CN207601195U - Surface charge DYNAMIC DISTRIBUTION measuring device in a kind of dielectric barrier discharge - Google Patents
Surface charge DYNAMIC DISTRIBUTION measuring device in a kind of dielectric barrier discharge Download PDFInfo
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- CN207601195U CN207601195U CN201721839181.2U CN201721839181U CN207601195U CN 207601195 U CN207601195 U CN 207601195U CN 201721839181 U CN201721839181 U CN 201721839181U CN 207601195 U CN207601195 U CN 207601195U
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- discharge
- surface charge
- electrode
- discharge cell
- dielectric barrier
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Abstract
The utility model discloses surface charge DYNAMIC DISTRIBUTION measuring device in a kind of dielectric barrier discharge, belong to dielectric barrier discharge field, it is related to medium blocking discharge electrode structure design, it includes discharge cell, glass chamber, discharge cell fixed component and electric discharge device support member；The discharge cell is made of high-field electrode, measuring electrode, ground electrode and surface charge measurement unit and some insulating parts, these components are tightly secured together by bolt；It is opened on the glass chamber there are two observation window, convenient for being observed to the surface charge generated in electric discharge, discharge spectrum and electric discharge image；The discharge cell fixed component is used to discharge cell being fixed on glass chamber；Electric discharge device support member is used to be supported entire electric discharge device.The utility model has the advantages such as small and measurement error is small, and while surface charge DYNAMIC DISTRIBUTION in measuring dielectric barrier discharge, other related discharge parameters accurately can also be measured.
Description
Technical field
The utility model belongs to dielectric barrier discharge field, is related to surface charge DYNAMIC DISTRIBUTION in a kind of dielectric barrier discharge
Measuring device.
Background technology
At present, the dielectric barrier discharge under plate electrode structures is the important way for generating low temperature plasma.Practical
Commercial Application needs dielectric barrier discharge to be operated under uniform discharge mode, and then generates a large amount of uniform plasmas or to material
Material surface is modified without causing to damage to material.Dielectric barrier discharge is easily achieved Uniform Discharge at low pressure, but
Due to realizing that the extras needed for low pressure can increase the cost of practical application in industry, medium under atmospheric pressure is realized in research
The effective way and its mechanism of production for stopping Uniform Discharge are of great significance for commercial Application.
Surface charge has great influence to the electric discharge form and uniformity of dielectric barrier discharge.Surface charge effect is ground
Study carefully is that atmosphere medium stops the importance that Uniform Discharge is studied.In the research of surface charge effect, measurement surface is needed
Charge DYNAMIC DISTRIBUTION, while also discharge spectrum, electric discharge a variety of discharge parameters such as image and discharge current are measured.It utilizes
When plate electrode carries out dielectric barrier discharge, the depth of parallelism between plate electrode is affected to surface charge observation, therefore
In observation electric discharge during surface charge DYNAMIC DISTRIBUTION, the depth of parallelism needs of electrode structure reach very high precision.In addition, many scientific researches
The discharging structure of design is put in metal cavity and carries out discharge test by personnel, is observed in discharge process by the window of cavity
The information such as spectrum and electric discharge image.Since electrode has larger distance with window in the cavity, the light intensity observed can be by
To larger impact.Under certain electric discharge forms, the pulsewidth of discharge current pulse only had for tens nanoseconds, using general current coil or
It is larger that resistance carries out current measurement errors.In order to be furtherd investigate to discharge mechanism, whole device is also wanted can be to electrode knot
Emission spectrum in the electric discharge image and discharge process on structure side and ground is observed.
Invention content
In view of the above-mentioned drawbacks of the prior art or insufficient and research specific requirements, the purpose of this utility model exist
The surface charge DYNAMIC DISTRIBUTION measuring device in a kind of dielectric barrier discharge of offer, the surface charge in dielectric barrier discharge is measured
It, can also be to the transmitting in the electric discharge image and discharge process of discharge current waveform, side and bottom surface while DYNAMIC DISTRIBUTION
Spectrum is accurately measured.
In order to achieve the above object, the utility model uses following technical scheme.
Surface charge DYNAMIC DISTRIBUTION measuring device in a kind of dielectric barrier discharge, including discharge cell, glass chamber, electric discharge
Unit fixed component and electric discharge device support member；The discharge cell is by high-field electrode, measuring electrode, ground electrode and surface electricity
Lotus measuring unit and insulation fixed component are formed, and fixed component is according to high-field electrode fixed component, surface charge measurement unit
The sequence of fixed component, insulating part and ground electrode, by being tightly secured together by the bolt that insulating materials is made, surface charge
Measuring unit is in direct contact with insulating part, and is fixed by surface charge measurement unit fixed component, surface charge measurement list
First fixed component and insulating part are glued together, and measuring electrode is fixed by the interference fit with insulating part；The glass
Air inlet, gas outlet are provided on cavity, convenient for being passed through the inert gas of gas discharge, opened on glass chamber there are two observe
Window is observed convenient for the electric discharge image to the surface charge of medium, discharge spectrum and bottom surface in electric discharge and side；It is described to put
Electric unit fixed component is used to discharge cell being fixed on glass chamber；Electric discharge device support member is used for the dress that entirely discharges
It puts and is supported.
The material of observation window on glass chamber is quartz glass, and the fixation of observation window is realized using cover board, glass chamber
On aviation plug is installed, for the extraction of current measurement line and ground wire, the center face electric discharge of the air inlet on glass chamber
Gap, the center face discharge cell gas gap of the lateral blister on glass chamber, the center of bottom surface observation window and electric discharge
Unit bottom center overlaps.
Surface charge measurement unit in discharge cell is made of BSO crystal, BK7 glass and ito transparent electrode, and electric discharge is single
Insulating part in member is made using nylon material, and discharge cell and glass chamber are coupled, discharge cell fixed component
Discharge cell is fixed in glass chamber, the bottom discord glass chamber of discharge cell is in contact.
The measurement of discharge current is realized by the voltage at parallel resistance both ends that four central symmetries of measurement are placed.
The screw in measuring electrode and ground electrode in discharge cell is conductor, the screw in electric discharge device in addition to this
It is insulator with bolt.
It is sealed for high pressure to be introduced between the conductor rods of cavity and glass chamber upper cover plate, each corner of conductor rods
There is chamfering.
It is 20mm that the high-field electrode fixed component, which is opened there are one width, and the depth of groove is the air gap height to discharge.
Above technical scheme is employed, the utility model has the advantages that.
The utility model has minimized the size of cavity, is conducive to reduce the inert gas dosage of single experiment,
Experimental period is shortened, reduces experimental cost.
The utility model improves the accuracy of observation of discharge current and emission spectrum.Measure four resistance spiral shells of electric current
Silk be fixed between measuring electrode and ground electrode, ground wire and current measurement line are screwed on electrode, be easily installed and
Dismounting.
The observation window of the utility model is from region of discharge closer to the light intensity observed is stronger, is conducive to obtain true reality
Test result.
The utility model realizes the coupling of electro-optic crystal and plate electrode structures, is conducive to the observation of surface charge.This
Outside, the utility model also achieves the coupling of discharge cell and glass chamber, reduces the volume of electric discharge device.
The utility model is improved parallel between electrode by ensureing the machining accuracy of high-field electrode fixed component groove
Degree, and then ensure that the observation effect of surface charge.
The utility model, can also be to other electric discharges while surface charge DYNAMIC DISTRIBUTION in measuring dielectric barrier discharge
Parameter is accurately measured, contribute to atmospheric dielectric barrier discharge electric discharge Form Development rule at different conditions and its
Formation mechenism carries out deep mechanism Journal of Sex Research.
The utility model have small, observation parameter mostly with the advantages such as measurement error is small.
Description of the drawings
The utility model is described in further detail below in conjunction with the drawings and specific embodiments.
Fig. 1 is the overall structure diagram of utility model.
Fig. 2 is the different direction design sketch at a in Fig. 1.
Fig. 3 is the amplification decomposition figure at a in Fig. 1.
Fig. 4 is the enlarged drawing at 2 in Fig. 1.
Wherein, 1- glass chambers upper cover plate；2- glass chambers；3- electric discharge device supporting racks；4- discharge cell fixed components；
5- discharge cell fixed components；6- conductor rods；7- lateral blister cover boards；Observe window cover in 8- bottom surfaces；9- lateral blisters；
10- bottom surfaces observation window；11- aviation plugs；12- current measurement line interfaces；13- interface of the ground wire；14- high-field electrodes；15- high-voltage electricity
Pole fixed component；16- surface charge measurement units；17- surface charge measurement unit fixed components；18- insulating parts；19- is measured
Electrode；20- ground electrodes；21- resistance；22- gas outlets；23- sides observation panel；24- gas outlets；25- bottom surfaces observation panel；26- navigates
Blind plug interface；27- air inlets；A- discharge cells.
Specific embodiment
The utility model is described in further detail below in conjunction with the accompanying drawings：
With reference to shown in attached drawing, surface charge DYNAMIC DISTRIBUTION measuring device in a kind of dielectric barrier discharge, including discharge cell,
Glass chamber, discharge cell fixed component and electric discharge device support member.The glass chamber is small, and specification is only 95
× 105 × 65mm can just accommodate lower discharge cell and necessary support fixation elements, advantageously reduce the indifferent gas in experiment
Body dosage can be realized being uniformly distributed for gas in cavity, greatly shorten experimental period in the short time.The discharge cell is by two
A discharge cell fixing piece clamping so that its plane is parallel with cavity bottom surface, is carried out between discharge cell and cavity by bolt
Connection is fixed；It is fixed between the discharge cell support member by four bolts, four bolts ensure that discharge cell
Can completely it be stepped up by two support members；Between the glass chamber and electric discharge device support member, consolidated by bolt
Fixed connection.
Further, the discharge cell include high-field electrode, high-field electrode fixed component, surface charge measurement unit,
Surface charge measurement unit fixed component, ground electrode, measuring electrode, measures resistance etc. at insulating part.The high-field electrode is by high pressure
Electrode-fixing section part is fixed, and bottom surface is only exposed in air gap, electric discharge is made to occur over just between high-field electrode bottom surface and ground electrode, shape
Into slab discharge electrode structure.It is 20mm that the high-field electrode fixed component, which is opened there are one width, and depth is several millimeters of groove.
The depth of groove is the air gap height to discharge.The machining accuracy of groove is easy to ensure, therefore has between electrode higher
The depth of parallelism is conducive to the accurate measurement of surface charge.Groove can only be processed into constant depth.If necessary to change air gap height,
Need to process multiple high-field electrode fixed components of different depths of groove.Change air gap height by replacing the fixed component.
The surface charge measurement unit is made of BSO crystal, BK7 glass, ito transparent electrode.The size of BSO crystal for 20 × 20 ×
The size of 0.16mm, BK7 glass is 20 × 20 × 0.8mm.During experiment, it can be realized pair using the Pockels effects of BSO crystal
The dynamic of barrier surface charge Two dimensional Distribution measures in discharge process.BK7 and BSO are glued together, and ito transparent electrode is plated in
The bottom of BK7 glass.Surface charge measurement unit is fixed on by BSO crystal fixing pieces on insulating part.Measuring electrode directly and
ITO electrode contacts.Four resistor coupled in parallel together, are screwed between measuring electrode and ground electrode, installation are facilitated to tear open
It unloads.Four resistance are centrosymmetric placement, advantageously reduce the distributed constant of resistance under pulse current, improve current measurement essence
Degree, the current waveform that most true reduction electric discharge generates.It is each in measuring electrode and ground electrode that there are one screws for fixing ground wire
With current measurement line.In discharge process, discharge current flows through measuring electrode, resistance and ground electrode from ITO electrode, eventually by ground
Line imports the earth.By the way that the resistance measured both end voltage waveform divided by resistance can obtain current waveform.Discharge cell
All components be closely fixed together by four bolts.Insulating part and the outer diameter of high-field electrode fixed component are
50mm.The middle part of insulating part, ground electrode and measuring electrode is provided with the through-hole that aperture is 25mm, for passing through polarised light.Polarization
Light passes through through-hole, after BSO crystal, by backtracking.Pass through the variation of intensity signal before and after record, you can utilize
Pockels effect correlation formulas calculate to obtain surface charge two dimension DYNAMIC DISTRIBUTION.
Further, glass chamber part includes glass cavity, upper cover plate, observation window, aviation plug.The upper cover plate and glass
It by screw connection between glass cavity main body part, is opened among upper cover plate there are one circular hole, a conductor rods extend there through, for will
High pressure is guided on the high-field electrode of intracavitary.The size of upper cover plate is 95 × 105 × 65mm, and the aperture of intermediate circular hole is 10mm.For
It avoids creeping discharge occurs between conductor rods and the screw of upper cover plate, screw is made with insulating materials.The circular hole of upper cover plate
Special air-tightness processing has been done between conductor rods.The contact portion of upper cover plate and glass cavity main body also uses air-tightness and sets
Meter.The bottom surface of the glass chamber is provided with injection of the observation window in order to polarised light, realizes the observation of surface charge.In addition, from
The observation window on ground can also observe electric discharge image.One side of cavity is additionally provided with an observation window, is put for observing side
Emission spectrum information in electrical image and discharge process.The observation window is screwed in by cover board on cavity.Observation window
Basal diameter 30mm, thickness 3mm.Stomata is provided on two sides of cavity, one of air inlet, two are used for gas outlet.
Peace is there are one aviation plug on the bottom surface of cavity, for the extraction of current measurement line and ground wire.Aviation plug solves well
Measure airtight sex chromosome mosaicism when line is drawn from cavity.
Further, discharge cell fixed component is made of two fixing pieces.The contact surface of two fixing pieces and discharge cell
Smooth cylindrical surface is processed into, the close connection between fixing piece and discharge cell is realized by four bolts on fixing piece.
Since discharge cell bottom surface is equipped with the resistance for measuring discharge current, bottom surface is uneven, is directly fixed on discharging structure
It can not ensure discharge cell being disposed vertically spatially on cavity bottom surface, influence whether the measurement accuracy of surface charge.Therefore,
The main purpose for increasing discharge cell fixed component is to ensure discharge cell being disposed vertically spatially.
Further, the electric discharge device support member is mainly used for the support of entire electric discharge device, and ensures entire electric discharge
Device spatially vertical.
Further, in entire discharging chamber, in addition to the screw in measuring electrode and ground electrode is using metal material, other spiral shells
Silk and bolt use insulating materials.
Surface charge DYNAMIC DISTRIBUTION measuring device in a kind of dielectric barrier discharge, including discharge cell, glass chamber, electric discharge
Unit fixed component and electric discharge device support member.Glass chamber 2 is fixed on by screw on electric discharge device supporting rack 3.It sees side
It examines window 9 and bottom surface observation window 10 and glass chamber 2 is screwed in by lateral blister cover board 7 and bottom surface observation window cover 8
On.Anti-reflection film is coated on observation window, corresponding site has opened observation panel on glass chamber, increases the transmitance of light.During experiment, from
Air inlet 27 is passed through inert gas, carries out discharge test.Discharging gap in 27 face discharge cell of air inlet, is conducive to inertia
Dispersion of the gas in discharge air-gap.Inert gas is flowed out from gas outlet 22,24.Discharge cell a is discharged unit fixed component
4th, it 5 is clamped by four bolts, and be fixed by bolts on glass chamber 2.Glass chamber upper cover plate 1 is close by entire cavity
Envelope.High voltage is guided to by conductor rods 6 on high pressure copper electrode 14.Special gas is done between conductor rods 6 and glass chamber upper cover plate 1
Close property design.Screw for fixing glass chamber upper cover plate 1 is made from an insulative material, before conductor rods 6 and screw
Creeping discharge occurs.High-field electrode fixing piece 15 plays a supportive role to high-field electrode 14, and its side wrap is lived, and ensures electric discharge
The ground of high-field electrode 14 is occurred over just, its side is avoided to discharge.Between high-field electrode 14 and high-field electrode fixing piece 15
Using interference fit.Surface charge measurement unit 16 includes BSO crystal, BK7 glass and ito transparent electrode.Since crystal is relatively thin
It is frangible, therefore be affixed on BK7 glass, BK7 glass bottom surfaces are coated with ito transparent electrode.External voltage guides to high-field electrode 14,
Ground wire is connected at interface of the ground wire 13, can the bottom surface of high-field electrode 14 and surface charge measurement unit 16 (ITO electrode) it
Between realize dielectric barrier discharge.Surface charge measurement unit fixed component 17 is made with insulating materials, for being surveyed to surface charge
Amount unit 16 is fixed.Measuring electrode 19 is copper conductor, is directly contacted with ITO electrode.Measuring electrode 19 and ground electrode 20 it
Between bridge 4 200 Europe measurement resistance 21.4 measure resistance central symmetry and place, and in parallel relationship, can cut to greatest extent
The stray parameter of weak resistive.During dielectric barrier discharge, discharge current flows through four resistance.By being connected on current measurement line
Current line at interface 12 can measure the voltage waveform at resistance both ends, and then can obtain with the ground wire being connected at interface of the ground wire 13
To current waveform.15 middle part of high-field electrode fixed component is provided with the groove of constant depth, as fixed air gap.During experiment, component
15th, 17,18,20, be tightly secured in together by bolt so that the upper surface of surface charge measurement unit 16 and high-field electrode 14 it
Between air-gap separation determined completely by the groove at the middle part of high-field electrode fixing piece 15.As long as ensure the processing essence of groove constant depth
Degree so that depth of groove is equal everywhere, ensures during installation to be tightly fastened, you can ensures that discharge air-gap is equal everywhere, and then ensures
Discharge electric field it is uniform.The special designing of insulating part 18 is primarily to realize exhausted between measuring electrode 19 and ground electrode 20
Edge, while cause four to measure resistance 21 and be easily installed dismounting, and make entire discharge cell structure more succinct.Discharge cell
Current measurement line and ground wire draw glass chamber 2 by the aviation plug 11 being mounted on aviation plug interface 26.14 He of component
It is tightly secured together between component 15, between component 18 and component 19 by interference fit.The middle part of component 18,19,20 has
The through-hole of diameter 25mm passes through convenient for surface charge measurement polarised light.
When carrying out dielectric barrier discharge experiment, first component 16 is fixed on component 18 with component 17, is surveyed in surface charge
The surface patch last layer insulation film of unit 16 is measured, then component 15,17,18,20 is closely fixed together by bolt.
Four resistance 21 are fixed between component 19 and component 20 with screw, and then complete the assembling of discharge cell a.By current measurement
Line is fixed at 12, and ground wire is fixed at 13.Conductor rods 6 are attached by screw thread and high-field electrode 14.Utilize component 4,5
Discharge cell is carried out by bolt tentatively to fix, and pass through bolt and be fixed in glass chamber 2.By glass window 9
It is screwed on glass chamber 2 with cover board 7 and 8 with 10, aviation plug is fixed at 26.Cover board 1 is passed through into conductor
Bar 6 is screwed on glass chamber 2, and then completes the assembling of entire electric discharge device.It will discharge and fill finally by screw
It puts and is fixed on stent 3.
During experiment, high pressure is connected on conductor rods 6, the current measurement line that Aviation Connector 11 is drawn is connected on oscillograph,
It will be ground wire grounded.Inert gas is passed through from air inlet 27, gas is flowed out from gas outlet 22,24.Due to inside cavity space compared with
It is small, after a few minutes of ventilating, you can think that air drains substantially in cavity, inert gas is uniformly distributed in the cavity.Then with work
Plug blocks air inlet and gas outlet.Voltage is gradually risen, when voltage is increased to a certain value, gap breakdown simultaneously realizes electric discharge, shows
Pulse current waveform is shown on wave device.It can deposition surface charge in dielectric surface in discharge process.It is injected from observation window 10 a branch of
Polarised light, since the electric field that surface charge generates makes the refractive index of BSO crystal change, so that the light intensity hair of reflected light
Changing.The information changed by cameras record light intensity, and can calculate surface charge in discharge process using Pockels effects
Two-dimentional DYNAMIC DISTRIBUTION.One piece of reflective mirror is placed around in observation window 10, the polarization of measurement surface charge is filtered using optical filter
Light, you can observe the electric discharge image of bottom surface.The electric discharge image of side can be observed at observation window 9.In addition, from observation window
Discharge spectrum information can also be observed at 9.By the way that obtained a variety of discharge parameters are carried out comprehensive analysis, you can to dielectric impedance
Surface charge effect in electric discharge carries out deep mechanism Journal of Sex Research.
Claims (7)
1. surface charge DYNAMIC DISTRIBUTION measuring device in a kind of dielectric barrier discharge, which is characterized in that including discharge cell, glass
Cavity, discharge cell fixed component and electric discharge device support member；The discharge cell by high-field electrode, measuring electrode, it is electric
Pole and surface charge measurement unit and insulation fixed component are formed, and fixed component is according to high-field electrode fixed component, surface electricity
The sequence of lotus measuring unit fixed component, insulating part and ground electrode, by being tightly fixed to one by the bolt that insulating materials is made
It rises, surface charge measurement unit is in direct contact with insulating part, and is fixed by surface charge measurement unit fixed component, surface
Charge measurement unit fixed component and insulating part are glued together, and measuring electrode is consolidated by the interference fit with insulating part
It is fixed；Air inlet, gas outlet are provided on the glass chamber, convenient for being passed through the inert gas of gas discharge, is opened on glass chamber
There are two observation window, convenient for being carried out to the electric discharge image of the surface charge of medium, discharge spectrum and bottom surface in electric discharge and side
Observation；The discharge cell fixed component is used to discharge cell being fixed on glass chamber；Electric discharge device support member is used for
Entire electric discharge device is supported.
2. surface charge DYNAMIC DISTRIBUTION measuring device, feature exist in a kind of dielectric barrier discharge according to claim 1
In the material of the observation window on glass chamber is quartz glass, and the fixation of observation window is realized using cover board, is installed on glass chamber
There is aviation plug, for the extraction of current measurement line and ground wire, the center face discharging gap of the air inlet on glass chamber, glass
The center face discharge cell gas gap of lateral blister on glass cavity, the center of bottom surface observation window and discharge cell bottom surface
Center overlaps.
3. surface charge DYNAMIC DISTRIBUTION measuring device, feature exist in a kind of dielectric barrier discharge according to claim 1
In the surface charge measurement unit in discharge cell is made of BSO crystal, BK7 glass and ito transparent electrode, in discharge cell
Insulating part made using nylon material, discharge cell and glass chamber are coupled, and discharge cell fixed component will be put
Electric unit is fixed in glass chamber, and the bottom discord glass chamber of discharge cell is in contact.
4. surface charge DYNAMIC DISTRIBUTION measuring device, feature exist in a kind of dielectric barrier discharge according to claim 1
In the measurement of discharge current is realized by the voltage at the parallel resistance both ends of four central symmetries placements of measurement.
5. surface charge DYNAMIC DISTRIBUTION measuring device, feature exist in a kind of dielectric barrier discharge according to claim 1
In, the screw in measuring electrode and ground electrode in discharge cell be conductor, the screw and spiral shell in electric discharge device in addition to this
Bolt is insulator.
6. surface charge DYNAMIC DISTRIBUTION measuring device, feature exist in a kind of dielectric barrier discharge according to claim 1
In for will be sealed between the high pressure introducing conductor rods of cavity and glass chamber upper cover plate, each corner of conductor rods has down
Angle.
7. surface charge DYNAMIC DISTRIBUTION measuring device, feature exist in a kind of dielectric barrier discharge according to claim 1
In the high-field electrode fixed component is opened there are one the groove that width is 20mm, and the depth of groove is the air gap height to discharge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721839181.2U CN207601195U (en) | 2017-12-25 | 2017-12-25 | Surface charge DYNAMIC DISTRIBUTION measuring device in a kind of dielectric barrier discharge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721839181.2U CN207601195U (en) | 2017-12-25 | 2017-12-25 | Surface charge DYNAMIC DISTRIBUTION measuring device in a kind of dielectric barrier discharge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207601195U true CN207601195U (en) | 2018-07-10 |
Family
ID=62766677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721839181.2U Expired - Fee Related CN207601195U (en) | 2017-12-25 | 2017-12-25 | Surface charge DYNAMIC DISTRIBUTION measuring device in a kind of dielectric barrier discharge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207601195U (en) |
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2017
- 2017-12-25 CN CN201721839181.2U patent/CN207601195U/en not_active Expired - Fee Related
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