CN207780484U - Eliminating device, optical system and litho machine - Google Patents
Eliminating device, optical system and litho machine Download PDFInfo
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- CN207780484U CN207780484U CN201820165275.4U CN201820165275U CN207780484U CN 207780484 U CN207780484 U CN 207780484U CN 201820165275 U CN201820165275 U CN 201820165275U CN 207780484 U CN207780484 U CN 207780484U
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- light
- delustring
- eliminating device
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Abstract
The utility model discloses a kind of eliminating device, optical system and litho machines.The eliminating device includes delustring ontology；Delustring ontology includes light-receiving surface；The delustring groove of multiple array arrangements is provided on light-receiving surface, so that in delustring groove multiple reflections occur for the light for entering delustring groove.The utility model is by providing a kind of eliminating device including delustring ontology；And it includes light-receiving surface that delustring ontology, which is arranged,；The delustring groove of multiple array arrangements is provided on light-receiving surface, so that in delustring groove multiple reflections occur for the light entered in delustring groove, to promote the energy dissipation of stray light, and then achieve the purpose that eliminate stray light, solve the problems, such as that the existing method for eliminating stray light can not eliminate the stray light that light generates in optical system in communication process, reach and eliminated the stray light that light generates in optical system in communication process, has improved the purpose of the performance of optical system.
Description
Technical field
The utility model is related to a kind of optical technology more particularly to eliminating device, optical system and litho machines.
Background technology
With the development of science and technology, optical system all has the foreground of being widely applied in fields such as semiconductor, camera shooting or displays.
But stray light is the major obstacle for restricting Performance of Optical System at present, this is because stray light is to optical system
Harm it is very big, will drown out the very low image of contrast or details, directly reduce the image quality of optical system so that influencing
The resolution ratio of optical system.There are many kinds of the sources of stray light, for example optical system does not do shading appropriate, optical element quilt
Damage, light beam aperture mismatch and the difference and mechanical parts inner wall Darkening process of optical system itself are improper etc..
The mode for eliminating stray light in optical system at present includes mainly increasing the stray light diaphragm that disappears, and increases the stray light spiral shell that disappears
Line carries out unglazed nigrescence oxidation or spray lusterless paint etc. in lens barrel inner wall.But these modes can not eliminate light in optical system
The stray light generated in communication process in system, this makes the performance of optical system still bad.
Utility model content
A kind of eliminating device of the utility model offer, optical system and litho machine eliminate light in optical system to realize
The stray light generated in interior communication process improves the purpose of the performance of optical system.
In a first aspect, the utility model provides a kind of eliminating device, which includes delustring ontology；
The delustring ontology includes light-receiving surface；
The delustring groove of multiple array arrangements is provided on the light-receiving surface, so as to enter the light of the delustring groove
Multiple reflections occur in the delustring groove.
Further, multiple delustring grooves are in staggered arrangement.
Further, the shape of the delustring groove is cattle horn shape.
Further, the delustring groove includes vertex and bottom surface；
The bottom surface is located on the light-receiving surface；
The vertex is greater than or equal to 30 ° with the line of the geometric center of the bottom surface and the angle of the bottom surface, and small
In or equal to 60 °.
Further, the bottom surface is circular hole and aperture is 1mm, and the two neighboring bottom surface center of circular hole distance is
1.2mm。
Further, the eliminating device is optics support seat；
It is provided at least one fixed structure on the light-receiving surface of the delustring ontology, with stationary optics.
Further, the fixed structure includes that at least two optics being oppositely arranged lean on face, and lean on face in the optics
On be provided with a glue groove, by dispensing with the fixation optical device；
The delustring groove is set to the optics being oppositely arranged between face.
Further, the optical device includes beam splitter.
Second aspect, the utility model additionally provide a kind of optical system, which includes that the utility model provides
Any one described in eliminating device.
Further, the optical system is to Barebone.
Further, described includes multiple optical mirror slips and at least one eliminating device to Barebone；
The multiple optical mirror slip constitutes optical system for alignment, wherein at least one optical mirror slip includes stray light light extraction
Face；The optical mirror slip including the stray light light-emitting surface is fixed on the eliminating device, and the institute of the optical mirror slip
It is corresponding with the light-receiving surface of the eliminating device to state stray light light-emitting surface.
The third aspect, the utility model additionally provide a kind of litho machine, which includes provided by the utility model
It anticipates a kind of optical system.
