CN207781546U - A kind of substrate board treatment - Google Patents

Abstract

The utility model is related to a kind of substrate board treatments comprising：Buffer is accommodated, is accommodated to the liquid supplied by the surface of processing substrate；Liquid shifting pump, it is in control the supply of liquid by gravity by matching from the buffer extended first, to supply liquid, and positioned at the downside of the receiving buffer, to provide a kind of following substrate board treatment, liquid is supplied from receiving buffer to liquid shifting pump using the potential energy of liquid, accordingly, it prevents from being coated with the state for generating bubble in liquid due to being pressurizeed with gas, to improve the coating quality of substrate.

Description

A kind of substrate board treatment

Technical field

The utility model is related to a kind of substrate board treatments, are related to a kind of substrate board treatment in further detail, in order to Liquid is coated by processing substrate surface, the content for the bubble for flowing into liquid is reduced during supplying liquid.

Background technology

In the technique of the flat-panel monitors such as manufacture LCD, applied with by the surface by processing substrate of the making such as glass Cover the coating processes of the liquids such as resist.It is gradually got higher by the viscosity of the liquid on the surface of processing substrate in particular, being coated on recently, The influence that the generation of bubble generates liquid coating quality accordingly becomes larger.

It is small in the prior art in the size of flat-panel monitor, use following spin coating method：By processing substrate Central portion coating liquid while so that rotated by processing substrate, accordingly, by processing substrate surface coat liquid.

But as the size of display picture is increasingly becoming enlargement, rotary coating mode is hardly used, and is used Such as the painting method of under type：So that with by the liquid nozzle of the slit form of the corresponding length of the width of processing substrate It is made a relative move with by processing substrate, while liquid is coated from liquid nozzle to by the surface of processing substrate.

In other words, as shown in Figure 1, substrate board treatment 8 includes：Platform 60, supporting substrate G；Liquid nozzle 70, It is formed with long width as the width of substrate G, and is carried out along the direction indicated with drawing reference numeral 70d and substrate G Relative movement, to coat liquid 99 on the surface of substrate G with certain thickness；Chemicals feeder 80, to liquid nozzle 70 Supply liquid 99.

For thus configured substrate board treatment 8, while substrate G and liquid nozzle 70 are made a relative move After the liquid 99 of amount used in the one-time process of the surface coating liquid 99 of substrate G is filled in liquid dispensing pump 1, pass through medicine Nozzle for liquid 70 coats liquid.More specifically, as shown in Figure 2 so that liquid 99 is filled from cylinder 90 to buffer 81, and opening is passed through It pumps filling-valve 83a and is incited somebody to action to the filling (not shown) of the chamber inside liquid dispensing pump 82 from buffer 81 by liquid supply pipe 83 After the liquid 99 for the amount to be used in a substrate coating processes, open nozzle open and close valve 83b, in substrate G and liquid While nozzle 20 makes a relative move 70d, liquid 99 is coated on the surface of substrate G.

At this point, as shown in figure 3, in order to will be slow to being filled in after drawing reference numeral 99x1 supply by supply pipe 90L from cylinder 90 The supply of liquid 99 of device 81 is rushed to liquid dispensing pump 82, in the nitrogen of the upside of buffer 81 pressurization high pressure, by gas pressurized Liquid is moved to liquid dispensing pump 1 by liquid supply pipe 83.

But during being pressurizeed to the liquid 99 for being filled in buffer 81 with gas, due to fixed according to Henry The amount of the gas of rule flows into liquid 99, therefore leads to following problem：It is transferred in the liquid 99 of liquid dispensing pump 1 and contains gas 99a is steeped, while reducing the coating quality of liquid.In particular, the viscosity with liquid 99 is gradually got higher, the bubble contained in liquid 99 99a is more reduced there is an urgent need to one kind and is being coated to being generated bigger harmful effect by the coating quality of processing substrate In by the scheme of the content of the bubble contained in the liquid 99 of processing substrate G.

Utility model content

It is as described above in order to solve the problems, such as, the purpose of this utility model is that, medicine is being coated by the surface of processing substrate In the technique of liquid, inhibit to cause coating quality to decline due to containing bladdery liquid and being coated on by processing substrate.

Accordingly, it is intended that more reliably improving by the liquid coating quality on the surface of processing substrate, and Improve the efficiency of technique.

In order to realize that purpose as described above, the utility model provide a kind of substrate board treatment, substrate board treatment exists Liquid is coated by the surface of processing substrate, the substrate board treatment is characterised by comprising：Accommodate buffer, accommodate to The liquid that the surface by processing substrate supplies；Liquid shifting pump, by being piped from the buffer extended first To the supply of liquid, to supply liquid, and it is located at height identical with the receiving buffer or downside；Liquid medicine jet The liquid supplied from the liquid shifting pump is coated on described by processing substrate by mouth.

As described above, in the utility model, liquid shifting pump is set in the downside of receiving buffer, so as to utilize filling It supplies to liquid shifting pump, therefore can solve existing in theprior art as follows in the potential energy of the liquid of receiving buffer Problem：During supply to liquid shifting pump, bubble is contained in liquid by gas-pressurized, to reduce coating matter Amount.

In other words, in the utility model, the liquid is transferred to by the first piping from the receiving buffer and is transferred The liquid of pump can naturally decline and transferred because of gravity.

At this point, first piping extends to the liquid shifting pump from the bottom surface of the receiving buffer, in medicine During liquid is transferred to liquid shifting pump by the first piping, gravity can be passed through from downside by being filled in the liquid of receiving buffer Swimmingly it is transferred to liquid shifting pump.

At this point, in the receiving buffer, exhaust outlet can be formed in the upside of the receiving height of liquid.Accordingly, exist Be filled in receiving buffer liquid by first piping be transferred to liquid shifting pump during, receiving buffer in air In the case of the volume change in empty space, it is also possible that liquid is swimmingly transferred to liquid shifting pump.

In addition, other implementation forms according to the present utility model, instead of forming exhaust outlet in the upside of receiving buffer, Can to be transferred to amount as the amount of liquid shifting pump by the first piping with the liquid for being filled in receiving buffer, from cylinder to It accommodates buffer and supplies liquid, so that the volume in the empty space in receiving buffer keeps certain.

Here, if be configured to when receiving buffer in liquid begin through the first piping be transferred to liquid shifting pump it Afterwards, the case where supplementing liquid from cylinder to receiving buffer, then liquid shifting pump not being transferred to by the first piping with liquid phase Than, it accommodates the empty space in buffer and keeps the state slightly expanded, while becoming the negative pressure state slightly lower than atmospheric pressure, Therefore it can get following advantageous effect：The gas that can be completely removed in receiving buffer is dissolved in medicine according to Henry's law The effect of liquid.

In addition, be additionally provided with bubble detecting sensor in first piping, bubble detecting sensor the liquid from During the receiving buffer is transferred to the liquid receiving portion, the content of bubble is measured, if passing through the gas Bubble detecting sensor is measured containing bubble more than defined content in the liquid being piped by described first, then described in closing First piping, therefore the liquid containing the above bubble of a reference value can be prevented to be coated on by processing substrate.

Here, the applicable pump form for variforms such as vane pump, centrifugal pump, linear pumps of the liquid shifting pump.This When, it is preferable that it being flowed into cut off gas in the technique of aspiration medicinal liquid, the liquid shifting pump is provided with liquid receiving portion, So as to inhibit bubble during pump pushes liquid to be dissolved in liquid, the pump is to flowing by first piping The liquid entered carries out physical compression and the pump of the mode of pushing.

For example, the liquid shifting pump may be configured as piston pump, piston pump includes：Cylinder, be formed with flow into port and Port is flowed out, and is formed with the liquid receiving portion, port is flowed into and is connected with first piping, quilt is discharged in outflow port The liquid of pushing；Piston is moved back and forth in the inside of the cylinder, while pressurized plane carries out physics to the liquid and pushes away It squeezes.

Here, the outflow end mouth is formed in the facing position of the pressurized plane moved back and forth with the piston It sets, to during will be transferred to the liquid of liquid receiving portion of liquid shifting pump and be supplied towards liquid nozzle, by piston The liquid of pressurization is expelled directly out by flowing out port, therefore during liquid is discharged from liquid shifting pump, can be inhibited Bubble is generated in liquid.

At this point, the pressurized plane of the piston is formed as shape identical with the opposite face of the cylinder, the cylinder Opposite face and the pressurized plane it is facing, during liquid is discharged from liquid receiving portion so that the vortex of liquid is minimum Change, and inhibits the generation of bubble caused by being vortexed by liquid.

Also, discharged institute after the first space and liquid in the cylinder that the piston moves back and forth flow into It states liquid receiving portion to be separated by the diaphragm seal of flexible material, for the diaphragm seal, a part is fixed on the work Plug, to move together with the reciprocating movement of the piston, the reciprocating movement with piston can be inhibited accordingly and in piston The liquid on periphery generates bubble.

Also, the diaphragm seal is fixed on the pressurized plane of the piston using countersink head screw, in diaphragm seal and piston Fixed structure in constituted in the form of the part that do not protrude, therefore can inhibit by liquid on the pressurized plane periphery of piston Bubble caused by vortex generates.

In addition, the port that flows into may be configured as the side positioned at the reciprocating movement channel of the piston.At this point, described In the state that piston is retreated in the form of not blocking the inflow port, it can play and supply liquid from the receiving buffer To the effect of the liquid receiving portion.Accordingly, in the state that liquid receiving portion is substantially ensured, liquid is moved from receiving buffer It send to liquid shifting pump, therefore liquid can be smoothly flowed therein from receiving buffer to liquid shifting pump.

In addition, other implementation forms according to the present utility model, the piston from block the state for flowing into port to It, can also be from the receiving buffer to the liquid receiving portion while not blocking the state for flowing into port and retreat mobile Supply liquid.Accordingly, apply weaker negative pressure to liquid receiving portion, the attraction to be generated due to gravity and negative pressure is made Liquid is transferred to liquid receiving portion from receiving buffer, and the transfer efficiency of liquid can be improved accordingly.

In addition, the liquid shifting pump can also directly be connected with liquid nozzle, it is, however, preferable that in the liquid Liquid dispensing pump is provided between shifting pump and the liquid nozzle, liquid dispensing pump is supplied the liquid using scheduled pressure To the extremely liquid nozzle.

Also, the liquid dispensing pump is located at the position close with the liquid nozzle in the upside of the liquid nozzle, Accordingly, critically the injection pressure of liquid can be adjusted using the plus-pressure controlled in liquid dispensing pump, simultaneously The emitted dose per unit time for the liquid that accurately the opposite surface by processing substrate is sprayed is controlled.

Accordingly, the liquid shifting pump positioned at the downside of receiving buffer is set to the downside of liquid dispensing pump, is moved from liquid The liquid that pump is discharged is sent to supply to liquid dispensing pump, while the transfer Jing Guo two steps is by medical liquid spraying and coated on by processing base The surface of plate.

Thus configured substrate board treatment further includes platform so that described to be positioned over platform, the medicine by processing substrate Nozzle for liquid is moved relative to described by processing substrate, while being applied from the liquid nozzle to the surface by processing substrate Cover liquid.

In addition, substrate board treatment according to the present utility model further includes：Floating platform makes described by processing substrate It suspends；Transfer member, transfers described by processing substrate on the floating platform, and the liquid nozzle can also be to suspend The surface by processing substrate of state transfer coat liquid.

Here, the floating platform using ultrasonic activation make it is described suspended by processing substrate, therefore with air spray Mode is compared, and the temperature for being handled substrate can be made to keep certain, it is hereby achieved that following advantage：Inhibit because by processing base The temperature difference of plate and the stain phenomenon of liquid generated.

As described above, in the utility model so that liquid shifting pump is located at the downside of receiving buffer, receiving Buffer is accommodated to the liquid supplied by the surface of processing substrate, and is supplied liquid from receiving buffer using the potential energy of liquid To liquid shifting pump, accordingly, following advantageous effects can be obtained：It prevents due to being pressurizeed using gas to be produced in liquid The state of anger bubble is coated, so that the coating quality of substrate improves.

In addition, in the utility model, it is provided with bubble detecting sensor between receiving buffer and liquid shifting pump, according to This, can obtain following effect：The liquid containing the above bubble of a reference value is prevented to be coated on by processing substrate, to prevent in advance It coats bad.

Also, in the utility model, moved with being transferred to liquid by the first piping with the liquid for being filled in receiving buffer The amount for sending the amount of pump the same supplies liquid from cylinder to receiving buffer, so that the body in the empty space in receiving buffer Product keeps certain, accordingly, can obtain following effect：Liquid can also be swimmingly transferred using the potential energy of liquid.

Moreover, in the utility model, the liquid in receiving buffer begins through the first piping and is transferred to liquid shifting After sending pump, liquid is supplemented from cylinder to receiving buffer, because liquid is not filled in receiving buffer, to be filled with gas The empty space of body keeps the negative pressure state slightly lower than atmospheric pressure that can obtain following advantageous effect accordingly：It can be complete Gas in removal receiving buffer is dissolved in the effect of liquid according to Henry's law.

Also, in the utility model, it is configured to piston pump, piston pump is included in the work that the inside of cylinder moves back and forth The outflow end mouth of liquid receiving portion, is formed in the facing position of the pressurized plane moved back and forth with piston by plug, thus During liquid is discharged in liquid shifting pump, have the effect of inhibiting to generate bubble in liquid.

In addition, in the utility model, by the piston pressurization face of liquid shifting pump be shaped so as to and it is facing with it The identical shape of opposite face of cylinder, to during liquid is discharged from liquid receiving portion, it is also possible to obtain following advantage： So that the vortex of liquid minimizes, inhibit the generation of bubble caused by being vortexed by liquid.

In particular, in the utility model, liquid is supplied to liquid in the way of being pushed by physical compression power and is distributed Pump, therefore following advantageous effects can be obtained：It ensures and not only transfers the medium viscous of 100cp or more in the state of not generating bubble Liquid is spent, but also transfers the high viscosity liquid of 1000cp or more.

Accordingly, the utility model can get following effect：It can more reliably improve to be coated on by processing substrate Surface and the quality of liquid that supplies.

Description of the drawings

Fig. 1 is the stereogram for the composition for showing general substrate board treatment.

Fig. 2 is the skeleton diagram for showing the liquid supply of Fig. 1 and constituting.

Fig. 3 is the figure of the composition for the buffer for showing Fig. 2.

Fig. 4 is the stereogram of the composition for the substrate board treatment for showing one embodiment according to the present utility model.

Fig. 5 is the sectional view along the transversal V-V of Fig. 4.

Fig. 6 a and Fig. 6 b are the enlarged drawings of the part Fig. 4 " A ", are for illustrating that it is detailed that receiving buffer and base plate transfer pump The thin figure constituted and act on.

Specific implementation mode

Hereinafter, with reference to attached drawing, the substrate board treatment 100 of one embodiment according to the present utility model is carried out specifically It is bright.But when illustrating the utility model, in order to enable the main idea of the utility model understands, omit for well known function or What person was constituted illustrates.

Fig. 4 is the stereogram of the composition for the substrate board treatment for showing one embodiment according to the present utility model, and Fig. 5 is Along the sectional view of the transversal V-V of Fig. 4, Fig. 6 a and Fig. 6 b are the enlarged drawings of the part Fig. 4 " A ", are for illustrating that receiving is slow Rush the figure of device and base plate transfer pump constituted in detail.

As shown, the substrate board treatment 100 of one embodiment according to the present utility model includes：Floating platform 110, It is set on frame 2, by the ultrasonic activation generated by vibrator V suspending power 110p is generated；Transfer member 120, it is transferred by the suspending power 110p of floating platform 110 states by processing substrate G to suspend with clamping；Lifting Rack 130 can move as needed along track 132, in the state stopped in liquid coating processing technique；Liquid Nozzle 140 is fixed on the crosshead 135 of connection gantry 130, and to the state transfer with suspension by processing substrate Spray liquid in the surface of G；Liquid dispensing pump 150 is controlled by accurate pressure to supply liquid to liquid nozzle 140；Medicine Liquid shifting pump 160 supplies the liquid of ampoule to liquid dispensing pump 150；Buffer 170 is accommodated, is located at liquid and transfers The upside of pump 160, supply and the receiving of liquid 99 are obtained from cylinder 90, then the potential energy of liquid 99 are utilized to supply to liquid shifting pump 160 liquid receiving portion 160c.

For the floating platform 110, multiple vibration panel vibrations are made by vibrator V, are formed thereon simultaneously The suspending power 110p generated by ultrasonic activation.Other embodiment according to the present utility model, floating platform 110 are provided with more A air jet hole, to which suspending power 110p can also be generated by air jet forces.Accordingly, it is supplied in floating platform 110 The state to suspend by suspending power 110p is kept by processing substrate G.

For the transfer member 120, air bearing 120b is moved along transfer track 122 with the state of suspension, is moved It send track 122 along the arranged on both sides of floating platform 110, sucking pressure 120a is applied by the position of processing substrate G being placed with.By This, is fixed on the state of transfer member 120 and is moved together along the position of transfer member 120 by processing substrate G to adsorb.

The liquid nozzle 140 sprays liquid 99 during utilizing transfer member 120 by downside by processing substrate G, To be coated on liquid by the surface of processing substrate G.

For from the liquid that liquid nozzle 140 sprays, pressure should be evenly sprayed in entire jet port, therefore to medicine The liquid dispensing pump 150 that the injection pressure of liquid is adjusted is configured at the position close with 140 nozzle of liquid.Preferably, such as Fig. 5 institutes Show, liquid dispensing pump 150 is configured to close to the upside of crosshead 135, to accurately to 99x3 is discharged from liquid dispensing pump 150 The pressure of liquid be adjusted.

The receiving buffer 170 obtains the supply of liquid 99 by liquid supply pipe 71 from cylinder 90, and the keeping of cylinder 99 provides Coated weight liquid 99.As a result, as shown in Fig. 6 a and Fig. 6 b, the shape that liquid 99 is contained in receiving buffer 170 is remained State.

The of the liquid receiving portion 161c of liquid shifting pump 160 is formed with and extended in the bottom surface of receiving buffer 170 The outflow port 170a that one piping 72 is connected, thus when each time to carrying out liquid coating processing technique by processing substrate G, Liquid 99 passes through 72 supply of the first piping to liquid shifting pump 160.

Here, using compared with liquid shifting pump 160 positioned at upside receiving buffer 170 in liquid 99 potential energy come The liquid for being contained in receiving buffer 170 is supplied to liquid shifting pump 160.In other words, if open first is piped 72 Open and close valve 72a then passes through the liquid receiving portion 161c of 72 supply of the first piping to liquid shifting pump 160 due to gravity.At this point, The upside of receiving buffer 170 is formed with gas vent 170x, in order to prevent because of no filling liquid 99 in receiving buffer 170 Empty space 170c pressure oscillation and cause liquid 99 that can not be smoothly discharged 99x1 by gravity, could be formed with exhaust Mouth 170a.

In addition, if the amount for the liquid 99 being contained in receiving buffer 170 has variation, can make per unit time It is changed by the flow of the first piping 72 supply to liquid shifting pump 160, therefore, to be supplied extremely with by the first piping 72 The same amount of the amount of the liquid of liquid shifting pump 160, from cylinder 90 to the receiving supplement supply 99x0 liquids of buffer 170.

As described above, instead of liquid is transferred to liquid dispensing pump from receiving buffer 170 by being pressurizeed with gas 150 so that receiving buffer 170 is located at the upside of liquid shifting pump 160, and using potential energies such as gravity come to decline naturally Form is transferred to liquid shifting pump 160, and liquid 99 is transferred by physical compression using piston etc. in liquid shifting pump 160, according to This, can prevent from generating bubble in liquid 99, it is possible thereby to improve coated on by the liquid coating quality of processing substrate G.At this point, Preferably, receiving buffer 170 is located at the upside of liquid shifting pump 160, but is moved with liquid even if receiving buffer 170 is located at It send pump 160 identical height, and even if is contained in the position of the water table ratio liquid shifting pump 160 of the liquid of receiving buffer 170 Height is set, the potential energies such as gravity can also be utilized not have bladdery state to transfer highly viscous liquid to liquid shifting pump 160.

In addition, the blender being stirred to the liquid 99 being received can be provided in the inside of receiving buffer 170 177, and constituted in the form of stirring liquid 99.Accordingly, a part of ingredient in liquid will not precipitate, but protect on the whole Uniform Density Distribution is held, is coated on by processing substrate G so as to the liquid for the state that will be homogenized.

It, can also be in the upside of the receiving buffer 170 not row of being formed in addition, other implementation forms according to the present utility model Gas port 170a.At the same time, to be piped 72 to liquid shifting pump by first with the liquid 99 for being filled in receiving buffer 170 The same amount of amount of 160 transfers supplies 99x0 liquids 99 from cylinder 90 to receiving buffer 170, and in receiving buffer 170 Liquid 99 begin through the first piping 72 to liquid shifting pump 160 transfer and keep the volume for the space 170c having leisure slightly swollen It, can be from cylinder 90 to the receiving supplement supply 99x0 of buffer 170 liquids 99 in the state of swollen.

As a result, compared with when liquid is not transferred by the first piping 72 to liquid shifting pump 160, accommodate in buffer 170 Empty space 170c keep the state slightly expanded, therefore the pressure of empty space 170c remain it is slightly lower than atmospheric pressure Negative pressure state can prevent gas to be dissolved in the same of the liquid 99 for being housed in receiving buffer 170 according to Henry's law accordingly When, induce the bubble that contains in liquid 99 to be expelled to empty space 170c on the contrary, therefore can obtain from receiving buffer The advantageous effects of bubble are completely removed in 170 liquids 99 transferred to liquid shifting pump 160.

In addition, being provided with bubble detecting sensor 180 in the first piping 72, bubble detecting sensor 180 is to passing through gravity And the bubbles volume in the liquid 99 transferred is perceived, as defined in liquid 99 is included and is had more than in the case of the bubble of value, Open and close valve 72a, 73x are all closed, to prevent the liquid 99 containing a large amount of bubbles to be coated on by processing substrate G.

