CN207704870U - A kind of rotation micromotion platform - Google Patents
A kind of rotation micromotion platform Download PDFInfo
- Publication number
- CN207704870U CN207704870U CN201721824292.6U CN201721824292U CN207704870U CN 207704870 U CN207704870 U CN 207704870U CN 201721824292 U CN201721824292 U CN 201721824292U CN 207704870 U CN207704870 U CN 207704870U
- Authority
- CN
- China
- Prior art keywords
- connecting rod
- rod
- platform
- rotation
- micromotion platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
This application provides a kind of rotation micromotion platforms,Including a mounting platform,Pass through setting prop in the rotatable fine motion being connected on the mounting platform of screw thread,A swing rod is provided in the fine motion on setting prop,An endless glide is provided on the mounting platform,A sliding block is provided on swing rod,The sliding block is slidably set in the endless glide,Micromotion platform further includes one end to be rotated the first connecting rod connecting with the swing rod by first rotating shaft,It is rotated the second connecting rod connecting by the second shaft with first connecting rod,It is rotated the third connecting rod connecting by third shaft with second connecting rod,Feed screw nut's assembly for pushing the third connecting rod,Feed screw nut's assembly includes thread bush,Across the thread bush and the screw rod that is mutually threadedly coupled with the thread bush,Screw rod extends along X-direction,Screw rod has a pushing part close to the end set of the swing rod,End set of the screw rod far from the swing rod has a rotating part.
Description
Technical field
This application involves a kind of rotation micromotion platforms.
Background technology
Micro displacement workbench with high-precision and quick response is in Modern Manufacturing Technology with extremely important status, quilt
It is considered as the important symbol of a national high technology development level.In ultra-precision machine tool, ultra-precise micro displacement workbench be used for into
Error compensation is carried out to system, realizes Ultra-precision Turning；In large scale integrated circuit manufacture, ultra-precise micro displacement workbench is used for
Micro- positioning and Fine Feed are carried out in lithographic equipment；In scanning probe microscopy, ultra-precise micro displacement workbench is for measuring sample
Surface topography carries out nanoprocessing；In terms of bioengineering, ultra-precise micro displacement workbench is used to complete the operation to cell, real
Existing biological operation engineering；In terms of medical science, ultra-precise micro displacement workbench is used for microsurgery, to mitigate doctor
Burden shortens operating time, improves success rate.Ultra-precise micro displacement workbench is also extensively used for fiber alignment, MEMS system
In processing, encapsulation and the fields such as assembly and electrical-chemistry method.Currently, micro displacement workbench in the market be mostly x, y-axis level
Leveling is insufficient for real work needs without the function of turning angle.
Invention content
The application technical problems to be solved are to provide a kind of rotation micromotion platform.
In order to solve the above-mentioned technical problem, this application provides a kind of rotation micromotion platform, the micromotion platform includes
One mounting platform passes through setting prop in the rotatable fine motion being connected on the mounting platform of screw thread, fine motion rising
It is provided with a swing rod on column, an endless glide is provided on the mounting platform, a sliding block, institute are provided on the swing rod
The sliding block stated slidably is set in the endless glide, and the micromotion platform further includes that one end and the swing rod are logical
Cross first rotating shaft rotate connection first connecting rod, rotated by the second shaft with the first connecting rod connect second connect
Bar, with the second connecting rod by third shaft rotate the third connecting rod connecting, for pushing the third connecting rod
Feed screw nut's assembly, the feed screw nut's assembly includes thread bush, across the thread bush and with the thread bush phase
The screw rod of threaded connection, the screw rod extend along X-direction, and the screw rod has one close to the end set of the swing rod
Pushing part, end set of the screw rod far from the swing rod have a rotating part.
Preferably, the micromotion platform further includes a pedestal, and the mounting platform is arranged on the pedestal.
Preferably, the thread bush is fixedly connected on the pedestal.
Preferably, the swing rod is substantially vertical with the first connecting rod, and the first connecting rod and second connecting rod are big
Cause vertical, described second connecting rod substantially vertical with the third connecting rod.
Preferably, it is rotated connection by a rotation axis between the second connecting rod and the pedestal.
Preferably, the rotation axis to the distance between third shaft is more than the rotation axis between the second shaft
Distance.
Preferably, it is provided with a threaded post on the mounting platform, setting prop and the threaded post in the fine motion
It is connected through a screw thread.
Preferably, the threaded post is arranged with the endless glide concentric.
A kind of rotation micromotion platform of the application pushes connecting rod by a feed screw nut's assembly, passes through the power of multiple connecting rods
It transmits, swing rod is made to swing, swing rod drives setting prop rotation in fine motion, reaches the Precision trimming of setting prop in fine motion, platform structure letter
It is single, it is very accurate to the adjusting of the height of setting prop in fine motion.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of rotation micromotion platform,
Wherein：1, setting prop in fine motion；2, mounting platform；3, pedestal；11, swing rod；21, sliding rail；41, thread bush；42, spiral shell
Bar；43, pushing part；44, rotating part；51, first connecting rod；52, second connecting rod；53, third connecting rod；6, rotation axis；71, first
Shaft；72, the second shaft；73, third shaft.
Specific implementation mode
The application is described further in the following with reference to the drawings and specific embodiments, so that those skilled in the art can be with
It more fully understands the application and can be practiced, but illustrated embodiment is not as the restriction to the application.
As shown, this application provides a kind of rotation micromotion platform, the micromotion platform include a mounting platform 2,
By setting prop 1 in the rotatable fine motion being connected on the mounting platform 2 of screw thread, it is arranged on setting prop 1 in the fine motion
There is a swing rod 11, an endless glide 21 is provided on the mounting platform 2, a sliding block, institute are provided on the swing rod 11
The sliding block stated slidably is set in the endless glide 21, and the micromotion platform further includes one end and the pendulum
Bar 11 by first rotating shaft 71 rotate connection first connecting rod 51, with the first connecting rod 51 pass through 72 phase of the second shaft turn
The second connecting rod 52 of dynamic connection, is used the third connecting rod 53 connecting that rotated by third shaft 73 with the second connecting rod 52
In the feed screw nut's assembly for pushing the third connecting rod 53, the feed screw nut's assembly includes thread bush 41, across described
Thread bush 41 and the screw rod 42 that is threadedly coupled with 41 phase of thread bush, the screw rod 42 extend along X-direction, institute
The screw rod 42 stated has a pushing part 43 close to the end set of the swing rod 11, and the screw rod 42 is far from the swing rod
11 end set has a rotating part 44.The micromotion platform further includes a pedestal 3, and the mounting platform 2 is arranged in institute
On the pedestal 3 stated.The thread bush 41 is fixedly connected on the pedestal 3.The swing rod 11 connects with described first
Bar 51 is substantially vertical, the first connecting rod 51 and substantially vertical, the described second connecting rod 52 of second connecting rod 52 and described the
Three-link 53 is substantially vertical.It is rotated connection by a rotation axis 6 between the second connecting rod 52 and the pedestal 3.Institute
The rotation axis 6 stated to the distance between third shaft 73 is more than the distance between 6 to the second shaft 72 of rotation axis.Institute
A threaded post is provided on the mounting platform 2 stated, setting prop 1 is connected through a screw thread with the threaded post in the fine motion.Institute
The threaded post stated is arranged with 21 concentric of endless glide.
A kind of rotation micromotion platform of the application pushes connecting rod by a feed screw nut's assembly, passes through the power of multiple connecting rods
It transmits, swing rod 11 is made to swing, swing rod 11 drives setting prop 1 in fine motion to rotate, and reaches the Precision trimming of setting prop 1 in fine motion, the platform
It is simple in structure, it is very accurate to the adjusting of the height of setting prop in fine motion 1.
Embodiment described above is only the preferred embodiment lifted to absolutely prove the application, the protection model of the application
It encloses without being limited thereto.Those skilled in the art on the basis of the application made by equivalent substitute or transformation, in the application
Protection domain within.The protection domain of the application is subject to claims.
Claims (8)
1. a kind of rotation micromotion platform, it is characterised in that：The micromotion platform includes a mounting platform, rotatable by screw thread
The fine motion being connected on the mounting platform on setting prop, be provided with a swing rod, the peace on setting prop in the fine motion
It is provided with an endless glide on assembling platform, a sliding block is provided on the swing rod, the sliding block is slidably set to described
Endless glide in, the micromotion platform further includes that one end is rotated with the swing rod by first rotating shaft connect
One connecting rod, with the first connecting rod by the second shaft rotate the second connecting rod connecting, pass through with the second connecting rod
Third shaft rotates the third connecting rod of connection, the feed screw nut's assembly for pushing the third connecting rod, the lead screw
Nut assembly includes thread bush, across the thread bush and the screw rod that is mutually threadedly coupled with the thread bush, the spiral shell
Bar extends along X-direction, and the screw rod has a pushing part close to the end set of the swing rod, and the screw rod is far from institute
The end set for the swing rod stated has a rotating part.
2. a kind of rotation micromotion platform as described in claim 1, it is characterised in that：The micromotion platform further includes a bottom
Seat, the mounting platform are arranged on the pedestal.
3. a kind of rotation micromotion platform as claimed in claim 2, it is characterised in that：The thread bush is fixedly connected on described
Pedestal on.
4. a kind of rotation micromotion platform as claimed in claim 3, it is characterised in that：The swing rod and the first connecting rod
Substantially vertical, substantially vertical, the described second connecting rod of the first connecting rod and second connecting rod and the third connecting rod are substantially
Vertically.
5. a kind of rotation micromotion platform as claimed in claim 4, it is characterised in that：The second connecting rod and the pedestal
Between rotated connection by a rotation axis.
6. a kind of rotation micromotion platform as claimed in claim 5, it is characterised in that：The rotation axis is between third shaft
Distance be more than described rotation axis the distance between to the second shaft.
7. a kind of rotation micromotion platform as claimed in claim 6, it is characterised in that：A spiral shell is provided on the mounting platform
Line column, setting prop is connected through a screw thread with the threaded post in the fine motion.
8. a kind of rotation micromotion platform as claimed in claim 7, it is characterised in that：The threaded post and the annular are sliding
Rail concentric is arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721824292.6U CN207704870U (en) | 2017-12-22 | 2017-12-22 | A kind of rotation micromotion platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721824292.6U CN207704870U (en) | 2017-12-22 | 2017-12-22 | A kind of rotation micromotion platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207704870U true CN207704870U (en) | 2018-08-07 |
Family
ID=63028127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721824292.6U Expired - Fee Related CN207704870U (en) | 2017-12-22 | 2017-12-22 | A kind of rotation micromotion platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207704870U (en) |
-
2017
- 2017-12-22 CN CN201721824292.6U patent/CN207704870U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180807 Termination date: 20201222 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |