CN207586166U - A kind of fuel cell automobile hydrogen detection sensor - Google Patents
A kind of fuel cell automobile hydrogen detection sensor Download PDFInfo
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- CN207586166U CN207586166U CN201721688207.8U CN201721688207U CN207586166U CN 207586166 U CN207586166 U CN 207586166U CN 201721688207 U CN201721688207 U CN 201721688207U CN 207586166 U CN207586166 U CN 207586166U
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Abstract
A kind of fuel cell automobile hydrogen detection sensor, including AT crystals slice substrate, coating Cr, coating Pt, coating Au, two pieces of the setting left and right coating Cr on AT crystals slice substrate, two pieces of the setting left and right coating Au on the coating Cr of two pieces of left and right, the setting coating Pt on left part coating Au, setting coating Cr, the setting coating Pt in the case where being coated with Cr in the case where AT crystals are sliced substrate.The thickness of AT crystals slice substrate is 100 μm；The thickness for being coated with Cr is 0.05 μm；The thickness for being coated with Pt is 0.2 μm；The thickness for being coated with Au is 0.1 μm.The utility model solves the problems, such as that less than 4% hydrogen leak quickly detects, solve the difficult operation part of sensor production process, it is novel in design, simple in structure, technique is advanced, and maintenance load is small, service life is longer, the property indices of hydrogen detection sensor air compressor machine are stablized, good in economic efficiency, applied in technical field of automobile detection.
Description
Technical field
The utility model is related to a kind of fuel cell automobile hydrogen detection sensors in technical field of automobile detection, also may be used
Applied in other hydrogen gas detectors.
Background technology
Recently as implementing for the Scientific Outlook on Development, China increasingly payes attention to energy-saving and emission-reduction, and fuel cell car is as new
Outstanding person in energy automobile also attracts attention.At the same time, hydrogen as its power resources, more becomes in fuel cell car
The most important thing in technology.Technology about hydrogen faces following problem, and first, the storage of hydrogen is difficult general hydrogen
Tank is difficult to long-time storage hydrogen, and the price for storing the best Metal Palladium of hydrogen is costly.Second, the danger of hydrogen is very
Height, hydrogen aerial volumetric concentration are easily exploded, and explosive range is wide when reaching 4%；Ignition point is low, easily burns, and puts
It is big to go out heat；For combustion flame close to colourless, burning velocity is fast.In order to ensure the safe handling of hydrogen, and can be with high response
Speed and high sensitive detect hydrogen leak, hydrogen gas sensor into fuel cell car research emphasis and break the back of a tough job.
Domestic and international present Research, level and development trend：U.S. of auto industry big country, Germany, Japanology it is relatively early,
And the abundance of capital, so very fast in the development of hydrogen gas sensor field.But with domestic air mail space industry and automotive field
It flourishing, the technology of hydrogen detection sensor also in continuous test and is developed, therefore achievement in research increases there has also been significant,
To sum up the type for the hydrogen gas sensor studied both at home and abroad has following several, particular content refers to following table.
| Detection mode | Testing principle | Detectable concentration range | It is applicable in maximum temperature |
| Catalytic combustion type | Detect the thermistor change in resistance after being reacted because of catalyst | 1000ppm~number % | 300-400℃ |
| Semiconductor-type | Detect the conductivity variations of metal semiconductor compound | Below 5000ppm | 200-500℃ |
| Thermal conductivity | The variation of the heat-conduction value of detection gas | 1%-100% | 150℃ |
| Thermoelectric (al) type | Generated thermal energy is converted into the value of electric energy after detection catalyst reaction | 0.5ppm-5% | 100℃ |
| Surface acoustic wave type | The variation of sound wave on detection gas sense film | 10ppm-100% | 130℃ |
| Optical profile type | Detect refractive index, optical absorption coefficient, the change in shape of sense film | 0.2%-10% | -20℃-80℃ |
From above-mentioned table as can be seen that wherein catalytic combustion type, semiconductor-type, thermal conductivity hydrogen detection technique
Relative maturity, thermoelectric (al) type, surface acoustic wave type, optical profile type hydrogen detection technique temporarily also in research and development the stage.Existing skill
The sensitivity for the hydrogen detection sensor that art processes and answer speed are all relatively slow.The hydrogen gas sensor that the prior art processes compared with
Greatly, it is big to postpone occupied space for multiple spot cloth.3. general hydrogen detection sensor energy consumption is big.Therefore, a kind of fuel cell is developed
Automobile hydrogen detection sensor is always new issue anxious to be resolved.
Utility model content
The purpose of this utility model is to provide a kind of fuel cell automobile hydrogen detection sensors, which can
The hydrogen leak below 4% concentration is quickly detected, the range of scatter of hydrogen can be detected after multiple spot arrangement installation, is made
Obtain the process simplification using MEMS processing hydrogen detection sensors.
What the purpose of this utility model was realized in：A kind of fuel cell automobile hydrogen detection sensor, including AT water
Crystalline substance slice substrate, coating Cr, coating Pt, coating Au, two pieces of the setting left and right coating Cr on AT crystals slice substrate, in left and right two
Two pieces of setting left and right coating Au on block coating Cr, setting coating Pt, is set in the case where AT crystals are sliced substrate on left part coating Au
Cr is coated with, the setting coating Pt in the case where being coated with Cr；The thickness of AT crystals slice substrate is 100 μm；The thickness for being coated with Cr is 0.05 μ
m；The thickness for being coated with Pt is 0.2 μm；The thickness for being coated with Au is 0.1 μm.
The utility model is characterized by its structure.Its operation principle is, according to H2With O2It can be sent out on catalyst metal Pt
Raw exothermic chemical reaction, reaction generate heat and the vibration frequency of quartz wafer are had an impact.Pass through difference on the frequency before and after reaction
The size of value Δ f detects the leakage concentration of hydrogen.Hydrogen detection sensor belongs to catalytic combustion type sensor, is based on MEMS
Processing technology is sliced crystal, metal coating, exposes, is obtained after etching.Price is cheaper than same type sensor and volume
It is small, it can be arranged multi-point near fuel cell, it is contemplated that the density of hydrogen of 0.05%-4% can be detected, there is high answer speed
And high sensitive, can help fuel-cell vehicle solve presently, there are hydrogen leak test problems.
Compared with prior art, with solving, less than 4% hydrogen leak is fast for a kind of fuel cell automobile hydrogen detection sensor
The problem of speed detection solves the difficult operation part of sensor production process, and novel in design, simple in structure, technique is advanced, dimension
It is small to repair workload, service life is longer, and the property indices of hydrogen detection sensor air compressor machine are stablized, good in economic efficiency etc. excellent
Point will be widely used in technical field of automobile detection.
Description of the drawings
The utility model is described in detail with reference to the accompanying drawings and embodiments.
Fig. 1 is the structure diagram of the utility model.
Fig. 2 is the vertical view of Fig. 1.
Fig. 3 is the bottom view of Fig. 1.
Fig. 4 is position view of the utility model on automobile.
Fig. 5 is the utility model hydrogen detection result figure.
Specific embodiment
With reference to attached drawing, a kind of fuel cell automobile hydrogen detection sensor, including AT crystals slice substrate 1, coating Cr2,
Pt3, coating Au4 are coated with, two pieces of the setting left and right coating Cr2 on AT crystals slice substrate 1 is set on the coating Cr2 of two pieces of left and right
Two pieces of left and right coating Au4 is put, setting coating Pt3 on Au4 is coated in left part, Cr2 is coated in the 1 time setting of substrate of AT crystals slice,
The setting coating Pt3 in the case where being coated with Cr2.
The thickness of AT crystals slice substrate 1 is 100 μm；The thickness for being coated with Cr2 is 0.05 μm；The thickness for being coated with Pt3 is 0.2
μm；The thickness for being coated with Au4 is 0.1 μm.
A kind of operation principle of fuel cell automobile hydrogen detection sensor is, according to H2With O2It can be in catalyst gold
Belong to and exothermic chemical reaction occurs on Pt, reaction generates heat and the vibration frequency of quartz wafer is had an impact.Before reaction
The size of frequency-splitting Δ f detects the leakage concentration of hydrogen afterwards.Hydrogen detection sensor belongs to catalytic combustion type sensor, is
Crystal is sliced based on MEMS processing technologies, metal coating, exposes, obtained after etching.Price is than same type sensor just
It is suitable and small, it can be arranged multi-point near fuel cell, it is contemplated that the density of hydrogen of 0.05%-4% can be detected, there is height
Answer speed and high sensitive, can help fuel-cell vehicle solve presently, there are hydrogen leak test problems.
A kind of process technique of the fuel cell automobile hydrogen detection sensor：First, clean AT crystals slice
Substrate 1, removal AT crystals are sliced the dust debris on substrate 1；Second is that coating Cr, coating Au, make on AT crystals slice substrate 1
Heating electrode；Third, coating photoresist, prepares for exposure step；Fourth, coating stripping glue, to make coating Pt3 parts cloth
Line is prepared；Fifth, released part is coated with Pt3, makes coating Pt3 parts and connect up；Sixth, coating photoresist, makes AT crystals and cuts
Vibration sub-electrode on plate base 1；Seventh, removal AT crystal slice substrates 1, build external AT crystals slice 1 frame of substrate.
A represents fuel cell automobile hydrogen detection sensor in Fig. 4；B represents hydrogen air accumulator；C represents fuel cell；D
Represent motor.
Claims (2)
1. a kind of fuel cell automobile hydrogen detection sensor including AT crystals slice substrate, coating Cr, coating Pt, is coated with Au,
It is characterized in that：Two pieces of the setting left and right coating Cr on AT crystals slice substrate, the setting left and right two on the coating Cr of two pieces of left and right
Block is coated with Au, and the setting coating Pt on left part coating Au, in the case where AT crystals are sliced substrate, setting coating Cr, is set in the case where being coated with Cr
It is coated with Pt.
2. a kind of fuel cell automobile hydrogen detection sensor according to claim 1, it is characterised in that：AT crystals are sliced
The thickness of substrate is 100 μm；The thickness for being coated with Cr is 0.05 μm；The thickness for being coated with Pt is 0.2 μm；The thickness for being coated with Au is 0.1 μ
m。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721688207.8U CN207586166U (en) | 2017-12-07 | 2017-12-07 | A kind of fuel cell automobile hydrogen detection sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721688207.8U CN207586166U (en) | 2017-12-07 | 2017-12-07 | A kind of fuel cell automobile hydrogen detection sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207586166U true CN207586166U (en) | 2018-07-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721688207.8U Expired - Fee Related CN207586166U (en) | 2017-12-07 | 2017-12-07 | A kind of fuel cell automobile hydrogen detection sensor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020103740A1 (en) | 2018-11-19 | 2020-05-28 | 江苏多维科技有限公司 | Magnetoresistance element-based hydrogen sensor and hydrogen detecting method thereof |
-
2017
- 2017-12-07 CN CN201721688207.8U patent/CN207586166U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020103740A1 (en) | 2018-11-19 | 2020-05-28 | 江苏多维科技有限公司 | Magnetoresistance element-based hydrogen sensor and hydrogen detecting method thereof |
| US11408949B2 (en) | 2018-11-19 | 2022-08-09 | MultiDimension Technology Co., Ltd. | Magnetoresistive hydrogen sensor and sensing method thereof |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180706 Termination date: 20211207 |