CN207571035U - A kind of laser ablation secondary resonance laser induced breakdown spectroscopy detection device - Google Patents
A kind of laser ablation secondary resonance laser induced breakdown spectroscopy detection device Download PDFInfo
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- CN207571035U CN207571035U CN201721752506.3U CN201721752506U CN207571035U CN 207571035 U CN207571035 U CN 207571035U CN 201721752506 U CN201721752506 U CN 201721752506U CN 207571035 U CN207571035 U CN 207571035U
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Abstract
The utility model discloses a kind of laser ablation secondary resonance laser induced breakdown spectroscopy detection devices.The device includes laser ablation, resonant excitation, spectra collection and system control four parts, using the solid sample that the fixed optical-fiber laser ablation of a branch of wavelength is to be detected, make its melting, sputtering and evaporation, generate lasting aerosol, after aerosol is transferred to a new spatial position, it reuses tunable wave length laser and plasma exciatiaon is carried out to aerosol, by wavelength tuning to resonant excitation consistent wavelength corresponding with analyzed elemental characteristic spectral line, enhance object element characteristic spectral line, plasma transmitting light is acquired analysis again, obtain constituent content to be analyzed.The utility model realizes the unification of analysis matrix, effectively increases signal-to-noise ratio, reduces the influence of matrix effect and spectra1 interfer- to laser induced breakdown spectroscopy quantitative analysis performance.
Description
Technical field
The utility model belongs to atomic emission detection technical field, and in particular to a kind of laser ablation secondary resonance swashs
Photoinduction breakdown spectral detection device.
Background technology
Laser induced breakdown spectroscopy (Laser-induced Breakdown Spectroscopy, abbreviation LIBS) technology is
A kind of Laser-Induced Plasma Spectral Analysis Technique.LIBS technology sample treatments are simple, and detection speed is fast, are suitble to field, exist in real time
Line and remote detection.However, it as the conventional LIBS technologies of excitaton source is difficult to that matrix effect and spectrum is overcome to do using single laser
Disturb problem.Element is strong to high-order harmonics spectrum, plasma emissioning light in the difference of physically or chemically form in substance
Degree, elemental analysis sensitivity and quantitative analysis precision all have a direct impact, i.e., so-called matrix effect, it causes in different samples
Same element difficulty carries out quantitative analysis using same calibration directrix curve.Slight matrix effect can lead to quantitative analysis precision not
Height, serious matrix effect will lead to apparent non co-linearity between analytical element content and characteristic spectral line intensity, it is difficult to carry out
Effective quantitative analysis.In addition, the numerous sample spectra of contained element is complicated, is interfered with each other between element spectral line and cause analysis spectral line
Intensity is higher and spectrum peak position deviates, and analytical error is caused to increase.Therefore, active demand is researched and developed new LIBS methods and is improved simultaneously
The matrix effect and spectra1 interfer- problem that conventional LIBS faces.
Chinese patent literature《A kind of component analyzer for laser probe micro-area based on bidifly light source》(application publication number：CN
101782517 A) to disclose a kind of double laser light source laser microprobe using fixed wave length laser and wavelength tunable laser micro-
Area's analytical instrument, basic principle are to utilize laser induced fluorescence auxiliary laser induced breakdown spectroscopy (laser-
Induced breakdown spectroscopy assisted with laser-induced fluorescence, LIBS-
LIF it) is combined with plasma space restriction technique and realizes plasma emission signal intensity enhancing.Since the technology is to utilize
Fixed wave length laser directly carries out sample excitation and generates plasma, and with tunable wave length laser directly to this plasma
Secondary excitation is carried out, while motion control is carried out with space constraint mechanism plasma, realizes spectral signal enhancing, detection pole
Limit reduces and analysis precision improves.As above as it can be seen that the document does not carry out the conversion of sample matrices, so as to fulfill analysis sample base
The unification of body, it is difficult to the physico-chemical property difference by different sample matrices be overcome to lead to the property difference of excited plasma
(matrix effect), such as the amount of excited species, plasma temperature and electron number densitiy, these factors are all by impact analysis result
Precision.
Chinese patent literature《A kind of laser microprobe analysis instrument based on aerosolization and resonant excitation》(Publication No. CN
103712962 A) a kind of laser microprobe analysis instrument for being combined analytical solution ingredient with resonant excitation using aerosolization is disclosed,
Solution atomization is generated by aerosol using atomizer, uses Nd:YAG laser excites aerosol and generates plasma, then uses wavelength
Tunable laser is focused on plasma, is treated analytical element and is carried out resonant excitation, can practise and treat analytical element characteristic spectrum
The enhancing of line, greatly improves sensitivity for analysis.But there are still problems with for the device：(1) fluid sample analysis, nothing are only applicable to
Method realizes solid sample analysis；(2) although the intensity of spectral line and sensitivity for analysis can be greatly improved using LIBS-LIF, not needle
Solution is proposed to influencing the serious matrix effect of LIBS quantitative analyses and spectra1 interfer- problem.
Chinese patent literature《Portable laser probe analytical instrument based on optical fiber laser》(Publication No. CN
103743710 A) disclose a kind of portable LIBS analyzers using optical fiber laser as plasma exciatiaon source.The invention can
Reduce LIBS instrument costs and volume, but directly by the use of Gao Zhongying optical-fiber laser as plasma exciatiaon source, it is difficult to be acquired
Delays time to control, strong spectrum continuous background causes detection sensitivity relatively low, and can not equally solve matrix effect and spectrum
Interference problem.
Utility model content
The utility model provides a kind of laser ablation secondary resonance laser induced breakdown spectroscopy detection device, it is therefore intended that changes
The matrix effect and spectra1 interfer- problem that kind routine LIBS faces.
To achieve the above object, the utility model provides a kind of laser ablation secondary resonance laser induced breakdown spectroscopy inspection
Device is surveyed, which includes laser ablation, resonant excitation, spectra collection and system and control four parts；
Laser-ablated fraction includes optical fiber laser, the first speculum, the first focus lamp, swing offset platform and sampling group
Part；Optical fiber laser, the first speculum and the first focus lamp are sequentially located in same light path, and swing offset platform is to be checked for placing
Substance is surveyed, the sampling assemble is used to collect aerosol and resonant excitation part is supplied to carry out plasma exciatiaon；
Resonant excitation part includes Wavelength tunable laser, the second speculum, the second focus lamp and absorber；Wavelength can
Tuned laser, the second speculum and the second focus lamp are sequentially located in another light path, and absorber is located at the coke of the second focus lamp
Point is outer；
Spectra collection part includes acquisition light path, optical fiber, spectrometer and detector；Acquire light path outlet by optical fiber with
Spectrometer is connected, and detector is connect with spectrometer；
Systems control division point includes computer and sequence controller, and computer is connect with detector, sequence controller difference
It is connect with high-capacity optical fiber laser, Wavelength tunable laser and detector electric signal, sequence controller controls for generating
The synchronous sequence signal of laser and detector；
During work, sample surfaces, convergent laser are exposed to after the optical-fiber laser convergence sent out by high-capacity optical fiber laser
Sample melted, sputtering and evaporation are generated lasting sample aerosol by beam；It is collected and is sprayed by the sampling assemble, by assembling
Tunable wave length laser pulse irradiation afterwards generates low-density steam, after its pulse using its pulse front edge irradiation aerosol
Plasma is generated along resonance ionization is carried out with steam plumage, when its wavelength tuning is extremely corresponding common with analyzed elemental characteristic spectral line
When excitation wavelength of shaking is consistent, enhancing of the object element characteristic spectral line tens to hundred times can be realized, extra laser energy is by inhaling
Acceptor absorbs；The acquisition light path acquisition plasma emissioning light is simultaneously coupled into optical fiber, and being transmitted to spectrometer through optical fiber carries out
Light splitting, the spectral information obtained after light splitting carry out opto-electronic conversion, accumulation and amplification by detector；Computer is used for the light to reception
Modal data is handled, and obtains constituent content to be analyzed.
As a kind of improvement of above-mentioned technical proposal, the sampling assemble is made of constraint chamber and injector, constraint chamber top
Portion is provided with aperture, and injector is concentric cavity configuration, and the outlet of injector arrival end and constraint chamber, the port of export is nozzle,
Injector exocoel tail pipe is as pressurized gas inlet；During work, enter high-pressure inert gas from pressurized gas inlet, make injector
Inner cavity forms negative pressure；Optical-fiber laser passes through aperture above constraint chamber after reflection and convergence, is radiated at sample surfaces, convergent laser
Sample melted, sputtering and evaporation are generated lasting sample aerosol by beam；Aerosol is inhaled into the injector of constraint chamber side,
High pressure gas, by being sprayed at injector nozzle behind injector inner cavity, is swashed with aerosol mixt by the resonant excitation system
Colloidal sol of getting angry generates plasma, and plasma emissioning light signal carries out paraxonic acquisition by acquisition light path.
As an alternative to the above-described technical solution, the sampling assemble is made of constraint chamber, top be provided with for
The quartz window of optical-fiber laser transmission, constraint one side bottom of chamber are provided with pressurized gas inlet；It constrains chamber opposite side and ablation substance is same
Aerosol outlet is provided at one height；During work, high-pressure inert gas is passed through from pressurized gas inlet, is made air in constraint chamber
Discharge, optical-fiber laser are radiated at the sample surfaces being placed on swing offset platform by quartz window, convergent laser beam by sample melted,
Sputtering and evaporation, generate lasting sample aerosol, and sprayed by aerosol outlet, by the resonant excitation system excited gas
Colloidal sol generates plasma, and plasma emissioning light signal carries out paraxonic acquisition by the acquisition light path.
As another improvement of above-mentioned technical proposal, the sampling assemble is made of injector, and injector is T shape knots
Structure, one end of injector is as pressurized gas inlet, and the other end is as aerosol outlet, and the tail pipe of injector is as ablation substance
Import；During work, high-pressure inert gas is passed through from pressurized gas inlet, swiftly flowing inert gas drive under, into
Negative pressure is formed in sample device tail pipe, optical-fiber laser irradiating sample surface generates ablation substance, makes the ablation substance quilt of tail pipe entrance
It sucks inside injector, ablation substance sprays after being mixed with swiftly flowing inert gas from aerosol outlet, is formed for follow-up
The aerosol source of excitation, then plasma is generated by tunable wave length laser irradiation, plasma emissioning light is by the acquisition light
Road is coaxially acquired.
The utility model uses the optical-fiber laser ablation solid sample of Gao Zhongying, by the solids that matrix differentia influence is larger
Matter is converted into the aerosol substantially without matrix difference, and is allowed to continue and stablize output, realizes the unification of analysis matrix.This reality
With novel also by carrying out Selective long-range DEPT to analytical element characteristic spectral line, generation resonance laser induced breakdown spectroscopy can be effective
Signal-to-noise ratio is improved, reduces the influence of matrix effect and spectra1 interfer- to laser induced breakdown spectroscopy quantitative analysis performance.It is specific and
Speech, the utility model have following technical characterstic：
(1) technical characterstic that the utility model protrudes is used as admittedly using Gao Zhongying optical-fiber laser of the frequency in kHz magnitudes
Body sample ablation source comes out surface of solids substance from sample surfaces ablation, then by ablation substance under the action of sampling assemble
The aerosol for continuing and stablizing output is generated with gas mixing, after aerosol is transported to another spatial position by injector, is utilized
Tunable wave length laser carries out aerosol ablation and resonance ionization generates plasma, by selecting tunable laser wavelength can
Selective long-range DEPT is carried out to analytical element characteristic spectral line, resonance laser induced breakdown spectroscopy (RLIBS) is generated, can effectively reduce base
The influence of bulk effect and spectra1 interfer- to LIBS quantitative analysis performances.
(2) the utility model continues ablation solid sample using Gao Zhongying optical-fiber laser, will be larger by matrix differentia influence
Solid ablation be aerosol substantially without matrix difference, then using sampling assemble (such as constraint chamber and Ngatively pressurized sampling device) control gas
Colloidal sol behavior, by current-carrying gas by aerosol carrying to another spatial position, sustainable stable the export, matrix of generation is united
One aerosol, plasma spectrometry excitation is carried out to aerosol can effectively reduce the influence of matrix effect, overcome conventional laser
Harsh Matrix Match problem required by induced breakdown spectroscopy quantitative analysis improves analysis precision.
(3) the utility model uses plasma exciatiaon source of the tunable wave length pulse laser as aerosol, utilizes it
The forward position irradiation aerosol of focused laser pulses generates low-density steam, resonance ionization is carried out to steam with pulse back edge, when sharp
When optical wavelength is tuned to match with analytical element RESONANCE ABSORPTION energy level, a large amount of ground state Elements Atoms to be analyzed are excited to specified
High level, thus high level transit to low-lying level electron number and sharply increase, make objective emission line formatlon excitation enhancing, from
And improve analysis spectral line signal-to-noise ratio；Meanwhile the fluorescent collecting gate-width that RLIBS excitations generate is in nanosecond order, in the process not
It can be accumulated by by the spectral line of emission only a small part of the interference element atom of resonant excitation, thus analysis spectral line can be obtained
Selective long-range DEPT, while can significantly weaken the influence of other interference element spectral lines.
Description of the drawings
Fig. 1 is the first specific embodiment schematic diagram provided by the utility model；
Fig. 2 is second of specific embodiment schematic diagram provided by the utility model；
Fig. 3 is the third specific embodiment schematic diagram provided by the utility model；
In figure：1-optical fiber laser；2-the first speculum；3-the first focus lamp；4-constraint chamber；5-sample；6—
Swing offset platform；7-pedestal；8-ablation substance；9-Ngatively pressurized sampling device；10-pressurized gas inlet；11-tunable wave length
Laser；12-the second speculum；13-the second focus lamp；14-plasma；15-absorber；16-acquisition light path；
17-optical fiber；18-spectrometer；19-detector；20-computer；21-sequence controller；22-quartz window；23-gas is molten
Glue nozzle.
Specific embodiment
Specific embodiment of the present utility model is described further below in conjunction with the accompanying drawings.It should be noted that
The explanation of these embodiments is used to help to understand the utility model, but do not form the restriction to the utility model.This
Outside, as long as technical characteristic involved in the various embodiments of the present invention described below does not form punching each other
It is prominent to can be combined with each other.
A kind of laser ablation secondary resonance laser induced breakdown spectroscopy (Laser that the example of the utility model provides
ablation assisted with resonant laser-induced breakdown spectroscopy,LA-
RLIBS it is a branch of to be that it is used with the maximum difference of existing LIBS-LIF methods (also referred to as resonant excitation LIBS) for) detection device
Ablation substance and gas mixing are generated aerosol, aerosol are transferred to a new sky by wavelength fixed laser ablation substance
Meta position postpones, then carries out plasma exciatiaon to aerosol using tunable wave length laser merely, so as to fulfill that will analyze sample
Matrix is unified for aerosol, therefore achievees the purpose that eliminating matrix effect influences.This method is made using the optical-fiber laser of Gao Zhongying
For solid sample ablation source, optical-fiber laser passes through after reflection and convergence degrades aperture above chamber, is radiated at and is placed on turntable
Sample surfaces, sample melted, sputtering and evaporation generate lasting sample aerosol by convergent laser beam；Aerosol is inhaled into
(high pressure gas sprays the Ngatively pressurized sampling device of constraint chamber side from the exocoel of injector nozzle, makes to be formed at injector chamber exit
Negative pressure, so as to extract the ablation substance of constraint intracavitary), high pressure gas is with aerosol mixt by being sprayed behind injector inner cavity；
The tunable wave length laser pulse irradiation that aerosol is converged at injector nozzle is generated using its pulse front edge irradiation aerosol
Low-density steam carries out resonance ionization with its pulse back edge and steam plumage and generates plasma, when its wavelength tuning is to being divided
When analysing the corresponding resonant excitation consistent wavelength of elemental characteristic spectral line, it can be achieved that object element characteristic spectral line tens to hundred times increasing
By force；Tunable wave length laser focus point underlying absorbent body is used to absorb extra laser energy；Tunable wave length laser excitation gas is molten
The plasma emissioning light that glue generates is coupled into optical fiber after being acquired by acquisition light path (light collector), and spectrum is transmitted to through optical fiber
Instrument is divided, and the spectral information obtained after light splitting carries out opto-electronic conversion, accumulation and amplification by detector (such as ICCD)；Computer
It is handled for instrument controlling and spectroscopic data；Sequence controller is believed for generating the synchronous sequence of control laser and detector
Number.
As shown in Figure 1, the first laser ablation secondary resonance laser induced breakdown spectroscopy that the example of the utility model proposes
Detection device mainly includes laser ablation, resonant excitation, spectra collection and system and controls 4 parts.
Laser-ablated fraction includes high-capacity optical fiber laser 1, the first speculum 2, the first focus lamp 3, constraint chamber 4, rotation
Indexable moving stage 6, pedestal 7 and injector 9；High-capacity optical fiber laser 1, the first speculum 2 and the first focus lamp 3 are sequentially located at together
In one light path, constraint chamber 4 is mounted on pedestal 7, and swing offset platform 6 is located in constraint chamber 4, and going out positioned at the first focus lamp 3
In light light path, channel is provided between the import of injector 9 and constraint chamber 4.
Resonant excitation part includes Wavelength tunable laser 11, the second speculum 12, the second focus lamp 13 and absorber
15；Wavelength tunable laser 11, the second speculum 12 and the second focus lamp 13 are sequentially located in another light path, absorber 15
Below tunable wave length laser focus point, for absorbing extra laser energy；
Spectra collection part includes acquisition light path 16, optical fiber 17, spectrometer 18 and detector 19；Acquire the outlet of light path 16
It is connected by optical fiber 17 with spectrometer 18, detector 19 is connect with 18 signal of spectrometer.
Systems control division point includes computer 20 and sequence controller 21, and computer 20 is connect with detector 19, sequential control
Device 21 processed is connect respectively with high-capacity optical fiber laser 1, Wavelength tunable laser 11 and 19 electric signal of detector.
More than the optical fiber laser power 20W, more than repetition rate 1kHz, pulsewidth is in more than 10ns；The high pressure gas
Body is using inert gases such as Ar gas；
The Ngatively pressurized sampling device is concentric cavity configuration, and exocoel tail pipe is passed through high pressure Ar gas, when being sprayed by injector nozzle
Inner cavity is made to form negative pressure, so as to draw the aerosol of the other end of inner cavity, realizes sample introduction function；
The Wavelength tunable laser uses optical parametric oscillator OPO Wavelength tunable lasers, and launch wavelength exists
200~1000nm ranges are adjustable, more than pulsed laser energy 1mJ, 5~10ns of pulsewidth；
The spectrometer is Czerny-Turner type spectrometers, can acquire wave-length coverage in 200~900nm, detector is adopted
The opto-electronic conversion of spectral signal is realized with the face battle array ICCD with 1024 × 256 pixels, ICCD has delay acquisition and gate-width control
Function processed, minimum shutter width 5ns；
The sequence controller has at least three time delayed signal output channels such as A, B, C, all communication channel delay resolution ratio
Not less than 5ps, delay jitter is not more than 50ps between channel.
The specific work process of the first embodiment of the utility model is：
The optical fiber laser 1 of Gao Zhongying generates quasi-continuous high energy laser pulse, poly- through the reflection of the first speculum 2 and first
After burnt mirror 3 is assembled, across the aperture at cylindrical 4 top of constraint chamber, 5 surface of sample is focused on, to prevent to sample same position
Repeatedly ablation and generate dell, sample is placed on swing offset platform 6 at the uniform velocity, makes optical-fiber laser ablation point on sample surfaces edge
Helix moves, and optical-fiber laser ablation substance 8 is inhaled into the injector 9 mounted on 4 side of constraint chamber, and injector 9 is by outside
Chamber is passed through high pressure argon gas 10 and negative high voltage is formed at injector chamber exit, so as to constrain the ablation substance 8 generated in chamber 4
It draws out by injector 9 together with air, lasting aerosol, constraint chamber 4 and rotation position is generated in 9 exit of injector
Moving stage 6 is placed on pedestal 7；
After the laser pulse that OPO lasers 11 export is reflected by the second speculum 12 and assembled with the second focus lamp 13, focus on
Point is at away from injector aerosol nozzle 2mm, and OPO laser pulse pre irradiations aerosol generates low-density steam, after OPO pulses
Plasma 14 is generated along resonance ionization is carried out to steam, OPO laser wavelength lambdas are according to energy level E on tested elemental characteristic spectral lineHCertainly
It is fixed：λ=hc/EH, h is Planck's constant, and c is the light velocity, OPO energy densities F=1~5J/cm2, concrete numerical value can be by optimizing quilt
The selection of characteristic spectral line signal-to-noise ratio is surveyed, is absorbed after unabsorbed OPO laser lights plasma by absorber 15；
The setting of 16 paraxonic of light path is acquired, for being acquired to plasma optical emission, and coupled to optical fiber 17, via optical fiber
It is transmitted in spectrometer 18, the spectrum generated after light splitting carries out opto-electronic conversion by ICCD 19, and the spectroscopic data of generation is transmitted to meter
Calculation machine 20 is stored, calculated and is shown；
21 channel A of sequence controller triggers optical fiber laser 1, channel B triggering OPO lasers 11, channel C triggering ICCD
19, channel B and channel C time delay interval 5ns, ICCD 19 acquire gate-width 100ns, and continuous background interference can be reduced by increasing delay,
Interference spectral line integrated intensity can be reduced by reducing acquisition gate-width, improve analysis spectral line signal-to-noise ratio, it is practical measure in acquisition delay and
Gate-width most preferably can suitably be adjusted according to tested analysis spectral line signal-to-noise ratio；
After carrying out background deduction to acquisition spectrum, extraction and analysis elemental characteristic the intensity of spectral line I is built using series standard sample
The working curve of vertical I and analytical element content C：C=f (I), f () represent the functional relation of working curve, by unknown sample point
Analyse elemental characteristic the intensity of spectral line IxBring working curve into, it can estimate analysis constituent content Cx。
Second of embodiment is as shown in Figure 2.
Chamber and input mode are constrained with aerosol of the first embodiment the difference lies in its laser-ablated fraction not
Together, 4 top of constraint chamber increases the quartz window 22 transmitted for optical-fiber laser, and pressurized gas inlet 10 changes into constraint chamber side bottom
Portion is passed through argon gas in pressurized gas inlet 10, since argon gas density is higher than atmospheric density, thus first leads to before detection to constraint chamber
The discharge of cavity space gas will be constrained by entering argon gas, and aerosol outlet 23 is provided at constraint 4 opposite side of chamber and 8 sustained height of ablation substance,
Argon gas mixes the ablation substance 8 of sample with optical-fiber laser generation aerosol in detection process, is sprayed by aerosol outlet 23.
Compared with the first embodiment, specific work process removes constraint chamber and sample introduction process in the 1st step, and there are above-mentioned differences
Unusual, other processes are identical with the first embodiment.
The third embodiment is as shown in Figure 3.
The difference lies in laser-ablated fraction eliminates aerosol constraint chamber, Er Qiejin with the first embodiment
Sample loading mode uses the injector 9 of a T-shaped structure instead.Argon gas is passed through in the pressurized gas inlet 10 of injector 9, in swiftly flowing argon
Under gas drives, negative pressure is formed in the tail pipe of injector 9, the ablation substance 8 of tail pipe entrance is sucked into injector 9, ablation object
Matter 8 sprays after the mixing of swiftly flowing argon gas in aerosol nozzle 23, forms the aerosol source for subsequently exciting.
Compared with the first embodiment, specific work process removes constraint chamber and sample introduction process in the 1st step, and there are above-mentioned differences
Unusual, spectra collection mode is become coaxially acquiring from paraxonic acquisition in the 3rd step, and acquisition light path is placed in 12 rear of the second speculum.
The transmitting light of plasma 14 is collected light path after lens B11 and speculum 12 and collects.Other processes of the present embodiment with
The first embodiment is identical.
The above is several preferred embodiments of the utility model, for the substantially former of showing and describsion the utility model
The advantages of reason, main feature and the utility model, the utility model is not limited to interior disclosed in the embodiment and attached drawing
Hold.On the premise of not departing from the spirit and scope of the utility model, the present invention also has various changes and improvements, these changes
Change and improvement both falls within requirement.
Claims (6)
1. a kind of laser ablation secondary resonance laser induced breakdown spectroscopy detection device, which is characterized in that the device includes laser
Ablation, resonant excitation, spectra collection and system control four parts；
Laser-ablated fraction include optical fiber laser (1), the first speculum (2), the first focus lamp (3), swing offset platform (6) and
Sampling assemble；Optical fiber laser (1), the first speculum (2) and the first focus lamp (3) are sequentially located in same light path, rotate position
For placing substance to be detected, the sampling assemble is used to collect aerosol and resonant excitation part is supplied to carry out moving stage (6)
Plasma exciatiaon；
Resonant excitation part includes Wavelength tunable laser (11), the second speculum (12), the second focus lamp (13) and absorbs
Body (15)；Wavelength tunable laser (11), the second speculum (12) and the second focus lamp (13) are sequentially located in another light path,
Absorber (15) is outside the focus positioned at the second focus lamp (13)；
Spectra collection part includes acquisition light path (16), optical fiber (17), spectrometer (18) and detector (19)；Acquire light path (16)
Outlet be connected by optical fiber (17) with spectrometer (18), detector (19) is connect with spectrometer (18)；
Systems control division point includes computer (20) and sequence controller (21), and computer (20) is connect with detector (19), when
Sequence controller (21) respectively with high-capacity optical fiber laser (1), Wavelength tunable laser (11) and detector (19) electric signal
Connection；Sequence controller (21) controls the synchronous sequence signal of laser and detector for generating.
2. laser ablation secondary resonance laser induced breakdown spectroscopy detection device according to claim 1, which is characterized in that
The sampling assemble is made of constraint chamber (4) and injector (9), is provided with aperture at the top of constraint chamber (4), injector (9) is concentric
Cavity configuration, injector (9) arrival end with constraint chamber (4) outlet, the port of export be nozzle, injector (9) exocoel tail pipe
As pressurized gas inlet.
3. laser ablation secondary resonance laser induced breakdown spectroscopy detection device according to claim 1, which is characterized in that
The sampling assemble is made of constraint chamber (4), and top is provided with the quartz window (22) transmitted for optical-fiber laser, constraint chamber (4)
One side bottom is provided with pressurized gas inlet (10)；Aerosol is provided at constraint chamber (4) opposite side and ablation substance (8) sustained height
It exports (23).
4. laser ablation secondary resonance laser induced breakdown spectroscopy detection device according to claim 1, which is characterized in that
The sampling assemble is made of injector (9), and injector (9) is T-shaped structure, and one end of injector (9) enters as high pressure gas
Mouthful (10), the other end is as aerosol outlet (23), the import of the tail pipe of injector (9) as ablation substance.
5. the laser ablation secondary resonance laser induced breakdown spectroscopy detection device according to claim 2,3 or 4, feature
It is, the Wavelength tunable laser (11) is using optical parametric oscillator (OPO) Wavelength tunable laser, launch wavelength
Adjustable, more than pulsed laser energy 1mJ, 5~10ns of pulsewidth in 200~1000nm ranges.
6. the laser ablation secondary resonance laser induced breakdown spectroscopy detection device according to claim 2,3 or 4, feature
It is, optical fiber laser (1) power is more than more than 20W, repetition rate 1kHz, and pulsewidth is in more than 10ns.
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| CN111239104A (en) * | 2020-02-17 | 2020-06-05 | 吉林大学 | LIBS spectral signal enhancement method and system based on resonance excitation |
| CN111912835A (en) * | 2020-08-27 | 2020-11-10 | 山东大学 | LIBS device with ablation amount measuring function and method |
| CN111912835B (en) * | 2020-08-27 | 2023-06-23 | 山东大学 | LIBS device and LIBS method with ablation measuring function |
| CN113310862A (en) * | 2021-05-28 | 2021-08-27 | 中国矿业大学 | Device and method for continuously detecting air particles based on Raman spectrum |
| CN113310862B (en) * | 2021-05-28 | 2022-03-22 | 中国矿业大学 | Device and method for continuously detecting air particles based on Raman spectrum |
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Inventor after: Hao Zhongqi Inventor after: Li Xiangyou Inventor after: Li Jiaming Inventor after: Zhou Ran Inventor after: Guo Lianbo Inventor after: Zeng Xiaoyan Inventor before: Hao Zhongqi Inventor before: Li Xiangyou Inventor before: Li Jiaming Inventor before: Zhou Ran Inventor before: Guo Lianbo Inventor before: Zeng Xiaoyan Inventor before: Lu Yongfeng |