CN207591686U - A kind of polishing fluid mixing arrangement - Google Patents
A kind of polishing fluid mixing arrangement Download PDFInfo
- Publication number
- CN207591686U CN207591686U CN201721617603.1U CN201721617603U CN207591686U CN 207591686 U CN207591686 U CN 207591686U CN 201721617603 U CN201721617603 U CN 201721617603U CN 207591686 U CN207591686 U CN 207591686U
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- China
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- tank body
- wall
- polishing
- polishing fluid
- water inlet
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Abstract
The utility model discloses a kind of polishing fluid mixing arrangements,Including tank body,Tank body top left is equipped with polishing powder feed arrangement,Polishing powder feed arrangement upper end is equipped with sealing cover,It seals cap upper surface and is equipped with control panel,The first vibrator is equipped among sealing cover bottom,Polishing powder feed arrangement inner wall bottom is equipped with gravity sensor,Polishing powder feed arrangement outer wall is enclosed with sound-absorbing foamed cotton layer,Polishing powder feed arrangement bottom is equipped with discharge nozzle,Inside pipe wall upper end discharge equipped with electronic valve,Transmission device lower end is equipped with supporting rod,Lower end is equipped with pH value detection device on the left of inner tank wall,PH value detection device lower end is equipped with grain testing apparatus,Inner tank wall lower end is equipped with diaphragm plate,Diaphragm plate left and right ends are equipped with the second vibrator,Tank wall is equipped with constant warm tube,Steam generator is equipped on the right side of constant warm tube,The utility model is related to polishing fluid hybrid technology fields.The polishing fluid mixing arrangement, has reached that polishing fluid PH is controllable, steam circulation utilizes mesh, it is ensured that polishing effect.
Description
Technical field
The utility model is related to polishing fluid hybrid technology field, specially a kind of polishing fluid mixing arrangement.
Background technology
The acid-base value of polishing fluid is exactly the pH value of polishing fluid, when the pH value of polishing fluid is 9.6, the mechanism of polishing fluid
Much larger than chemical action, removal rate is bigger, and polished silicon wafer surface generates high damaging layer after leading to polishing, and roughness ratio is larger；
When the pH value of polishing fluid is increased to 10.84~11.34, when mechanism and chemical action reach a kind of peering state, at this time
The uniformity of chemical action is good so that surface tension is small, and the consistency of quality treatment is good, can obtain good surface polishing effect
Fruit；When pH value is more than 11.67, silica hydrosol generates silicic acid ammonia soluble easily in water so that silicon under the action of highly basic
Silica dioxide granule in colloidal sol cannot play ablation, become transparent liquid, and mechanism fails substantially at this time, polishing
Based on chemical action, surface pit increases so that surface roughness increases again.
The polishing effect of polishing fluid is good under constant temperature, can water a large amount of nitrite, nitrous can be generated after heating for multiple times
Hydrochlorate is noxious material, can not be decomposed under nitrite general condition, but nitrite heating can be gone under certain conditions
It removes, nitroso compound is more stable in alkaline environment, is not susceptible to hydrolyze under general condition, but is heated under acidic environment
It can be hydrolyzed to 70 DEG C~100 DEG C.
Utility model content
（One）The technical issues of solution：In view of the deficiencies of the prior art, the utility model provides a kind of polishing fluid mixing
Device, solve polishing fluid pH value can not stability contorting in most suitable range, stirring is uneven, filtering, steam can not recycle
The problem of.
（Two）Technical solution：In order to achieve the above object, the utility model is achieved by the following technical programs：A kind of throwing
Light liquid mixing arrangement, including tank body, the top left of the tank body is provided with polishing powder feed arrangement, the polishing powder charging dress
The upper end put is provided with sealing cover, and the upper surface of the sealing cover is provided with control panel, is set among the bottom of the sealing cover
The first vibrator is equipped with, the lower end of first vibrator is provided with vibration rod, the inner wall bottom of the polishing powder feed arrangement
Gravity sensor is provided with, the outer wall of the polishing powder feed arrangement is enclosed with sound-absorbing foamed cotton layer, the polishing powder feed arrangement
Bottom be provided with discharge nozzle, the inner wall upper end of the discharge nozzle is provided with electronic valve, the top right end setting of the tank body
There is transmission device, the lower end of the transmission device is rotatably connected to supporting rod, and the supporting rod stretches into tank interior, the support
The left and right ends of bar are provided with stirring rod, and lower end is provided with pH value detection device, the pH value inspection on the left of the inner wall of the tank body
The lower end for surveying device is provided with grain testing apparatus, and the inner wall lower end of the tank body is provided with diaphragm plate, a left side for the diaphragm plate
The right side is provided at both ends with the second vibrator, and the outer wall of the tank body is provided with constant warm tube, and the outside of the constant warm tube is provided with protection
Layer, the right side upper end of the constant warm tube is communicated with steam generator, the jet chimney and steam generator by jet chimney
Junction be provided with wind turbine, be provided with heating tube among the inner wall of the steam generator, the external of the heating tube is set
There is heat-dissipating pipe, the first water inlet pipe, the other end connection of first water inlet pipe are communicated on the right side of the upper end of the steam generator
There is water tank, the left side lower end of the water tank is provided with the second water inlet pipe, the other end of second water inlet pipe and the upper end of tank body
Right side connects, and the bottom left end of the steam generator is provided with third water inlet pipe, the other end connection of the third water inlet pipe
There is acidic treatment case, the left end of the acidic treatment case is provided with condensing water tube.
Preferably, the discharge nozzle is oblique, and the surface of the discharge nozzle is uniformly provided with through-hole.
Preferably, there are six the stirring rod is at least symmetrical arranged, the surface of the stirring rod is provided with stirring blade, institute
The outer wall left end for stating tank body is provided with liquid level gauge.
Preferably, the lower end of first water inlet pipe is provided with filter, and the second water inlet pipe right end sets current limiting
Valve, the lower end of the third water inlet pipe are provided with water pump.
Preferably, the lower end of the constant warm tube is provided with condensation-water drain, and the condensation-water drain connects with condensing water tube
It is logical.
Preferably, temperature controller is provided among the bottom of the steam generator, the inner wall of the protective layer is uniform
It is provided with temperature sensor.
Preferably, liquid outlet is provided among the bottom of the tank body, the bottom left and right ends of the tank body are provided with branch
Support leg, the surface of the supporting leg are provided with damping spring, Butterworth Hatch are provided among the bottom of the tank body.
（Three）Advantageous effect：The utility model provides a kind of polishing fluid mixing arrangement.Has following advantageous effect：
（1）, the polishing fluid mixing arrangement, by polishing powder addition polishing powder feed arrangement rear cover closely cover, in control plane
It starts to work after inputting program on plate, control panel opens the second water inlet valve and electronic valve, and water supply start and addition are thrown
Light powder, while the first vibrator is driven, polishing powder is broken up, prevents polishing powder from luming, through-hole is provided on feed pipe by vibration rod
And long enough, make under the action of vibrator polishing powder dispersion evenly, gravity sensor by polishing powder weight detecting come
The input of polishing powder is controlled, control panel opens transmission device, and transmission device drives supporting rod and stirring rod rotation, starts to stir
It mixes, pH value detection device moment detection polishing fluid pH value, and sends the data to control panel, control panel changes according to data
The addition of polishing powder or water supply adjust the pH value of polishing fluid, and grain testing apparatus supervises particulate matter in polishing fluid
Survey, grain testing apparatus sends out signal to control panel after particulate matter reaches a certain range, control panel open liquid outlet and
Second vibrator dissolves complete solution and is flowed out through diaphragm plate from liquid outlet, and the solute not being completely dissolved is left on tank body
Interior, the second vibrator drives diaphragm plate vibrations, and solute is made to be removed with diaphragm plate, prevents diaphragm plate from blocking, has reached polishing fluid PH
It is worth controllable, well-mixed purpose, polishing fluid pH value is made to be maintained at 10.84~11.34, it is ensured that polishing effect；
（2）, the polishing fluid mixing arrangement, start the valve that control panel after stirring opens steam generator and the first water inlet pipe
Door, steam start to import steam pipe, and the heat of steam gives polishing fluid preheating insulation, become condensed water after steam heat consumption from cold
Condensate outlet discharge, condensed water conduit enter acidic treatment case, are then come back in steam generator through third water inlet pipe,
It is heated to the nitrite hydrolysis after assigned temperature in water in acid condition, when temperature sensor detects that temperature reaches suitable
Signal is sent out to control panel after range, control panel steam off generator has achieved the purpose that steam circulation utilizes, avoided
Water pollution is made in direct emission condensed water.
Description of the drawings
Fig. 1 is the overall structure diagram of the utility model；
Fig. 2 is the polishing powder feed arrangement structure diagram of the utility model；
Fig. 3 is the steam generator structure diagram of the utility model.
In figure：1 tank body, 2 polishing powder feed arrangements, 3 sealing covers, 4 control panels, 5 first vibrators, 6 vibration rods, 7 weights
Force snesor, 8 sound-absorbing foamed cotton layers, 9 discharge nozzles, 10 electronic valves, 11 transmission devices, 12 supporting rods, 13 stirring rods, the inspection of 14PH values
Survey device, 15 grain testing apparatus, 16 diaphragm plates, 17 second vibrators, 18 constant warm tubes, 19 protective layers, 20 steam generators, 21
Wind turbine, 22 heating tubes, 23 heat-dissipating pipes, 24 first water inlet pipes, 25 water tanks, 26 second water inlet pipes, 27 third water inlet pipes, 28 acidity at
Manage case, 29 condensing water tubes, 30 liquid level gauges, 31 supporting legs, 32 Butterworth Hatch.
Specific embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
It clearly and completely describes, it is clear that the described embodiments are only a part of the embodiments of the utility model rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are without making creative work
All other embodiments obtained shall fall within the protection scope of the present invention.
- 3 are please referred to Fig.1, the utility model provides a kind of technical solution：A kind of polishing fluid mixing arrangement, including tank body 1,
The top left of tank body 1 is provided with polishing powder feed arrangement 2, and the upper end of polishing powder feed arrangement 2 is provided with sealing cover 3, sealing
The upper surface of lid 3 is provided with control panel 4, is provided with the first vibrator 5 among the bottom of sealing cover 3, under the first vibrator 5
End is provided with vibration rod 6, and the inner wall bottom of polishing powder feed arrangement 2 is provided with gravity sensor 7, polishing powder feed arrangement 2
Outer wall is enclosed with sound-absorbing foamed cotton layer 8, and the bottom of polishing powder feed arrangement 2 is provided with discharge nozzle 9, and the inner wall upper end of discharge nozzle 9 is set
Electronic valve 10 is equipped with, the top right end of tank body 1 is provided with transmission device 11, and the lower end of transmission device 11 is rotatably connected to support
Bar 12, supporting rod 12 are stretched into inside tank body 1, and the left and right ends of supporting rod 12 are provided with stirring rod 13, on the left of the inner wall of tank body 1 under
End is provided with pH value detection device 14, and the lower end of pH value detection device 14 is provided with grain testing apparatus 15, under the inner wall of tank body 1
End is provided with diaphragm plate 16, and the left and right ends of diaphragm plate 16 are provided with the second vibrator 17, and the outer wall of tank body 1 is provided with constant warm tube
18, the external setting matcoveredn 19 of constant warm tube 18, the right side upper end of constant warm tube 18 is communicated with steam generation by jet chimney
Device 20, the junction of jet chimney and steam generator 20 are provided with wind turbine 21, are provided among the inner wall of steam generator 20
Heating tube 22, the outside of heating tube 22 are provided with heat-dissipating pipe 23, the first water inlet pipe are communicated on the right side of the upper end of steam generator 20
24, the other end of the first water inlet pipe 24 is communicated with water tank 25, and the left side lower end of water tank 25 is provided with the second water inlet pipe 26, second into
It being connected on the right side of the other end of water pipe 26 and the upper end of tank body 1, the bottom left end of steam generator 20 is provided with third water inlet pipe 27,
The other end of third water inlet pipe 27 is communicated with acidic treatment case 28, and the left end of acidic treatment case 28 is provided with condensing water tube 29.
Discharge nozzle 9 it is oblique, and the surface of discharge nozzle 9 is uniformly provided with through-hole.
There are six stirring rod 13 is at least symmetrical arranged, the surface of stirring rod 13 is provided with stirring blade, and the outer wall of tank body 1 is left
End is provided with liquid level gauge 30.
The lower end of first water inlet pipe 24 is provided with filter, and 26 right end of the second water inlet pipe is provided with flow-limiting valve, third water inlet
The lower end of pipe 27 is provided with water pump.
The lower end of constant warm tube 18 is provided with condensation-water drain, and condensation-water drain is connected with condensing water tube 29.
Temperature controller is provided among the bottom of steam generator 20, the inner wall of protective layer 19 is evenly arranged with temperature biography
Sensor.
Liquid outlet is provided among the bottom of tank body 1, the bottom left and right ends of tank body 1 are provided with supporting leg 31, supporting leg
31 surface is provided with damping spring, and Butterworth Hatch 32 is provided among the bottom of tank body 1.
In use, polishing powder is added in the closely capping 3 of 2 rear cover of polishing powder feed arrangement, program is inputted on control panel 4
After start to work, control panel 4 opens 26 valve of the second water inlet pipe and electronic valve 10, water supply start and adds in polishing powder, together
When drive the first vibrator 5, vibration rod 6 breaks up polishing powder, prevents polishing powder from luming, and through-hole and foot are provided on discharge nozzle 9
It is enough long, polishing powder dispersion is made under the action of the first vibrator 5 evenly, gravity sensor 7 passes through to polishing powder weight detecting
Control the input of polishing powder, control panel 4 opens transmission device 11, transmission device 11 drives supporting rod 12 and stirring rod 13 to revolve
Turn, start to stir, 14 moment of pH value detection device detection polishing fluid pH value, and send the data to control panel 4, control panel
4 change addition or the water supply of polishing powder to adjust the pH value of polishing fluid according to data, and grain testing apparatus 14 is to polishing fluid
Middle particulate matter is monitored, and grain testing apparatus sends out signal, control plane to control panel 4 after particulate matter reaches a certain range
Plate 4 opens liquid outlet and the second vibrator 17, dissolves complete solution and is flowed out through diaphragm plate 16 from liquid outlet, without completely molten
The solute of solution is left in tank body, the second vibrator 17 drive diaphragm plate 16 shake, solute is made to be removed with diaphragm plate 16, prevent every
Diaphragm plate 16 blocks；Start the valve that control panel 4 after stirring opens 20 and first water inlet pipe 24 of steam generator, steam starts to lead
Enter constant warm tube 18, the heat of steam gives polishing fluid preheating insulation, and become condensed water after steam heat consumption arranges from condensation-water drain
Going out, condensed water conduit 29 enters acidic treatment case 28, is then come back in steam generator 20 through third water inlet pipe 27,
The nitrite hydrolysis after assigned temperature in water is heated under acid condition, when temperature sensor detects that temperature reaches suitable model
It encloses backward control panel 4 and sends out signal, 4 steam off generator 20 of control panel.
It should be noted that herein, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any this practical relationship or sequence.Moreover, term " comprising ", "comprising" or its any other variant are intended to
Non-exclusive inclusion, so that process, method, article or equipment including a series of elements not only will including those
Element, but also including other elements that are not explicitly listed or further include as this process, method, article or equipment
Intrinsic element.In the absence of more restrictions.By sentence " element limited including one ..., it is not excluded that
Also there are other identical elements in the process, method, article or apparatus that includes the element ".
While there has been shown and described that the embodiment of the utility model, for the ordinary skill in the art,
It is appreciated that can these embodiments be carried out with a variety of variations in the case of the principle and spirit for not departing from the utility model, repaiied
Change, replace and modification, the scope of the utility model are defined by the appended claims and the equivalents thereof.
Claims (7)
1. a kind of polishing fluid mixing arrangement, including tank body（1）, it is characterised in that：The tank body（1）Top left be provided with throwing
Light powder feed arrangement（2）, the polishing powder feed arrangement（2）Upper end be provided with sealing cover（3）, the sealing cover（3）It is upper
Surface is provided with control panel（4）, the sealing cover（3）Bottom among be provided with the first vibrator（5）, first vibrations
Device（5）Lower end be provided with vibration rod（6）, the polishing powder feed arrangement（2）Inner wall bottom be provided with gravity sensor
（7）, the polishing powder feed arrangement（2）Outer wall be enclosed with sound-absorbing foamed cotton layer（8）, the polishing powder feed arrangement（2）Bottom
Portion is provided with discharge nozzle（9）, the discharge nozzle（9）Inner wall upper end be provided with electronic valve（10）, the tank body（1）Top
Right end is provided with transmission device（11）, the transmission device（11）Lower end be rotatably connected to supporting rod（12）, the supporting rod
（12）Stretch into tank body（1）Inside, the supporting rod（12）Left and right ends be provided with stirring rod（13）, the tank body（1）It is interior
Lower end is provided with pH value detection device on the left of wall（14）, the pH value detection device（14）Lower end be provided with grain testing apparatus
（15）, the tank body（1）Inner wall lower end be provided with diaphragm plate（16）, the diaphragm plate（16）Left and right ends be provided with second
Vibrator（17）, the tank body（1）Outer wall be provided with constant warm tube（18）, the constant warm tube（18）External setting matcoveredn
（19）, the constant warm tube（18）Right side upper end steam generator is communicated with by jet chimney（20）, the jet chimney with
Steam generator（20）Junction be provided with wind turbine（21）, the steam generator（20）Inner wall among be provided with heating tube
（22）, the heating tube（22）Outside be provided with heat-dissipating pipe（23）, the steam generator（20）Upper end on the right side of be communicated with
First water inlet pipe（24）, first water inlet pipe（24）The other end be communicated with water tank（25）, the water tank（25）Left side under
End is provided with the second water inlet pipe（26）, second water inlet pipe（26）The other end and tank body（1）Upper end on the right side of connect, it is described
Steam generator（20）Bottom left end be provided with third water inlet pipe（27）, the third water inlet pipe（27）The other end be communicated with
Acidic treatment case（28）, the acidic treatment case（28）Left end be provided with condensing water tube（29）.
2. a kind of polishing fluid mixing arrangement according to claim 1, it is characterised in that：The discharge nozzle（9）It is oblique,
And the discharge nozzle（9）Surface be uniformly provided with through-hole.
3. a kind of polishing fluid mixing arrangement according to claim 1, it is characterised in that：The stirring rod（13）At least symmetrically set
There are six putting, the stirring rod（13）Surface be provided with stirring blade, the tank body（1）Outer wall left end be provided with liquid level gauge
（30）.
4. a kind of polishing fluid mixing arrangement according to claim 1, it is characterised in that：First water inlet pipe（24）Lower end
It is provided with filter, second water inlet pipe（26）Right end is provided with flow-limiting valve, the third water inlet pipe（27）Lower end setting
There is water pump.
5. a kind of polishing fluid mixing arrangement according to claim 1, it is characterised in that：The constant warm tube（18）Lower end setting
There are condensation-water drain, the condensation-water drain and condensing water tube（29）Connection.
6. a kind of polishing fluid mixing arrangement according to claim 1, it is characterised in that：The steam generator（20）Bottom
Centre is provided with temperature controller, the protective layer（19）Inner wall be evenly arranged with temperature sensor.
7. a kind of polishing fluid mixing arrangement according to claim 1, it is characterised in that：The tank body（1）Bottom among set
It is equipped with liquid outlet, the tank body（1）Bottom left and right ends be provided with supporting leg（31）, the supporting leg（31）Surface setting
There are damping spring, the tank body（1）Bottom among be provided with Butterworth Hatch（32）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721617603.1U CN207591686U (en) | 2017-11-28 | 2017-11-28 | A kind of polishing fluid mixing arrangement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721617603.1U CN207591686U (en) | 2017-11-28 | 2017-11-28 | A kind of polishing fluid mixing arrangement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207591686U true CN207591686U (en) | 2018-07-10 |
Family
ID=62759972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721617603.1U Expired - Fee Related CN207591686U (en) | 2017-11-28 | 2017-11-28 | A kind of polishing fluid mixing arrangement |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207591686U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112536669A (en) * | 2020-12-21 | 2021-03-23 | 中环领先半导体材料有限公司 | Automatic liquid supply and automatic PH (potential of hydrogen) adjustment system for edge polishing liquid of wafer edge polishing machine |
| CN112755936A (en) * | 2019-10-21 | 2021-05-07 | 中国石油化工股份有限公司 | Device for continuously preparing pseudo-boehmite and preparation method thereof |
| CN113913916A (en) * | 2021-11-10 | 2022-01-11 | 成都先进金属材料产业技术研究院股份有限公司 | Method for removing oxide skin on surface of titanium alloy |
| CN114029511A (en) * | 2021-11-10 | 2022-02-11 | 成都先进金属材料产业技术研究院股份有限公司 | Titanium alloy SLM (spatial light modulation) formed part supporting structure and removing method thereof |
-
2017
- 2017-11-28 CN CN201721617603.1U patent/CN207591686U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112755936A (en) * | 2019-10-21 | 2021-05-07 | 中国石油化工股份有限公司 | Device for continuously preparing pseudo-boehmite and preparation method thereof |
| CN112536669A (en) * | 2020-12-21 | 2021-03-23 | 中环领先半导体材料有限公司 | Automatic liquid supply and automatic PH (potential of hydrogen) adjustment system for edge polishing liquid of wafer edge polishing machine |
| CN113913916A (en) * | 2021-11-10 | 2022-01-11 | 成都先进金属材料产业技术研究院股份有限公司 | Method for removing oxide skin on surface of titanium alloy |
| CN114029511A (en) * | 2021-11-10 | 2022-02-11 | 成都先进金属材料产业技术研究院股份有限公司 | Titanium alloy SLM (spatial light modulation) formed part supporting structure and removing method thereof |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180710 Termination date: 20191128 |
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| CF01 | Termination of patent right due to non-payment of annual fee |