CN207619518U - A kind of optical vacuum coating system - Google Patents
A kind of optical vacuum coating system Download PDFInfo
- Publication number
- CN207619518U CN207619518U CN201721840999.6U CN201721840999U CN207619518U CN 207619518 U CN207619518 U CN 207619518U CN 201721840999 U CN201721840999 U CN 201721840999U CN 207619518 U CN207619518 U CN 207619518U
- Authority
- CN
- China
- Prior art keywords
- side window
- window plate
- clamping part
- haulage chain
- plated film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model is related to material processing unit (plant) technical field, and it is an object of the present invention to provide a kind of uniform optical vacuum coating system of plated film.Used technical solution is：A kind of optical vacuum coating system, including vacuum chamber, vacuum pump and side window plate, the bottom edge of the side window plate and vacuum chamber are side walls hinged；Loop pulling chain is arranged in the side window plate inner wall, and guide rail is arranged in the horizontal segment of the haulage chain；The sleeve vertical with side window plate is arranged in side of the haulage chain far from side window plate, and described sleeve one end is welded with haulage chain, the other end and clamping device are connect；Diaphragm plate is arranged in the side window plate inner wall, and haulage chain is separated into the second plated film portion in the first filming portion and lower section of top by the diaphragm plate, and the first filming portion and the second plated film portion are respectively provided with evaporation coating device；The evaporation coating device includes the vapor deposition nozzle being fixed at the top of l-shaped rod, the vertical shaft welding of the l-shaped rod bottom one end and servo motor far from its inflection.The utility model plated film is uniform.
Description
Technical field
The utility model is related to material processing unit (plant) technical fields, and in particular to a kind of optical vacuum coating system.
Background technology
Vacuum coating technology is a kind of new technology of novel materials synthesis and processing, is the weight of field of surface engineering technique
Want component part.Vacuum coating technology is the plated film for coating one layer of property in the surface of solids using physics, chemical means, from
And the surface of solids is made to have wear-resistant, high temperature resistant, corrosion-resistant, anti-oxidant, radiation protection etc. many excellent better than solid material itself
More performance.Existing vacuum coater when carrying out plated film to optical mirror slip, fix mostly by the vapor deposition point on optical mirror slip,
This can cause the plated film for being vaporized on optical lens surface uneven；Therefore, it is necessary to study a kind of uniform optical vacuums of plated film
Coating system.
Invention content
The purpose of this utility model is to provide a kind of uniform optical vacuum coating systems of plated film.
To achieve the above object, the technical solution adopted in the utility model is：
A kind of optical vacuum coating system, including vacuum chamber, the vacuum chamber setting vacuum pump and side window plate, the side window
The bottom edge of plate and vacuum chamber are side walls hinged；The haulage chain of the side window plate inner wall setting annular, the horizontal segment of the haulage chain are set
Set guide rail；The sleeve vertical with side window plate, described sleeve one end and haulage chain is arranged in side of the haulage chain far from side window plate
Welding, the other end and clamping device connect；Diaphragm plate is arranged in the side window plate inner wall, and haulage chain is separated by the diaphragm plate
The second plated film portion in the first filming portion and lower section of side, the first filming portion and the second plated film portion are both provided with evaporation coating device；
The evaporation coating device includes the vapor deposition nozzle being fixed at the top of l-shaped rod, the one end of the l-shaped rod bottom far from its inflection with watch
Take the vertical shaft welding of motor.
Preferably, the clamping device includes symmetrically arranged first clamping part and the second clamping part, first clamping
Portion and the second clamping part are arc-shaped；The both ends of first clamping part and the second clamping part are correspondingly arranged on tapped through hole, and
Bolt by being threaded through tapped through hole connects；The middle part of first clamping part is arranged connecting rod, and the connecting rod is far from the
One end of one clamping part is arranged external screw thread, the internal thread of the sleeve setting and the cooperation of connecting rod external screw thread and with connecting rod spiral shell
Line connects.
The beneficial effects of the utility model embody a concentrated reflection of, and the utility model is all provided in the first filming portion and the second plated film portion
Evaporation coating device is set, the vapor deposition nozzle of evaporation coating device is fixed on the top of l-shaped rod, the one end of l-shaped rod bottom far from its inflection
It is welded with the vertical shaft of servo motor, vapor deposition nozzle can make circumference fortune under the driving of servo motor around the shaft of servo motor
Dynamic, the shaft of servo motor can be corresponding with the center of optical mirror slip, and so, vapor deposition nozzle can be made around the center of optical mirror slip
Circular motion is uniformly deposited the surface of optical mirror slip, compared with the coating apparatus of common fixed vapor deposition point, vapor deposition
Effect is more preferable, plated film evenly.Further, since haulage chain is around circularizing, when being fixed on the optical mirror slip of clamping device from the
When one plated film portion is transported to the second plated film portion, one side upward can be turned to downward, and so, the two sides of optical mirror slip is just
It can be deposited respectively in the first filming portion and the second plated film portion, optical mirror slip two sides coating film thickness can be made consistent, compared
The two sides of optical mirror slip is deposited simultaneously, avoid coating of optical lens downward one side thickness, upward while thin situation
Occur.And the utility model is achieved that the gradation to the two sides of optical mirror slip is deposited by the way that the haulage chain of annular is arranged, and is not required to
Additional tipping arrangement is added, production cost is reduced.
Description of the drawings
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the connection diagram of clamping device and haulage chain.
Specific implementation mode
1~2 the utility model is expanded on further below in conjunction with the accompanying drawings.
A kind of optical vacuum coating system, including vacuum chamber 1, vacuum pump 2 and side window plate 3 is arranged in the vacuum chamber 1, described
The bottom edge of side window plate 3 and vacuum chamber 1 are side walls hinged；It should be understood that side window plate 3 can outwardly be rotated along its bottom edge, to
Opening side luffer boards 3.Guide rail 5 is arranged in the haulage chain 4 of 3 inner wall of the side window plate setting annular, the horizontal segment of the haulage chain 4；It answers
When understanding, guide rail 5 can be such that the height of the haulage chain 4 of horizontal segment is consistent, under preventing the haulage chain 4 of horizontal segment from relaxing
It hangs down.The sleeve 6 vertical with side window plate 3,6 one end of the sleeve and haulage chain is arranged in side of the haulage chain 4 far from side window plate 3
4 welding, the other end and clamping device 7 connect；It should be understood that clamping device 7 is for fixing optical mirror slip to be coated.Institute
Side window plate 3 inner wall setting diaphragm plate 8 is stated, haulage chain 4 is separated into the first filming portion 9 and lower section of top by the diaphragm plate 8
Second plated film portion 10,9 and second plated film portion 10 of the first filming portion are both provided with evaporation coating device；It should be understood that fixed
When the optical mirror slip of clamping device 7 is transported to the second plated film portion 10 from the first filming portion 9, one side upward can be turned to court
Under.The evaporation coating device includes the vapor deposition nozzle 12 for being fixed on 11 top of l-shaped rod, and 11 bottom of the l-shaped rod is far from its inflection
The vertical shaft of one end and servo motor 13 weld.
Further, the clamping device 7 includes 14 and second clamping part 15 of symmetrically arranged first clamping part, and described the
One clamping part 14 and the second clamping part 15 are arc-shaped；First clamping part 14 and the both ends of the second clamping part 15 are correspondingly arranged
Have a tapped through hole, and by be threaded through that the bolt of tapped through hole connects；Connecting rod 16 is arranged in the middle part of first clamping part 14,
External screw thread is arranged in the one end of the connecting rod 16 far from the first clamping part 14, and the setting of the sleeve 6 is matched with 16 external screw thread of connecting rod
The internal thread of conjunction is simultaneously threadedly coupled with connecting rod 16.It should be understood that the clamping device 7 of the utility model loads and unloads eyeglass side
Just, optical mirror slip can be fixed on clamping device 7 in the pretreatment before plated film and the following process after plated film and carry out,
When carrying out different process operations every time, clamping device 7 is loaded and unloaded, it in this way can be to avoid frequent handling optical mirror slip and light
Lens contacts are learned, optical mirror slip is polluted or is worn.
The embodiment of the utility model is described below, unscrews the bolt of clamping device 7, to the first clamping part 14 and second
It is put into optical mirror slip between clamping part 15, then tightens bolt, optical mirror slip is fixed；Put down the side window plate of vacuum chamber 1
3, the connecting rod 16 of clamping device 7 and the sleeve 6 on haulage chain 4 is affixed, and adjust the angle of clamping device 7, make clamping machine
Optical mirror slip is in horizontal positioned state when structure 7 is located at the first filming portion 9 and the second plated film portion 10.Then side window plate 3 is shut, and
Starting vacuum pump 2 to extract the air in vacuum chamber 1 out, then starts haulage chain 4, clamping device 7 can be moved with haulage chain 4, when
When clamping device 7 is located at the first clamping part 14 or the second clamping part 15, optical mirror slip can be deposited in evaporation coating device, due to steaming
The vapor deposition nozzle 12 of plating appts is fixed on the top of l-shaped rod 11,11 bottom of l-shaped rod one end and servo motor far from its inflection
13 vertical shaft welding, the shaft that vapor deposition nozzle 12 can be around servo motor 13 under the driving of servo motor 13 make circumference fortune
Dynamic, the shaft of servo motor 13 can be corresponding with the center of optical mirror slip, and so, vapor deposition nozzle 12 can be uniformly to light
The surface for learning eyeglass is deposited；When the optical mirror slip for being fixed on clamping device 7 is transported to the second plated film portion from the first filming portion 9
When 10, one side upward can be turned to downward, to which the another side of optical mirror slip be deposited.
For the utility model during to the vapor deposition of optical mirror slip, vapor deposition nozzle 12 can make circumference around the center of optical mirror slip
Movement, is uniformly deposited the surface of optical mirror slip, compared with the coating apparatus of common fixed vapor deposition point, evaporation effect
More preferably, plated film is evenly.In addition, the utility model is by several times deposited the two sides of optical mirror slip, optical mirror slip two can be made
Face coating film thickness is consistent, avoid coating of optical lens downward it is thick, upward while thin situation generation；And this practicality is new
Type is achieved that the gradation to the two sides of optical mirror slip is deposited by the way that the haulage chain 4 of annular is arranged, and need not add additional turn over
Turn equipment, reduces production cost.
Although the foregoing describe specific embodiment of the present utility model, it will be appreciated by those of skill in the art that
Under the premise of without departing substantially from the principles of the present invention and essence, many changes and modifications may be made,
But these change and modification each fall within the scope of protection of the utility model.
Claims (2)
1. a kind of optical vacuum coating system, it is characterised in that：Including vacuum chamber（1）, the vacuum chamber（1）Vacuum pump is set
（2）With side window plate（3）, the side window plate（3）Bottom edge and vacuum chamber（1）It is side walls hinged；The side window plate（3）Ring is arranged in inner wall
The haulage chain of shape（4）, the haulage chain（4）Horizontal segment be arranged guide rail（5）；The haulage chain（4）Far from side window plate（3）One
Side is arranged and side window plate（3）Vertical sleeve（6）, the sleeve（6）One end and haulage chain（4）Welding, the other end and clamping machine
Structure（7）Connection；The side window plate（3）Diaphragm plate is arranged in inner wall（8）, the diaphragm plate（8）By haulage chain（4）It is separated into top
The first filming portion（9）With the second plated film portion of lower section（10）, the first filming portion（9）With the second plated film portion（10）It is both provided with
Evaporation coating device；The evaporation coating device includes being fixed on l-shaped rod（11）The vapor deposition nozzle at top（12）, the l-shaped rod（11）Bottom
One end far from its inflection and servo motor（13）Vertical shaft welding.
2. a kind of optical vacuum coating system according to claim 1, it is characterised in that：The clamping device（7）Including
Symmetrically arranged first clamping part（14）With the second clamping part（15）, first clamping part（14）With the second clamping part（15）
It is arc-shaped；First clamping part（14）With the second clamping part（15）Both ends be correspondingly arranged on tapped through hole, and by wearing
The bolt of tapped through hole connects；First clamping part（14）Middle part be arranged connecting rod（16）, the connecting rod（16）Far
From the first clamping part（14）One end be arranged external screw thread, the sleeve（6）Setting and connecting rod（16）The interior spiral shell of external screw thread cooperation
Line and and connecting rod（16）It is threadedly coupled.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721840999.6U CN207619518U (en) | 2017-12-26 | 2017-12-26 | A kind of optical vacuum coating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721840999.6U CN207619518U (en) | 2017-12-26 | 2017-12-26 | A kind of optical vacuum coating system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207619518U true CN207619518U (en) | 2018-07-17 |
Family
ID=62830210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721840999.6U Expired - Fee Related CN207619518U (en) | 2017-12-26 | 2017-12-26 | A kind of optical vacuum coating system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207619518U (en) |
-
2017
- 2017-12-26 CN CN201721840999.6U patent/CN207619518U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180717 Termination date: 20191226 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |