CN207673507U - A kind of high-purity fluorine gas compressor - Google Patents
A kind of high-purity fluorine gas compressor Download PDFInfo
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- CN207673507U CN207673507U CN201721874459.XU CN201721874459U CN207673507U CN 207673507 U CN207673507 U CN 207673507U CN 201721874459 U CN201721874459 U CN 201721874459U CN 207673507 U CN207673507 U CN 207673507U
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Abstract
The utility model provides a kind of high-purity fluorine gas compressor, includes the guide cylinder being fixedly connected along length direction and working cylinder and driving mechanism, guide piston and working piston are respectively arranged in the guide cylinder and working cylinder；Driving mechanism can drive guide piston to be moved back and forth along guide cylinder length direction, working piston can follow guide piston to move, a diaphragm for separating two cylinders is provided between guide cylinder and working cylinder, the one end of working cylinder far from guide cylinder is provided with air entry and exhaust outlet, and air entry is connected with high-purity fluorine gas generating means.A kind of the advantages of high-purity fluorine gas compressor provided by the utility model, is：Sealing effect is good, and machine is simple in structure, and manufacturing cost is low, installation and easy to maintain, long lifespan, securely and reliably, has good promotion prospect.
Description
Technical field
The utility model is related to Compressor Technology field more particularly to a kind of high-purity fluorine gas compressors.
Background technology
Fluorine gas is widely used, is incorporated in the industries such as semi-conducting material, atomic energy industry, medical treatment and medicine extensively, and fluorine gas
Recycling fill bottle and pressurized delivered does not all leave freon compressor, but existing freon compressor structure is more complicated, operation
It is higher with maintenance cost, the development of fluorination industry is restricted to a certain extent, and since leakproofness is unreliable, there are certain peaces
Full hidden danger.
Utility model content
The technical problem to be solved by the utility model is to provide a kind of high-purity fluorine gas compressors of zero leakage.
The utility model is to solve above-mentioned technical problem by the following technical programs：
A kind of high-purity fluorine gas compressor, include the guide cylinder being fixedly connected along length direction and working cylinder and
Driving mechanism is respectively arranged with guide piston and working piston in the guide cylinder and working cylinder；Driving mechanism being capable of band
Action-oriented piston is moved back and forth along guide cylinder length direction, and working piston can follow guide piston to move, guide cylinder and
A diaphragm for separating two cylinders is provided between working cylinder, the one end of working cylinder far from guide cylinder is provided with suction
Gas port and exhaust outlet, air entry are connected with high-purity fluorine gas generating means.
Preferably, the working cylinder is fixedly installed a cylinder cap far from guide cylinder one end, is arranged among the cylinder cap
There is a baffle that cylinder cap is separated into two independent suction mufflers and discharge chamber；It is provided on the cylinder cover wall of suction muffler side and the external world
The air intake passage of connection is provided with the exhaust passage being in communication with the outside on the cylinder cover wall of discharge chamber side；Air entry is by suction muffler
It is connect with working cylinder, discharge chamber is connect by exhaust outlet with working cylinder.
Preferably, an inlet valve is provided at the air entry, exhaust ports are provided with an air bleeding valve, working cylinder internal pressure
When strong reduction, inlet valve is opened, exhaust valve closure；When pressure increases in working cylinder, air bleeding valve is opened, and inlet valve is closed.
Preferably, the inlet valve and air bleeding valve are check valve, and it is big that limitation air bleeding valve opening is provided at air bleeding valve
Small lift limiter.
Preferably, a connecting shaft is provided among the working piston, connecting shaft passes through diaphragm to connect guide piston, diaphragm
Surface can follow guide piston to change position.
Preferably, guide cylinder is bolted to connection with working cylinder, and diaphragm is clamped in guide cylinder and work
Between cylinder, diaphragm with guide piston and working piston junction and with connect the equal sealed set in shaft connection place.
Preferably, it is additionally provided with magnetic fluid before driving mechanism.
Preferably, the driving mechanism is motor, and guide cylinder is connected with crankcase, and magnetic fluid is fixed with crankcase to be connected
It connecing, motor is coaxially fixed with magnetic fluid, and the length direction that the shaft of magnetic fluid extends in crankcase and with guide cylinder is vertical,
An eccentric block is provided in shaft, eccentric block connects guide piston by connecting rod.
Preferably, eccentric block is connect by a bearing with connecting rod, and bearing inner ring is fixedly connected with eccentric block, outer race with
Connecting rod is fixedly connected.
Preferably, it is respectively arranged with balance weight and flywheel on the shaft axis of eccentric block both sides, flywheel is close to magnetic fluid.
A kind of the advantages of high-purity fluorine gas compressor provided by the utility model, is：Sealing effect is good, and machine is simple in structure, system
At low cost, installation and easy to maintain, long lifespan are made, securely and reliably, there is good promotion prospect.
Description of the drawings
Fig. 1 is a kind of schematic diagram for high-purity fluorine gas compressor that the embodiments of the present invention are provided.
Specific implementation mode
To make the purpose of this utility model, technical solution and advantage be more clearly understood, below in conjunction with specific embodiment, and
With reference to attached drawing, the utility model is described in further detail.
As shown in Figure 1, a kind of high-purity fluorine gas compressor, including working cylinder 1, guide cylinder 2, crankcase 3, magnetic fluid 4,
Driving mechanism 5, driving mechanism 5 is motor in the present embodiment.
1 one end of the working cylinder and guide cylinder 2 are spirally connected fixation, and the other end is provided with a cylinder cap 6；In working cylinder 1
It is provided with the working piston 11 that can be moved along its length, 1 end of working cylinder is provided with a gear among the cylinder cap 6
Cylinder cap 6 is separated into two independent suction mufflers 61 and discharge chamber 62 by plate 65；It is provided on 6 side wall of cylinder cap of 61 side of suction muffler
The air intake passage 63 being in communication with the outside, air intake passage 63 are connected with high-purity fluorine gas generating means (not shown), to give compression
Machine provides high-purity fluorine gas；It is provided with the exhaust passage 64 being in communication with the outside on 6 side wall of cylinder cap of 62 side of discharge chamber, thus by fluorine
Gas is discharged to store or use from compressor.
It is additionally provided with the air entry (not shown) being connect with working cylinder 1 on suction muffler 61, is also set on discharge chamber 62
It is equipped with the exhaust outlet (not shown) being connect with working cylinder 1.An inlet valve 12, exhaust ports setting are provided at air entry
There is an air bleeding valve 13, the inlet valve 12 and air bleeding valve 13 are check valve, when the volume of working cylinder 1 increases, pressure reduces
When, high-purity fluorine gas is open-top by inlet valve 12, and air bleeding valve 13 is pressed on exhaust ports by the gas at exhaust passage 64, to make height
Pure fluorine gas can enter in working cylinder 1.When the volume of working cylinder 1 reduces, and pressure increases, the gas in working cylinder 1
Inlet valve 12 is pressed at air entry, while air bleeding valve 13 is open-top, high-purity fluorine gas is discharged from exhaust passage 64, to complete
At a working cycles.
Air bleeding valve 13 is open excessive in order to prevent, when air bleeding valve 13 is opened there are one the direction of motion side settings of valve
Lift limiter 14.
Guide ring 15 and piston ring 16 are additionally provided on working piston 11, guide ring 15 and piston ring 16 are both secured to work
It on the side wall of piston 11, and is abutted respectively with the inner wall of working cylinder 1, to realize the close of working piston 11 and working cylinder 1
Envelope, and ensure the stabilization that working piston 11 is run.
The guide cylinder 2 and 1 junction of working cylinder are provided with a diaphragm 7 being clamped between two cylinders, lead
It is provided with a guide piston 21 into cylinder, a connecting shaft 17 is provided on working piston 11, connecting shaft 17 passes through diaphragm 7 and leads
It is fixedly connected to piston 21, diaphragm 7 is close with guide piston 21 and 11 junction of working piston and with 17 junction of connecting shaft
Envelope setting, prevents gas from leaking.
Crankcase 3 and 2 secure fit of guide cylinder, magnetic fluid 4 turn magnetic fluid 4 with after 5 coaxial secure fit of motor
Axis 41 extends in crankcase 3, and Independent Observer Program 41 is perpendicular to the length direction of guide cylinder 2.41 one end of shaft is fixed on magnetic fluid 4
In and pass through a support ring 42 and crankcase secure fit；41 other end of shaft extends to the end of crankcase 3 and by
32 secure fit of end cap of one bearing 31 and crankcase 3, is fixedly installed an eccentric block 33 in shaft 41, and eccentric block 33 can be with
It is rotated synchronously with shaft 41,33 outside of eccentric block is fixedly installed second bearing 34, and 34 outside of second bearing is fixed with connecting rod 22
Cooperation, 22 other end of connecting rod is by 3rd bearing 23 and 21 secure fit of guide piston, to enable 21 basis of guide piston
The movement of eccentric block 33 moves reciprocatingly.
When using a kind of high-purity fluorine gas compressor provided by the utility model, the shaft 41 of magnetic fluid 4 is driven by motor 7
Rotation, to drive eccentric block 33 to do eccentric motion, and is achieved in the reciprocating motion of guide piston 21, due to working piston 11
It is fixedly connected with guide piston 21, working piston 11 will be moved back and forth therewith to change the volume of working cylinder 1, to real
The absorption and discharge of existing high-purity fluorine gas.The compressor realizes first of sealing by the way that piston ring 16 is arranged on working piston 11,
Then second sealing is realized by diaphragm 7, when breakage is used for a long time in diaphragm 7, last sealing together is completed by magnetic fluid 4,
Ensure that fluorine gas leakage will not occur, ensures safe to use.
In order to balance the reciprocal inertia force and rotating inertia force of eccentric block 33, between first bearing 31 and eccentric block 33,
The eccentric balancing blocks 35 of one and 33 weight balancing of eccentric block are provided in shaft 41, while between eccentric block 33 and support ring 42
Shaft 41 on be fixedly installed one follow shaft 41 rotate flywheel 36, prevent shaft 41 beat.
In order to avoid fluorine gas is reacted with compressor material, all parts being likely to contact with fluorine gas in compressor
Be that fluorine-resistant material is made, and internal all bearings are all made of perfluoroether grease lubrication, to prevent all can with it is high-purity
The material for spending fluorine gas reaction exists.Meanwhile the guide ring 15 of high-purity fluorine gas compressor provided by the utility model, support ring 42 etc.
It is all made of nonmetallic self-lubricating material manufacture, such as filled polytetrafluoroethylene filled graphite, coordinates above-mentioned closed type grease lubrication axis
It holds, entire compressor is made not need additional lubricating oil, i.e., it is easy to use, and reduce pollution.
Particular embodiments described above has carried out into one the purpose of this utility model, technical solution and advantageous effect
Step is described in detail, it should be understood that the foregoing is merely specific embodiment of the utility model, are not limited to this reality
With novel, under the premise of not departing from the spirit and principles of the utility model, those of ordinary skill in the art are to the utility model
Any modification, equivalent substitution, improvement and etc. done, should all fall into the utility model claims book determination protection domain it
It is interior.
Claims (10)
1. a kind of high-purity fluorine gas compressor, it is characterised in that：Include the guide cylinder being fixedly connected along length direction and work
Make cylinder and driving mechanism, guide piston and working piston are respectively arranged in the guide cylinder and working cylinder；Driving
Mechanism can drive guide piston to be moved back and forth along guide cylinder length direction, and working piston can follow guide piston to move,
Be provided with a diaphragm for separating two cylinders between guide cylinder and working cylinder, working cylinder far from guide cylinder one
End is provided with air entry and exhaust outlet, and air entry is connected with high-purity fluorine gas generating means.
2. a kind of high-purity fluorine gas compressor according to claim 1, it is characterised in that：The working cylinder is far from guiding gas
Cylinder one end is fixedly installed a cylinder cap, be provided among the cylinder cap baffle by cylinder cap be separated into two independent suction mufflers and
Discharge chamber；It is provided with the air intake passage being in communication with the outside on the cylinder cover wall of suction muffler side, is set on the cylinder cover wall of discharge chamber side
It is equipped with the exhaust passage being in communication with the outside；Suction muffler is connect by air entry with working cylinder, and exhaust outlet is by discharge chamber and work gas
Cylinder connects.
3. a kind of high-purity fluorine gas compressor according to claim 2, it is characterised in that：A suction is provided at the air entry
Air valve, exhaust ports are provided with an air bleeding valve, and when pressure reduces in working cylinder, inlet valve is opened, exhaust valve closure；Work gas
When pressure increases in cylinder, air bleeding valve is opened, and inlet valve is closed.
4. a kind of high-purity fluorine gas compressor according to claim 3, it is characterised in that：The inlet valve and air bleeding valve are
Check valve is provided with the lift limiter of a limitation air bleeding valve openings of sizes at air bleeding valve.
5. a kind of high-purity fluorine gas compressor according to claim 1, it is characterised in that：It is provided among the working piston
One connecting shaft, connecting shaft pass through diaphragm to connect guide piston, and membrane surface can follow guide piston to change position.
6. a kind of high-purity fluorine gas compressor according to claim 5, it is characterised in that：Guide cylinder passes through with working cylinder
Bolt is fixedly connected, and diaphragm is clamped between guide cylinder and working cylinder, and diaphragm is connect with guide piston and working piston
Place and with connect the equal sealed set in shaft connection place.
7. a kind of high-purity fluorine gas compressor according to claim 1, it is characterised in that：It is additionally provided with magnetic before driving mechanism
Fluid.
8. a kind of high-purity fluorine gas compressor according to claim 7, it is characterised in that：The driving mechanism is motor, is led
It is connected with crankcase to cylinder, magnetic fluid is fixedly connected with crankcase, and motor is coaxially fixed with magnetic fluid, and the shaft of magnetic fluid is prolonged
The length direction reached in crankcase and with guide cylinder is vertical, and an eccentric block is provided in shaft, and eccentric block is connected by connecting rod
Connect guide piston.
9. a kind of high-purity fluorine gas compressor according to claim 8, it is characterised in that：Eccentric block passes through a bearing and connecting rod
Connection, bearing inner ring are fixedly connected with eccentric block, and outer race is fixedly connected with connecting rod.
10. a kind of high-purity fluorine gas compressor according to claim 8, it is characterised in that：On the shaft axis of eccentric block both sides
It is respectively arranged with balance weight and flywheel, flywheel is close to magnetic fluid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721874459.XU CN207673507U (en) | 2017-12-27 | 2017-12-27 | A kind of high-purity fluorine gas compressor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721874459.XU CN207673507U (en) | 2017-12-27 | 2017-12-27 | A kind of high-purity fluorine gas compressor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207673507U true CN207673507U (en) | 2018-07-31 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721874459.XU Active CN207673507U (en) | 2017-12-27 | 2017-12-27 | A kind of high-purity fluorine gas compressor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107905976A (en) * | 2017-12-27 | 2018-04-13 | 安庆市佰联无油压缩机有限公司 | A kind of high-purity fluorine gas compressor |
| CN112727730A (en) * | 2021-01-21 | 2021-04-30 | 宝华海恩斯压缩机(上海)有限公司 | Piston cylinder arrangement and method for operating a piston cylinder arrangement |
-
2017
- 2017-12-27 CN CN201721874459.XU patent/CN207673507U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107905976A (en) * | 2017-12-27 | 2018-04-13 | 安庆市佰联无油压缩机有限公司 | A kind of high-purity fluorine gas compressor |
| CN107905976B (en) * | 2017-12-27 | 2024-05-28 | 安庆市佰联无油压缩机有限公司 | High-purity fluorine gas compressor |
| CN112727730A (en) * | 2021-01-21 | 2021-04-30 | 宝华海恩斯压缩机(上海)有限公司 | Piston cylinder arrangement and method for operating a piston cylinder arrangement |
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