A kind of micro-Raman spectroscopy of fast automatic focusing
Technical field
The utility model is related to Raman spectrum detection technique fields, relate more specifically to a kind of the micro- of fast automatic focusing
Raman spectrometer.
Background technology
Raman spectrum is the information by obtaining the vibration and rotation of molecule, and applied to one kind point of molecular structure research
Analysis method, Raman spectrum can realize the qualitative analysis and quantitative analysis to substance by the vibration of substance and rotation information.It draws
Its is simple in structure for graceful spectrometer, and measurement quickly, efficiently and accurately easy to operate can obtain high-resolution spectral information, although can be with
Get the spectral information of sample surfaces, but Raman spectrometer acquisition be sample surfaces averaged spectrum, can not get
Regional area or the corresponding spectral information of partial points in sample.
Meanwhile traditional microscope can realize the observation to small items, but it is needed through eyepiece subjective observation mesh
It marks object and passes through manual adjustment knob and focus, this artificial focusing mode is time-consuming and laborious and easily generates human error.And
Although the clearly image information under object high-resolution can be got under high resolution microscope, high score can not be got
Object regional area or the internal structural information of partial points under resolution, and can not obtain under high-resolution microscope one it is complete
Whole object image information.Therefore, be badly in need of one kind can automatic focusing, obtain sample regional area spectral information and can be in height
The Raman spectrometer of complete object image information is obtained under the microscope of resolution ratio.
Utility model content
The utility model provides a kind of micro-Raman spectroscopy of fast automatic focusing, is needed with solving existing Raman spectrometer
Manual focus is wanted, testee topography information can not be obtained and complete object can not be obtained under the microscope of high-resolution rate
The problem of body image information.
In order to solve the above technical problems, a kind of micro-Raman spectroscopy of fast automatic focusing provided by the utility model,
Including micro imaging system, Raman spectrum system, control device and computer system, the control device connects with computer system
It connects, the micro imaging system is located above control device, and the Raman spectrum system is located at micro imaging system side, described
Control device includes objective table, the first motor, the second motor, automatic focusing mechanism, coarse adjustment turn-knob, control cabinet and pedestal, described
Control cabinet is connect with computer system, first motor, the second motor and automatic focusing mechanism respectively with control cabinet circuit
Connection, the objective table connect with the first motor and the second motor and are installed in above pedestal, the coarse adjustment turn-knob and loading
Platform is connected.
Preferably, the control cabinet includes communication module, the microcontroller being connect with the communication module, with the microcontroller
The driver of connection and the power supply being connect with the driver.
Preferably, the micro imaging system includes LED light, the first collimating mirror, the first light splitting piece, the second light splitting piece, pipe
Road, CCD camera and microcobjective, the microcobjective are located above the objective table, and first light splitting piece is located at micro- object
Above mirror and horizontal by 45 degree of angles, second light splitting piece is located above the first light splitting piece and is mutually with the first light splitting piece
90 degree of angles, the pipeline are located above the second light splitting piece, and the CCD camera is located at right over pipeline, first collimating mirror
The second light splitting piece downside side is vertically arranged in, the LED light is arranged on the first collimating mirror away from the second light splitting piece side.
Preferably, the Raman spectrum system includes processing unit, speculum, third light splitting piece, the second collimating mirror, coupling
Lens, the first fibre-optical probe, the second fibre-optical probe and optical filter, the processing unit is connect with the computer system, described
Third light splitting piece is located at the first light splitting piece downside side, and the optical filter, coupled lens and the first fibre-optical probe are successively
Third light splitting piece is arranged on away from the first light splitting piece side, the speculum is located at right over third light splitting piece, and described second is accurate
Straight mirror, the second fibre-optical probe be successively set on speculum downside side, first fibre-optical probe and the second fibre-optical probe with
The processing unit connection.
Preferably, the computer system includes display screen and computer connected to it.
A kind of micro-Raman spectroscopy of fast automatic focusing provided by the utility model mainly includes micro-imaging system
System, Raman spectrum system, control device and computer system pass through synthetic operation mutual between them, you can with by micro-
The microcobjective of auto-focusing obtains high-resolution clear image as research object in imaging system, and can pass through image
Regional area or partial points is selected to carry out the quick and easy corresponding spectral information of acquisition sample, are obtained by auto-focusing microscope
The spectral information taken can be with accurately detecting to the different layer depth of sample and the Raman signal of focal plane, with good space point
It resolution and controls the microcobjective of auto-focusing that can be accurately positioned the specific position of sample by control device, acquires the area
The Raman signal in domain, it is achieved thereby that the combination of the high-definition picture and spectrum to sample under the microscope.The utility model
It is compact-sized, it is full-featured, can automatic focusing, obtain sample regional area spectral information and can be high-resolution micro-
Complete object image information is obtained under mirror, greatly improves the test effect of Raman spectrometer.
Description of the drawings
Fig. 1 is a kind of micro-Raman spectroscopy structure diagram of fast automatic focusing provided by the utility model;
Wherein, micro imaging system 1, Raman spectrum system 2, control device 3, computer system 4, LED light 11, first are accurate
Straight mirror 12, the first light splitting piece 13, the second light splitting piece 14, pipeline 15, CCD camera 16, microcobjective 17, processing unit 21, reflection
Mirror 22, the second collimating mirror 24, coupled lens 25, the first fibre-optical probe 26, the second fibre-optical probe 27, filters at third light splitting piece 23
Piece 28, objective table 31, the first motor 32, the second motor 33, automatic focusing mechanism 34, coarse adjustment turn-knob 35, control cabinet 36, pedestal
37th, display screen 41, computer 42, sample a.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiment of the present utility model is described in further detail.Below
Embodiment is used to illustrate the utility model, but be not intended to limit the scope of the present invention.
Refering to Figure 1, a kind of micro-Raman spectroscopy of fast automatic focusing provided by the utility model, including aobvious
Micro- imaging system 1, Raman spectrum system 2, control device 3 and computer system 4, control device 3 are connect with computer system 4,
Micro imaging system 1 be high-resolution micro imaging system, positioned at control device 3 above, Raman spectrum system 2 positioned at it is micro- into
As 1 side of system.Wherein, control device 3 include objective table 31, the first motor 32, the second motor 33, automatic focusing mechanism 34,
Coarse adjustment turn-knob 35, control cabinet 36 and pedestal 37, control cabinet 36 are connect with computer system 4, the first motor 32,33 and of the second motor
Automatic focusing mechanism 34 is connect respectively with 36 circuit of control cabinet, and objective table 31 connect and fills with the first motor 32 and the second motor 33
37 top of pedestal is located at, coarse adjustment turn-knob 35 is connected with objective table 31.
Further, control cabinet 36 includes communication module, the microcontroller being connect with the communication module, with the microcontroller
The driver of connection and the power supply being connect with the driver.
Micro imaging system 1 includes LED light 11, the first collimating mirror 12, the first light splitting piece 13, the second light splitting piece 14, pipeline
15th, CCD camera 16 and microcobjective 17, microcobjective 17 are located at 31 top of objective table, and the first light splitting piece 13 is located at micro-
The top of object lens 17 and horizontal by 45 degree angles, the second light splitting piece 14 be located above the first light splitting piece 13 and with the first light splitting piece
13 are mutually 90 degree of angles, and pipeline 15 is located at 14 top of the second light splitting piece, and CCD camera 16 is located at right over pipeline 15, the first collimation
Mirror 12 is vertically arranged in 14 downside side of the second light splitting piece, and LED light is arranged on the first collimating mirror 12 away from the second light splitting piece 14
Side.
Raman spectrum system 2 includes processing unit 21, speculum 22, third light splitting piece 23, the second collimating mirror 24, coupling thoroughly
Mirror 25, the first fibre-optical probe 26, the second fibre-optical probe 27 and optical filter 28, processing unit 21 are connect with computer system 4, third
Light splitting piece 23 is located at 13 downside side of the first light splitting piece, and optical filter 28,25 and first fibre-optical probe 26 of coupled lens are set successively
It puts in third light splitting piece 23 away from 13 side of the first light splitting piece, speculum 22 is located at right over third light splitting piece 23, the second collimation
Mirror 24, the second fibre-optical probe 27 are successively set on 22 downside side of speculum, the first fibre-optical probe 26 and the second fibre-optical probe
27 connect with processing unit.
Computer system 4 includes display screen 41 and computer connected to it 42.
Utility model works process is as follows:Autofocus mode is first turned on, clicks the computer system of display screen
Autofocus mode, startup LED light 11, incident light are reflected by 12 second light splitting piece 14 of the first collimating mirror and the first light splitting piece 13
Into after microcobjective 17, light source converges to sample surfaces, the reflected light of generation after micro- object 17 through the first light splitting piece 13,
Enter the Image Acquisition of the CCD camera progress moment with high-pass filter, acquisition after the transmission of second light splitting piece 14 through pipeline 15
Picture signal by computer 42 processing be shown on computer display 41;It calculates and is evaluated according to the sharpness function of image
Value, evaluation of estimate is bigger, and image is more clear, and instruction is transferred to control cabinet 36 and automatic focusing mechanism 34 is driven to drive by computer 42
The objective table 31 for being loaded with sample a moves up or down, and micro imaging system 1 acquires sample image and is transferred to department of computer science at this time
System 4 calculates, and generates image function evaluation of estimate, by the comparison of function evaluation of estimate, instruction is transferred to control device 3 by computer 42
The objective table for being loaded with sample is driven to move up and down to obtain different focal planes, therefrom finds the focusing of function evaluation of estimate maximum
Plan-position is best focus image, closes focal modes at this time, and auto-focusing terminates.The best coke of several different images
Face acquisition is microcontroller instruction being transferred to by computer 42 in control cabinet, and the first motor of MCU driving 32 and second is electric
Machine 33 drives 31 left-right and front-back of the objective table movement for being loaded with sample a, and computer 42 issues instructions to micro imaging system 1 and adopts at this time
Best focus image and pass through computer 42 under collection microscope and preserved.
Secondly image mosaic pattern is opened:The image mosaic pattern of the computer system of display screen 41 is clicked, uses calculating
Several best focus images that computer preserves are spliced into the complete full resolution pricture information of a width by machine image mosaic function.
Spectra collection pattern is finally opened, the spectra collection pattern of the computer system of selection display screen 41 is clicked, passes through
The image information of upper two steps acquisition, selects local region or point on the image, at this time 14 output signal of computer and instruction
It is transferred to Raman spectrum system and control device, communication module in control device, microcontroller, driver, the device of power supply composition
23 receive computer instruction driving motor 19 and motor 20 with dynamic object stage the regional area or point selected on the image
Position is moved under microcobjective 17, and Raman module and the processing unit 21 of spectrometer composition are logical in Raman spectrum system 2 at this time
The second fibre-optical probe 27 output continuous laser is crossed after the second collimating mirror 24 collimates, speculum 22 reflects by third light splitting piece 23
Microcobjective 17 is reflected into the first light splitting piece 13 and converges to sample a surfaces, and the reflected light of generation is passed through by microcobjective 17
First light splitting piece 13 reflects and third light splitting piece 23 transmit after by optical filter 28 and coupled lens 25 pass through the first fibre-optical probe
26 enter Raman module and the processing unit 21 of spectrometer composition, and the transfer spectral information of acquisition is to computer 42, computer 42
It is shown on display screen 41 by processing, completes the acquisition of spectral information.
Finally, the present processes are only preferable embodiment, are not intended to limit the scope of protection of the utility model.
Within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on should be included in this reality
Within novel protection domain.