CN107945835A - One kind rotation micromotion platform - Google Patents
One kind rotation micromotion platform Download PDFInfo
- Publication number
- CN107945835A CN107945835A CN201711408659.0A CN201711408659A CN107945835A CN 107945835 A CN107945835 A CN 107945835A CN 201711408659 A CN201711408659 A CN 201711408659A CN 107945835 A CN107945835 A CN 107945835A
- Authority
- CN
- China
- Prior art keywords
- connecting rod
- rod
- platform
- micromotion platform
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Transmission Devices (AREA)
Abstract
This application provides one kind to rotate micromotion platform,Including a mounting platform,Pass through setting prop in the rotatable fine motion being connected on the mounting platform of screw thread,A swing rod is provided with the fine motion on setting prop,An endless glide is provided with the mounting platform,A sliding block is provided with swing rod,The sliding block is slidably arranged in the endless glide,Micromotion platform further includes one end and is rotated with the swing rod by first rotating shaft the first connecting rod being connected,Rotated the second connecting rod being connected with first connecting rod by the second shaft,Rotated the third connecting rod being connected with second connecting rod by the 3rd shaft,For promoting the feed screw nut's assembly of the third connecting rod,Feed screw nut's assembly includes thread bush,Through the thread bush and the screw rod that is mutually threadedly coupled with the thread bush,Screw rod extends along X-direction,Screw rod has a pushing part close to the end set of the swing rod,End set of the screw rod away from the swing rod has a rotating part.
Description
Technical field
This application involves one kind to rotate micromotion platform.
Background technology
Micro displacement workbench with high accuracy and quick response is in Modern Manufacturing Technology with extremely important status, quilt
It is considered as the important symbol of a national high technology development level.In ultra-precision machine tool, ultra-precise micro displacement workbench be used for into
Error compensation is carried out to system, realizes Ultra-precision Turning；In large scale integrated circuit manufacture, ultra-precise micro displacement workbench is used for
Micro- positioning and Fine Feed are carried out in lithographic equipment；In scanning probe microscopy, ultra-precise micro displacement workbench is used to measure sample
Surface topography, carries out nanoprocessing；In terms of bioengineering, ultra-precise micro displacement workbench is used to complete the operation to cell, real
Existing biological operation engineering；In terms of medical science, ultra-precise micro displacement workbench is used for microsurgery, to mitigate doctor
Burden, shortens operating time, improves success rate.Ultra-precise micro displacement workbench is also extensively used for fiber alignment, MEMS system
Processing, encapsulation and assembling, and in the field such as electrical-chemistry method.At present, the micro displacement workbench of in the market is mostly x, the level of y-axis
Leveling, without the function of turning angle, is insufficient for real work needs.
Apply for content
The application technical problems to be solved are to provide a kind of rotation micromotion platform.
In order to solve the above-mentioned technical problem, this application provides one kind to rotate micromotion platform, and the micromotion platform includes
One mounting platform, pass through setting prop in the rotatable fine motion being connected on the mounting platform of screw thread, fine motion rising
A swing rod is provided with column, an endless glide is provided with the mounting platform, a sliding block, institute are provided with the swing rod
The sliding block stated slidably is arranged in the endless glide, and the micromotion platform further includes one end and leads to the swing rod
Cross first rotating shaft rotate connection first connecting rod, rotated with the first connecting rod by the second shaft be connected second connect
Bar, rotated with the second connecting rod by the 3rd shaft be connected third connecting rod, for promoting the third connecting rod
Feed screw nut's assembly, the feed screw nut's assembly include thread bush, through the thread bush and with the thread bush phase
The screw rod of threaded connection, the screw rod extend along X-direction, and the screw rod has one close to the end set of the swing rod
Pushing part, end set of the screw rod away from the swing rod have a rotating part.
Preferably, the micromotion platform further includes a base, and the mounting platform is arranged on the base.
Preferably, the thread bush is fixedly connected on the base.
Preferably, the swing rod is substantially vertical with the first connecting rod, and the first connecting rod and second connecting rod are big
Cause vertical, described second connecting rod substantially vertical with the third connecting rod.
Preferably, rotated connection by a rotation axis between the second connecting rod and the base.
Preferably, the rotation axis to the distance between the 3rd shaft is more than the rotation axis between the second shaft
Distance.
Preferably, it is provided with a threaded post on the mounting platform, setting prop and the threaded post in the fine motion
It is connected through a screw thread.
Preferably, the threaded post is set with the endless glide concentric.
A kind of rotation micromotion platform of the application, promotes connecting rod by a feed screw nut's assembly, passes through the power of multiple connecting rods
Transmit, swing swing rod, swing rod drives setting prop rotation in fine motion, reaches the Precision trimming of setting prop in fine motion, platform structure letter
Single, the adjusting to the height of setting prop in fine motion is very accurate.
Brief description of the drawings
Fig. 1 is a kind of structure diagram for rotating micromotion platform,
Wherein：1st, setting prop in fine motion；2nd, mounting platform；3rd, base；11st, swing rod；21st, slide；41st, thread bush；42nd, spiral shell
Bar；43rd, pushing part；44th, rotating part；51st, first connecting rod；52nd, second connecting rod；53rd, third connecting rod；6th, rotation axis；71st, first turn
Axis；72nd, the second shaft；73rd, the 3rd shaft.
Embodiment
The application is described further with specific embodiment below in conjunction with the accompanying drawings, so that those skilled in the art can be with
More fully understand the application and can be practiced, but illustrated embodiment is not as the restriction to the application.
As shown in the figure, this application provides one kind rotate micromotion platform, the micromotion platform include a mounting platform 2,
By setting prop 1 in the rotatable fine motion being connected on the mounting platform 2 of screw thread, set in the fine motion on setting prop 1
There is a swing rod 11, an endless glide 21 is provided with the mounting platform 2, a sliding block, institute are provided with the swing rod 11
The sliding block stated slidably is arranged in the endless glide 21, and the micromotion platform further includes one end and the swing rod
11 by first rotating shaft 71 rotate connection first connecting rod 51, rotated by the second shaft 72 with the first connecting rod 51
The second connecting rod 52 of connection, with the second connecting rod 52 by the 3rd shaft 73 rotate the third connecting rod 53 being connected, be used for
Promote the feed screw nut's assembly of the third connecting rod 53, the feed screw nut's assembly includes thread bush 41, through described
Thread bush 41 and the screw rod 42 being threadedly coupled with 41 phase of thread bush, the screw rod 42 extends along X-direction, described
Screw rod 42 has a pushing part 43, end of the screw rod 42 away from the swing rod 11 close to the end set of the swing rod 11
Portion is provided with a rotating part 44.The micromotion platform further includes a base 3, and the mounting platform 2 is arranged on the bottom
On seat 3.The thread bush 41 is fixedly connected on the base 3.The swing rod 11 and the first connecting rod 51 are big
Cause vertical, substantially vertical, the described second connecting rod 52 of the first connecting rod 51 and second connecting rod 52 and the third connecting rod
53 is substantially vertical.Rotated connection by a rotation axis 6 between the second connecting rod 52 and the base 3.Described turns
The distance between 6 to the 3rd shaft 73 of moving axis is more than the distance between described shaft of rotation axis 6 to the second 72.The installation
A threaded post is provided with platform 2, setting prop 1 is connected through a screw thread with the threaded post in the fine motion.The screw thread
Column is set with 21 concentric of endless glide.
A kind of rotation micromotion platform of the application, promotes connecting rod by a feed screw nut's assembly, passes through the power of multiple connecting rods
Transmit, swing swing rod 11, swing rod 11 drives setting prop 1 in fine motion to rotate, and reaches the Precision trimming of setting prop 1 in fine motion, the platform
Simple in structure, the adjusting to the height of setting prop in fine motion 1 is very accurate.
Embodiment described above is only the preferred embodiment to absolutely prove the application and being lifted, the protection model of the application
Enclose not limited to this.The equivalent substitute or conversion that those skilled in the art are made on the basis of the application, in the application
Protection domain within.The protection domain of the application is subject to claims.
Claims (8)
1. one kind rotation micromotion platform, it is characterised in that：The micromotion platform includes a mounting platform, rotatable by screw thread
The fine motion being connected on the mounting platform on setting prop, be provided with a swing rod, the peace on setting prop in the fine motion
An endless glide is provided with assembling platform, a sliding block is provided with the swing rod, the sliding block is slidably arranged on described
Endless glide in, the micromotion platform further includes one end and is rotated with the swing rod by first rotating shaft be connected
One connecting rod, the second connecting rod being connected that rotated with the first connecting rod by the second shaft, pass through with the second connecting rod
3rd shaft rotates the third connecting rod of connection, the feed screw nut's assembly for promoting the third connecting rod, the screw
Nut assembly includes thread bush, through the thread bush and the screw rod that is mutually threadedly coupled with the thread bush, the spiral shell
Bar extends along X-direction, and the screw rod has a pushing part close to the end set of the swing rod, and the screw rod is away from institute
The end set for the swing rod stated has a rotating part.
A kind of 2. rotation micromotion platform as claimed in claim 1, it is characterised in that：The micromotion platform further includes a bottom
Seat, the mounting platform are arranged on the base.
A kind of 3. rotation micromotion platform as claimed in claim 2, it is characterised in that：The thread bush is fixedly connected on described
Base on.
A kind of 4. rotation micromotion platform as claimed in claim 3, it is characterised in that：The swing rod and the first connecting rod
Substantially vertical, substantially vertical, the described second connecting rod of the first connecting rod and second connecting rod and the third connecting rod are substantially
Vertically.
A kind of 5. rotation micromotion platform as claimed in claim 4, it is characterised in that：The second connecting rod and the base
Between rotated connection by a rotation axis.
A kind of 6. rotation micromotion platform as claimed in claim 5, it is characterised in that：The rotation axis is between the 3rd shaft
Distance be more than described rotation axis the distance between to the second shaft.
A kind of 7. rotation micromotion platform as claimed in claim 6, it is characterised in that：A spiral shell is provided with the mounting platform
Line column, setting prop is connected through a screw thread with the threaded post in the fine motion.
A kind of 8. rotation micromotion platform as claimed in claim 7, it is characterised in that：The threaded post and the annular are sliding
Rail concentric is set.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711408659.0A CN107945835A (en) | 2017-12-22 | 2017-12-22 | One kind rotation micromotion platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711408659.0A CN107945835A (en) | 2017-12-22 | 2017-12-22 | One kind rotation micromotion platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107945835A true CN107945835A (en) | 2018-04-20 |
Family
ID=61939731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711408659.0A Withdrawn CN107945835A (en) | 2017-12-22 | 2017-12-22 | One kind rotation micromotion platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107945835A (en) |
-
2017
- 2017-12-22 CN CN201711408659.0A patent/CN107945835A/en not_active Withdrawn
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20180420 |