CN107450270B - Lighting system - Google Patents
Lighting system Download PDFInfo
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- CN107450270B CN107450270B CN201610378227.9A CN201610378227A CN107450270B CN 107450270 B CN107450270 B CN 107450270B CN 201610378227 A CN201610378227 A CN 201610378227A CN 107450270 B CN107450270 B CN 107450270B
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- turning back
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
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Abstract
Lighting system of the invention includes the light source being arranged successively, ellipsoid bowl assembly, coupled lens group, module of turning back, microlens array, quartz pushrod, relay lens group and lighting object, wherein module of turning back is holohedral symmetry formula structure.Symmetrical expression of the invention module of turning back reduces optical axis direction size, can further promote exposure mask face illumination, and is able to achieve the visual field conversion of arbitrary proportion.In addition, under the premise of ensure that illumination field of view intensity of illumination uniformity, increase the theoretical numerical aperture of illumination field of view inward flange visual field, improve the intensity of illumination of peripheral field, to compensate for the low influence of visual field high rim visual field among intensity of illumination in illumination field of view caused by the factors such as flash diffusing reflection and light leakage due to coating process condition, the seamed edge of quartz pushrod and corner angle, the uniformity of intensity of illumination in illumination field of view effectively further ensure that.
Description
Technical field
The present invention relates to litho machine field more particularly to a kind of lighting systems.
Background technique
Projection aligner be it is a kind of exposure mask face pattern be transferred to real estate/silicon wafer face form required pattern, into
And a kind of equipment of the integrated IC circuit needed out.Wherein, lighting system provides uniform illumination spot for litho machine exposure mask face,
It is the energy source of Optical Coatings for Photolithography.Exposure mask face light spot energy and the pupil uniformity are the important indicators of lighting system, energy
Size determines the yield size of litho machine, and exposure lines directional width when pupil uniformity determines photo-etching machine exposal
Relative mistake is anisotropic, affects indirectly the resolution ratio of litho machine.For the scanning optical exposure system of big visual field, exposure field
It is mostly rectangle structure, because of the asymmetry of field size, pupil uniformity is generally lower than the visual field of symmetrical structure.?
The pupil uniformity that rectangle field illumination hot spot is improved while improving exposure mask face energy is to improve systematic yield and resolution ratio
Key point.
The illumination and pupil uniformity in exposure mask face are improved in existing patent 201310380266.9, in the illumination system
Introducing is turned back modular optical component, is turned back the Non-completety symmetry formula structure that module is the turnover of 1:4 visual field by application, by by light
The circular light spot that source issues converts square focus spot, the rectangular light spot needed is converted into after module of being turned back outgoing, using quartz
The even light of stick, relaying group are imaged on exposure mask, substantially increase the coupling efficiency of lighting system.
The module of turning back is made of the modular structure of turning back of above system four prisms, two prisms as shown in Figure 1:.Its
What 1,4 end faces were spliced into middle Fig. 1 a is rectangular for light inputting end, is located at coupling systems focal plane, the square that 3,6 end faces are spliced into Fig. 1 c
Shape is light end, at the object space focal plane of relaying group.Then the module of turning back can turn back the light beam of square incident end face
For oblong exit light beam, shape, the size of emergent light spot are identical as quartz pushrod port sizes, improve the coupling effect of system
Rate.
However, this is turned back, modular structure is complicated, brings certain difficulty to mechanical erection, this brings very very much not to element replacement
Just.Since the structure is in the longer dimension along optical axis direction, the energy absorption of optical material is more, has one to the illumination in exposure mask face
Fixed influence.In addition to this, this asymmetric structure can not achieve the visual field conversion (such as 1:9 visual field) of arbitrary proportion, this gives
The application of element brings certain limitation.
Summary of the invention
The present invention provides a kind of lighting system, exists including the light source, quartz pushrod, lighting object being arranged successively, and setting
Module of turning back between the light source and the quartz pushrod, the module of turning back is holohedral symmetry formula structure.
Optionally, the lighting system further includes ellipsoid bowl assembly, coupled lens group, microlens array, relay lens group,
Their putting in order successively be the light source, the ellipsoid bowl assembly, the coupled lens group, the module of turning back, described
Microlens array, the quartz pushrod, the relay lens group and the lighting object.
Optionally, the light inputting end of the module of turning back is square, and the module of turning back goes out light end and the quartz pushrod
Light inputting end cross sectional shape it is identical.
Optionally, the module of turning back includes the first prism, the second prism, third prism, quadrangular, wherein described the
The size of one prism and the second prism is identical, and the size of the third prism and quadrangular is identical.
Optionally, a part of light of the light inputting end for module of turning back described in injection successively passes through the first prism and tetragonous
Column, module of then turning back described in injection；Another part light of the light inputting end for module of turning back described in injection successively passes through the second rib
Column and third prism, module of then turning back described in injection.
Optionally, first prism, the second prism, third prism, quadrangular all have two opposite parallel four
Side shape face and four rectangular surfaces.
Optionally, the interior angle of the parallelogram face of first prism is respectively 45 degree and 135 degree.
Optionally, the length-width ratio of the length-width ratio of first prism is 1:2 rectangular surfaces and second prism is 1:2's
Turn back described in rectangular surfaces composition the square light inputting end of module, the rectangular surfaces that the length-width ratio of the third prism is 1:2 with it is described
The light end out that the length-width ratio for module of turning back described in the rectangular surfaces composition that the length-width ratio of quadrangular is 1:2 is 1:4.
Optionally, first prism, the second prism, third prism, quadrangular inclined-plane plate reflectance coating, it is described enter light
Anti-reflection film is plated at end and out light end.
Optionally, the light inputting end of the module of turning back is located at the image space focal plane of the coupled lens group.
Optionally, the light inputting end of the module of turning back is located at the focal point of the ellipsoid bowl assembly, the coupled lens group
The light end that goes out of object space focal plane and the module of turning back be overlapped.
Optionally, the light source and the object space focal plane of coupled lens group are located in two focuses of ellipsoid bowl assembly.
Optionally, the light end that goes out of the object space focal plane with the quartz pushrod of the relay lens group is overlapped.
Optionally, the lighting object is located at the image space focal plane of the relay lens group.
Optionally, the coupled lens group is 44 lens structures compositions for being all spherical surface, including the coupling being arranged successively
Group after group, filter plate and coupling before closing, the focal power organized after group and coupling before the coupling are positive.
Optionally, the relay lens group includes the first relaying group, the second relaying group and third relaying group being arranged successively.
Optionally, the light source is high-pressure sodium lamp.
Optionally, the lighting system further includes the first reflecting mirror and the second reflecting mirror, and first reflecting mirror is located at institute
It states between ellipsoid bowl assembly and the coupled lens group, second reflecting mirror is located at the relay lens group and the illumination pair
As between.
Optionally, first reflecting mirror and the second reflecting mirror are respectively cold mirror.
Lighting system of the invention includes the light source being arranged successively, ellipsoid bowl assembly, coupled lens group, module of turning back, micro-
Lens array, quartz pushrod, relay lens group and lighting object, wherein module of turning back is holohedral symmetry formula structure.Pair of the invention
Title formula module of turning back reduces optical axis direction size, can further promote exposure mask face illumination, and be able to achieve the visual field of arbitrary proportion
Conversion.In addition, increasing the reason of illumination field of view inward flange visual field under the premise of ensure that illumination field of view intensity of illumination uniformity
By numerical aperture, improve the intensity of illumination of peripheral field, thus compensate for due to coating process condition, quartz pushrod seamed edge and
Visual field high rim visual field is low among intensity of illumination in illumination field of view caused by the factors such as the flash diffusing reflection of corner angle and light leakage
It influences, effectively further ensure that the uniformity of intensity of illumination in illumination field of view.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of module of turning back in the prior art；
Fig. 2 is the structural schematic diagram of lighting system described in one embodiment of the invention；
Fig. 3 is that the rectangle visual field exposure mask face pupil with square diaphragm in lighting system described in one embodiment of the invention is imitative
True figure；
Fig. 4 a-4c is the structural schematic diagram of module of turning back in lighting system described in one embodiment of the invention；
Fig. 5 is the structural schematic diagram of coupled lens group in lighting system described in one embodiment of the invention；
Fig. 6 is the structural schematic diagram of relay lens group in lighting system described in one embodiment of the invention；
Fig. 7 is the visual field transition diagram of 1:1.5 in lighting system described in one embodiment of the invention；
Fig. 8 is the visual field transition diagram of 1:2 in lighting system described in one embodiment of the invention；
Fig. 9 is the visual field transition diagram of 1:3 in lighting system described in one embodiment of the invention；
Figure 10 is the visual field transition diagram of 1:4 in lighting system described in one embodiment of the invention；
Figure 11 is the visual field transition diagram of 1:5 in lighting system described in one embodiment of the invention；
Figure 12 is the visual field transition diagram of 1:6 in lighting system described in one embodiment of the invention；
Figure 13 is the visual field transition diagram of 1:9 in lighting system described in one embodiment of the invention.
Specific embodiment
The present invention is described in further detail below in conjunction with the drawings and specific embodiments.It is wanted according to following explanation and right
Book is sought, advantages and features of the invention will become apparent from.It should be noted that attached drawing is all made of very simplified form and using non-
Accurately ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
A kind of lighting system provided by the invention, as shown in Fig. 2, including the light source (being not drawn into Fig. 2) being arranged successively, ellipse
Ball bowl assembly 10, coupled lens group 20, module of turning back 30, microlens array 40, quartz pushrod 50, relay lens group 60 and illumination
Object 70.Preferably, the light source is high-pressure sodium lamp, the ellipsoid bowl assembly 10 is ellipsoid bowl reflecting mirror, the module of turning back
30 light inputting end is square, and the module 30 of turning back is holohedral symmetry type, goes out the light inputting end of light end and the quartz pushrod 50
Shape is identical.The mercury lamp light source provides the energy source of required certain NA for lighting system, and mercury lamp is located at ellipsoid reflector
A focus on, mercury lamp issue light after the convergence of ellipsoid bowl assembly 10 enter the coupled lens group 20, using
Enter the relay lens group 60 after the even light of multiple reflections of the turn back module 30, microlens array 40 and quartz pushrod 50,
It is ultimately imaged on lighting object 70.
Turnover module 30 can be used for illumination promotion, and coupled lens group 20 is converted for NA and visual field.From lighting system
Characteristic is set out, and what turnover module 30 to be realized is exactly depending on reconfiguring after dividing.Turnover module 30 not should bear multiplying power and NA
Function is adjusted, and inside modules of transferring cannot cause enlargement ratio and NA to generate asymmetric situation.
Based on this, module of transferring is realized, needs to follow following principle:
1, the light output end gross area is equal with the light inputting end face gross area；
2, light output end reconfigures after being divided by light inputting end face；
3, the minimum piecemeal of light output end is translated by light output end minimum piecemeal, and mirror image obtains；
4, ratio is promoted using coupling module coupling efficiency be higher than the decaying of illumination caused by coupling module itself transmitance；
Coupling efficiency entry evaluation is assessed with coupling area, and coupling efficiency is assessed in detail to be commented with the energy for entering coupling area
Estimate.
What the present invention passed through turn back, and 30 light inputting end of module is square, and light end is rectangle out, and is holohedral symmetry formula structure.
Therefore, square incident end face is converted to oblong exit end face to improve the system pupil uniformity and coupling by holohedral symmetry formula structure
While closing efficiency, the structure for module of turning back is enormously simplified, is easily installed.Module 30 of turning back in this patent is along optical axis side
To part want compared with prior art it is short very much, when selecting identical material, the present invention in turn back module to material absorb compared with
It is few, thus capacity usage ratio is higher.In addition to this, symmetrical structure can also realize any required visual field ratio conversion.It is existing
There is the pupil uniformity in the exposure mask face of technology to reach 0.8%, pupil symmetrical structure as shown in Figure 3, exposure mask face in the present invention
The pupil uniformity reached 0.6%.But this structure greatly reduces because size is smaller with respect to quartz pushrod port
The energy coupling efficiency of quartz pushrod port reduces the exposure mask face illumination of system.
Preferably, asking emphasis with reference to Fig. 2, the object space focal plane of the light source and coupled lens group 20 is located at ellipsoid bowl group
In two focuses of part 10, the light inputting end of the module 30 of turning back is located at the image space focal plane of the coupled lens group 20, described
Microlens array 40 goes out between light end and the light inputting end of the quartz pushrod 50 positioned at the module 30 of turning back, the relay lens
The object space focal plane of group 60 is overlapped with the light end that goes out of the quartz pushrod 50, and the lighting object 70 is located at the relay lens group 60
At image space focal plane.In this way, the light that the light source issues enters coupled lens group 20 after the convergence of the ellipsoid bowl assembly 10,
Module 30 of turning back is set in the image space position of focal plane of the coupled lens group 20, is passed through by the light beam for turning back the adjusting of module 30
Enter relay lens group 60 after the even light of multiple reflections of the microlens array 40 and quartz pushrod 50, by the relay lens group
It is imaged on lighting object 70 after 60 amplification, transmitting effect, (is finally mask in the present embodiment in the lighting object 70
Plate) on formed needed for have certain numerical value aperture, size, the illumination spot of the visual field uniformity and the pupil uniformity.
It should be noted that the object space focal plane is by the focus in optical element incident direction and perpendicular to system master
The plane of optical axis；Corresponding, the image space focal plane is by the focus in optical element exit direction and perpendicular to system master
The plane of optical axis.
Preferably, ask emphasis with reference to Fig. 4 a to Fig. 4 c, the module 30 of turning back include the first prism 31, the second prism 32,
Third prism 33, quadrangular 34, wherein first prism 31 is identical with the size of the second prism 32, the third prism 33
It is identical with the size of quadrangular 34.Module of turning back 30 is symmetrically spliced two-by-two by two distinct types of prism.Preferably
Ground, first prism 31, the second prism 32, third prism 33, quadrangular 34 all have two opposite parallelogram
Face and four rectangular surfaces.The interior angle of the parallelogram face of first prism 31 is respectively 45 degree and 135 degree.First rib
It turns back described in the rectangular surfaces composition that rectangular surfaces that the length-width ratio of column 31 is 1:2 and the length-width ratio of second prism 32 are 1:2 mould
The square light inputting end of block 30, the length-width ratio of the third prism 33 are the rectangular surfaces of 1:2 and the length and width of the quadrangular 34
The light end out that length-width ratio than module 30 of turning back described in the rectangular surfaces composition for 1:2 is 1:4.
By taking 40mm*40mm incident end face as an example, in the light inputting end of module 30 of turning back, by two pieces of identical quartzy prisms the
The plane of incidence is decomposed into the rectangular region of two 20mm*40mm sizes, and the rib of prism by one prism 31 and the second prism 32
Angle is 45 degree and 135 degree.Into the light beam for 30 incident end face the first prism 31 and the second prism 32 of module of turning back, by quartz column
Body enters the quartzy cylinder third prism 33 and quadrangular 34 being attached thereto.Go out light end in module 30 of turning back, by two pieces of phases
Same quartzy cylinder third prism 33 and quadrangular 34 forms, and the rectangular region for passing through two 20mm*40mm sizes is spliced
At the rectangular field of 20mm*80mm, and the corner angle of prism are 45 degree and 135 degree.More preferably, the first prism 31 and the second prism
32 and third prism 33 and quadrangular 34 at symmetrically placed, the structure of holohedral symmetry formula is spliced by this four pieces of prisms.By two
The optical module of the quartzy cylinder of group, module of turning back 30, which is realized, is converted to rectangle having a size of 20mm* for square launching spot
The oblong exit hot spot of 80mm greatly improves the system coupling efficiency of the quartz pushrod using rectangle size.Certainly, this hair
It is bright to be not intended to limit turn back 30 light inputting end of module and the specific size at light end out, it is selected according to specific needs.
More preferably, as depicted in figure 4 a-4 c, light beam from a part of light of the light inputting end of module 30 of turning back described in injection successively
By the first prism 31 and quadrangular 34, module 30 of then turning back described in injection；The light inputting end of module of turning back described in injection 30
Another part light successively pass through the second prism 32 and third prism 33, then project described in turn back module 30.
In the present embodiment, the inclined-plane plating of first prism 31, the second prism 32, third prism 33, quadrangular 34
Anti-reflection film is plated at reflectance coating, the light inputting end and out light end.The certain inclined-planes of the prism of said modules are plated into reflectance coating, quartzy cylinder enters
Smooth surface and light-emitting surface plate anti-reflection film, can be further improved energy coupling efficiency.
Module 30 light inputting end shown in Fig. 4 of turning back is placed at 20 image space focal plane of coupled lens group, light end is located at micro- out
40 light inputting end of lens array, quartz pushrod 50 be adjusted to against microlens array 40 go out light end position, then this turn back module 30 can
Turning back the light beam of square incident end face for oblong exit light beam, 50 end of shape, size and quartz pushrod of emergent light spot
Mouth size is identical, improves the coupling efficiency of system.The incident end face of the module of turning back is symmetry square dimensions, be ensure that
The symmetry of the ray angles distribution of incidence system, keeps the pupil uniformity of system higher.Using the holohedral symmetry formula folding in the present invention
The pupil uniformity in revolving die block exposure mask face is 0.6%, and the pupil uniformity of the prior art is 0.8%, and the pupil in the present invention is equal
Even property improves 25%, simultaneously because module of turning back in the present invention is compared with being only 13.35mm along optical axis direction length, in identical quartzy material
In the case of material, present invention module of turning back absorbs material less, therefore the capacity usage ratio of system can be higher.
Coupled lens group used by this system is as shown in figure 5, the coupled lens group 20 is 4 lens structures.4 mirrors
The all spherical surfaces of piece, are divided into two lens groups G1, G2, and focal power is successively positive, just.It include one between two lens groups of G1 and G2
Block filter plate.The coupling systems can preferably guarantee that the angle of incidence of light for being incident on filter plate less than 13.5 °, keeps filter plate
Preferable filter effect.
The light beam for being incident on microlens array is saturating into relaying as shown in Figure 2 after microlens array and the even light of quartz pushrod
Microscope group 60.The relay lens group 60 that this system includes is as shown in fig. 6, include the first relaying group, the second relaying group being arranged successively
With third relaying group.By the angle of mass center light and optical axis under optimization multi-wavelength, realize that multi-wavelength light is coefficient
Mass center telecentric light, the telecentricity value provided is more accurate, more meets reality.
Preferably, ask emphasis with reference to Fig. 2, the lighting system further includes the first reflecting mirror 80 and the second reflecting mirror 90, compared with
Goodly, first reflecting mirror 80 and the second reflecting mirror 90 are respectively cold mirror, and first reflecting mirror 80 is located at the ellipsoid
Between bowl assembly 10 and the coupled lens group 20, second reflecting mirror 90 is located at the relay lens group 60 and the illumination
Between object 70, reflection of the light beam through first reflecting mirror 80 reflected through the ellipsoid bowl assembly 10 is irradiated to the coupling
It closes in lens group 20；Reflection of the light beam through second reflecting mirror 90 handled through the relay lens group 60 is irradiated to described
On lighting object 70, first reflecting mirror 80 and the second reflecting mirror 90 can change the direction of propagation of light beam, reduce the present invention
The occupied space of lighting system.
Lighting system of the invention is due to may be implemented 1:1.5,1:2,1:3,1:4,1 in the presence of module 30 of symmetrically turning back:
5, the visual field conversion of 1:6 and 1:9.As shown in Fig. 7-Figure 13, wherein Fig. 7 is 1:1.5 visual field transition diagram, is spelled using 7 pieces of prisms
It connects, for circular light spot to be converted to the rectangular field that length-width ratio is 1:1.5, it is proposed that turned for realizing round visual field
Folding；Fig. 8 is 1:2 visual field transition diagram, is spliced using two prisms, commonly used in double lamp splicing systems, for turning circular light spot
It is changed to the rectangular field that length-width ratio is 1:2, it is proposed that spliced with two small mercury lamps；Fig. 9 is 1:3 visual field transition diagram, using 12
Prism or area it is corresponding prism splicing, for by circular light spot be converted to length-width ratio be 1:3 rectangular field, it is proposed that have
Two class connecting methods can be with reference to use: one is being transferred with length-width ratio closer to 1 visual field, one is use approximate circle
The visual field of shape is transferred；Figure 10 is 1:4 visual field transition diagram, is spliced using the corresponding prism of 4 prisms or area, is used for
Circular light spot is converted into the rectangular field that length-width ratio is 1:4；Figure 11 is 1:5 visual field transition diagram, using 5 prisms or area with
Corresponding prism splicing, for by circular light spot be converted to length-width ratio be 1:5 rectangular field；Figure 12 is the conversion of 1:6 visual field
Figure is spliced using the corresponding prism of 6 prisms or area, for circular light spot to be converted to the rectangle that length-width ratio is 1:6
Visual field；Figure 13 is 1:9 visual field transition diagram, is spliced using the corresponding prism of 9 prisms or area, for turning circular light spot
It is changed to the rectangular field that length-width ratio is 1:9.
Lighting system of the invention includes the light source being arranged successively, ellipsoid bowl assembly, coupled lens group, module of turning back, micro-
Lens array, quartz pushrod, relay lens group and lighting object, wherein module of turning back is holohedral symmetry formula structure.Pair of the invention
Title formula module of turning back reduces optical axis direction size, can further promote exposure mask face illumination, and be able to achieve the visual field of arbitrary proportion
Conversion.In addition, increasing the reason of illumination field of view inward flange visual field under the premise of ensure that illumination field of view intensity of illumination uniformity
By numerical aperture, improve the intensity of illumination of peripheral field, thus compensate for due to coating process condition, quartz pushrod seamed edge and
Visual field high rim visual field is low among intensity of illumination in illumination field of view caused by the factors such as the flash diffusing reflection of corner angle and light leakage
It influences, effectively further ensure that the uniformity of intensity of illumination in illumination field of view.
Obviously, those skilled in the art can carry out various modification and variations without departing from spirit of the invention to invention
And range.If in this way, these modifications and changes of the present invention belong to the claims in the present invention and its equivalent technologies range it
Interior, then the invention is also intended to include including these modification and variations.
Claims (16)
1. a kind of lighting system including the light source, quartz pushrod, lighting object being arranged successively, and is arranged in the light source and institute
State the module of turning back between quartz pushrod, which is characterized in that the module of turning back is holohedral symmetry formula structure；
The module of turning back includes the first prism, the second prism, third prism, quadrangular, wherein first prism and the
The size of two prisms is identical, and the size of the third prism and quadrangular is identical, the first prism, the second prism, third prism
And quadrangular all has two opposite parallelogram faces and four rectangular surfaces, first prism and the second prism
Along side edge as light inlet, one of the third prism and quadrangular has one rectangular surfaces with identical size
For the rectangular surfaces of identical size along side edge as light end is gone out, the light output end gross area is equal with the light inputting end face gross area,
A part of light of the light inputting end for module of turning back described in injection successively passes through the first prism and quadrangular, then projects the folding
Another part light of revolving die block, the light inputting end for module of turning back described in injection successively passes through the second prism and third prism, then
It turns back described in injection module.
2. lighting system as described in claim 1, which is characterized in that further include ellipsoid bowl assembly, coupled lens group, lenticule
Array, relay lens group, their putting in order successively is the light source, the ellipsoid bowl assembly, the coupled lens group, institute
State module of turning back, the microlens array, the quartz pushrod, the relay lens group and the lighting object.
3. lighting system as claimed in claim 2, which is characterized in that the light inputting end of the module of turning back is square.
4. lighting system as claimed in claim 2, which is characterized in that the interior angle of the parallelogram face of first prism point
It Wei not be 45 degree and 135 degree.
5. lighting system as claimed in claim 2, which is characterized in that the length-width ratio of first prism is the rectangular surfaces of 1:2
The square light inputting end for module of turning back described in the rectangular surfaces composition that length-width ratio with second prism is 1:2, the third rib
It turns back described in the rectangular surfaces composition that rectangular surfaces that the length-width ratio of column is 1:2 and the length-width ratio of the quadrangular are 1:2 module
The light end out that length-width ratio is 1:4.
6. lighting system as claimed in claim 5, which is characterized in that first prism, the second prism, third prism,
The inclined-plane of quadrangular plates reflectance coating, and anti-reflection film is plated at the light inputting end and out light end.
7. lighting system as claimed in claim 2, which is characterized in that it is saturating that the light inputting end of the module of turning back is located at the coupling
At the image space focal plane of microscope group.
8. lighting system as claimed in claim 2, which is characterized in that the light inputting end of the module of turning back is located at the ellipsoid bowl
The focal point of component, the object space focal plane of the coupled lens group are overlapped with the light end that goes out of the module of turning back.
9. a kind of lighting system as described in any in claim 2 to 8, which is characterized in that the light source and coupled lens group
Object space focal plane be located in two focuses of ellipsoid bowl assembly.
10. a kind of lighting system as described in any in claim 2 to 8, which is characterized in that the object space of the relay lens group
Focal plane is overlapped with the light end that goes out of the quartz pushrod.
11. a kind of lighting system as described in any in claim 2 to 8, which is characterized in that the lighting object is located at described
At the image space focal plane of relay lens group.
12. a kind of lighting system as described in any in claim 2 to 8, which is characterized in that the coupled lens group is 4
It is all 4 lens structures composition of spherical surface, including group after group, filter plate and coupling before the coupling that is arranged successively, before the coupling
The focal power organized after group and coupling is positive.
13. a kind of lighting system as described in any in claim 2 to 8, which is characterized in that the relay lens group include according to
The first relaying group, the second relaying group and the third relaying group of secondary arrangement.
14. a kind of lighting system as described in any in claim 1 to 8, which is characterized in that the light source is high-pressure sodium lamp.
15. a kind of lighting system as described in any in claim 2 to 8, which is characterized in that further include the first reflecting mirror and
Two-mirror, first reflecting mirror is between the ellipsoid bowl assembly and the coupled lens group, second reflecting mirror
Between the relay lens group and the lighting object.
16. a kind of lighting system as claimed in claim 15, which is characterized in that first reflecting mirror and the second reflecting mirror point
It Wei not cold mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610378227.9A CN107450270B (en) | 2016-05-31 | 2016-05-31 | Lighting system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610378227.9A CN107450270B (en) | 2016-05-31 | 2016-05-31 | Lighting system |
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| Publication Number | Publication Date |
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| CN107450270A CN107450270A (en) | 2017-12-08 |
| CN107450270B true CN107450270B (en) | 2019-07-23 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101907235A (en) * | 2009-06-08 | 2010-12-08 | 松下电器产业株式会社 | Multiple-lights-combining illumination device and the projection display device that has used this device |
| TW201237566A (en) * | 2011-02-22 | 2012-09-16 | Canon Kk | Illumination optical system, exposure apparatus, and method of manufacturing device |
| CN104423174A (en) * | 2013-08-27 | 2015-03-18 | 上海微电子装备有限公司 | Illumination system |
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| US20050134825A1 (en) * | 2002-02-08 | 2005-06-23 | Carl Zeiss Smt Ag | Polarization-optimized illumination system |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101907235A (en) * | 2009-06-08 | 2010-12-08 | 松下电器产业株式会社 | Multiple-lights-combining illumination device and the projection display device that has used this device |
| TW201237566A (en) * | 2011-02-22 | 2012-09-16 | Canon Kk | Illumination optical system, exposure apparatus, and method of manufacturing device |
| CN104423174A (en) * | 2013-08-27 | 2015-03-18 | 上海微电子装备有限公司 | Illumination system |
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