CN207591686U - A kind of polishing fluid mixing arrangement - Google Patents

A kind of polishing fluid mixing arrangement Download PDF

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Publication number
CN207591686U
CN207591686U CN201721617603.1U CN201721617603U CN207591686U CN 207591686 U CN207591686 U CN 207591686U CN 201721617603 U CN201721617603 U CN 201721617603U CN 207591686 U CN207591686 U CN 207591686U
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CN
China
Prior art keywords
tank body
wall
polishing
polishing fluid
water inlet
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Expired - Fee Related
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CN201721617603.1U
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Chinese (zh)
Inventor
耿昌文
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Shenzhen City Yida Electronic Technology Co Ltd
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Shenzhen City Yida Electronic Technology Co Ltd
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Priority to CN201721617603.1U priority Critical patent/CN207591686U/en
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Publication of CN207591686U publication Critical patent/CN207591686U/en
Expired - Fee Related legal-status Critical Current
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Abstract

The utility model discloses a kind of polishing fluid mixing arrangements,Including tank body,Tank body top left is equipped with polishing powder feed arrangement,Polishing powder feed arrangement upper end is equipped with sealing cover,It seals cap upper surface and is equipped with control panel,The first vibrator is equipped among sealing cover bottom,Polishing powder feed arrangement inner wall bottom is equipped with gravity sensor,Polishing powder feed arrangement outer wall is enclosed with sound-absorbing foamed cotton layer,Polishing powder feed arrangement bottom is equipped with discharge nozzle,Inside pipe wall upper end discharge equipped with electronic valve,Transmission device lower end is equipped with supporting rod,Lower end is equipped with pH value detection device on the left of inner tank wall,PH value detection device lower end is equipped with grain testing apparatus,Inner tank wall lower end is equipped with diaphragm plate,Diaphragm plate left and right ends are equipped with the second vibrator,Tank wall is equipped with constant warm tube,Steam generator is equipped on the right side of constant warm tube,The utility model is related to polishing fluid hybrid technology fields.The polishing fluid mixing arrangement, has reached that polishing fluid PH is controllable, steam circulation utilizes mesh, it is ensured that polishing effect.

Description

A kind of polishing fluid mixing arrangement
Technical field
The utility model is related to polishing fluid hybrid technology field, specially a kind of polishing fluid mixing arrangement.
Background technology
The acid-base value of polishing fluid is exactly the pH value of polishing fluid, when the pH value of polishing fluid is 9.6, the mechanism of polishing fluid Much larger than chemical action, removal rate is bigger, and polished silicon wafer surface generates high damaging layer after leading to polishing, and roughness ratio is larger; When the pH value of polishing fluid is increased to 10.84~11.34, when mechanism and chemical action reach a kind of peering state, at this time The uniformity of chemical action is good so that surface tension is small, and the consistency of quality treatment is good, can obtain good surface polishing effect Fruit;When pH value is more than 11.67, silica hydrosol generates silicic acid ammonia soluble easily in water so that silicon under the action of highly basic Silica dioxide granule in colloidal sol cannot play ablation, become transparent liquid, and mechanism fails substantially at this time, polishing Based on chemical action, surface pit increases so that surface roughness increases again.
The polishing effect of polishing fluid is good under constant temperature, can water a large amount of nitrite, nitrous can be generated after heating for multiple times Hydrochlorate is noxious material, can not be decomposed under nitrite general condition, but nitrite heating can be gone under certain conditions It removes, nitroso compound is more stable in alkaline environment, is not susceptible to hydrolyze under general condition, but is heated under acidic environment It can be hydrolyzed to 70 DEG C~100 DEG C.
Utility model content
(One)The technical issues of solution:In view of the deficiencies of the prior art, the utility model provides a kind of polishing fluid mixing Device, solve polishing fluid pH value can not stability contorting in most suitable range, stirring is uneven, filtering, steam can not recycle The problem of.
(Two)Technical solution:In order to achieve the above object, the utility model is achieved by the following technical programs:A kind of throwing Light liquid mixing arrangement, including tank body, the top left of the tank body is provided with polishing powder feed arrangement, the polishing powder charging dress The upper end put is provided with sealing cover, and the upper surface of the sealing cover is provided with control panel, is set among the bottom of the sealing cover The first vibrator is equipped with, the lower end of first vibrator is provided with vibration rod, the inner wall bottom of the polishing powder feed arrangement Gravity sensor is provided with, the outer wall of the polishing powder feed arrangement is enclosed with sound-absorbing foamed cotton layer, the polishing powder feed arrangement Bottom be provided with discharge nozzle, the inner wall upper end of the discharge nozzle is provided with electronic valve, the top right end setting of the tank body There is transmission device, the lower end of the transmission device is rotatably connected to supporting rod, and the supporting rod stretches into tank interior, the support The left and right ends of bar are provided with stirring rod, and lower end is provided with pH value detection device, the pH value inspection on the left of the inner wall of the tank body The lower end for surveying device is provided with grain testing apparatus, and the inner wall lower end of the tank body is provided with diaphragm plate, a left side for the diaphragm plate The right side is provided at both ends with the second vibrator, and the outer wall of the tank body is provided with constant warm tube, and the outside of the constant warm tube is provided with protection Layer, the right side upper end of the constant warm tube is communicated with steam generator, the jet chimney and steam generator by jet chimney Junction be provided with wind turbine, be provided with heating tube among the inner wall of the steam generator, the external of the heating tube is set There is heat-dissipating pipe, the first water inlet pipe, the other end connection of first water inlet pipe are communicated on the right side of the upper end of the steam generator There is water tank, the left side lower end of the water tank is provided with the second water inlet pipe, the other end of second water inlet pipe and the upper end of tank body Right side connects, and the bottom left end of the steam generator is provided with third water inlet pipe, the other end connection of the third water inlet pipe There is acidic treatment case, the left end of the acidic treatment case is provided with condensing water tube.
Preferably, the discharge nozzle is oblique, and the surface of the discharge nozzle is uniformly provided with through-hole.
Preferably, there are six the stirring rod is at least symmetrical arranged, the surface of the stirring rod is provided with stirring blade, institute The outer wall left end for stating tank body is provided with liquid level gauge.
Preferably, the lower end of first water inlet pipe is provided with filter, and the second water inlet pipe right end sets current limiting Valve, the lower end of the third water inlet pipe are provided with water pump.
Preferably, the lower end of the constant warm tube is provided with condensation-water drain, and the condensation-water drain connects with condensing water tube It is logical.
Preferably, temperature controller is provided among the bottom of the steam generator, the inner wall of the protective layer is uniform It is provided with temperature sensor.
Preferably, liquid outlet is provided among the bottom of the tank body, the bottom left and right ends of the tank body are provided with branch Support leg, the surface of the supporting leg are provided with damping spring, Butterworth Hatch are provided among the bottom of the tank body.
(Three)Advantageous effect:The utility model provides a kind of polishing fluid mixing arrangement.Has following advantageous effect:
(1), the polishing fluid mixing arrangement, by polishing powder addition polishing powder feed arrangement rear cover closely cover, in control plane It starts to work after inputting program on plate, control panel opens the second water inlet valve and electronic valve, and water supply start and addition are thrown Light powder, while the first vibrator is driven, polishing powder is broken up, prevents polishing powder from luming, through-hole is provided on feed pipe by vibration rod And long enough, make under the action of vibrator polishing powder dispersion evenly, gravity sensor by polishing powder weight detecting come The input of polishing powder is controlled, control panel opens transmission device, and transmission device drives supporting rod and stirring rod rotation, starts to stir It mixes, pH value detection device moment detection polishing fluid pH value, and sends the data to control panel, control panel changes according to data The addition of polishing powder or water supply adjust the pH value of polishing fluid, and grain testing apparatus supervises particulate matter in polishing fluid Survey, grain testing apparatus sends out signal to control panel after particulate matter reaches a certain range, control panel open liquid outlet and Second vibrator dissolves complete solution and is flowed out through diaphragm plate from liquid outlet, and the solute not being completely dissolved is left on tank body Interior, the second vibrator drives diaphragm plate vibrations, and solute is made to be removed with diaphragm plate, prevents diaphragm plate from blocking, has reached polishing fluid PH It is worth controllable, well-mixed purpose, polishing fluid pH value is made to be maintained at 10.84~11.34, it is ensured that polishing effect;
(2), the polishing fluid mixing arrangement, start the valve that control panel after stirring opens steam generator and the first water inlet pipe Door, steam start to import steam pipe, and the heat of steam gives polishing fluid preheating insulation, become condensed water after steam heat consumption from cold Condensate outlet discharge, condensed water conduit enter acidic treatment case, are then come back in steam generator through third water inlet pipe, It is heated to the nitrite hydrolysis after assigned temperature in water in acid condition, when temperature sensor detects that temperature reaches suitable Signal is sent out to control panel after range, control panel steam off generator has achieved the purpose that steam circulation utilizes, avoided Water pollution is made in direct emission condensed water.
Description of the drawings
Fig. 1 is the overall structure diagram of the utility model;
Fig. 2 is the polishing powder feed arrangement structure diagram of the utility model;
Fig. 3 is the steam generator structure diagram of the utility model.
In figure:1 tank body, 2 polishing powder feed arrangements, 3 sealing covers, 4 control panels, 5 first vibrators, 6 vibration rods, 7 weights Force snesor, 8 sound-absorbing foamed cotton layers, 9 discharge nozzles, 10 electronic valves, 11 transmission devices, 12 supporting rods, 13 stirring rods, the inspection of 14PH values Survey device, 15 grain testing apparatus, 16 diaphragm plates, 17 second vibrators, 18 constant warm tubes, 19 protective layers, 20 steam generators, 21 Wind turbine, 22 heating tubes, 23 heat-dissipating pipes, 24 first water inlet pipes, 25 water tanks, 26 second water inlet pipes, 27 third water inlet pipes, 28 acidity at Manage case, 29 condensing water tubes, 30 liquid level gauges, 31 supporting legs, 32 Butterworth Hatch.
Specific embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out It clearly and completely describes, it is clear that the described embodiments are only a part of the embodiments of the utility model rather than whole Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are without making creative work All other embodiments obtained shall fall within the protection scope of the present invention.
- 3 are please referred to Fig.1, the utility model provides a kind of technical solution:A kind of polishing fluid mixing arrangement, including tank body 1, The top left of tank body 1 is provided with polishing powder feed arrangement 2, and the upper end of polishing powder feed arrangement 2 is provided with sealing cover 3, sealing The upper surface of lid 3 is provided with control panel 4, is provided with the first vibrator 5 among the bottom of sealing cover 3, under the first vibrator 5 End is provided with vibration rod 6, and the inner wall bottom of polishing powder feed arrangement 2 is provided with gravity sensor 7, polishing powder feed arrangement 2 Outer wall is enclosed with sound-absorbing foamed cotton layer 8, and the bottom of polishing powder feed arrangement 2 is provided with discharge nozzle 9, and the inner wall upper end of discharge nozzle 9 is set Electronic valve 10 is equipped with, the top right end of tank body 1 is provided with transmission device 11, and the lower end of transmission device 11 is rotatably connected to support Bar 12, supporting rod 12 are stretched into inside tank body 1, and the left and right ends of supporting rod 12 are provided with stirring rod 13, on the left of the inner wall of tank body 1 under End is provided with pH value detection device 14, and the lower end of pH value detection device 14 is provided with grain testing apparatus 15, under the inner wall of tank body 1 End is provided with diaphragm plate 16, and the left and right ends of diaphragm plate 16 are provided with the second vibrator 17, and the outer wall of tank body 1 is provided with constant warm tube 18, the external setting matcoveredn 19 of constant warm tube 18, the right side upper end of constant warm tube 18 is communicated with steam generation by jet chimney Device 20, the junction of jet chimney and steam generator 20 are provided with wind turbine 21, are provided among the inner wall of steam generator 20 Heating tube 22, the outside of heating tube 22 are provided with heat-dissipating pipe 23, the first water inlet pipe are communicated on the right side of the upper end of steam generator 20 24, the other end of the first water inlet pipe 24 is communicated with water tank 25, and the left side lower end of water tank 25 is provided with the second water inlet pipe 26, second into It being connected on the right side of the other end of water pipe 26 and the upper end of tank body 1, the bottom left end of steam generator 20 is provided with third water inlet pipe 27, The other end of third water inlet pipe 27 is communicated with acidic treatment case 28, and the left end of acidic treatment case 28 is provided with condensing water tube 29.
Discharge nozzle 9 it is oblique, and the surface of discharge nozzle 9 is uniformly provided with through-hole.
There are six stirring rod 13 is at least symmetrical arranged, the surface of stirring rod 13 is provided with stirring blade, and the outer wall of tank body 1 is left End is provided with liquid level gauge 30.
The lower end of first water inlet pipe 24 is provided with filter, and 26 right end of the second water inlet pipe is provided with flow-limiting valve, third water inlet The lower end of pipe 27 is provided with water pump.
The lower end of constant warm tube 18 is provided with condensation-water drain, and condensation-water drain is connected with condensing water tube 29.
Temperature controller is provided among the bottom of steam generator 20, the inner wall of protective layer 19 is evenly arranged with temperature biography Sensor.
Liquid outlet is provided among the bottom of tank body 1, the bottom left and right ends of tank body 1 are provided with supporting leg 31, supporting leg 31 surface is provided with damping spring, and Butterworth Hatch 32 is provided among the bottom of tank body 1.
In use, polishing powder is added in the closely capping 3 of 2 rear cover of polishing powder feed arrangement, program is inputted on control panel 4 After start to work, control panel 4 opens 26 valve of the second water inlet pipe and electronic valve 10, water supply start and adds in polishing powder, together When drive the first vibrator 5, vibration rod 6 breaks up polishing powder, prevents polishing powder from luming, and through-hole and foot are provided on discharge nozzle 9 It is enough long, polishing powder dispersion is made under the action of the first vibrator 5 evenly, gravity sensor 7 passes through to polishing powder weight detecting Control the input of polishing powder, control panel 4 opens transmission device 11, transmission device 11 drives supporting rod 12 and stirring rod 13 to revolve Turn, start to stir, 14 moment of pH value detection device detection polishing fluid pH value, and send the data to control panel 4, control panel 4 change addition or the water supply of polishing powder to adjust the pH value of polishing fluid according to data, and grain testing apparatus 14 is to polishing fluid Middle particulate matter is monitored, and grain testing apparatus sends out signal, control plane to control panel 4 after particulate matter reaches a certain range Plate 4 opens liquid outlet and the second vibrator 17, dissolves complete solution and is flowed out through diaphragm plate 16 from liquid outlet, without completely molten The solute of solution is left in tank body, the second vibrator 17 drive diaphragm plate 16 shake, solute is made to be removed with diaphragm plate 16, prevent every Diaphragm plate 16 blocks;Start the valve that control panel 4 after stirring opens 20 and first water inlet pipe 24 of steam generator, steam starts to lead Enter constant warm tube 18, the heat of steam gives polishing fluid preheating insulation, and become condensed water after steam heat consumption arranges from condensation-water drain Going out, condensed water conduit 29 enters acidic treatment case 28, is then come back in steam generator 20 through third water inlet pipe 27, The nitrite hydrolysis after assigned temperature in water is heated under acid condition, when temperature sensor detects that temperature reaches suitable model It encloses backward control panel 4 and sends out signal, 4 steam off generator 20 of control panel.
It should be noted that herein, relational terms such as first and second and the like are used merely to a reality Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation In any this practical relationship or sequence.Moreover, term " comprising ", "comprising" or its any other variant are intended to Non-exclusive inclusion, so that process, method, article or equipment including a series of elements not only will including those Element, but also including other elements that are not explicitly listed or further include as this process, method, article or equipment Intrinsic element.In the absence of more restrictions.By sentence " element limited including one ..., it is not excluded that Also there are other identical elements in the process, method, article or apparatus that includes the element ".
While there has been shown and described that the embodiment of the utility model, for the ordinary skill in the art, It is appreciated that can these embodiments be carried out with a variety of variations in the case of the principle and spirit for not departing from the utility model, repaiied Change, replace and modification, the scope of the utility model are defined by the appended claims and the equivalents thereof.

Claims (7)

1. a kind of polishing fluid mixing arrangement, including tank body(1), it is characterised in that:The tank body(1)Top left be provided with throwing Light powder feed arrangement(2), the polishing powder feed arrangement(2)Upper end be provided with sealing cover(3), the sealing cover(3)It is upper Surface is provided with control panel(4), the sealing cover(3)Bottom among be provided with the first vibrator(5), first vibrations Device(5)Lower end be provided with vibration rod(6), the polishing powder feed arrangement(2)Inner wall bottom be provided with gravity sensor (7), the polishing powder feed arrangement(2)Outer wall be enclosed with sound-absorbing foamed cotton layer(8), the polishing powder feed arrangement(2)Bottom Portion is provided with discharge nozzle(9), the discharge nozzle(9)Inner wall upper end be provided with electronic valve(10), the tank body(1)Top Right end is provided with transmission device(11), the transmission device(11)Lower end be rotatably connected to supporting rod(12), the supporting rod (12)Stretch into tank body(1)Inside, the supporting rod(12)Left and right ends be provided with stirring rod(13), the tank body(1)It is interior Lower end is provided with pH value detection device on the left of wall(14), the pH value detection device(14)Lower end be provided with grain testing apparatus (15), the tank body(1)Inner wall lower end be provided with diaphragm plate(16), the diaphragm plate(16)Left and right ends be provided with second Vibrator(17), the tank body(1)Outer wall be provided with constant warm tube(18), the constant warm tube(18)External setting matcoveredn (19), the constant warm tube(18)Right side upper end steam generator is communicated with by jet chimney(20), the jet chimney with Steam generator(20)Junction be provided with wind turbine(21), the steam generator(20)Inner wall among be provided with heating tube (22), the heating tube(22)Outside be provided with heat-dissipating pipe(23), the steam generator(20)Upper end on the right side of be communicated with First water inlet pipe(24), first water inlet pipe(24)The other end be communicated with water tank(25), the water tank(25)Left side under End is provided with the second water inlet pipe(26), second water inlet pipe(26)The other end and tank body(1)Upper end on the right side of connect, it is described Steam generator(20)Bottom left end be provided with third water inlet pipe(27), the third water inlet pipe(27)The other end be communicated with Acidic treatment case(28), the acidic treatment case(28)Left end be provided with condensing water tube(29).
2. a kind of polishing fluid mixing arrangement according to claim 1, it is characterised in that:The discharge nozzle(9)It is oblique, And the discharge nozzle(9)Surface be uniformly provided with through-hole.
3. a kind of polishing fluid mixing arrangement according to claim 1, it is characterised in that:The stirring rod(13)At least symmetrically set There are six putting, the stirring rod(13)Surface be provided with stirring blade, the tank body(1)Outer wall left end be provided with liquid level gauge (30).
4. a kind of polishing fluid mixing arrangement according to claim 1, it is characterised in that:First water inlet pipe(24)Lower end It is provided with filter, second water inlet pipe(26)Right end is provided with flow-limiting valve, the third water inlet pipe(27)Lower end setting There is water pump.
5. a kind of polishing fluid mixing arrangement according to claim 1, it is characterised in that:The constant warm tube(18)Lower end setting There are condensation-water drain, the condensation-water drain and condensing water tube(29)Connection.
6. a kind of polishing fluid mixing arrangement according to claim 1, it is characterised in that:The steam generator(20)Bottom Centre is provided with temperature controller, the protective layer(19)Inner wall be evenly arranged with temperature sensor.
7. a kind of polishing fluid mixing arrangement according to claim 1, it is characterised in that:The tank body(1)Bottom among set It is equipped with liquid outlet, the tank body(1)Bottom left and right ends be provided with supporting leg(31), the supporting leg(31)Surface setting There are damping spring, the tank body(1)Bottom among be provided with Butterworth Hatch(32).
CN201721617603.1U 2017-11-28 2017-11-28 A kind of polishing fluid mixing arrangement Expired - Fee Related CN207591686U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721617603.1U CN207591686U (en) 2017-11-28 2017-11-28 A kind of polishing fluid mixing arrangement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721617603.1U CN207591686U (en) 2017-11-28 2017-11-28 A kind of polishing fluid mixing arrangement

Publications (1)

Publication Number Publication Date
CN207591686U true CN207591686U (en) 2018-07-10

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112755936A (en) * 2019-10-21 2021-05-07 中国石油化工股份有限公司 Device for continuously preparing pseudo-boehmite and preparation method thereof
CN113913916A (en) * 2021-11-10 2022-01-11 成都先进金属材料产业技术研究院股份有限公司 Method for removing oxide skin on surface of titanium alloy
CN114029511A (en) * 2021-11-10 2022-02-11 成都先进金属材料产业技术研究院股份有限公司 Titanium alloy SLM (spatial light modulation) formed part supporting structure and removing method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112755936A (en) * 2019-10-21 2021-05-07 中国石油化工股份有限公司 Device for continuously preparing pseudo-boehmite and preparation method thereof
CN113913916A (en) * 2021-11-10 2022-01-11 成都先进金属材料产业技术研究院股份有限公司 Method for removing oxide skin on surface of titanium alloy
CN114029511A (en) * 2021-11-10 2022-02-11 成都先进金属材料产业技术研究院股份有限公司 Titanium alloy SLM (spatial light modulation) formed part supporting structure and removing method thereof

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GR01 Patent grant
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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180710

Termination date: 20191128

CF01 Termination of patent right due to non-payment of annual fee