CN207571442U - A kind of automatic focusing mechanism - Google Patents
A kind of automatic focusing mechanism Download PDFInfo
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- CN207571442U CN207571442U CN201721752548.7U CN201721752548U CN207571442U CN 207571442 U CN207571442 U CN 207571442U CN 201721752548 U CN201721752548 U CN 201721752548U CN 207571442 U CN207571442 U CN 207571442U
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- automatic focusing
- focusing mechanism
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- glass
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Abstract
The utility model is related to glass focusing technical fields,More particularly to a kind of automatic focusing mechanism,Including automatic focusing mechanism and air supporting motion platform,Automatic focusing mechanism includes stepper motor,Z axis,Stent,Y-axis platform,Optical head and displacement sensor,Stepper motor is fixed at Z axis top,Multiple mounting holes are provided on Y-axis platform,Y-axis platform is connected by positioning bolt with Z axis,Stent is fixed with optical head and displacement sensor successively from top to bottom,The side of stent and Z axis be fixedly connected air supporting motion platform be included in upper end support glass limiting device and be arranged on the transmitting device of lower end and the glass air-floatation support platform of intermediate setting,The transmitting device can be transmitted movement in one-dimensional square,Solve in the prior art glass in air supporting move back and forth when optical head easily generate defocus the phenomenon that,And then influence the technological deficiency of clarity of taking pictures.Target of the relative altitude undulated control within ± 10um between optical head and glass is reduced the focus situation of optical head, effectively reduces influence of the warpage to taking pictures by the utility model.
Description
Technical field
The utility model is related to glass focusing fields, and in particular to a kind of automatic focusing mechanism.
Background technology
Glass is in air supporting when moving back and forth at this stage, and head and the tail of the glass at the scan line height that floats can show warpage wave
Shape when warped portion has been more than daily setting value, may result in optical head and generate defocus phenomenon, and then influence clarity of taking pictures,
Need to Mapping schemes be planned in accurate pneumatically supported face shape feature according to glass, the influence of warped portion is fallen in compensation.Air supporting scans
Platform mainly carries glass and carries out two dimensional motion, and passes through Z-direction displacement sensor and carry out positioning of accurately taking pictures, so as to fulfill
Real-time Focusing, levelling function to glass substrate.In order to reach high position precision, scanning platform is carried out using accurate air supporting component
The support of glass substrate is oriented to.
Glass float it is high present warpage waveform derived from glass head and the tail pass through scan line when air supporting to there are one the control meetings of glass
Caused by transient process, autofocus system has glass warp always in the prior art so that the defocus shape of optical head
Condition happens occasionally, and also generates harmful effects to a series of follow-up activities such as take pictures.
Utility model content
For glass in prior art problem, when being moved back and forth in air supporting, optical head generates defocus phenomenon, and then influences to clap
According to the technological deficiency of clarity.The utility model provides a kind of new automatic focusing mechanism, which is directed to glass
The improvement of warpage is notable, and target of the relative altitude undulated control within ± 10um between optical head and glass is reduced
The focus situation of optical head, effectively reduces influence of the warpage to taking pictures.
The purpose of this utility model is achieved through the following technical solutions:
A kind of automatic focusing mechanism, including automatic focusing mechanism and air supporting motion platform, the automatic focusing mechanism includes
Stepper motor, Z axis, stent, Y-axis platform, optical head and displacement sensor, the stepper motor are fixed at Z axis top,
Multiple mounting holes are provided on the Y-axis platform, Y-axis platform is connected by positioning bolt with Z axis, and the stent is from top to bottom
It is fixed with optical head and displacement sensor successively, the stent is fixedly connected with the side of Z axis;The air supporting motion platform includes
It is flat in the limiting device of the support glass of upper end and the glass air-floatation support of the transmitting device for being arranged on lower end and intermediate setting
Platform, the transmitting device can be transmitted movement in two-dimensional directional.
As a further improvement, it is provided with mounting hole corresponding with Z axis position, equal-sized on the Y-axis platform.
As a further improvement, institute's displacement sensors are laser displacement sensor.
As a further improvement, mounting hole corresponding with Z axis position, equal-sized is provided on the stent.
As a further improvement, the stent is connect with Z axis by positioning bolt.
As a further improvement, the transmitting device and air supporting are relatively independent, contactless face.
As a further improvement, the two-dimensional directional includes X-axis and Y direction.
As a further improvement, the objective end of the optical head is provided with rangefinder.
Compared with prior art, the beneficial effects of the utility model are:
Effect one, automatic focusing mechanism the stretching, while in optical head with step motor control Z axis of the utility model
Objective end be provided with rangefinder, therefore can accurately adjust the distance of glass on optical head and air floating platform, greatly reduce
The focus situation of optical head, effectively reduces influence of the warpage to taking pictures;
Effect two, what the utility model adjusted the adjusting of air supporting motion platform is the direction of two-dimentional (X-axis and Y-axis), automatic right
Coke installation adjusts the distance of optical head and air floating platform by Z axis, ensure that three dimensions can realize the adjustment of distance, drops
The low probability that opposite warpage occurs.
Description of the drawings
Fig. 1 is the utility model overall structure diagram;
Figure is applied in combination for automatic focusing mechanism in Fig. 2;
Fig. 3 is autofocus system positioning sequence flow chart;
Fig. 4 is utility model works flow chart;
In figure, 1- stepper motors, 2-Z axis, 3-Y shaft platforms, 4- optical heads, 5- rangefinders, 6- displacement sensors, 7- glass
Glass, 8- limiting devices, 9- transmitting devices, 10- rangefinders, 11- stents, 12- positioning bolts, 13- automatic focusing mechanisms, 14- gas
Transportation by driving moving platform.
Specific embodiment
Purpose, technical scheme and advantage to make the utility model embodiment are clearer, new below in conjunction with this practicality
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that described
Embodiment be only the utility model part of the embodiment, instead of all the embodiments.Usually here described in attached drawing
It can be configured to arrange and design with a variety of different with the component of the utility model embodiment shown.Therefore, below to
The detailed description of the embodiment of the utility model provided in attached drawing is not intended to limit the model of claimed the utility model
It encloses, but is merely representative of the selected embodiment of the utility model.Embodiment based on the utility model, those skilled in the art exist
All other embodiments obtained under the premise of creative work are not made, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " " center ", " on ", " under ", it is "left", "right", " perpendicular
Directly ", the orientation of the instructions such as " level ", " interior ", " outer " or position relationship are based on orientation shown in the drawings or position relationship, are only
The utility model must have specific with the device or element for simplifying description rather than instruction or hint meaning for ease of description
Orientation, with specific azimuth configuration and operation, therefore it is not intended that limitation to the utility model.In addition, term " the
One ", " second ", " third " are only used for description purpose, and it is not intended that instruction or hint relative importance.
In the description of the present invention, it should also be noted that, unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected or integrally
Connection;Can be mechanical connection or electrical connection;It can be directly connected, can also be indirectly connected by intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, can above-mentioned art be understood with concrete condition
Concrete meaning of the language in the utility model.
The utility model is further described in detail below through specific implementation examples and in conjunction with the accompanying drawings.
Embodiment
The present embodiment provides a kind of automatic focusing mechanism, as shown in Figure 1, for the utility model overall structure diagram, packet
Include automatic focusing mechanism 13 and air supporting motion platform 14, the automatic focusing mechanism 13 include stepper motor 1, Z axis 2, stent 11,
Y-axis platform 3, optical head 4 and displacement sensor 6, the stepper motor 1 are fixed at 2 top of Z axis, the Y-axis platform 3
On be provided with multiple mounting holes, mounting hole and Z axis 2 have that position is corresponding, equal-sized mounting hole, and Y-axis platform 3 is by positioning spiral shell
Bolt 12 is connected with Z axis 2, and the stent 11 is fixed with optical head 4 and displacement sensor 6 successively from top to bottom, on Y-axis platform 3
Mounting hole corresponding with 2 position of Z axis, equal-sized is provided with, the side of the stent 11 and Z axis 2 is fixed by positioning bolt
Connection;The air supporting motion platform 14 is included in the limiting device 8 of the support glass of upper end and is arranged on the transmitting device 9 of lower end
And the glass air-floatation support platform of intermediate setting, the transmitting device 9 can be transmitted movement in one-dimensional square.Glass 7
In accurate air supporting, X-axis and Y direction have exceeded field depth, therefore Z axis is highly adjusted using rangefinder, together
When Z axis 2 need to the movement of X-axis glass come
As a further improvement, the transmitting device and air supporting are relatively independent contactless state.Transmitting device can
So that glass arbitrarily moves on air floating platform in X-direction, Y-axis platform can drive optical head arbitrarily to move in the Y direction, so
Optical head can be made to cover entire glass surface.
As a further improvement, the objective end of the optical head is provided with rangefinder 5, and the objective end of optical head is provided with
Screw thread, rangefinder 10 can be stretched come the distance for adjusting rangefinder and air supporting motion platform with optical head by screw thread rotation.By
In rangefinder 5 and optical head with Y direction difference X-direction, therefore the waveform of Y direction 170mm distances is measured respectively, make ranging
Instrument 10 can cover the waveform of optical head Y direction.The waveform of two rangefinders is spliced, while according to rangefinder and light
The distance between head is learned, the Y-axis waveform at optical head is extrapolated, for adjusting the height of Z axis.
It, can be by Y-axis platform by multiple auto-focusing tissues as shown in Fig. 2, figure is applied in combination for automatic focusing mechanism
An entirety is connected as, automatic detection focusing can be carried out for the glass of larger area simultaneously.
As shown in figure 3, autofocus system positioning sequence flow chart, the glass on air supporting motion platform is past along X-direction
Movement is returned, rangefinder acquires the height of the forward and reverse Z axis of glass, then collected data by 40ms are averaged, are set
The smooth height of intermediate mouth is standard value, calculates the difference of 40ms periodic quantities average value and standard value, if difference within 5um,
It is 0 to focus on adjustment amount, and if more than 5um, then adjusted value is difference.By the corresponding Z axis normal place of the standard value of stadia surveying
In addition the Z axis position obtained during Mapping, it is possible to which obtained numerical value is stored in positioning group.
Fig. 4 is utility model works flow chart, first starts scanning mode, then calculate the i.e. standard of the big sequence of current fourth and determine
The value of each element of bit sequence array respectively add with the corresponding Z axis offset of Y-axis, using obtained value as Y-axis offset
The standard value of amount;Then optical head is shifted onto first point of positioning sequence by position indicator by Z axis, when rangefinder monitors that glass is deposited
When, start in sequence to be unfolded according to the data of positioning sequence, motor starting time 60ms, motor has response, movement space
40ms, since second point, interval 40ms triggers Z axis positioning successively;Perform complete positioning sequence, a complete scanning
Monitoring just terminates.
The above is only the preferred embodiment of the utility model, it should be understood that the utility model is not limited to herein
Disclosed form is not to be taken as the exclusion to other embodiment, and available for other combinations, modifications, and environments, and
Can be in contemplated scope described herein, modifications can be made through the above teachings or related fields of technology or knowledge.And this field
The modifications and changes that personnel are carried out do not depart from the spirit and scope of the utility model, then all should be in right appended by the utility model
It is required that protection domain in.
Claims (8)
1. a kind of automatic focusing mechanism, including automatic focusing mechanism (13) and air supporting motion platform (14), which is characterized in that described
Automatic focusing mechanism (13) includes stepper motor (1), Z axis (2), stent (11), Y-axis platform (3), optical head (4) and displacement
Sensor (6), the stepper motor (1) are fixed at Z axis (2) top, multiple installations are provided on the Y-axis platform (3)
Hole, Y-axis platform (3) are connected by positioning bolt (12) with Z axis (2), and the stent (11) is fixed with light successively from top to bottom
It learns head (4) and displacement sensor (6), the stent (11) is fixedly connected with the side of Z axis (2);The air supporting motion platform
(14) limiting device (8) for being included in the support glass (7) of upper end and the transmitting device (9) for being arranged on lower end and intermediate setting
Glass air-floatation support platform, the transmitting device (9) can be transmitted movement in two-dimensional directional.
2. automatic focusing mechanism according to claim 1, which is characterized in that be provided on the Y-axis platform (3) and Z axis
(2) position correspondence, equal-sized mounting hole.
3. automatic focusing mechanism according to claim 1, which is characterized in that institute's displacement sensors (6) are laser displacement
Sensor.
4. automatic focusing mechanism according to claim 1, which is characterized in that be provided on the stent (11) and Z axis (2)
Position correspondence, equal-sized mounting hole.
5. automatic focusing mechanism according to claim 4, which is characterized in that the stent (11) passes through positioning with Z axis (2)
It is bolted.
6. automatic focusing mechanism according to claim 1, which is characterized in that the transmitting device (9) is opposite with air supporting only
It is vertical, contactless face.
7. automatic focusing mechanism according to claim 1, which is characterized in that the two-dimensional directional includes X-axis and Y-axis side
To.
8. automatic focusing mechanism according to claim 1, which is characterized in that the objective end of the optical head (4) is provided with
Rangefinder (5).
Priority Applications (1)
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CN201721752548.7U CN207571442U (en) | 2017-12-13 | 2017-12-13 | A kind of automatic focusing mechanism |
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CN201721752548.7U CN207571442U (en) | 2017-12-13 | 2017-12-13 | A kind of automatic focusing mechanism |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110208289A (en) * | 2019-05-27 | 2019-09-06 | 武汉中导光电设备有限公司 | Automatic top type tracking focusing system and method based on image definition |
CN113176273A (en) * | 2021-03-19 | 2021-07-27 | 哈工大机器人(中山)无人装备与人工智能研究院 | Automatic focusing device and method and panel defect detection system |
-
2017
- 2017-12-13 CN CN201721752548.7U patent/CN207571442U/en active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110208289A (en) * | 2019-05-27 | 2019-09-06 | 武汉中导光电设备有限公司 | Automatic top type tracking focusing system and method based on image definition |
CN113176273A (en) * | 2021-03-19 | 2021-07-27 | 哈工大机器人(中山)无人装备与人工智能研究院 | Automatic focusing device and method and panel defect detection system |
CN113176273B (en) * | 2021-03-19 | 2023-08-15 | 哈工大机器人(中山)无人装备与人工智能研究院 | Automatic focusing device, method and panel defect detection system |
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