The utility model is by providing a kind of eliminating device including delustring ontology；And be arranged the delustring ontology include by
Smooth surface；The delustring groove of multiple array arrangements is provided on the light-receiving surface, so as to enter the light in the delustring groove
Multiple reflections occur in the delustring groove, to promote the energy dissipation of stray light, and then achieve the purpose that eliminate stray light,
The method for solving existing elimination stray light can not eliminate the stray light that light generates in optical system in communication process
Problem has reached and has eliminated the stray light that light generates in optical system in communication process, improved the mesh of the performance of optical system
's.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram for eliminating device that the utility model embodiment provides；
Fig. 2 is the cross-sectional view of the A1-A2 along Fig. 1；
Fig. 3 is schematic diagram of the light in delustring groove internal reflection；
Fig. 4 is a kind of structural schematic diagram for delustring groove array arrangement that this experiment new embodiment provides；
Fig. 5 is the structural schematic diagram for another delustring groove array arrangement that this experiment new embodiment provides；
Fig. 6 is that optical device is installed on to the structural representation after a kind of eliminating device that the utility model embodiment provides
Figure；
Fig. 7-Fig. 8 is when carrying out extinction performance test to the eliminating device that the utility model embodiment provides using photometer
Structural schematic diagram；
Fig. 9 is the test for carrying out extinction performance test to the eliminating device that the utility model embodiment provides using photometer
As a result；
Figure 10 is to eliminate the method for stray light to the eliminating device that the utility model embodiment provides using photometer and show
The method that some eliminates stray light carries out structural schematic diagram when contrast test.
Specific implementation mode
The utility model is described in further detail with reference to the accompanying drawings and examples.It is understood that herein
Described specific embodiment is used only for explaining the utility model, rather than the restriction to the utility model.It further needs exist for
It is bright, it illustrates only for ease of description, in attached drawing and the relevant part of the utility model rather than entire infrastructure.
Fig. 1 is a kind of structural schematic diagram for eliminating device that the utility model embodiment provides.Fig. 2 is the A1-A2 along Fig. 1
Cross-sectional view.Referring to Fig. 1 and Fig. 2, which includes delustring ontology 10；The delustring ontology includes light-receiving surface
11；The delustring groove 12 of multiple array arrangements is provided on light-receiving surface 11, so as to enter the light of delustring groove 12 in delustring
Multiple reflections occur in groove 12.
Fig. 3 is schematic diagram of the light in delustring groove internal reflection.Referring to Fig. 3, when stray light a is from the light of the eliminating device
After face 11 enters delustring groove 12, multiple reflections occur on the inner wall of delustring groove 12.It is miscellaneous during multiple reflections
The energy of astigmatism a is gradually decayed, final that the stray light a of only only a few is emitted from light-receiving surface 11, and is turned again to
In light path, it can achieve the purpose that eliminate stray light in this way.
It should be noted that in actual setting, the array arrangement structure of delustring groove 12 can there are many.Fig. 4 and Fig. 5
Illustratively give the structural schematic diagram of two kinds of delustring groove arrays arrangement.Optionally, referring to Fig. 4, multiple delustring grooves 12
It arranges in matrix structure.Or referring to Fig. 5, multiple delustring grooves 12 are in staggered arrangement.Wherein, by the way that multiple delustrings are arranged
Groove 12 is in staggered arrangement, and multiple delustring grooves 12 can be arranged as much as possible on the light-receiving surface 11 of limited area,
To improve the effect for eliminating stray light.
During actual fabrication, the shape of delustring groove 12 can there are many, such as cylindrical, cone, prismatic table shape
Or truncated cone-shaped etc..The application is not restricted this.Optionally, as shown in figure 3, the shape of delustring groove 12 is cattle horn shape.This
The benefit of sample setting is the number that can increase stray light as much as possible and be reflected in delustring groove 12, and then as far as possible
The energy for mostly consuming stray light improves the eradicating efficacy of stray light.
Further, with continued reference to Fig. 3, it includes vertex A and bottom surface 121 that delustring groove 12, which can be arranged,；Bottom surface 121 is located at
On the light-receiving surface 11 of delustring ontology；The line of the vertex A of the delustring groove 12 and geometric center C of bottom surface 121 and the bottom surface 121
Angle β be greater than or equal to 30 °, and be less than or equal to 60 °.The benefit being arranged in this way is to increase stray light as much as possible and exist
The number reflected in cattle horn shape delustring groove 12, and then the energy of stray light is maximumlly consumed, improve disappearing for stray light
Except effect.
It should be noted that eliminating device provided by the present application is suitable for eliminating the stray light being separated with effective light.
In actual use, which can be set to after stray light detaches with effective light, on the arbitrary propagation path of stray light.
In view of in practice, forming stray light usually at the interface of optical device.Fig. 6 is to install optical device
Structural schematic diagram after a kind of eliminating device that the utility model embodiment provides.It optionally, should with continued reference to Fig. 1 and Fig. 6
Eliminating device is optics support seat；It is provided at least one fixed structure on the light-receiving surface 11 of delustring ontology 10, with fixation
Optical device 20.In this way, on the one hand, optical device 20 can be fixed, and then play protection optical device 20
Effect, the propagation path of Simultaneous Stabilization light；On the other hand, it can eliminate what light generated in optical system in communication process
Stray light a, and then the performance of improving optical system.
In actual setting, there are many structures of fixed structure, optionally, wants fixed optical device 20 on the estimation
Structure is targetedly designed, and is allowed to match with optical device 20.Illustratively, as shown in figures 1 to 6, it to fix
Optical device 20 be cuboid, fixed structure may include that at least two optics being oppositely arranged lean on face, and be leaned in optics
A glue groove is provided on face, by dispensing with stationary optics 20；Delustring groove 12 is set to the optics being oppositely arranged and leans on face
Between.
Illustratively, two groups of optics are provided with referring to Fig. 1 and Fig. 6, in the eliminating device and lean on face, respectively first group of optics
It includes that two optics being oppositely arranged lean on face by face to lean on face 14, each group of optics by face 13 and second group of optics.Due to effective
The face incidence or outgoing that light is in contact by face 14 with optical device 20 from second group of optics, optionally, second group of optics of setting leans on
Each optics is below height of the first group of optics by each optics in face 13 by face by the height in face in face 14.It so on the one hand can be with
Preferable fixed function is played to optical device 20, on the other hand the propagation of effective light will not be impacted.
It should be noted that in actual setting, the light-emitting surface and eliminating device of 20 stray light of optical device can be set
11 face of light-receiving surface of middle delustring ontology 10 contacts, and can also be arranged in the light-emitting surface and eliminating device of 20 stray light of optical device and disappear
The light-receiving surface 11 of trimmed book body 10 is opposite, while being separated by setpoint distance.
In the above-mentioned technical solutions, can be used for by the fixed optical device of the eliminating device 20 being arbitrary optics device
Part, such as convex lens or concavees lens.Optionally, optical device includes beam splitter, and the reason of setting in this way is that normal daylight is through dividing
Two beam sub-lights are formed after beam mirror beam splitting.The light intensity of this two beams sub-light is very big.For wherein a branch of sub-light (i.e. beam is used only
Sub-light is effective light) the case where, another Shu Ziguang formed is stray light, since the light intensity of stray light is larger, to effective
The interference of light be can not ignore.It, can be by the light-emitting surface of beam splitter stray light and delustring sheet using eliminating device provided by the present application
The light-receiving surface 11 of body 10 corresponds to, and the stray light formed in this way through beam splitter can be directly incident in delustring groove 12, fully reduces
Influence of the stray light to effective light, the performance of improving optical system.
Optionally, it is 9 times or more to enter the number that the light of delustring groove 12 reflects in delustring groove 12.
The reason of being arranged in this way is that, due to every secondary reflection, light has energy loss, when the number of reflection reaches 9 times or more,
Light reflectivity is extremely low so that the eliminating device has the effect of the excellent stray light that disappears.
The extinction effect of eliminating device provided by the present application is tested below by the method for experimental study.
Eliminating device as shown in Figure 1 is made of 3D printing technique.It is provided with multiple friendships on the eliminating device light-receiving surface
The shape of the delustring groove 12 of wrong array row arrangement, delustring groove 12 is cattle horn shape.On the light-receiving surface 11 of eliminating device, delustring groove
12 bottom surface is circular hole and aperture is 1mm, and two neighboring bottom surface center of circular hole distance is 1.2mm, i.e., two neighboring delustring groove
Minimum distance (i.e. minimum wall thickness (MINI W.)) between 12 is 0.2mm.
Fig. 7-Fig. 8 is structure when carrying out extinction performance test to eliminating device provided by the utility model using photometer
Schematic diagram.It is referring to Fig. 7-Fig. 8, the light-receiving surface of eliminating device and photometric test surfaces is staggered relatively, using photometer to this
The extinction performance of eliminating device is tested.Wherein, comparison diagram 7 and Fig. 8 are it can be found that relative to Fig. 7, in Fig. 8, eliminating device
Light-receiving surface be rotated by 90 °.
Fig. 9 is the test result for carrying out extinction performance test to eliminating device provided by the utility model using photometer.
Wherein, curve A indicates that wavelength is used to be incident in Fig. 7 with the directions for being 10 ° straight line p angles γ for the light of 400-650nm edge
When on the light-receiving surface of eliminating device, the test result of the eliminating device extinction performance.Curve B expressions use wavelength for 400-
When the light of 650nm is incident in Fig. 7 along the direction for being 60 ° with straight line p angles γ on the light-receiving surface of eliminating device, delustring dress
Set the test result of extinction performance.Curve C expressions use wavelength for the light of 400-650nm, and edge is 10 ° with straight line p angles γ
Direction when being incident in Fig. 8 on the light-receiving surface of eliminating device, the test result of the eliminating device extinction performance.Curve D is indicated
It uses wavelength for the light of 400-650nm, the light of eliminating device in Fig. 8 is incident on along the direction for being 60 ° with straight line p angles γ
When on face, the test result of the eliminating device extinction performance.Wherein, straight line p vertically with the light-receiving surface of eliminating device.Referring to Fig. 9,
After eliminating device delustring provided by the present application, the reflectivity of light is no more than 1.8%.
Figure 10 is to eliminate the method for stray light to eliminating device provided by the utility model using photometer and existing disappear
Structural schematic diagram when contrast test is carried out except the method for stray light.Referring to Figure 10, light is incident after the reflection of speculum 31
Reflectivity detection is carried out on to test platform 32.Wherein, M is control group, in its optical path, light in test platform 32
Reflecting surface is stainless steel surface or nigrescence aluminum alloy surface.N is experimental group, in its optical path, light in test platform 32
Reflecting surface be eliminating device provided by the utility model light-receiving surface.Its test result shows the reflectivity of stainless steel surface
About 12%~25%, the reflectivity about 3%~4% of nigrescence aluminum alloy surface, the stainless steel ox horn hole surface of the utility model
Reflectivity is about 0.6%~1.8%.It can be seen that the with obvious effects of the stray light that disappears of eliminating device provided by the present application is better than
Current maturation disappears stray light technology.
The utility model embodiment also provides a kind of optical system, which includes that the utility model embodiment provides
Any one eliminating device.
The optical system that the utility model embodiment provides includes the eliminating device of delustring ontology by setting；And it is arranged
Delustring ontology includes light-receiving surface；The delustring groove of multiple array arrangements is provided on light-receiving surface, so as to enter in delustring groove
Light multiple reflections occur in delustring groove, to promote the energy dissipation of stray light, so reach eliminate stray light mesh
, the stray light that light generates in optical system in communication process can not be eliminated by solving the existing method for eliminating stray light
The problem of, reach and eliminated the stray light that light generates in optical system in communication process, has improved the performance of optical system
Purpose.
Optionally, which is to Barebone.Specifically, this includes multiple optical mirror slips and at least one to Barebone
A eliminating device；Multiple optical mirror slips constitute optical system for alignment, wherein at least one optical mirror slip includes stray light light-emitting surface；Packet
The optical mirror slip for including stray light light-emitting surface is fixed on eliminating device, and the stray light light-emitting surface of optical mirror slip and eliminating device
Light-receiving surface corresponds to.Setting fully reduces interference of the stray light to effective light in this way, improves the alignment precision to Barebone.
Optionally, this to Barebone can be litho machine in Barebone.In semiconductor chip IC manufacturing mistake
Cheng Zhong, a complete chip usually require just complete by multiple photolithographic exposure.Other than first time photoetching, remaining
The figure that the figure of the level leaves with the exposure of former level will be accurately positioned by the photoetching of level before exposure, in this way
It just can guarantee between each layer pattern there is correct relative position, i.e. alignment precision.Alignment precision is the main of projection mask aligner
One of technical indicator, and the alignment precision between mask and silicon chip is the key factor for influencing alignment precision.If the alignment is arranged
System is to be conducive to improve the alignment precision of litho machine in litho machine to Barebone, and then improve the integrated electricity of semiconductor chip
Road makes yield.
The utility model embodiment also provides a kind of litho machine, which provides any one
Kind optical system.
The litho machine that the utility model embodiment provides includes the eliminating device of delustring ontology by setting；And it is arranged and disappears
Trimmed book body includes light-receiving surface；The delustring groove of multiple array arrangements is provided on light-receiving surface, so as to enter in delustring groove
In delustring groove multiple reflections occur for light, to promote the energy dissipation of stray light, and then achieve the purpose that eliminate stray light,
The method for solving existing elimination stray light can not eliminate the stray light that light generates in optical system in communication process
Problem has reached and has eliminated the stray light that light generates in optical system in communication process, improved the mesh of the performance of optical system
's.
Note that above are only the preferred embodiment and institute's application technology principle of the utility model.Those skilled in the art's meeting
Understand, the utility model is not limited to specific embodiment described here, can carry out for a person skilled in the art various bright
Aobvious variation is readjusted, be combined with each other and is substituted without departing from the scope of protection of the utility model.Therefore, although passing through
Above example is described in further detail the utility model, but the utility model is not limited only to the above implementation
Example can also include other more equivalent embodiments in the case where not departing from the utility model design, and the utility model
Range is determined by scope of the appended claims.
Claims (12)
1. a kind of eliminating device, which is characterized in that including delustring ontology；
The delustring ontology includes light-receiving surface；
The delustring groove of multiple array arrangements is provided on the light-receiving surface, so as to enter the light of the delustring groove in institute
It states and multiple reflections occurs in delustring groove.
2. eliminating device according to claim 1, which is characterized in that multiple delustring grooves are in staggered arrangement.
3. eliminating device according to claim 1, which is characterized in that the shape of the delustring groove is cattle horn shape.
4. eliminating device according to claim 3, it is characterised in that；
The delustring groove includes vertex and bottom surface；
The bottom surface is located on the light-receiving surface；
The line of the geometric center of the vertex and the bottom surface is greater than or equal to 30 ° with the angle of the bottom surface, and be less than or
Equal to 60 °.
5. eliminating device according to claim 4, which is characterized in that the bottom surface is circular hole and aperture is 1mm, adjacent two
A bottom surface center of circular hole distance is 1.2mm.
6. eliminating device according to claim 1, it is characterised in that；
The eliminating device is optics support seat；
It is provided at least one fixed structure on the light-receiving surface of the delustring ontology, with stationary optics.
7. eliminating device according to claim 6, it is characterised in that；
The fixed structure includes that at least two optics being oppositely arranged lean on face, and are provided with dispensing on face in the optics
Slot, by dispensing with the fixation optical device；
The delustring groove is set to the optics being oppositely arranged between face.
8. eliminating device according to claim 6, which is characterized in that the optical device includes beam splitter.
9. a kind of optical system, which is characterized in that
The optical system includes the eliminating device described in any one of claim 1-8.
10. optical system according to claim 9, which is characterized in that
The optical system is to Barebone.
11. optical system according to claim 10, which is characterized in that
Described includes multiple optical mirror slips and at least one eliminating device to Barebone；
The multiple optical mirror slip constitutes optical system for alignment, wherein at least one optical mirror slip includes stray light light-emitting surface；Packet
The optical mirror slip for including the stray light light-emitting surface is fixed on the eliminating device, and the optical mirror slip is described spuious
Light light-emitting surface is corresponding with the light-receiving surface of the eliminating device.
12. a kind of litho machine, which is characterized in that including the optical system described in any one of claim 9-11.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820165275.4U CN207780484U (en) | 2018-01-31 | 2018-01-31 | Eliminating device, optical system and litho machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820165275.4U CN207780484U (en) | 2018-01-31 | 2018-01-31 | Eliminating device, optical system and litho machine |
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| Publication Number | Publication Date |
|---|---|
| CN207780484U true CN207780484U (en) | 2018-08-28 |
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ID=63211992
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| Application Number | Title | Priority Date | Filing Date |
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| CN201820165275.4U Active CN207780484U (en) | 2018-01-31 | 2018-01-31 | Eliminating device, optical system and litho machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112710385A (en) * | 2020-11-26 | 2021-04-27 | 上海航天控制技术研究所 | Optical trap for photoelectric sensor test |
-
2018
- 2018-01-31 CN CN201820165275.4U patent/CN207780484U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112710385A (en) * | 2020-11-26 | 2021-04-27 | 上海航天控制技术研究所 | Optical trap for photoelectric sensor test |
| CN112710385B (en) * | 2020-11-26 | 2023-11-10 | 上海航天控制技术研究所 | Optical trap for photoelectric sensor test |
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