The liquid shifting pump 160, which is received, to be supplied in a manner of declining naturally from receiving buffer 170 to liquid receiving portion The liquid 99 of the bubble-free of 161c, to apply plus-pressure to liquid in a manner of the volume-diminished of liquid receiving portion 161c, into And liquid is supplied to liquid dispensing pump 150 with no state for generating bubble.

Other implementation forms according to the present utility model, although including passing through liquid shifting pump 160 directly to liquid nozzle The composition of 140 supply liquids, but the injection pressure being to be able to accurately to the jet port in liquid nozzle 140 is adjusted, Liquid dispensing pump 150 should be located at close to the position of liquid nozzle 140, therefore, preferred implementation form according to the present utility model, warp Cross two steps that liquid shifting pump 160 supplies liquid to the liquid dispensing pump 150 that accurately the injection pressure of liquid is adjusted Suddenly.Moreover, liquid shifting pump 160 is located at height identical with receiving buffer 170 or downside, therefore, it is difficult to transfer liquid Pump 160 is configured at close to the position of liquid nozzle 140.It, can be with as described above, according to the composition for supplying liquid by two steps It advantage is obtained that：Bubble removing is more definitely removed, while accurately the injection pressure in liquid nozzle 140 is adjusted, from And improve the coating quality of liquid.

Liquid shifting pump 160 can be applicable in the pump of variform well known to vane pump etc..One according to the present utility model Implementation form, liquid shifting pump 160 are formed as piston pump, and piston pump includes：Cylinder 161, is provided with inner space；Piston 162, it is moved back and forth inside cylinder 161；Diaphragm seal 163, for the volume of regulating liquid medicine receiving portion 161c, by piston The region that region and liquid 99 residing for 162 are received separates, while being formed by flexible material.

Here, piston 162 is formed by the slightly small section of the inner section than cylinder 161, and with piston rod 162b profits It is controlled with the form that operating device moves back and forth, is moved back and forth inside cylinder 161 accordingly.At this point, operation Device is formed by linear motor, so as to the reciprocating movement stroke of reliably round-trip defined length, and can be more accurate The emitted dose and injection for really keeping liquid are pressed.

Also, first in the cylinder 161 for being moved back and forth piston 162 by the diaphragm seal of flexible material 163 Space 162c and liquid are discharged 99x2 liquid receiving portion 161c after flowing into is separated, and the diaphragm seal 163 utilizes countersink head screw 162 a are fixed on piston 162, folding while to be moved together with the reciprocating movement of piston 162 and expansion.According to This, is contained in the medicinal liquid osmosis of liquid receiving portion 161c to gap between piston 162 and the inner wall of cylinder 161, at the same inhibit with It the reciprocating movement of piston 162 and generates bubble on piston periphery, and ensure leakproofness.

In addition, diaphragm seal 163 is fixed on the pressurized plane 162s of piston 162 using countersink head screw 162a, accordingly in diaphragm seal 163 and piston 162 fixed structure in formed in the form of the part that do not protrude, therefore can be carried out back and forth in piston 162 The liquid on the peripheries pressurized plane 162s is inhibited to generate the bubble caused by being vortexed during movement.

As shown in Fig. 6 a and Fig. 6 b, flow into port 161i be located at piston 162 move back and forth channel side, liquid 99 from It accommodates buffer 170 and is flowed into port 161i is flowed into, outflow port 161o is formed in facing with the pressurized plane 162s of piston 162 Face, liquid by from liquid receiving portion 161c to liquid dispensing pump 150 transfer in the form of be discharged 99x2.Accordingly, will be to medicine During the liquid of the liquid receiving portion 161c transfers of liquid shifting pump 160 is supplied to liquid dispensing pump 150, added by piston 162 The liquid of pressure is directly discharged 99x2 by flowing out port 161o, therefore can be discharged from liquid shifting pump 160 in liquid 99 Inhibit to generate bubble in liquid during 99x2.

Also, the pressurized plane 162s of the piston 162 of liquid shifting pump 160 is formed as the opposite face with cylinder 161 The identical shapes of 161s, the opposite face 161s and pressurized plane 162s of cylinder 161 are facing, thus in piston 162 from shown in Fig. 6 a Piston 162 fallback state to the forward travel state of piston 162 shown in Fig. 6 b move during, in the pressurization of piston 162 So that being minimized the phenomenon that liquid generates vortex between face 162s and the opposite face 161s of cylinder 161, in liquid from medicine During liquid receiving portion 161c is discharged 99x2 by outflow port 161o, inhibit the production of bubble caused by being vortexed by liquid It is raw.

In addition, supplying 99x1 to the liquid receiving portion 161c of liquid shifting pump 160 from receiving buffer 170 with regard to liquid 99 For process, as shown in Figure 6 a, piston 162 in order not to block be located at move back and forth channel side inflow port 161i and In the state of retrogressing, it can be worked in the form of supplying liquid from receiving buffer 170 to liquid receiving portion 161c.

As described above, in the state that the volume of liquid receiving portion 161c fully becomes larger, liquid 99 is from receiving buffer 170 99x1 is transferred to liquid shifting pump 160, accordingly, liquid swimmingly can flow into liquid shifting pump from receiving buffer.

Other implementation forms according to the present utility model, in piston 162 from the state for flowing into port 161i is blocked to not hiding The state of baffle inbound port 161i retreats in mobile action, can also be supplied from receiving buffer 170 to liquid receiving portion 161c To 99x1 liquids 99.In the case, with the volume expansion of liquid receiving portion 161c, the pressure of liquid receiving portion 161c becomes The slightly low negative pressure than atmospheric pressure, therefore, because liquid 99 moves 99x1's from receiving buffer 170 to liquid receiving portion 161c Reason power, thus the additional attraction generated by the negative pressure of the gravity and liquid receiving portion 161c that are generated by the potential energy of liquid 99 Power, so as to improve the transfer efficiency of liquid.In this embodiment, it has the following advantages that：Even accommodating 170, buffer In with liquid 160 identical height of shifting pump the case where, liquid can also be transferred.

As described above, for the liquid 99 of liquid receiving portion 161c for flowing into liquid shifting pump 160, such as Fig. 6 b institutes Show, the volume of liquid receiving portion 161c reduced by before piston 162, accordingly, can by with piston pressurization face 162s phases The outflow port 161o of the opposite face 161s faced supplies liquid to liquid dispensing pump 150 with the state of bubble-free.

The substrate board treatment 100 of the utility model formed according to this is configured to so that liquid shifting pump 160 is located at Height identical with receiving buffer 170 or downside, the receiving receiving of buffer 170 are coated on by the surface of processing substrate G Liquid 99 supplies liquid from receiving buffer 170 to liquid shifting pump 160 using the potential energy of liquid, and by liquid from liquid The supply of shifting pump 160 can obtain following effect accordingly to the liquid dispensing pump 150 being configured at close to the upside of liquid nozzle 140 Fruit：It can to minimize coated on the bubble generated by the liquid of processing substrate G, to improve the coating quality of substrate, For the highly viscous liquid of 1000cp or more, the generation that can also inhibit bubble while, is reliably transferred, and is accommodating Bubble detecting sensor is set between buffer and liquid shifting pump, prevents the liquid containing the above bubble of a reference value in advance accordingly It is bad to prevent to coat coated on by processing substrate, therefore can more reliably improve with coated on by processing substrate The quality of the liquid of the form supply on surface.

More than, the preferred embodiment of the utility model is illustrated in exemplary fashion, but the utility model Range is not limited only to specific embodiment as described above, and can be appropriate in the range of being recorded in patent claims Ground changes.In addition, have been illustrated jet port in the accompanying drawings and suction inlet is respectively formed one composition, however, it is possible to By the peripheral surface in cylinder by be separated by 90 degree, 120 degree, form more than two suction inlets in the form of the spacing of 180 degree.

Label declaration

100:Substrate board treatment 110:Floating platform

120:Transfer member 130:Gantry

140:Liquid nozzle 150:Liquid dispensing pump

160:Liquid shifting pump 161:Cylinder

162:Piston 162s:Pressurized plane

161s:Opposite face 170:Accommodate buffer

163:Seal member

Claims (23)

1. liquid is coated on by the surface of processing substrate, the feature of the substrate board treatment by a kind of substrate board treatment It is, including：

Buffer is accommodated, the liquid supplied to the surface by processing substrate is accommodated；

Liquid shifting pump is in control the supply of liquid by matching from the buffer extended first, to supply liquid, and And it is located at height identical with the receiving buffer or downside；

The liquid supplied from the liquid shifting pump is coated on described by processing substrate by liquid nozzle.

2. substrate board treatment according to claim 1, which is characterized in that

The liquid for being transferred to the liquid shifting pump by the first piping from the receiving buffer declines simultaneously naturally because of gravity It is mobile.

3. substrate board treatment according to claim 2, which is characterized in that

First piping extends to the liquid shifting pump from the bottom surface of the receiving buffer.

4. substrate board treatment according to claim 2, which is characterized in that

In the receiving buffer, exhaust outlet is formed in the upside of the receiving height of liquid.

5. substrate board treatment according to claim 2, which is characterized in that

To be transferred to as the amount of the liquid shifting pump by the first piping with the liquid for being contained in the receiving buffer Amount supplements supply liquid from cylinder to the receiving buffer.

6. substrate board treatment according to claim 5, which is characterized in that

After the liquid in the receiving buffer, which begins through first piping, is transferred to the liquid shifting pump, from cylinder Supply liquid is supplemented to the receiving buffer, does not have the pressure in the empty space for filling liquid to protect in the receiving buffer The state forced down than air is held, while liquid is transferred to the liquid shifting pump by first piping.

7. substrate board treatment according to claim 2, which is characterized in that

The liquid shifting pump is provided with liquid receiving portion, is added by carrying out physics to the liquid for being contained in the liquid receiving portion It presses and pushes to supply liquid.

8. substrate board treatment according to claim 7, which is characterized in that

It is additionally provided with bubble detecting sensor in first piping, bubble detecting sensor is slow from the receiving in the liquid It rushes during device is transferred to the liquid receiving portion, the content of bubble is measured,

If by the bubble detecting sensor measure in the liquid being piped by described first containing defined content with On bubble, then close it is described first piping.

9. substrate board treatment according to claim 7, which is characterized in that the liquid shifting pump is piston pump, including：

Cylinder is formed with and flows into port and outflow port, and is formed with the liquid receiving portion, flows into port and described the One piping is connected, and the liquid being pushed out is discharged in outflow port；

Piston is moved back and forth in the inside of the cylinder, while pressurized plane carries out physics pushing to the liquid.

10. substrate board treatment according to claim 9, which is characterized in that

The outflow end mouth is formed in the facing position of the pressurized plane moved with the piston reciprocating.

11. substrate board treatment according to claim 10, which is characterized in that

The pressurized plane of the piston be shape identical with the opposite face of the cylinder, the opposite face of the cylinder with it is described Pressurized plane is facing.

12. substrate board treatment according to claim 9, which is characterized in that

The first space in the cylinder for being moved the piston reciprocating using the diaphragm seal of flexible material and liquid are flowed into The discharged liquid receiving portion separates afterwards, and a part for the diaphragm seal is fixed on the piston, with the piston It moves back and forth and moves together.

13. substrate board treatment according to claim 12, which is characterized in that

The diaphragm seal is fixed on the pressurized plane of the piston using countersink head screw.

14. substrate board treatment according to claim 9, which is characterized in that

The side for flowing into port and being located at the reciprocating movement channel of the piston.

15. substrate board treatment according to claim 9, which is characterized in that

In the state that the piston does not block the inflow port, supplied from the receiving buffer to the liquid receiving portion To liquid.

16. substrate board treatment according to claim 9, which is characterized in that

The piston is from the state for flowing into port is blocked to not blocking the state movement for flowing into port, while from institute It states receiving buffer and supplies liquid to the liquid receiving portion.

17. substrate board treatment according to claim 1, which is characterized in that

The liquid is the high viscosity of 1000cp or more.

18. substrate board treatment according to claim 1, which is characterized in that

The receiving buffer is provided with blender, to be stirred to the liquid for being contained in the receiving buffer.

19. the substrate board treatment according to any one of claim 1 to 18, which is characterized in that

Liquid dispensing pump is provided between the liquid shifting pump and the liquid nozzle, liquid dispensing pump is with scheduled pressure The liquid is supplied to the liquid nozzle.

20. substrate board treatment according to claim 19, which is characterized in that

The liquid dispensing pump is located at the upside of the liquid nozzle, and the liquid shifting pump is located under the liquid dispensing pump Side.

21. substrate board treatment according to claim 20, which is characterized in that further include：

Platform, be used to place it is described by processing substrate,

The liquid nozzle is moved relative to described by processing substrate, while from the liquid nozzle to described by processing base The surface of plate coats liquid.

22. substrate board treatment according to claim 20, which is characterized in that further include：

Floating platform described to be suspended by processing substrate；

Transfer member, be used on the floating platform transfer it is described by processing substrate,

The liquid nozzle coats liquid to the surface by processing substrate transferred with the state of suspension.

23. substrate board treatment according to claim 22, which is characterized in that

The floating platform is by ultrasonic activation so that described suspended by processing substrate.