CN207675296U - A kind of zigzag tread patterns threshold sensor for using spring structure as fixed electrode contacts - Google Patents
A kind of zigzag tread patterns threshold sensor for using spring structure as fixed electrode contacts Download PDFInfo
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- CN207675296U CN207675296U CN201721860044.7U CN201721860044U CN207675296U CN 207675296 U CN207675296 U CN 207675296U CN 201721860044 U CN201721860044 U CN 201721860044U CN 207675296 U CN207675296 U CN 207675296U
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Abstract
The utility model belongs to micro-electromechanical system field, and in particular to a kind of zigzag tread patterns threshold sensor for using spring structure as fixed electrode contacts.Weaken structure, movable electrode support column, movable electrode pendulum spring, movable mass, fixed electrode support column, fixed electrode and fixed electrode elastic contact including substrate, damping.It is fixedly installed damping on substrate and weakens structure, movable electrode support column and fixed electrode support column.Fixed electrode is vacantly connected on fixed electrode support column, and fixed electrode elastic contact one end is connect with fixed electrode, and the other end is connected by hollow out square.Movable electrode pendulum spring one end is connected with movable mass, the other end is connected with movable electrode support column and movable mass is suspended on damping weakens between structure and fixed electrode.The sensor introduces the principle of drive and transmission, passes through the stiffness optimization to two arrays of electrodes spring so that the making contact between electrode becomes the vibration transmittance process between flexure spring.
Description
Technical field
The utility model belongs to MEMS (MEMS) technical field, and in particular to a kind of to use spring structure as fixation
The zigzag tread patterns threshold sensor of electrode contacts.
Background technology
Micro-vibration threshold sensor as a kind of novel passive device, because its have many advantages, such as it is small, it is light-weight
And be widely used in various microelectronics systems, especially as the development of Internet of things system, various sensor devices and interconnection
Net is combined into a sensing network system, and these sensors are usually placed on remote ring because of certain special needs
In border or it is implanted the internal system for replacing battery difficulty, causes power supply difficult.Vibration threshold sensor is compared to acceleration
Meter and gyroscope need not maintain a stable electric current, parasitic power consumption zero, therefore become Internet of things system under normal conditions
The optimal selection of middle vibration monitoring.
Currently, the movable electrode of inertial oscillation threshold sensor is usually by " spring (cantilever beam)-mass block " sensing element
Composition makes fixed structure as electrode contacts are fixed on the side of mass block, has a certain distance between two electrodes, work as the external world
When acceleration is more than the given threshold of sensor, movable electrode is moved in its sensitive direction and is contacted with fixed electrode contacts, from
And realize the conducting function of threshold sensor, when threshold sensor is connected, when contact between movable electrode and fixed electrode
Between be the important parameter for influencing sensor performance, time of contact pulse width is big, then device contacts stability is high, at output signal
Reason is simple；Conversely, then increasing the intractability of output signal, therefore, extend the contact between movable electrode and fixed electrode
Time is the important means for improving threshold sensor performance.
Inertial sensor bearing inertia impact Sensitive Apparatus as one kind, is connect if the making contact between electrode is rigidity
It touches, not only time of contact is short, it could even be possible to causing the destruction of device, reduces the service life.Therefore, connecing between change electrode
Tactile mode is to improve the effective way of device performance, is found by being retrieved to existing literature, and Luke J. Currano etc. exist
《Sensors and Actuators》、《Sensor and actuator A》, 41-50 pages of 159 phase in 2010) delivered it is entitled
“Latching in a MEMS shock sensor:Modeling and experiments " (" enclosed type micro mechanical vibrations
Sensor：Modeling and experiment ") paper, it is proposed that a kind of enclosed type sensor sensitive to both direction on horizontal plane, it is this
Rigid collision leads to time of contact short problem although closed-end sensor has avoided electrode between, can be in sufficiently large mistake
The continuous output that signal is realized under acceleration effect is carried, but due to forming buckle structure between electrode after making contact, no
It obtains and does not increase tripper in the devices, this results in device architecture to become complicated so that being easy impaired and such
Structure undoubtedly greatly reduces the repeated work ability of device.Xu Qiu etc. exists《Sensors》Entitled " Design and are delivered
Optimization of a Stationary Electrode in a Vertically-Driven MEMS Inertial
Switch for Extending Contact Duration”（17 phase page 527 in 2017）Paper, it was recently reported that a kind of using more
The inertia switch that empty cantilever beam extends contact time as vertical fixed electrode contacts, but the fixation electrode elastic in the device
Flexible limited, manufacturing process restriction condition is more, and any cantilever beam defect may all lead to fixed electrode failure.It is comprehensive current
Invention Analysis on Results, only flexible springs could realize larger elastic deformation, and movable electrode is made to be collided with fixed electrode
Most effective Elastic Contact is realized in contact process, can effectively solve the problem that having for Elastic Contact between electrode there has been no a kind of at present
Imitate design scheme.
Invention content
The utility model in view of the deficiencies of the prior art, provides a kind of longitudinal direction for using spring structure as fixed electrode contacts
Drive threshold sensor.The sensor uses two groups of spring electrodes to be touched as the movable electrode of threshold sensor and fixed electrode
Point passes through the stiffness optimization to two arrays of electrodes spring so that the making contact between electrode becomes the vibration between flexure spring
Transmittance process.
To achieve the goals above, the utility model uses following technological means：It is a kind of to use spring structure as fixed electricity
The zigzag tread patterns threshold sensor of pole contact, including substrate, damping weaken structure, movable electrode support column, movable electrode suspension
Spring, movable mass, fixed electrode support column, fixed electrode cantilever beam and fixed electrode elastic contact.
It is fixed with damping on substrate and weakens structure, movable electrode support column and fixed electrode support column.Fixed electrode is outstanding
Arm beam is vacantly connected on fixed electrode support column, and fixed electrode elastic contact one end is connect with fixed electrode cantilever beam, another
End is vacantly being fixed among electrode cantilever beam by the connection of hollow out square.Movable electrode pendulum spring one end and movable mass
It is connected, the other end is connected with movable electrode support column and movable mass is suspended on damping decrease structure and fixed electrode cantilever
Between beam.
The utility model beneficial effect：It is touched for the rigidity between previous threshold sensor movable electrode and fixed electrode
It hits, is easy to damage device, and the problem that time of contact is short, it is proposed that is a kind of to use spring structure as vertical fixed electricity
Realize that zigzag tread patterns single vibration threshold sensor of the Elastic Contact to extend contact time, the sensor introduce in pole contact
The principle of drive and transmission, when two spring electrodes mutually collide, inertia impact is conducted by movable electrode to fixed electrode, and
The moment of electrode contact realizes the collaboration movement of two electrodes, both extends time of contact, the rigidity also avoided between electrode is touched
It hits and electrode is damaged.
Description of the drawings
Fig. 1 is overall structure diagram.
Fig. 2 is that damping weakens structure and support column arrangement schematic diagram.
Fig. 3 is movable mass structural schematic diagram.
Fig. 4 is fixed electrode cantilever beam structure schematic diagram.
Figure number explanation：1-substrate；2-dampings weaken structure；3-movable electrode support columns；4-movable electrodes are outstanding
Hang spring；5-movable mass；6-fixed electrode support columns；7-fixed electrode cantilever beams；8-fixed electrode elastic contacts.
Specific implementation mode
Technical solution is further illustrated as embodiment below in conjunction with attached drawing.It is a kind of to use spring structure as fixed electricity
The zigzag tread patterns threshold sensor of pole contact, including substrate 1, damping weaken structure 2, movable electrode support column 3, movable electrode and hang
Hang spring 4, movable mass 5, fixed electrode support column 6, fixed electrode cantilever beam 7 and fixed electrode elastic contact 8.
Substrate 1 is insulator, and damping is fixed on substrate 1 and weakens structure 2, movable electrode support column 3 and fixed electrode
Support column 6.
It is rectangle structure that damping, which weakens structure 2,100-300 microns long, 10-100 microns wide, 5-50 microns thick, is in
Quadrangle is symmetrical, and it is to weaken squeeze Film Damping Effect that damping, which weakens the effect of structure 2,.
Movable mass 5 is square structure, and 600-1500 microns of the length of side is 20-300 microns thick.Movable mass 5
Center is equipped with the deflector hole through movable mass 5, and four sides in 100-300 microns of deflector hole aperture, movable mass 5 are recessed
Channel-shaped.
Fixed electrode cantilever beam 7 is square frame structure, 1000-1900 microns of the length of side, and cantilever deck-siding 100-300 is micro-
Rice, four angle points of fixed electrode cantilever beam 7, which extend outwardly, to be vacantly connected on fixed electrode support column 6.
Movable electrode pendulum spring 4 is made of four groups of serpentine springs, 5-50 microns of spring line width, 5-50 microns thick.It can
4 one end of moving electrode pendulum spring is connected with movable mass 5, the other end is connected with movable electrode support column 3 and by movable quality
Block 5, which is suspended on damping, to be weakened between structure 2 and fixed electrode cantilever beam 7, and movable electrode pendulum spring 4 and movable mass 5 are right
Claim distribution.Movable mass 5 vacantly weakens above structure 2 5-100 microns in damping, and movable mass 5 is vacantly in fixed electrode
7 5-100 microns of lower section of cantilever beam.
Fixed electrode elastic contact 8 is four U-shaped springs, 8 one end of fixed electrode elastic contact and fixed electrode cantilever beam 7
Connection, the other end are connected by the hollow out square of inner circle foreign side vacantly on fixed electrode cantilever beam 7, spring line width 10-
100 microns, 5-50 microns thick, 200-600 microns of length.Hollow out square is located among fixed electrode cantilever beam 7, fixed electrode
Vertical range of the central point of resilient contact 8 away from 5 sideline of movable mass is 5-50 microns.
It is utilized when the extraneous acceleration more than given threshold acts on the utility model along 1 surface normal direction of dielectric substrate
When spring structure fixes electrode contacts as zigzag tread patterns, movable mass 5 is into contact with vacantly above movable mass 5
Fixed electrode elastic contact 8, to realize the conducting to external circuit in vertical direction.
Claims (5)
1. a kind of zigzag tread patterns threshold sensor for using spring structure as fixed electrode contacts, including substrate（1）, damping weaken
Structure（2）, movable electrode support column（3）, movable electrode pendulum spring（4）, movable mass（5）, fixed electrode support column
（6）, fixed electrode cantilever beam（7）With fixed electrode elastic contact（8）, it is characterised in that：Substrate（1）For insulator, substrate（1）
On be fixed with damping weaken structure（2）, movable electrode support column（3）With fixed electrode support column（6）, damping decrease structure
（2）It is symmetrical in quadrangle for rectangle structure；
The movable mass（5）It is square structure, movable mass（5）Center be equipped with run through movable mass（5）'s
Deflector hole；Fixed electrode cantilever beam（7）It is square frame structure, fixed electrode cantilever beam（7）Four angle points extend outwardly
Vacantly it is connected to fixed electrode support column（6）On；
The movable electrode pendulum spring（4）For serpentine spring, movable electrode pendulum spring（4）One end and movable mass（5）
The connected, other end and movable electrode support column（3）It is connected and by movable mass（5）It is suspended on damping and weakens structure（2）With it is solid
Fixed electrode cantilever beam（7）Between, movable electrode pendulum spring（4）With movable mass（5）It is symmetrical；
The fixed electrode elastic contact（8）For U-shaped spring, fixed electrode elastic contact（8）One end and fixed electrode cantilever beam
（7）Connection, the other end are by the hollow out square connection of inner circle foreign side vacantly in fixed electrode cantilever beam（7）On, hollow out is square
Morpheme is in fixed electrode cantilever beam（7）It is intermediate.
2. using spring structure as the zigzag tread patterns threshold sensor of fixed electrode contacts, feature according to claim 1
It is：Damping weakens structure（2）It is 100-300 microns long, it is 10-100 microns wide, it is 5-50 microns thick.
3. using spring structure as the zigzag tread patterns threshold sensor of fixed electrode contacts, feature according to claim 1
It is：Movable electrode pendulum spring（4）It is made of four groups of serpentine springs, 5-50 microns of spring line width, it is 5-50 microns thick.
4. using spring structure as the zigzag tread patterns threshold sensor of fixed electrode contacts, feature according to claim 1
It is：Movable mass（5）600-1500 microns of the length of side, 20-300 microns thick, movable mass（5）On deflector hole aperture
100-300 microns, movable mass（5）Vacantly weaken structure in damping（2）5-100 microns of top, movable mass（5）It is outstanding
Sky is in fixed electrode cantilever beam（7）5-100 microns of lower section, movable mass（5）Four sides be groove-like.
5. using spring structure as the zigzag tread patterns threshold sensor of fixed electrode contacts, feature according to claim 1
It is：Fixed electrode elastic contact（8）For four U-shaped springs, 10-100 microns of spring line width, 5-50 microns thick, length 200-
600 microns, fixed electrode elastic contact（8）Centre-to-centre spacing movable mass（5）The vertical range in sideline is 5-50 microns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721860044.7U CN207675296U (en) | 2017-12-27 | 2017-12-27 | A kind of zigzag tread patterns threshold sensor for using spring structure as fixed electrode contacts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721860044.7U CN207675296U (en) | 2017-12-27 | 2017-12-27 | A kind of zigzag tread patterns threshold sensor for using spring structure as fixed electrode contacts |
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| Publication Number | Publication Date |
|---|---|
| CN207675296U true CN207675296U (en) | 2018-07-31 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721860044.7U Active CN207675296U (en) | 2017-12-27 | 2017-12-27 | A kind of zigzag tread patterns threshold sensor for using spring structure as fixed electrode contacts |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207675296U (en) |
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2017
- 2017-12-27 CN CN201721860044.7U patent/CN207675296U/en active Active
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