CN207731915U - The remover-and-replacer of electrostatic chuck in chemical gaseous phase deposition board - Google Patents
The remover-and-replacer of electrostatic chuck in chemical gaseous phase deposition board Download PDFInfo
- Publication number
- CN207731915U CN207731915U CN201721797367.6U CN201721797367U CN207731915U CN 207731915 U CN207731915 U CN 207731915U CN 201721797367 U CN201721797367 U CN 201721797367U CN 207731915 U CN207731915 U CN 207731915U
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- China
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- crossbearer
- electrostatic chuck
- nut
- lifting screw
- remover
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Abstract
The utility model discloses a kind of remover-and-replacers of electrostatic chuck in chemical gaseous phase deposition board, including holder, lifting screw, nut, crossbearer and connection bolt, the nut is fixedly mounted on holder, the lifting screw is located in nut and is moved up and down relative to the nut, the crossbearer is mounted on the lower end of lifting screw, and the connection bolt is mounted on crossbearer；The bottom of lifting screw is equipped with a spacing ball, and a groove is formed at the crossbearer center, and the spacing ball insertion is stuck in the groove.The utility model is rotated up by the lifting screw among holder to be moved to take out electrostatic chuck, simple in structure, easy to operation, time saving and energy saving；In the bottom of lifting screw, setting is stuck in spacing ball or cheese head screw on crossbearer simultaneously, crossbearer may be implemented in this way in horizontal plane rotation and tilted upward, so as to avoid remove electrostatic chuck is installed during the electrostatic chuck back side copper post and post holes run-off the straight and cause to damage.
Description
Technical field
The utility model belongs to semiconductor integrated circuit manufacturing field, and in particular to quiet in a kind of chemical gaseous phase deposition board
The remover-and-replacer of electric sucker.
Background technology
In the production process of semiconductor devices, Lam SPEED boards are widely used in chemical gaseous phase deposition technique,
By specific process gas to being adsorbed on ESC under its hot environment in the cavity and under the conditions of plasma enhancing
Silicon chip on (Electrostatic Chuck, i.e. electrostatic chuck) carries out chemical vapor deposition and forms film, and its feature is into
Film speed is fast, film equality is good, it is strong to fill out hole ability.Silicon chip is fixed in cavity by the electrostatic chuck on board by electrostatic
Specific position, and adjust by helium the temperature of silicon chip surface.Since electrostatic chuck on silicon chip to being formed by property of thin film
There is vital influence, so needing to be replaced to ensure the property of formed film once electrostatic chuck is damaged
Matter.
It removes and needs to use specific fixture during replacing electrostatic chuck, to ensure that electrostatic chuck was installed in dismounting
It is not damaged in journey, while can quickly and easily complete the replacement of electrostatic chuck.Electrostatic chuck is replaced currently, removing
Fixture includes a crossbearer 1 and two root long bolts 2, as shown in Figure 1, wherein two root long bolts 2 are fixed on crossbearer 1.Work as dismounting
When replacing electrostatic chuck, stay bolt 2 is fixed in the screw hole of electrostatic chuck, is held crossbearer 1 using both hands and is lifted crossbearer 1 and quiet
Electric sucker is completed to remove and be replaced.But used fixture has the following defects at present：
1, since the weight of electrostatic chuck itself is about at 10 kilograms or more, manually lead to during removing replacement
It crosses that both hands lift fixture and electrostatic chuck needs certain strength, and can be shaken with can not avoiding during lifting,
Therefore the fixture uses convenience deficiency；
2, it during new electrostatic chuck is installed, also needs the flattened crossbearer 1 of holding of both hands and lifts electrostatic chuck
It is extend into inside cavity, but there is copper post outstanding, the copper post to need the correspondence being inserted into cavity at the back side of electrostatic chuck
In post holes, when installation, can not observe the copper post position at the electrostatic chuck back side, and both hands can inevitably occur during being put into
Shake, may result in copper post and causes to damage during being inserted into post holes in this way.
Utility model content
The technical problem to be solved by the present invention is to provide a kind of dismounting of electrostatic chuck in chemical gaseous phase deposition board
Fixture easily can be completed easily to replace, and will not be caused to damage to electrostatic chuck.
In order to solve the above technical problems, the dismounting of electrostatic chuck is pressed from both sides in chemical gaseous phase deposition board provided by the utility model
Tool includes holder, lifting screw, nut, crossbearer and connection bolt, and the nut is fixedly mounted on the bracket, the lifting
Screw rod is located in the nut and is moved up and down relative to the nut, and the crossbearer is mounted on the lower end of the lifting screw,
The connection bolt is mounted on the crossbearer.
The bottom of one of which structure, the lifting screw is equipped with a spacing ball, and one is formed at the crossbearer center
Groove, spacing ball insertion are stuck in the groove, and the crossbearer is relative to lifting screw is rotatable and tilted upward.
Wherein another structure, the bottom of the lifting screw is equipped with a cheese head screw, is formed at the crossbearer center
Have a groove, the head insertion of the cheese head screw is stuck in the groove, the crossbearer relative to lifting screw rotatably and
Tilted upward.
In said structure, the holder is A-frame, including the transverse slat of triangle and three supporting legs, the transverse slat
There are one supporting legs for installation on each angle.Wherein, the transverse slat is fixedly connected with nut.Alternatively, the transverse slat is integrated with nut
Structure.Nut is located at the either above or below of transverse slat.
In said structure, the crossbearer is strip, and respectively installation one connects bolt at the both ends of crossbearer.
In said structure, the crossbearer is equilateral triangle, and respectively installation one connects bolt at three angles of crossbearer.
The utility model is beneficial in that：
1) with existing fixture need both hands it is flattened lift remove electrostatic chuck by way of compared with, the utility model passes through
Lifting screw among holder, which rotates up, to be moved to take out electrostatic chuck, simple in structure, easy to operation, time saving and energy saving；
2) in the bottom of lifting screw, setting is stuck in spacing ball or cheese head screw on crossbearer to the utility model, in this way can be with
Crossbearer is realized in horizontal plane rotation and tilted upward, so as to avoid electrostatic chuck during removing installation electrostatic chuck
The copper post at the back side causes to damage with post holes run-off the straight.
Description of the drawings
Fig. 1 is the structural schematic diagram of existing remover-and-replacer；
Fig. 2 is the side view of the remover-and-replacer of the utility model；
Fig. 3 is the vertical view of the remover-and-replacer of the utility model.
Wherein the reference numerals are as follows：
1 is crossbearer；2 be stay bolt；3 be holder；31 be transverse slat；32 be supporting leg；4 be lifting screw；5 be nut；6 be company
Connecting bolt.
Specific implementation mode
The utility model is described in further detail with specific implementation mode below in conjunction with the accompanying drawings.
The remover-and-replacer of electrostatic chuck in the chemical gaseous phase deposition board of the utility model, as shown in Fig. 2, including holder 3,
Lifting screw 4, nut 5, crossbearer 1 and connection bolt 6, wherein nut 5 are fixedly mounted on the holder 3, the lifting screw 4
It being moved up and down in the nut 5 and relative to the nut 5, the crossbearer 1 is mounted on the lower end of the lifting screw 4,
The connection bolt 6 is mounted on the crossbearer 1.
Wherein, the bottom of the lifting screw 4 is equipped with a spacing ball (not shown), accordingly, at 1 center of crossbearer
It is formed with a groove, the spacing ball insertion is stuck in the groove, can make crossbearer 1 relative to lifting screw 4 in water in this way
Rotation in surface simultaneously can be with tilted upward.Certainly, those skilled in the art can replace spacing ball according to conventional technical means
For cheese head screw or other locating parts, if ensure crossbearer 1 it is rotatable in the horizontal plane relative to lifting screw 4 and can on have a down dip
Tiltedly.
In the present embodiment, as shown in figure 3, holder 3 is illustrated by taking A-frame as an example, which includes triangle
Transverse slat 31 and three supporting legs 32, there are one supporting legs 32 for installation on each angle of the transverse slat 31.Supporting leg 32 is L-shaped, one end
It is fixed on an angle of triangle transverse slat 31.Preferably, the transverse slat 31 of triangle is in equilateral triangle.
In the present embodiment, by taking square nut as an example, square nut 5 is located at the top of transverse slat 31 and transverse slat 31 and nut 5
It is structure as a whole, but the utility model is not limited thereto, other shapes of nut may be used in those skilled in the art, when
The position of right nut can also be located at the lower section of transverse slat 31, and transverse slat 31 can also be fixedly connected with nut 5 using other manner, such as
Fixed using bolt and nut, these to those skilled in the art all can easy realization, therefore do not do herein
It repeats.
As described in Figure 2, the crossbearer 1 of the present embodiment is strip, and respectively installation one connects bolt 6 at the both ends of crossbearer 1, uses
It is fixedly connected in electrostatic chuck.Although the present embodiment is by taking strip crossbearer as an example, the utility model is not limited thereto,
The crossbearer can also use other shapes, such as equilateral triangle or square, in the every of the crossbearer of equilateral triangle or square
One connection bolt is installed, as long as ensureing that the distance at connection bolt to electrostatic chuck center is equal, this is for this on a angle
It is obvious for field technology personnel.
In addition, as shown in Figure 2 and Figure 3, there is a head, the head to be equipped with handle, this sample prescription at the top of lifting screw 4
Convenient to operate.
With existing fixture need both hands it is flattened lift remove electrostatic chuck by way of compared with, the utility model use one
A A-frame is supported on above cavity, and a lifting screw moving up and down, the lifting are installed among A-frame
Screw rod drives the connection bolt of crossbearer and fixed electrostatic chuck, mobile current to replace by rotating up for lifting screw in this way
Manually lift fixture, time saving and energy saving, simple operation.
Meanwhile the utility model designs position limiting structure in the bottom end of lifting screw, the crossbearer of such lifting screw bottom can
To rotate horizontally tilted upward, to ensure remove electrostatic chuck is installed during the electrostatic chuck back side copper post will not be with
Post holes run-off the straight collides and causes to damage.
The utility model is described in detail above by specific embodiment, which is only that this practicality is new
The preferred embodiment of type, the utility model are not limited to the above embodiment.The case where not departing from the utility model principle
Under, the equivalent replacement and improvement that those skilled in the art makes the shape of holder and crossbearer, the shape of nut and position etc.,
It is regarded as in the technology scope that the utility model is protected.
Claims (10)
1. the remover-and-replacer of electrostatic chuck in a kind of chemical gaseous phase deposition board, which is characterized in that including holder, lifting screw,
Nut, crossbearer and connection bolt, the nut are fixedly mounted on the bracket, the lifting screw be located in the nut and
It is moved up and down relative to the nut, the crossbearer is mounted on the lower end of the lifting screw, and the connection bolt is mounted on institute
It states on crossbearer.
2. the remover-and-replacer of electrostatic chuck in chemical gaseous phase deposition board according to claim 1, which is characterized in that described
The bottom of lifting screw is equipped with a spacing ball, and a groove is formed at the crossbearer center, and the spacing ball insertion is stuck in institute
It states in groove, the crossbearer is relative to lifting screw is rotatable and tilted upward.
3. the remover-and-replacer of electrostatic chuck in chemical gaseous phase deposition board according to claim 1, which is characterized in that described
The bottom of lifting screw is equipped with a cheese head screw, and a groove, the head of the cheese head screw are formed at the crossbearer center
Insertion is stuck in the groove, and the crossbearer is relative to lifting screw is rotatable and tilted upward.
4. the remover-and-replacer of electrostatic chuck, feature exist in chemical gaseous phase deposition board according to claim 1 or 2 or 3
In, the holder be A-frame, including the transverse slat of triangle and three supporting legs, on each angle of the transverse slat there are one installations
Supporting leg.
5. the remover-and-replacer of electrostatic chuck in chemical gaseous phase deposition board according to claim 4, which is characterized in that described
Transverse slat is fixedly connected with nut.
6. the remover-and-replacer of electrostatic chuck in chemical gaseous phase deposition board according to claim 4, which is characterized in that described
Transverse slat is structure as a whole with nut.
7. the remover-and-replacer of electrostatic chuck in chemical gaseous phase deposition board according to claim 4, which is characterized in that described
Nut is located at the top of transverse slat.
8. the remover-and-replacer of electrostatic chuck in chemical gaseous phase deposition board according to claim 4, which is characterized in that described
Nut is located at the lower section of transverse slat.
9. the remover-and-replacer of electrostatic chuck, feature exist in chemical gaseous phase deposition board according to claim 1 or 2 or 3
In the crossbearer is strip, and respectively installation one connects bolt at the both ends of crossbearer.
10. the remover-and-replacer of electrostatic chuck, feature exist in chemical gaseous phase deposition board according to claim 1 or 2 or 3
In the crossbearer is equilateral triangle, and respectively installation one connects bolt at three angles of crossbearer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721797367.6U CN207731915U (en) | 2017-12-21 | 2017-12-21 | The remover-and-replacer of electrostatic chuck in chemical gaseous phase deposition board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721797367.6U CN207731915U (en) | 2017-12-21 | 2017-12-21 | The remover-and-replacer of electrostatic chuck in chemical gaseous phase deposition board |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207731915U true CN207731915U (en) | 2018-08-14 |
Family
ID=63085545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721797367.6U Active CN207731915U (en) | 2017-12-21 | 2017-12-21 | The remover-and-replacer of electrostatic chuck in chemical gaseous phase deposition board |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207731915U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113042991A (en) * | 2021-03-17 | 2021-06-29 | 泉芯集成电路制造(济南)有限公司 | Dismounting device of electrostatic chuck of semiconductor etching board |
-
2017
- 2017-12-21 CN CN201721797367.6U patent/CN207731915U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113042991A (en) * | 2021-03-17 | 2021-06-29 | 泉芯集成电路制造(济南)有限公司 | Dismounting device of electrostatic chuck of semiconductor etching board |
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