CN207735280U - Parts cleannes cleaning device - Google Patents
Parts cleannes cleaning device Download PDFInfo
- Publication number
- CN207735280U CN207735280U CN201721496301.3U CN201721496301U CN207735280U CN 207735280 U CN207735280 U CN 207735280U CN 201721496301 U CN201721496301 U CN 201721496301U CN 207735280 U CN207735280 U CN 207735280U
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- Prior art keywords
- parts
- totally
- cabinet
- enclosed
- cleaning
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 99
- 238000007789 sealing Methods 0.000 claims description 26
- 230000000694 effects Effects 0.000 claims description 19
- 239000012535 impurity Substances 0.000 abstract description 13
- 239000003344 environmental pollutant Substances 0.000 abstract description 6
- 231100000719 pollutant Toxicity 0.000 abstract description 6
- 238000001514 detection method Methods 0.000 description 7
- 239000003638 chemical reducing agent Substances 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 235000004443 Ricinus communis Nutrition 0.000 description 3
- 230000003139 buffering effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 240000000528 Ricinus communis Species 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model is related to cleaning device fields, specifically parts cleannes cleaning device.Including totally-enclosed cleaning cabinet 1, for cleaning parts under enclosed environment；Overturn movable stand 2, the inside for parts to be movably fixed to totally-enclosed cleaning cabinet 1.When parts are cleaned in enclosed environment, the closed state that totally-enclosed cleaning cabinet 1 can keep it internal avoids external pollutant from bringing into the impurity being cleaned out；When totally-enclosed cleaning cabinet 1 also avoids cleaning parts simultaneously, the cleaning solution with the impurity being cleaned out is splashed to the outside of totally-enclosed cleaning cabinet 1.
Description
Technical field
The utility model is related to cleaning device fields, specifically parts cleannes cleaning device.
Background technology
In automobile engine and transmission parts, it is desirable that control pollutant, this is weigh parts quality one
Item important indicator requirement.Large scale contaminant particle may lead to equipment failure, failure, out of control.The requirement of parts fit tolerance
It is more and more harsh, if there is more pollutant between moving component, machine life can be caused to contract parts accelerated wear test
It is short or scrap.
The detection of parts cleannes is generally cleaned by equipment, is then filtered and to rings such as the analyses of impurity
Section.Due to pollutant weight very little, and the required precision detected is higher, and the environment of detection need to reach certain cleanliness factor.This its
In, it is the most important thing in the cleaning process of parts.The cleaning that parts are carried out in closed clean environment, after capable of ensureing
The accuracy of detection of the cleannes of continuous parts, and then more effectively control product quality.
In the prior art, for the small parts of quality, it can realize and carry out parts in closed clean environment
Cleaning.But for the big parts of quality, such as engine cylinder body, realization carries out parts in closed clean environment
Cleaning just become very difficult.
Utility model content
In order to solve the above technical problems, the utility model provides parts cleannes cleaning device.
One side according to the present utility model provides parts cleannes cleaning device, including：
Totally-enclosed cleaning cabinet, for cleaning the parts under enclosed environment；
Overturn movable stand, the inside for the parts to be movably fixed to the totally-enclosed cleaning cabinet.
Further, the totally-enclosed cleaning cabinet includes at least cabinet and side door, and the side door is closed for activity
The cabinet；When the side door is opened, the parts can enter or exit the totally-enclosed cleaning cabinet.
Further, the overturning movable stand includes at least support shaft；One end of the support shaft is used to support described
Parts.
Further, the totally-enclosed cleaning cabinet further includes movable sealing, and the movable sealing includes sealing ring and sealing
Plate；The sealing plate closes the totally-enclosed cleaning cabinet by the sealing ring activity；The branch is closed in the sealing ring activity
Support the circumferential part of axis.
Further, the overturning movable stand further includes fixed structure, and the fixed structure is for removably fixed
The parts.
Further, the fixed structure includes ring flange and fixing bolt, and the fixing bolt passes through the ring flange
Through-hole after fix the parts.
Further, the fixed structure further includes connecting rod, the through-hole of one end of the connecting rod and the ring flange
Flexible connection, the fixing bolt pass through the bolt shifting chute of the connecting rod to fix the parts.
Further, the overturning movable stand further includes rotational structure, and the rotational structure is for rotating described zero
Part.
Further, the overturning movable stand further includes lifting structure, and the lifting structure is used for the parts
It is fixed in vertical direction activity.
Further, the overturning movable stand further includes bottom plate, and the totally-enclosed cleaning cabinet further includes the automatic of bottom
Spacer pin；When the bottom plate stretches into the bottom of the totally-enclosed cleaning cabinet, the automatic spacing pin is for locking the overturning
Movable stand.
Parts cleannes cleaning device provided by the utility model, when parts are cleaned in enclosed environment, entirely
The closed state that enclosed cleaning cabinet 1 can keep it internal avoids external pollutant from bringing into the impurity being cleaned out；Simultaneously
When totally-enclosed cleaning cabinet 1 also avoids cleaning parts, the cleaning solution with the impurity being cleaned out is splashed to totally-enclosed cleaning
The outside of cabinet 1.
Description of the drawings
Structural representation when Fig. 1 is the inoperative for the parts cleannes cleaning device that the utility model embodiment provides
Figure.
Structural schematic diagram when Fig. 2 is the work for the parts cleannes cleaning device that the utility model embodiment provides.
Fig. 3 is the structural schematic diagram for the overturning movable stand that the utility model embodiment provides.
Specific implementation mode
The utility model is described in detail with embodiment below in conjunction with the accompanying drawings.
Referring to Fig. 2, parts cleannes cleaning device, including totally-enclosed cleaning cabinet 1 and overturning movable stand 2.It is totally-enclosed
Cleaning cabinet 1 cleans parts for establishing an enclosed environment under enclosed environment.Parts are clear under enclosed environment
After washing, the impurity being cleaned out is collected by corresponding collection device, is used for the detection of subsequent parts cleannes.
Overturning movable stand 2 is used to support parts, and parts stretch into or exit totally-enclosed cleaning cabinet 1 by overturning movable stand 2, and zero
Component activity is fixed on the inside of totally-enclosed cleaning cabinet 1.When parts are cleaned in enclosed environment, totally-enclosed cleaning cabinet
1 closed state that it can be kept internal, avoids external pollutant from bringing into the impurity being cleaned out.It is totally-enclosed simultaneously clear
When washing cabinet 1 and also avoiding cleaning parts, the cleaning solution with the impurity being cleaned out is splashed to the outer of totally-enclosed cleaning cabinet 1
Portion.Therefore, the impurity being cleaned out collected by totally-enclosed cleaning cabinet 1 can be used in the accurate detection of parts cleannes.
Referring to Fig. 1, Fig. 2, totally-enclosed cleaning cabinet 1 includes at least cabinet 1-1 and side door 1-7.Side door 1-7 is for activity
Close cabinet 1-1；When side door is opened, parts can enter or exit totally-enclosed cleaning cabinet 1.Side door 1-7 can be convenient for
The parts of a variety of volumes by and be contained in the inside of totally-enclosed cleaning cabinet 1.
Side door 1-7 may be used various ways relative to cabinet 1-1 and is flexibly connected.For example, radial type, sliding
The modes such as formula, manipulator.Preferably, side door 1-7 is attached using slidingtype with cabinet 1-1, can reduce side door 1-
7 activity space, convenient for being operated to side door 1-7, while the manufacturing cost of side door 1-7 is relatively low.
Referring to Fig. 1, overturning movable stand 2 includes at least support shaft 2-3.One end of support shaft 2-3 is used for securing part,
The other end of support shaft 2-3 is for being fixed on overturning movable stand 2.After side door 1-7 is opened, overturning movable stand 2 to
Side door 1-7 is moved, and support shaft 2-3 activities pass through the side door 1-7 of totally-enclosed cleaning cabinet 1, reaches the interior of cabinet 1-1
Portion.Side door 1-7 is closed, parts are accommodated within the enclosure space of cabinet 1-1.Overturning movement with support shaft 2-3
Rack 2 can effectively reduce the volume that overturning movable stand 2 extend into the inside of cabinet 1-1, zero is accommodated to improve
The volume of the enclosure space of part.
Referring to Fig. 2, support shaft 2-3 is extend into after passing through side door 1-7 within cabinet 1-1, support shaft 2-3 and side
There is gap between door 1-7, thus support shaft 2-3 needs setting activity to close between side door 1-7.One kind can be real
Existing movable sealing is as follows：
Referring to Fig. 1, Fig. 2, including sealing ring 1-5 and sealing plate 1-6.Sealing plate 1-6 is arranged in side door 1-7 and support shaft
The end that 2-3 is in contact, there are one the semi-circular recesses that can accommodate support shaft 2-3 for end tool.With phase below side door 1-7
To cabinet 1-1 one semi-circular recesses that can accommodate support shaft 2-3 is set.Two semi-circular recesses concentrics and same half
Diameter is arranged, and the excircle of support shaft 2-3 can be contained in two semi-circular recesses.It is respectively set on two semi-circular recesses
Sealing ring 1-5, two sealing ring 1-5 can seal the gap between support shaft 2-3 and side door 1-7.When support shaft 2-3 phases
When being detached for side door 1-7, sealing plate 1-6 closes totally-enclosed cleaning cabinet 1 by sealing ring 1-5 activities.When support shaft 2-3 is worn
When crossing side door 1-7, sealing plate 1-6 is moved relative to side door 1-7, and the circle of support shaft 2-3 is closed in sealing ring 1-5 activities
Circumference.Wherein, sealing plate 1-6 can be rotatably connected, be slidably connected or removably connect relative to side door.It should be understood that
, which is only a kind of preferred sealing structure.Movable sealing can be when cleaning parts and no clean zero
When component, can closed side door 1-7 and support shaft 2-3 contact site, to form full closeding state to cabinet 1-1.
Different parts have various shapes and construction, especially complicated engine cylinder body.Work as engine cylinder
When body is cleaned, engine cylinder body is fixed into for a problem.If using the fixed side of fixture in the prior art
Engine cylinder body is fixed in formula, and engine cylinder body is easy to be damaged, and then can cause engine cylinder body after assembling,
Generate poorly sealed Deng defective modes.The similar complicated parts with engine cylinder body all exist and this are difficult to fix
The problem of.
Engine cylinder body or similar parts have the threaded hole of assembling or installation, thus provided by the utility model
Parts cleannes cleaning device can utilize this threaded hole stationary engine cylinder body or similar parts, without making
The damage of coupled engines cylinder body itself or similar parts itself.
Referring to Fig. 1~Fig. 3, fixed structure is added in overturning movable stand 2, which is used for dismountable constant zero
Component, such as engine cylinder body.Fixed structure includes ring flange 2-4 and fixing bolt 2-6.Wherein, ring flange 2-4 and support shaft
One end of 2-3 is fixed or is removably connected, fixing bolt 2-6 across ring flange 2-4 through-hole after, with engine cylinder body or
The threaded hole of similar parts is attached.
Further, it is fixed on support shaft 2-3 to adapt to the parts of different volumes, following two sides may be used
Formula is realized.
The first way that may be implemented, ring flange 2-4 are removably connect with one end of support shaft 2-3.Pass through replacement
The different ring flange of model realizes that the parts of a variety of volumes are fixed on support shaft 2-3.This mode is simple in structure, is easy
It realizes.
Referring to Fig. 1~Fig. 3, the second way that may be implemented, ring flange 2-4 is fixedly connected with one end of support shaft 2-3.
Connecting rod is added, the quantity of connecting rod is multiple.One end of connecting rod is flexibly connected with ring flange, can rotate different angle,
Fixing bolt 2-6 passes through the other end of connecting rod, is attached with the threaded hole of the parts of different volumes.Have in connecting rod
Bolt shifting chute can realize flexible connection in such a way that the position of mobile bolt reaches the connecting rod of adjustment different length
The parts of a variety of volumes are fixed on support shaft 2-3.This mode is not only easy to implement, and relative to it is aforementioned the first
Mode is more flexible, and the connection of ring flange 2-4 and support shaft 2-3 is more firm.
When complicated engine cylinder body or similar parts are cleaned in cabinet 1-1, need to parts
It is rotated.Parts cleannes cleaning device provided by the utility model is added rotational structure in overturning movable stand 2, is revolved
Rotation structure is used for rotational components.Therefore Rotation when parts clean under enclosed environment is solved.One kind can be real
Existing rotational structure is as follows：
Referring to Fig. 1~Fig. 3, rotational structure includes speed reducer 2-1 and rocking arm 2-14.Rocking arm 2-14 is for driving speed reducer 2-
An end of 1, support shaft 2-3 and speed reducer 2-1 are coaxially connected.When rocking arm 2-14 driving speed reducer 2-1 work, slow down
Machine 2-1 drives support shaft 2-3 coaxial rotatings.Since parts are fixed on the other end of support shaft 2-3, support shaft 2-3
Parts realization is driven to be rotated within totally-enclosed cleaning cabinet 1.It should be understood that the rotational structure is a kind of preferred rotation
Rotation structure.The structure of the rotational structure is relatively simple, and manufacturing cost and use cost is low.
Volume is larger or the irregular parts of volume are before the inside for entering cabinet 1-1, under the parts
End is easy to be stopped by cabinet 1-1 or the upper end of the parts is easy to be stopped by side door 1-7.Therefore, it is also desirable to overturning
2 added lifting structure of movable stand, lifting structure is for fixing parts in vertical direction activity.Thus solve parts
The problem of some end is blocked.A kind of lifting structure that may be implemented is as follows：
Referring to Fig. 1, Fig. 2, lifting structure includes lifting part 2-13 and lifting pedal 2-12, and lifting pedal 2-12 is for driving
Dynamic lifting part 2-13's rises or falls.After parts are fixed on overturning movable stand 2, by trampling lifting pedal
2-12 so that lifting part 2-13 drives parts to rise or fall.It should be understood that the lifting structure is a kind of preferred
Lifting structure.The structure of the lifting structure is relatively simple, and manufacturing cost and use cost is low.
The bottom of the parts cleannes cleaning device of the utility model, overturning movable stand 2 is provided with castor, is formed
A kind of vehicle structure.Opposite with overturning movable stand 2, a mobile space is arranged in the bottom of totally-enclosed cleaning cabinet 1, can
A part for vehicle structure is allowed to be contained in the mobile space.In actual use, if using vehicle structure in the prior art, hold
Easily there is collision of the vehicle structure to totally-enclosed cleaning cabinet 1.In addition, after a vehicle structure part stretches into the mobile space,
Corresponding parts extend into the inside of totally-enclosed cleaning cabinet 1, move, are easy if continuing to press on overturning movable stand 2 at this time
Collision of the parts relative to totally-enclosed cleaning cabinet 1 occurs.Therefore, the utility model will overturn movable stand 2 and totally-enclosed clear
It washes cabinet 1 and has made some improvement respectively, to eliminate ill effect above-mentioned.
Referring to Fig. 1, Fig. 3, for totally-enclosed cleaning cabinet 1, on the both ends madial wall of the mobile space of its bottom, setting is led
Rail 3, guide rail 3 have guideway 3-1, one end setting automatic spacing block 3-2 that guide rail 3 is contacted with overturning movable stand 2 first；With
Simultaneously for overturning movable stand, bottom plate 2-7 is arranged, multiple castors are arranged in the lower section of bottom plate 2-7 in this.For the ease of bottom plate 2-7
In the mobile space for the bottom that can smoothly stretch into totally-enclosed cleaning cabinet 1 with the vehicle structure of castor composition, preferably the bottom of by
Plate 2-7 is set as taper or T-type.
Referring to Fig. 1~Fig. 3, parts are mounted on overturning movable stand 2, when overturning the movement of movable stand 2, bottom plate 2-
7 front truckle 2-15 is contacted with the guideway 3-1 of guide rail 3, and two front truckle 2-15 respectively enter the left rail 3-1-1 of guide rail 3
In right guide rail 3-1-2.Therefore guide rail 3 is played solves vehicle structure pair to the guiding and fixed function that overturn movable stand
The problem of lateral impact of totally-enclosed cleaning cabinet 1.
Referring to Fig. 1~Fig. 3, two rear truckle 2-11 are arranged below the non-contact end of bottom plate 2-7, in the two rear truckles
Direction setting buffering fixed block 2-9s and stop block 2-10 of the 2-11 towards totally-enclosed cleaning cabinet 1.Buffer fixed block 2-9 and cabinet
When 1-1 is in contact, the speed of overturning movable stand 2 can be slowed down.When bottom plate 2-7 stretches into the bottom of totally-enclosed cleaning cabinet 1
When mobile space, automatic spacing pin 3-2 is contacted with stop block 2-10 first, overturning movable stand 2 by stop block 2-10 by
Blocking, at this point, automatic spacing pin 3-2 can lock overturning movable stand 2.When automatic spacing pin 3-2 is contacted with stop block 2-10
When having overshoot, buffering fixed block 2-9 contacts buffering with cabinet 1-1, and automatic spacing pin 3-2 is controlled the control of system 1-2, energy
Enough realize opens and closes.Automatic spacing pin 3-2 solves overturning movable stand 2 and is touched relative to the longitudinal direction of totally-enclosed cleaning cabinet 1
The problem of hitting, and then solve collision problem of the parts relative to totally-enclosed cleaning cabinet 1.In addition, stop block 2-10 has one
Fixed thickness, into guide rail 3 after contacted with guideway 3-1, realize overturning 2 rear end cross spacing of movable stand；Buffer fixed block
2-9 has L-type structure, is limited in overturning movable stand 2 and both sides and cabinet 1-1, and auxiliary cross spacing effect may be implemented, lead to
It crosses and solves the problems, such as the horizontal swing of 2 rear end of overturning movable stand.
Referring to Fig. 1, Fig. 2, the cabinet 1-1 of totally-enclosed cleaning cabinet 1 is for accommodating parts.The mistake that parts are cleaned
Cheng Zhong cleans the surface of parts and/or inside by cleaning solution.Can be by controlling for the cleaning of parts
System 1-2 is controlled.Impurity is contained in cleaning solution, is collected by the rinse bath 1-3 below parts.Rinse bath 1-3
It is preferable to provide as funnel-form, convenient for quickly collecting the cleaning solution for accommodating impurity.The lower section setting filtration system 1- of rinse bath 1-3
4, it is used for the filtering and collection of impurity.Aforementioned rinse bath 1-3 and filtration system 1-4 are preferably separately positioned on the interior of cabinet 1-1
The manufacture and assembling of totally-enclosed cleaning cabinet 1 are convenient in portion.
Referring to Fig. 2, overturning movable stand 2 is moved to totally-enclosed cleaning cabinet 1, and the one of support shaft 2-3 securing parts
End extend into the inside of totally-enclosed cleaning cabinet 1.After the completion of cleaning parts, one end of support shaft 2-3 securing parts can move back
Go out totally-enclosed cleaning cabinet 1, completes the cleaning to parts.
Referring to Fig. 1, Fig. 2, after parts complete cleaning, carried out by the impurity for being collected into filtration system 1-4
Detection, you can complete the detection work to the cleannes of parts.
The above is only the preferred embodiment of the present invention, and it does not limit the scope of the patent of the present invention,
Equivalent structure transformation made by using the description of the utility model and the drawings is applied directly or indirectly in other phases
The technical field of pass, is equally included in the patent within the scope of the utility model.
Claims (9)
1. parts cleannes cleaning device, which is characterized in that including：
Totally-enclosed cleaning cabinet (1), for cleaning the parts under enclosed environment；
Movable stand (2) is overturn, the overturning movable stand (2) includes at least support shaft (2-3)；The support shaft (2-3)
One end is used to support the parts, and the parts stretch into the totally-enclosed cleaning cabinet by the overturning movable stand (2)
(1) inside, overturning movable stand (2) are used to the parts being movably fixed to the inside of the totally-enclosed cleaning cabinet (1).
2. cleaning device according to claim 1, which is characterized in that the totally-enclosed cleaning cabinet (1) includes at least cabinet
(1-1) and side door (1-7), the side door (1-7) close the cabinet (1-1) for activity；The side door (1-7) is opened
Qi Shi, the parts can enter or exit the totally-enclosed cleaning cabinet (1).
3. cleaning device according to claim 1, which is characterized in that the totally-enclosed cleaning cabinet (1) further includes that activity is close
Envelope, the movable sealing includes sealing ring (1-5) and sealing plate (1-6)；The sealing plate (1-6) passes through the sealing ring (1-
5) the totally-enclosed cleaning cabinet (1) is closed in activity；The circumferential part of the support shaft (2-3) is closed in sealing ring (1-5) activity.
4. cleaning device according to claim 1, which is characterized in that the overturning movable stand (2) further includes fixed knot
Structure, the fixed structure is for removably fixing the parts.
5. cleaning device according to claim 4, which is characterized in that the fixed structure includes ring flange (2-4) and consolidates
Determine bolt (2-6), the fixing bolt (2-6) fixes the parts after the through-hole of the ring flange (2-4).
6. cleaning device according to claim 5, which is characterized in that the fixed structure further includes connecting rod (2-5), institute
The one end for stating connecting rod (2-5) is flexibly connected with the through-hole of the ring flange (2-4), and the fixing bolt (2-6) passes through described
The bolt shifting chute of connecting rod (2-5) fixes the parts.
7. cleaning device according to claim 1, which is characterized in that the overturning movable stand (2) further includes rotation knot
Structure, the rotational structure is for rotating the parts.
8. cleaning device according to claim 1, which is characterized in that the overturning movable stand (2) further includes lifting knot
Structure, the lifting structure is for fixing the parts in vertical direction activity.
9. cleaning device according to claim 1, which is characterized in that the overturning movable stand (2) further includes bottom plate (2-
7), the totally-enclosed cleaning cabinet (1) further includes the automatic spacing pin (3-2) of bottom；When the bottom plate (2-7) stretches into the full envelope
When closing the bottom of cleaning cabinet (1), the automatic spacing pin (3-2) is for locking the overturning movable stand (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721496301.3U CN207735280U (en) | 2017-11-10 | 2017-11-10 | Parts cleannes cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721496301.3U CN207735280U (en) | 2017-11-10 | 2017-11-10 | Parts cleannes cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207735280U true CN207735280U (en) | 2018-08-17 |
Family
ID=63115598
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721496301.3U Expired - Fee Related CN207735280U (en) | 2017-11-10 | 2017-11-10 | Parts cleannes cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207735280U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109256348A (en) * | 2018-10-17 | 2019-01-22 | 江苏英锐半导体有限公司 | A kind of pretreating device for wafer flow manufacture |
-
2017
- 2017-11-10 CN CN201721496301.3U patent/CN207735280U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109256348A (en) * | 2018-10-17 | 2019-01-22 | 江苏英锐半导体有限公司 | A kind of pretreating device for wafer flow manufacture |
| CN109256348B (en) * | 2018-10-17 | 2023-10-03 | 广西中科蓝谷半导体科技有限公司 | Pretreatment device for wafer flow sheet manufacturing |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180817 |