CN207586635U - A kind of novel exposure machine - Google Patents
A kind of novel exposure machine Download PDFInfo
- Publication number
- CN207586635U CN207586635U CN201721825255.7U CN201721825255U CN207586635U CN 207586635 U CN207586635 U CN 207586635U CN 201721825255 U CN201721825255 U CN 201721825255U CN 207586635 U CN207586635 U CN 207586635U
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- CN
- China
- Prior art keywords
- fixedly connected
- exposure machine
- main body
- machine main
- retractable support
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Abstract
The utility model discloses a kind of novel exposure machines, including exposure machine main body, the both sides of the exposure machine main body have been fixedly connected with anticollision spring, one end of the anticollision spring is fixedly connected with Crashworthy plate, the front surface of the exposure machine main body is provided with arc groove, circular housing is provided with below the arc groove, transparent observing platform is provided with below the circular housing.The utility model in the both sides of exposure machine by setting anticollision spring and Crashworthy plate that can be effectively prevented from the problem of exposure machine is damaged in moving process because of collision occurrence of equipment, control panel is formed by centralized Control button, and connect heat sink in control panel rear surface, it can be effectively prevented from because the working time is long, the problem of equipment is caused to be damaged, by setting retractable support column and retractable support arm can be with the position of adjusting control panel, the staff that custom can be allowed different rapidly enters working condition, improves office efficiency.
Description
Technical field
The utility model is related to exposure machine field, specially a kind of novel exposure machine.
Background technology
Exposure machine refers to send out the ultraviolet light of UVA wavelength by opening light, by the image on film or other transparent bodies
Information is transferred to the machinery equipment on the surface for being coated with photoactive substance, is widely used in semiconductor, microelectronics, biological devices and receives
Rice science and technology neck, common exposure machine citing:Excellent (N＆Q) ultra-violet exposure system of grace section Americanized MYCRO, suitable for from special big
For small substrate to the ultraviolet or deep UV exposure of 4 sizes very broad range material, NXQ400-6 systems are applied successfully to half
Conductor manufactures, Photon-Electron electrons, tablet, frequency microwave, diffraction optics, MEMS, concave-convex or flip equipment and other requirements
The application of fine print and accurate alignment.
But exposure machine structure currently on the market is complicated, and function is single, exposure machine is not provided with dustcloth not instantly
Dust can be prevented to enter, may cause to be damaged together for a long time, be not provided with Crashworthy plate and anticollision spring, be moved through in exposure machine
Because collision causes equipment to be damaged, exposure machine control button more disperses Cheng Zhonghui instantly, is awkward.
Utility model content
The utility model provides a kind of novel exposure machine, can effectively solve mentioned above in the background art not set
Putting dustcloth cannot prevent dust from entering, and may cause to be damaged together for a long time, be not provided with Crashworthy plate and anticollision spring, expose
Equipment can be caused to be damaged the problem of exposure machine control button more disperses, is awkward because of collision in ray machine moving process.
To achieve the above object, the utility model provides following technical solution：A kind of novel exposure machine, including exposure machine
Main body, the both sides of the exposure machine main body have been fixedly connected with anticollision spring, and one end of the anticollision spring is fixedly connected with anti-
Plate is hit, the front surface of the exposure machine main body is provided with arc groove, circular housing, institute are provided with below the arc groove
It states and transparent observing platform is provided with below circular housing, the both ends of the transparent observing platform are fixedly connected with workbench, described
Light source habitat is provided with below bright observation platform, wafer station is provided with below the light source habitat, the wafer station
Lower surface is fixedly connected with closing door, and the front surface of the closing door is fixedly connected with fixing buckle, under the exposure machine main body
Surface is fixedly connected with cleat, and the lower surface of exposure machine main body is provided with pulley, the work close to the side of cleat
The upper surface of platform is fixedly connected with retractable support column, and the upper surface of the retractable support column is fixedly connected with fixed block, described solid
The side for determining block is fixedly connected with retractable support arm, and the side of the retractable support arm is fixedly connected with heat sink, the heat dissipation
The side of plate is fixedly connected with control panel, and dustcloth is provided on the inside of the circular housing, is set on the inside of the dustcloth
Spring ring is equipped with, one end of the spring ring is fixedly connected with return spring, and the front surface of the control panel is provided with display
Device, one end of the dustcloth are fixedly connected with fixture block, and the side of the fixture block is provided with annulus.
As a kind of optimal technical scheme of the utility model, the cleat passes through bolt and exposure machine main body with pulley
It is fixedly connected, and the quantity of cleat and pulley is four.
As a kind of optimal technical scheme of the utility model, one end of the retractable support arm is fixed with fixed block to be connected
It connects, and the other end of retractable support arm is fixedly connected with heat sink, the upper surface of the wafer station is provided with graduation mark.
As a kind of optimal technical scheme of the utility model, one end of the anticollision spring is fixed with exposure machine main body to be connected
It connects, and the other end of anticollision spring is fixedly connected with Crashworthy plate.
As a kind of optimal technical scheme of the utility model, the lower surface of the circular housing is close to the position of anticollision spring
The place of putting is fixedly connected with workbench.
Compared with prior art, the beneficial effects of the utility model：
1st, the utility model blocks dust can effectively be entered inside equipment, and dustcloth by setting dustcloth
End be connected with return spring, be conveniently operated, do not influence equipment operation.
2nd, the utility model in the both sides of exposure machine by setting anticollision spring and Crashworthy plate that can be effectively prevented from exposing
The problem of machine is damaged in moving process because of collision occurrence of equipment.
3rd, the utility model forms control panel by centralized Control button, can effectively increase working efficiency, and
Control panel rear surface connects heat sink, the problem of being effectively prevented from because the working time is long, equipment is caused to be damaged.
4th, the utility model, can be with by setting retractable support column and retractable support arm can be with the position of adjusting control panel
The staff for making custom different rapidly enters working condition, improves office efficiency.
Description of the drawings
Attached drawing is used to provide a further understanding of the present invention, and a part for constitution instruction, with this practicality
Novel embodiment for explaining the utility model, does not form the limitation to the utility model together.
In the accompanying drawings：
Fig. 1 is the structure diagram of the utility model；
Fig. 2 is the structure diagram of the utility model wafer station；
Fig. 3 is the structure diagram of the utility model circular housing；
Fig. 4 is the structure diagram of the utility model telescopic supporting rod；
Figure label：1st, exposure machine main body；2nd, arc groove；3rd, display；4th, control panel；5th, retractable support column；6、
Crashworthy plate；7th, anticollision spring；8th, wafer station；9th, circular housing；10th, fixing buckle；11st, cleat；12nd, pulley；13rd, closing door；
14th, light source habitat；15th, workbench；16th, dustcloth；17 fixture blocks,；18th, annulus；19th, spring ring；20th, return spring；21st, it is solid
Determine block；22nd, retractable support arm；23rd, heat sink；24th, transparent observing platform.
Specific embodiment
The preferred embodiment of the utility model is illustrated below in conjunction with attached drawing, it should be understood that described herein excellent
Embodiment is selected to be only used for describing and explaining the present invention, is not used to limit the utility model.
Embodiment：As shown in Figs 1-4, the utility model provides a kind of technical solution, a kind of novel exposure machine, including exposing
Optical machine main body 1, the both sides of exposure machine main body 1 have been fixedly connected with anticollision spring 7, and one end of anticollision spring 7 is fixedly connected with anti-
Plate 6 is hit, the front surface of exposure machine main body 1 is provided with arc groove 2, and the lower section of arc groove 2 is provided with circular housing 9, round
The lower position of shell 9 is provided with transparent observing platform 24, and the both ends of transparent observing platform 24 are fixedly connected with workbench 15, transparent
The lower section of observation platform 24 is provided with light source habitat 14, and the lower section of light source habitat 14 is provided with wafer station 8, under wafer station 8
Surface is fixedly connected with closing door 13, and the front surface of closing door 13 is fixedly connected with fixing buckle 10, the lower surface of exposure machine main body 1
Cleat 11 is fixedly connected with, and the lower surface of exposure machine main body 1 is provided with pulley 12, workbench close to the side of cleat 11
15 upper surface is fixedly connected with retractable support column 5, and the upper surface of retractable support column 5 is fixedly connected with fixed block 21, fixed block
21 side is fixedly connected with retractable support arm 22, and the side of retractable support arm 22 is fixedly connected with heat sink 23, heat sink 23
Side be fixedly connected with control panel 4, the inside of circular housing 9 is provided with dustcloth 16, and the inside of dustcloth 16 is provided with
Spring ring 19, one end of spring ring 19 are fixedly connected with return spring 20, and the front surface of control panel 4 is provided with display 3, prevent
One end of dirt cloth 16 is fixedly connected with fixture block 17, and the side of fixture block 17 is provided with annulus 18.
For the ease of the movement and fixation of exposure machine main body 1, in the present embodiment, it is preferred that cleat 11 is logical with pulley 12
It crosses bolt to be fixedly connected with exposure machine main body 1, and the quantity of cleat 11 and pulley 12 is four.
For the ease of controlling the position of control panel 4, in the present embodiment, it is preferred that one end of retractable support arm 22 with it is solid
Determine block 21 to be fixedly connected, and the other end of retractable support arm 22 is fixedly connected with heat sink 23, the upper surface of wafer station 8 is provided with
Graduation mark.
For the ease of not collided in 1 moving process of exposure machine main body, in the present embodiment, it is preferred that the one of anticollision spring 7
End is fixedly connected, and the other end of anticollision spring 7 is fixedly connected with Crashworthy plate 6 with exposure machine main body 1.
It does not influence for the ease of the dust-proof of exposure machine main body 1 and exposure and remembers work, in the present embodiment, it is preferred that round
The lower surface of shell 9 is fixedly connected at the position of anticollision spring 7 with workbench 15.
The operation principle and process for using of the utility model：First, annulus 18 is being pulled, fixture block is driven by annulus 18
17, fixture block 17 drives dustcloth 16, can so cover 15 part of workbench of exposure machine, annulus 18 then is forgotten about it fixing buckle 10
Position, annulus 18 is fixed on fixing buckle 10, when exposure machine is needed to work, only annulus 18 need to be taken from fixing buckle 10
Under, return spring 20 and spring ring 19 will retract dustcloth 16；Then, by adjust the height of retractable support column 5 come
The height of staff's custom is adapted to, by adjusting retractable support arm 22 come the far and near position of adjusting control panel 4, makes work people
Member can quickly find suitable custom, increase comfort level and working efficiency when staff works；Finally, by setting
Anticollision spring 7 and Crashworthy plate 6 are put to avoid suffered damage in exposure machine moving process, can also be effectively prevented from because removing
The accidentally contingency of generation of fortune personnel.
Finally it should be noted that：The foregoing is merely the preferred embodiments of the utility model, are not limited to this reality
With novel, although the utility model is described in detail with reference to the foregoing embodiments, those skilled in the art is come
Say, can still modify to the technical solution recorded in foregoing embodiments or to which part technical characteristic into
Row equivalent replacement.Within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on, should all
It is included within the scope of protection of this utility model.
Claims (5)
1. a kind of novel exposure machine, including exposure machine main body（1）, it is characterised in that：The exposure machine main body（1）Both sides it is equal
It is fixedly connected with anticollision spring（7）, the anticollision spring（7）One end be fixedly connected with Crashworthy plate（6）, the exposure machine main body
（1）Front surface be provided with arc groove（2）, the arc groove（2）Lower section be provided with circular housing（9）, the circle
Shell（9）Lower section be provided with transparent observing platform（24）, the transparent observing platform（24）Both ends be fixedly connected with workbench
（15）, the transparent observing platform（24）Lower section be provided with light source habitat（14）, the light source habitat（14）Lower section set
It is equipped with wafer station（8）, the wafer station（8）Lower surface be fixedly connected with closing door（13）, the closing door（13）Preceding table
Face is fixedly connected with fixing buckle（10）, the exposure machine main body（1）Lower surface be fixedly connected with cleat（11）, and exposure machine
Main body（1）Lower surface close to cleat（11）Side be provided with pulley（12）, the workbench（15）Upper surface fix
It is connected with retractable support column（5）, the retractable support column（5）Upper surface be fixedly connected with fixed block（21）, the fixed block
（21）Side be fixedly connected with retractable support arm（22）, the retractable support arm（22）Side be fixedly connected with heat sink
（23）, the heat sink（23）Side be fixedly connected with control panel（4）, the circular housing（9）Inside be provided with it is anti-
Dirt cloth（16）, the dustcloth（16）Inside be provided with spring ring（19）, the spring ring（19）One end be fixedly connected with
Return spring（20）, the control panel（4）Front surface be provided with display（3）, the dustcloth（16）One end fix
It is connected with fixture block（17）, the fixture block（17）Side be provided with annulus（18）.
2. a kind of novel exposure machine according to claim 1, it is characterised in that：The cleat（11）With pulley（12）
Pass through bolt and exposure machine main body（1）It is fixedly connected, and cleat（11）With pulley（12）Quantity be four.
3. a kind of novel exposure machine according to claim 1, it is characterised in that：The retractable support arm（22）One end
With fixed block（21）It is fixedly connected, and retractable support arm（22）The other end and heat sink（23）It is fixedly connected, the wafer station
（8）Upper surface be provided with graduation mark.
4. a kind of novel exposure machine according to claim 1, it is characterised in that：The anticollision spring（7）One end and exposure
Optical machine main body（1）It is fixedly connected, and anticollision spring（7）The other end and Crashworthy plate（6）It is fixedly connected.
5. a kind of novel exposure machine according to claim 1, it is characterised in that：The circular housing（9）Lower surface lean on
Nearly anticollision spring（7）Position at and workbench（15）It is fixedly connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721825255.7U CN207586635U (en) | 2017-12-25 | 2017-12-25 | A kind of novel exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721825255.7U CN207586635U (en) | 2017-12-25 | 2017-12-25 | A kind of novel exposure machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207586635U true CN207586635U (en) | 2018-07-06 |
Family
ID=62740055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721825255.7U Expired - Fee Related CN207586635U (en) | 2017-12-25 | 2017-12-25 | A kind of novel exposure machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207586635U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109270800A (en) * | 2018-09-29 | 2019-01-25 | 张家港奇点光电科技有限公司 | It is a kind of that exposure machine easy to remove is adjusted |
-
2017
- 2017-12-25 CN CN201721825255.7U patent/CN207586635U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109270800A (en) * | 2018-09-29 | 2019-01-25 | 张家港奇点光电科技有限公司 | It is a kind of that exposure machine easy to remove is adjusted |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190805 Address after: 511330 Xiaosongyuan, Guwu Village, Shitan Town, Zengcheng District, Guangzhou City, Guangdong Province Patentee after: Guangzhou Tongming Electronics Co., Ltd. Address before: 511325 First Floor of A1 Building in Guangzhou Sanzhao Electronics Co., Ltd., Shatou Village, Zengcheng Shitan Town, Guangzhou City, Guangdong Province Patentee before: Guangzhou Yong Zhao Hardware Electronics Co., Ltd. |
|
| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180706 Termination date: 20191225 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |