressure value on the third pipeline.
Further, further include elastic component, one end of the elastic component is fixed on the pedestal, the elastic component it is another
One end is fixed on the supporting rod, and between the articulated section and first clamping part.
Further, it is provided with resilient snubber on first clamping part.
Further, the resilient snubber is rubber sleeve, and the rubber sleeve is sheathed on the end of first clamping part.
The utility model also provides a kind of substrate bearing device, including above-mentioned substrate fixture.
The utility model has the beneficial effects that：It is controlled using lever-type method of clamping, and using pressure-actuated mode
First clamping part and second clamping part for substrate to be clamped closer or far from improving the clamping force of clamping substrate
Stability, service life is long, effectively reduces fragmentation risk.
Description of the drawings
Fig. 1 shows substrate fixture structural schematic diagrams in the utility model embodiment；
Fig. 2 indicates pressure-driven control principle schematic diagram one in the utility model embodiment；
Fig. 3 indicates pressure-driven control principle schematic diagram two in the utility model embodiment.
Specific implementation mode
The feature and principle of the utility model are described in detail below in conjunction with attached drawing, illustrated embodiment is only used for explaining
The utility model not limits the scope of protection of the utility model with this.
As shown in Figure 1, the present embodiment provides a kind of substrate fixture, including pedestal 1 and supporting rod 2,
The middle part of the supporting rod 2 is articulated in by articulated section 3 on the pedestal 1, and one end of the supporting rod 2 is provided with
The other end of first clamping part 6, the supporting rod 2 is provided with drive connection portion；
It is provided with second clamping part 7 corresponding with first clamping part 6 on the pedestal 1, is arranged on the pedestal 1
There is the pressure-driven structure being sequentially connected with the drive connection portion；
Wherein, under the control of the pressure-driven structure, the supporting rod 2 is swung around the articulated section 3, so that institute
The first clamping part 6 is stated to the direction movement closer or far from second clamping part 7.
Compared with the existing technology in such a way that substrate is clamped in the spring leaf of sheet type, using lever-type in the present embodiment
Method of clamping, and first clamping part 6 for substrate to be clamped and second clamping part 7 are controlled by pressure-driven
Closer or far from overcoming and be easy to change using spring leaf clamping substrate elasticity, the unstable problem of clamping force effectively reduces fragmentation
Risk.
The specific constructive form of the pressure-driven structure can there are many, as long as realize controlled in a manner of pressure-actuated
The movement of first clamping part 6, in the present embodiment, the pressure-driven structure includes：
It is used to provide power the pressure source 8 in source；
The fluid-powered cylinder 4 being connect with the pressure source 8 by fluid circuit, the fluid-powered cylinder 4 with
The drive connection portion connection；
And it is set to the control switch module on the fluid circuit, for controlling in the fluid-powered cylinder 4
Fluid flows to, so that first clamping part 6 is moved to the direction closer or far from second clamping part 7.
The pressure source 8 can be gas or liquid, the corresponding fluid-powered cylinder 4 can be cylinder or
Hydraulic cylinder.
Preferably, the fluid-powered cylinder 4 includes first chamber 41 and second chamber 42, the control switch module
Including reversing solenoid valve 10, the fluid circuit includes being connected between the first chamber 41 and the reversing solenoid valve 10
First pipeline and the second pipeline being connected between the second chamber 42 and the reversing solenoid valve 10；The commutation electromagnetism
Valve 10 has first state and the second state；
The reversing solenoid valve 10 pressure source 8 and passes through first pipeline and described first in first state
Chamber 41 be connected to, the pressure source 8 provide fluid enter the first chamber 41 so that first clamping part 6 to
Close to the movement of the direction of second clamping part 7；
For the reversing solenoid valve 10 in the second state, the pressure source 8 passes through the second pipeline and the second chamber 42
Connection, the fluid that the pressure source 8 provides enter the second chamber 42, so that first clamping part 6 is to far from described the
It moves in the direction of two clamping parts 7.
In the present embodiment, first chamber 41 and second chamber 42 are divided by piston inside the fluid-powered cylinder 4,
The reversing solenoid valve 10 includes the first valve port being connected to the pressure source 8, by first pipeline and first chamber
The second valve port that room 41 is connected to, the third valve port that is connected to the second chamber 42 by second pipeline and for unloading
4th valve port of pressure；
As shown in Fig. 2, dotted arrow indicates that fluid flow direction, the reversing solenoid valve 10 are described in first state in figure
First valve port is communicated with second valve port, and the third valve port and the 4th valve port communicate, and the pressure source 8 passes through described
First pipeline is connected to the first chamber 41, and the fluid that the pressure source 8 provides enters the first chamber 41, to push
It states piston to move to the second chamber 42, the fluid in the second chamber 42 enters the release by second pipeline
Slot 9, the drive link being connected on the piston is protruding and the drive connection portion is pushed to move, and the supporting rod 2 is around institute
The swing of articulated section 3 is stated, so that first clamping part 6 is moved to close to the direction of second clamping part 7 to clamp base
Plate；
As shown in figure 3, dotted arrow indicates that fluid flow direction, the reversing solenoid valve 10 are described in the second state in figure
First valve port and the third valve port communicate, and second valve port and the 4th valve port communicate, and the pressure source 8 passes through described
Second pipeline is connected to the second chamber 42, and the fluid that the pressure source 8 provides enters the stream by second pipeline
The second chamber 42 of body pressure-driven cylinder 4, piston are moved to the first chamber 41, and the fluid in the first chamber 41 passes through
First pipeline enters the pressure relief groove 9, the drive link recycling being connected on the piston, 2 backswing of the supporting rod,
So that first clamping part 6 is moved to the direction far from second clamping part 7.
First clamping part 6 is moved to the direction far from second clamping part 7, in order to the taking-up of substrate, fluid
The setting of circuit and fluid-powered cylinder 4 improves clamping stability when clamping substrate, and overcomes using spring leaf
The problem of being easy elasticity loss, effectively reduces fragmentation risk.
In the present embodiment, the control switch module includes being set on first pipeline and/or second pipeline
Flow control valve 12, the flow of the fluid for control the entrance first chamber 41.The setting of flow control valve 12 controls
The flow velocity of first pipeline and/or the fluid in second pipeline, to control first clamping part 6 to close to described
The speed of the rectangular movement of second clamping part 7 so that in clamping substrate, slowly clamp to prevent fragmentation.
In the present embodiment, the reversing solenoid valve 10 is not limited thereto using 3-position 4-way reversing solenoid valve 10.
In the present embodiment, the control switch module includes the check valve 13 being set on second pipeline.Check valve
13 setting can make fluid rapidly enter the second chamber 42, so that the supporting rod 2 can quickly be swung, with
So that first clamping part 6 and 7 quick separating of the second clamping part, to improve production efficiency.
The setting of check valve 13 makes flowing to for the fluid for passing through second pipeline single, only from commutation electricity
The third valve port of magnet valve 10 flows to the second chamber 42, and the setting of check valve 13 avoids the reversing solenoid valve 10 and exists
When the first state, fluid flows rapidly into the fluid-powered cylinder 4 by second pipeline, and prevents institute
Fluid reflux of the reversing solenoid valve 10 in the first state is stated, ensures the steady of the pressure in the fluid-powered cylinder 4
It is qualitative, to ensure the stability of the clamping force between first clamping part 6 and second clamping part 7.
Second pipeline can be that single pipeline is arranged, i.e., the described flow control valve and the check valve can be arranged
In same pipeline；Or the flow control valve is set on first pipeline, the check valve is set to second pipe
On the road；Or second pipeline includes the first sub- pipeline and the second sub- pipeline, as shown in Figures 2 and 3, the check valve setting
In on the described first sub- pipeline, the flow control valve is set on the described second sub- pipeline.
When the reversing solenoid valve 10 is in the first state, by the control of the flow control valve 12, institute is realized
The slow movement for stating the piston in fluid-powered cylinder 4 is clamped to control first clamping part 6 to close to described second
The direction in portion 7 is slowly moved, and due to the setting of check valve 13, the reversing solenoid valve 10, can not in second state
The aperture of the flow control valve 12 must be adjusted, you can realize quickly returning for the piston in the fluid-powered cylinder 4
Position, that is, realize the quick separating of first clamping part 6 and second clamping part 7, save the time, avoid frequently adjusting institute
Flow control valve 12 is stated to reduce the service life of the flow control valve 12.
In the present embodiment, the control switch module further includes being set to the pressure source 8 and the reversing solenoid valve 10
Between third pipeline on overflow valve 11, for controlling the fluid pressure value on the third pipeline.
As shown in Figures 2 and 3, it is also set up on the third pipeline between the pressure source 8 and the reversing solenoid valve 10
There are overflow valve 11, the setting of the overflow valve 11 that can control the fluid pressure value on the third pipeline, described in control
The size of clamping force between first clamping part 6 and second clamping part 7.
In the present embodiment, the pressure relief groove 9 can be connected to the pressure source 8 to play the role of recycling.
Optionally, the substrate fixture further includes elastic component 5, and one end of the elastic component 5 is fixed on the pedestal 1,
The other end of the elastic component 5 is fixed on the supporting rod 2, and positioned at the articulated section 3 and first clamping part 6 it
Between.
In the present embodiment, the elastic component 5 is spring, plays the role of damping, prevents the movement of first clamping part 6
Excessive velocities reduce impact of first clamping part 6 to substrate.
In the present embodiment, it is provided with resilient snubber on first clamping part 6, cushioning effect is played, reduces substrate
Fragmentation risk.
Optionally, the resilient snubber is rubber sleeve, and the rubber sleeve is sheathed on the end of first clamping part 6.
The setting of rubber sleeve, plays a protective role to substrate, and increases connecing between first clamping part 6 and substrate
Contacting surface is accumulated, it is ensured that is contacted for face between first clamping part 6 and substrate, is effectively improved due to stress concentration and causes fragmentation
Problem.
The utility model also provides a kind of substrate bearing device, including above-mentioned substrate fixture.
In compared with the existing technology by the way of spring leaf clamping substrate, the substrate fixture in the present embodiment has following
Advantage：
Using fluid circuit, pressure control and leverage, the setting by controlling switch module, which controls in fluid zone, drives
The flow velocity of the pressure and fluid of dynamic cylinder, achievees the effect that the clamping force of substrate fixture is controllable；
Due to the presence that fluid circuit, pressure control, the elasticity for overcoming existing spring leaf is easy change, clamping force shakiness
Fixed disadvantage；
Increase elasticity, multi-surface contact rubber sleeve on first clamping part 6, makes first clamping part 6 and base
Contact between plate contacts for face, is effectively improved problem of stress concentration.
Substrate fixture in the present embodiment breaks away from the flake structure of existing spring leaf, has fully considered spring in the prior art
There may be fragmentation risk points for piece, can effectively drop reduction fragmentation.
The above is the utility model preferred embodiment, it should be noted that for the utility model ordinary skill people
Member for, under the premise of not departing from principle described in the utility model, several improvements and modifications can also be made, these improve and
Retouching also should be regarded as scope of protection of the utility model.
Claims (10)
1. a kind of substrate fixture, which is characterized in that including pedestal and supporting rod,
The middle part of the supporting rod is articulated in by articulated section on the pedestal, and one end of the supporting rod is provided with the first clamping
The other end in portion, the supporting rod is provided with drive connection portion；
The second clamping part corresponding with first clamping part is provided on the pedestal, be provided on the pedestal with it is described
The pressure-driven structure that drive connection portion is sequentially connected；
Wherein, under the control of the pressure-driven structure, the supporting rod is swung around the articulated section, so that described first
Clamping part is moved to the direction closer or far from second clamping part.
2. substrate fixture according to claim 1, which is characterized in that the pressure-driven structure includes：
It is used to provide power the pressure source in source；
The fluid-powered cylinder being connect with the pressure source by fluid circuit, the fluid-powered cylinder and the transmission
Interconnecting piece connects；
And it is set to the control switch module on the fluid circuit, for controlling the fluid in the fluid-powered cylinder
Flow direction, so that first clamping part is moved to the direction closer or far from second clamping part.
3. substrate fixture according to claim 2, which is characterized in that the fluid-powered cylinder include first chamber and
Second chamber, the control switch module includes reversing solenoid valve, the fluid circuit include be connected to the first chamber and
The first pipeline between the reversing solenoid valve and the second pipe being connected between the second chamber and the reversing solenoid valve
Road；
The reversing solenoid valve has first state and the second state；
In first state, the pressure source is connected to by first pipeline with the first chamber reversing solenoid valve,
The fluid that the pressure source is provided enters the first chamber, so that first clamping part is to close to second clamping part
Direction movement；
In the second state, the pressure source is connected to by second pipeline with the second chamber reversing solenoid valve,
The fluid that the pressure source is provided enters the second chamber, so that first clamping part is to far from second clamping part
Direction movement.
4. substrate fixture according to claim 3, which is characterized in that the control switch module includes being set to described the
Flow control valve on one pipeline and/or second pipeline, for controlling the flow into the fluid of the first chamber.
5. substrate fixture according to claim 3, which is characterized in that the control switch module includes being set to described the
Check valve on two pipelines.
6. substrate fixture according to claim 3, which is characterized in that the control switch module further include be set to it is described
The overflow valve on third pipeline between pressure source and the reversing solenoid valve, for controlling the fluid pressure on the third pipeline
Force value.
7. substrate fixture according to claim 3, which is characterized in that further include elastic component, one end of the elastic component is solid
Due on the pedestal, the other end of the elastic component is fixed on the supporting rod, and positioned at the articulated section and described the
Between one clamping part.
8. substrate fixture according to claim 3, which is characterized in that be provided with elastic buffer on first clamping part
Part.
9. substrate fixture according to claim 8, which is characterized in that the resilient snubber is rubber sleeve, the rubber
It is sheathed on the end of first clamping part.
10. a kind of substrate bearing device, which is characterized in that including claim 1-9 any one of them substrate fixtures.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820006587.0U CN207788736U (en) | 2018-01-03 | 2018-01-03 | Substrate fixture and substrate bearing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820006587.0U CN207788736U (en) | 2018-01-03 | 2018-01-03 | Substrate fixture and substrate bearing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207788736U true CN207788736U (en) | 2018-08-31 |
Family
ID=63278265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820006587.0U Expired - Fee Related CN207788736U (en) | 2018-01-03 | 2018-01-03 | Substrate fixture and substrate bearing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207788736U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109303632A (en) * | 2018-11-08 | 2019-02-05 | 京东方科技集团股份有限公司 | Fixture |
-
2018
- 2018-01-03 CN CN201820006587.0U patent/CN207788736U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109303632A (en) * | 2018-11-08 | 2019-02-05 | 京东方科技集团股份有限公司 | Fixture |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180831 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |