CN207713807U - A kind of controllable linear vaporising device - Google Patents
A kind of controllable linear vaporising device Download PDFInfo
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- CN207713807U CN207713807U CN201721745217.0U CN201721745217U CN207713807U CN 207713807 U CN207713807 U CN 207713807U CN 201721745217 U CN201721745217 U CN 201721745217U CN 207713807 U CN207713807 U CN 207713807U
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Abstract
The utility model is related to a kind of controllable linear vaporising devices, the controllable linear evaporation source includes crucible, crucible heater, conduit, conduit heater, the crucible and the conduit constitute linear evaporation source, controllability valve is set between the conduit and the crucible, the pressure of material gas in the crucible is controlled, and then changes the flash evapn rate of material gas within a short period of time.When being evaporated plated film using the controllable linear vaporising device, average evaporation rate can be more accurately controlled, expands the adjusting section of evaporation rate, improves the flash evapn rate of linear evaporation source, while saving the consumption of raw material when changing temperature process.
Description
Technical field
The utility model is related to evaporation coating techniques more particularly to a kind of controllable linear vaporising devices.
Background technology
Evaporation coating techniques are a kind of currently used vacuum coating technologies, its main feature is that in a vacuum (can be with by material
It is inorganic material, can also be organic material) heating evaporation, gaseous state is formed, is deposited on substrate, this technology can expend
The film of high quality is obtained under the premise of less material, evaporation coating techniques are chiefly used in the preparation of solar cell, OLED at present
Industries, the application prospect such as preparation it is very extensive.
Currently, the technique of evaporation coating is divided into two kinds of evaporation and a linear evaporation.Point evaporation is to be placed in material to be evaporated
Among dotted evaporation source, in use, making material evaporate by heater strip, deposit on substrate, because disengagement area is relatively small,
Referred to as put evaporation source；Linear evaporation has redesigned evaporation source structure, is generally divided into crucible and linear evaporation jet pipe, will be to be evaporated
Material is placed in crucible, has heater strip to heat it on the outside of crucible, and material is changed into gaseous state and enters evaporation jet pipe from crucible,
There are multiple evaporation spray orifices or linear spray orifice on jet pipe, steam is deposited to from spray orifice ejection on substrate, because vapor source is similar to
Linearly, so referred to as linear evaporation source, may be implemented flow line production.
Dotted evaporation source is commonly used to small-size laboratory equipment, or multiple evaporation sources are arranged according to certain distance,
For realizing flow line production, but the production efficiency of multiple evaporation sources is not high, and more difficult while controlling evaporation rate and temperature
Degree, the poor controllability of technique are also unfavorable for load evaporation raw material.
Linear evaporation compensates for the shortcomings that evaporation source, with the linear evaporation of a large area instead of multiple independent points
Evaporation source, but current linear evaporation source usually adds conduit to steam for depositing large-area film on the top of crucible
It guides, heater strip is distributed on the outside of conduit, for maintaining temperature in conduit, keep material in gas phase state, conduit side
EDS maps have a certain number of evaporation apertures, are used for guiding material gas and spray, deposit on the substrate of evaporation apertures face.It is steamed with
It rises similar, linear evaporation source regulates and controls evaporation rate also by temperature is changed to change saturated vapor pressure, due to evaporation source
Structure is larger, and the adjusting of temperature is a slow process, and the process material of heating or cooling is still ceaselessly being consumed, because
This both wasted time or wasted raw material.In process of production if it find that technological parameter needs to adjust, evaporation cannot be adjusted immediately
Rate can cause sample fraction defective to increase, and reduce production efficiency, and in addition to this, higher temperature needs equipment to linearly steaming
It rises and the material of temperature shielding harness has higher requirement, increase the cost of equipment itself.
Invention content
In view of the above problems, the utility model provides a kind of controllable linear vaporising device, it is intended to improve original linear evaporation
The flash evapn rate of linear evaporation source is improved in source, saves the energy consumption of equipment, while raw material is saved when changing temperature process
Consumption.
To achieve the goals above, the utility model adopts the following technical solution：A kind of controllable linear vaporising device, including
Crucible, crucible heater, conduit, conduit heater, wherein the crucible and the conduit are connected to form linear evaporation source,
Valve is set between the conduit and the crucible.
The valve is controllability valve, by valve switch, to control the pressure of material gas in the crucible, in turn
Change the flash evapn rate of material gas within a short period of time.
Described device further includes control system, and the control system includes manual mode and automatic mode, the control system
For controlling the switch of the valve.The opening and closing of manual mode, that is, artificial control valve.Automatic mode is setting valve
The time of the time and closing opened every time are opened and closed automatically.
The control system is controlled by computer, and the valve opening degree selects adjustable between 0-100%.
Valve heating system is arranged in the external of the valve, for prevent material gas by valve since pressure difference changes
The condensation Deng caused by.The heating system is armouring heating tube, metal heating wire or piece, graphite heater, induction heater etc..
Shielded layer is arranged in the linear evaporation source outer layer, to ensure the less loss of evaporation source internal heat, also to every
Exhausted external temperature avoids interfering evaporation source.
The material selection of crucible and conduit should be depending on heating material, to ensure that it is not reacted with heating material.It is described
Crucible is graphite crucible, silica crucible, boron nitride crucible or alumina crucible.
Crucible heater is set outside the crucible, and crucible heater heats crucible bottom and side, realization pair
Material heating in crucible.
The external of the conduit is distributed conduit heater, and conduit heater heats surrounding catheter, and then maintains material
Material keeps gaseous state in conduit.The side of the conduit is distributed several evaporation apertures, and the size and spacing in aperture pass through software
Simulation obtains, to realize the uniform deposition of large area.
When being evaporated plated film using above-mentioned controllable linear vaporising device, each evaporation apertures in the aperture and spacing that optimized
Flash evapn rate certain proportionate relationship should be kept to realize preferable uniformity.Each unlatching of valve is set at this time
Closing time, close stage, since the material gas of crucible can not export, pressure increases, when valve opening, due to pressure difference material
Material steam can go out rapidly valve, and flash evapn rate to be promoted, stablize and maintain after peaking by flash evapn rate
For a period of time, valve is closed at this time, and flash evapn rate declines, and crucible starts to put aside pressure again.It can be adjusted when production every
Shut-in time of secondary valve and opening degree control the evaporation rate of material.It is understood that when extending the closing of valve
Between can increase pressure in crucible, to improve the flash evapn rate of material；It also will be understood that when, pass through control valve
Opening degree, such as reduce the opening degree of valve, can reduce the flash evapn rate of material, thus can be instant tune
The flash evapn rate of whole timber material, and without needing to change flash evapn rate by temperature, technique has instantaneity.
When needing to change temperature, valve can be closed, the loss of material when avoiding temperature change.
The advantageous effect of the use of the new type is：
1, controllable valve is increased among linear evaporation source crucible and conduit, can at a lower temperature in the case of i.e.
When the flash evapn rate of raising material under certain condition, can be instantaneous compared to the device for not using controllable valve
Evaporation rate doubles left and right, such as the momentary rate of arrival substrate material from 5 × 10-8Gram/cm second (selenium)
It improves to 10 × 10-8Gram/cm second (selenium)；
2, controllable valve is increased among linear evaporation source crucible and conduit, it can be the case where maintaining Current Temperatures
The flash evapn rate of instant reduction material down；
3, controllable valve is increased among linear evaporation source crucible and conduit, reduces equipment energy consumption, passes through valve
The time comparison of opening and closing accurately controls evaporation rate；According to material needs, required evaporation rate size can be adjusted,
It is more advantageous to being smoothed out for experiment；
4, controllable valve is increased among linear evaporation source crucible and conduit, can close valve in temperature-rise period allows
Material can not escape, and save raw material；
5, in certain special dimensions, the increase of pressure can promote the progress of reaction, obtain higher-quality film, such as
The raising of selenium bias in the preparation process of copper-indium-galliun-selenium film solar cell, can promote the life of the compound of copper indium gallium selenide
At being embodied as copper indium gallium selenide chemical constituent closer to desired proportions, crystallite dimension bigger, fault in material is less.
Description of the drawings
Fig. 1 is the adjustable linear evaporation source structural schematic diagram of the utility model
Fig. 2 is time and the evaporation rate relational graph of the utility model evaporation coating
In figure, 1, crucible；2, valve；3, conduit；5, crucible heater；6, conduit heater；7, evaporation apertures；8, valve adds
Hot systems
Specific implementation mode
The utility model is described in detail with reference to the accompanying drawings and examples.
Embodiment 1
Controllable linear vaporising device, including crucible 1, crucible heater 5, conduit 3, conduit heater 6, wherein 3 He of conduit
Crucible 1 constitutes linear evaporation source, which is vertical linear evaporation source.Wherein, crucible 1 is graphite crucible.Described
Valve 2 is set in conduit and the crucible.Entire linear evaporation source coats (not marked in figure) by shielded layer.The outside of conduit 3
Distribution conduit heater 6, conduit heater 6 heat conduit 3.The side of conduit 3 is distributed with evaporation apertures 7, aperture it is big
It is small for 5mm between 10mm.
Crucible heater 5 is located on the outside of crucible, to be heated to 1 bottom of crucible and side, realizes in crucible 1
Material heats.It is connected by valve 2 between crucible 1 and conduit 3, there is valve heating system 8 in the outside of valve 2.The switch of valve 2
It is controlled by control system, which is controlled by computer, using the opening and closing of manual mode control valve.Valve 2
Opening degree it is adjustable between computer end is set as 0-100%.
When preparing CIGS thin-film used for solar batteries using above-mentioned controllable linear vaporising device, when production, can adjust
Shut-in time and the opening degree of each valve 2 are saved to control the evaporation rate of material, it is to be understood that extend valve 2
Shut-in time can increase the pressure in crucible 1, to improve the flash evapn rate of material and valve is always on compares
(such as Fig. 2 curves 1), instantaneous evaporation rate can be from 5 × 10-8Gram/cm second (selenium) improves to instantaneous in curve 2
Rate 10 × 10-8Gram/cm second (selenium)；It will also be appreciated that by the opening degree of control valve 2, such as
The opening degree of valve drops to opening 3/4 from complete opening, such as the curve 3 in Fig. 2, can reduce the flash evapn rate of material
7.5×10-8Gram/cm second (selenium), thus can be instant adjustment material flash evapn rate, and without need according to
Change flash evapn rate by temperature, technique has instantaneity.
When needing to change temperature, valve 2 can be closed, the loss of material when avoiding temperature change.It is controlled using valve
Technology, rough estimate close valve when adjusting temperature, and the half that raw materials consumption is about saved the case where than being not related to valve closing door is left
It is right.
Embodiment 2
Linear evaporation source is horizontal linear evaporation source, and crucible 1 is silica crucible, and the pore size of conduit is 10mm, valve 2
Switch uses automatic control mode, the time of time and closing opened every time using computer setting valve carry out to valve from
Dynamic control.Other structures and embodiment are same as Example 1.
Above disclosed is only preferred embodiment in the utility model embodiment, although by reference to preferred reality
It applies example the utility model is described, but in the case where not departing from the scope of the utility model, it can be carried out various
It improves and component therein can be replaced with equivalent.The utility model is not limited to specific embodiment disclosed herein,
But include the whole technical solutions fallen within the scope of the appended claims.
Claims (2)
1. a kind of controllable linear vaporising device, including crucible, crucible heater, conduit, conduit heater, which is characterized in that institute
It states crucible and the conduit is connected to form linear evaporation source, valve is set between the conduit and the crucible；The valve
Door is that controllability valve to control the pressure of material gas in the crucible, and then is changed within a short period of time by valve switch
The flash evapn rate for becoming material gas accurately adjusts average evaporation rate by the time scale of valve opening and closing；
Described device further includes control system, and the control system includes manual mode and automatic mode, and the control system is used for controlling
Make the switch of the valve；The opening and closing of the manual mode, that is, artificial control valve；The automatic mode is setting valve
The time for the time and closing that door is opened every time is opened and closed automatically；The external setting valve of the valve heats system
System, for preventing material gas from being condensed caused by changing due to pressure difference by valve；The linear evaporation source outer layer setting screen
Layer is covered, to ensure that evaporation source internal temperature is not lost in, also to completely cut off external temperature, avoids interfering evaporation source；Institute
It states and crucible heater is set outside crucible, crucible heater heats crucible bottom and side, realizes to the material in crucible
Material heating；The conduit heater is distributed in the outside of the conduit, and the conduit heater heats surrounding catheter, into
And material is maintained to keep gaseous state in conduit；The side of the conduit is distributed several evaporation apertures, the size and spacing in aperture
It is simulated and is obtained by software, to realize the uniform deposition of large area.
2. controllable linear vaporising device as described in claim 1, which is characterized in that the control system is controlled by computer,
The valve opening degree selects adjustable between 0-100%.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201721745217.0U CN207713807U (en) | 2017-12-14 | 2017-12-14 | A kind of controllable linear vaporising device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721745217.0U CN207713807U (en) | 2017-12-14 | 2017-12-14 | A kind of controllable linear vaporising device |
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| Publication Number | Publication Date |
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| CN207713807U true CN207713807U (en) | 2018-08-10 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113957390A (en) * | 2020-07-21 | 2022-01-21 | 宝山钢铁股份有限公司 | Vacuum coating device with air cushion buffer cavity |
-
2017
- 2017-12-14 CN CN201721745217.0U patent/CN207713807U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113957390A (en) * | 2020-07-21 | 2022-01-21 | 宝山钢铁股份有限公司 | Vacuum coating device with air cushion buffer cavity |
| CN113957390B (en) * | 2020-07-21 | 2024-03-08 | 宝山钢铁股份有限公司 | Vacuum coating device with air cushion buffer cavity |
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