CN207623549U - Wafer transmission detection sensing device - Google Patents
Wafer transmission detection sensing device Download PDFInfo
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- CN207623549U CN207623549U CN201721845058.1U CN201721845058U CN207623549U CN 207623549 U CN207623549 U CN 207623549U CN 201721845058 U CN201721845058 U CN 201721845058U CN 207623549 U CN207623549 U CN 207623549U
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- sensor
- fixed disc
- sensing device
- light transmission
- wafer
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Wafer transmission detection sensing device, including fixed disc, light transmission disk, sensor stand and sensor.The sensor is connected with sensor stand, and sensor stand coordinates with fixed disc, and the light transmission disk is connected with fixed disc.The sensor stand, there is bending in one end, has notch on folding surface, for fixing sensor signal jointing；The sensor other end is there are two folding face, hole in folding face, for being fixed with fixed disc.The fixed disc, using teflon material, in annular shape.The utility model has the advantages that：It is simple in structure, it is easily assembled to, wafer position detection is accurate.
Description
Technical field
The utility model is related to semiconductor crystal wafer manufacturing field more particularly to wafer transmission detection sensing devices.
Background technology
Semiconductor integrated circuit manufacturing field is the industry that country greatly develops in recent years, is national future economy pillar production
Industry.Semiconductor production equipment is generally gathered around there are one transmission cavity and multiple reaction chambers, and wafer production is passed through multiple steps, needed anti-
It answers and is repeatedly transmitted between chamber, how to detect that judge whether wafer reaches designated position in transmit process particularly important.This
Utility model will design a probe of wafer sensing device, and whether detection wafer reaches specified transmission position.
Invention content
To achieve the above object, technical solution provided by the utility model is：Wafer transmission detection sensing device, including
Fixed disc, light transmission disk, sensor stand and sensor.The sensor is connected with sensor stand, sensor stand
Coordinate with fixed disc, the light transmission disk is connected with fixed disc;
The sensor, is connected with sensor stand, and light emitting end is towards light transmission disk;
There are bending in the sensor stand, one end, have notch on folding surface, are connect for fixing sensor signal connecting line
Head；The sensor other end is there are two folding face, hole in folding face, for being fixed with fixed disc;
The fixed disc, using teflon material, in annular shape, internal diameter is less than light transmission disk diameter；Fixed disc
On have multiple threaded holes, fixed respectively with sensor stand and semiconductor chambers;
The light transmission disk, material use quartz glass, and hardness is high, and material compactness is good, can keep high vacuum
Degree；Light transmission disk form is rounded, and diameter is more than fixed disc internal diameter;
In use, first fixing sensor by two circular cavities among sensor stand, sensor signal wire terminal is fixed
In sensor stand folding surface notch；Then, sensor and fixed disc are locked by screw；Finally, light transmission disk is put
It sets below fixed disc.Assembled detection sensor device is fixed on cavity, probe of wafer work is carried out;
The utility model has the advantages that：It is simple in structure, it is easily assembled to, wafer position detection is accurate.
Description of the drawings
Fig. 1 is wafer transmission detection sensing device entirety assembling schematic diagram；
Fig. 2 is wafer transmission detection sensing device fixed disc schematic diagram；
Fig. 3 is wafer transmission detection sensing device sensor stand schematic diagram；
1. fixed disc；2. light transmission disk；3. sensor stand；4. sensor.
Specific implementation mode
The utility model is described further with reference to the accompanying drawings and examples, the utility model preferred embodiment is：
Referring to attached drawing 1, attached drawing 2 and attached drawing 3.Technical solution provided by the utility model is：Wafer transmission detection sensing device, including
Fixed disc 1, light transmission disk 2, sensor stand 3 and sensor 4.The sensor 4 is connected with sensor stand 3, sensing
Device holder 3 coordinates with fixed disc 1, and the light transmission disk 2 is connected with fixed disc 1.In use, first sensor 4 is passed through
3 intermediate two circular cavities of sensor stand are fixed, and 4 signal wire joint of sensor is fixed on 3 folding surface notch of sensor stand；So
Afterwards, sensor 4 and fixed disc 1 are locked by screw；Finally, light transmission disk 2 is placed on 1 lower section of fixed disc.By group
The detection sensor device installed is fixed on cavity, carries out probe of wafer work;
Example described above is only the preferred embodiments of the utility model, and the implementation model of the utility model is not limited with this
It encloses.Therefore the variation that all shape, principles according to the utility model are done, it should all cover in scope of protection of the utility model.
Claims (4)
1. wafer transmission detection sensing device, including fixed disc, light transmission disk, sensor stand and sensor；The biography
Sensor is connected with sensor stand, and sensor stand coordinates with fixed disc, and the light transmission disk is connected with fixed disc.
2. wafer transmission detection sensing device according to claim 1, it is characterised in that：The sensor stand, one
There is bending at end, has notch on folding surface；The sensor other end is there are two folding face, hole in folding face, for solid with fixed disc
It is fixed.
3. wafer transmission detection sensing device according to claim 1, it is characterised in that：The fixed disc uses
Teflon material, in annular shape, internal diameter is less than light transmission disk diameter；Have multiple threaded holes on fixed disc, respectively with sensor
Holder and semiconductor chambers are fixed.
4. wafer transmission detection sensing device according to claim 1, it is characterised in that：The light transmission disk, material
Using light transmission disk, shape is rounded, and diameter is more than fixed disc internal diameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721845058.1U CN207623549U (en) | 2017-12-26 | 2017-12-26 | Wafer transmission detection sensing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721845058.1U CN207623549U (en) | 2017-12-26 | 2017-12-26 | Wafer transmission detection sensing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207623549U true CN207623549U (en) | 2018-07-17 |
Family
ID=62830090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721845058.1U Active CN207623549U (en) | 2017-12-26 | 2017-12-26 | Wafer transmission detection sensing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207623549U (en) |
-
2017
- 2017-12-26 CN CN201721845058.1U patent/CN207623549U/en active Active
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