CN207567379U - A kind of polysilicon fully-automatic production system - Google Patents

A kind of polysilicon fully-automatic production system Download PDF

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Publication number
CN207567379U
CN207567379U CN201721533526.1U CN201721533526U CN207567379U CN 207567379 U CN207567379 U CN 207567379U CN 201721533526 U CN201721533526 U CN 201721533526U CN 207567379 U CN207567379 U CN 207567379U
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silicon
polysilicon
ingot
raw material
processing unit
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CN201721533526.1U
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Chinese (zh)
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何建志
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Zhejiang Kai Ray Electronics Co Ltd
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Zhejiang Kai Ray Electronics Co Ltd
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Abstract

The utility model is related to a kind of polysilicon fully-automatic production systems,Processing unit including polycrystalline silicon raw material,The device includes raw material and detects screening machine,Raw material cleaning device and raw material drying device,Material transport track is equipped with after the processing unit of polycrystalline silicon raw material,The end of material transport track is connected on the ingot casting device of polysilicon,The ingot casting device of polysilicon includes crucible spraying device and vacuumizes/heating unit,Silicon ingot transmission rail is equipped with after the ingot casting device of polysilicon,The ingot casting device end of polysilicon leads to the cutting means of silicon ingot,The cutting means of the silicon ingot are followed successively by evolution device,Decaptitating tail apparatus,Flour milling,Facing attachment and glue sticking device and slicing device,The retracting device of waste material and the processing unit of silicon chip are equipped with after the cutting means of silicon ingot,Process is followed successively by degumming/washing/drying of silicon chip and the packaging of silicon chip before and after the processing unit of silicon chip,It is put in storage two parts.The utility model is structurally consummate, reasonable design, can meet needs of production.

Description

A kind of polysilicon fully-automatic production system
Technical field
The utility model belongs to the production and processing field of polysilicon, relates generally to a kind of polysilicon fully-automatic production system.
Technical background
Silicon materials are currently the most important semiconducting materials, and currently used solar cell is silion cell.Elemental silicon is ratio A kind of more active nonmetalloid, it can form compound with 64 kinds of elements in 96 kinds of stable elements.The main application of silicon It is to depend on its semiconduction.
Crystalline silicon includes monocrystalline silicon and polysilicon, and the preparation method of crystalline silicon, which is about first reduction with carbon SiO2, becomes Si, It is purified again with HCl reactions and obtains higher purity polysilicon, polysilicon or amorphous silicon is typically first made in the preparation method of monocrystalline silicon, so Bar-like single crystal silicon is grown from melt with vertical pulling method or floating zone method afterwards.The monocrystal of silicon.With substantially complete dot matrix The crystal of structure.Polysilicon purity requirement for manufacturing solar cell reaches 99.9999%.It is first before crystalline silicon production and processing It first needs to clean polysilicon.The purpose of cleaning is mainly the mechanical damage layer and the table to silicon chip for removing silicon chip surface Face carries out male and fomale(M&F) (pyramid matte) and handles, and increases refraction number of the light on solar cell piece surface, conducive to solar cell Absorption of the piece to light, to reach the peak use rate that cell piece is worth solar energy.In addition remove surface sodium metasilicate, oxide, Greasy dirt and impurity metal ion.
Silicon material directional solidification after cleaning makes product.In general, silicon material includes virgin polycrystalline silicon material and monocrystalline silicon returns Materials, the commonly referred to as positive material of virgin polycrystalline silicon, purity is higher, and price is also high;Monocrystalline silicon returns such as silicon single crystal rod is end to end Raw material that material, edge skin material, pot bottom material, cell piece obtain after cleaning treatment etc..By silicon material in single crystal growing furnace (in solar level It is more typical with Czochralski furnace in the production technology of monocrystalline silicon) in melt after using series of processes can grow into monocrystalline silicon ear of maize, Monocrystalline silicon ear of maize is subsequently machined, obtains monocrystal silicon, slicing machines is reused and slice processing is carried out to silicon ingot, then To silicon chip.
Making is the polycrystalline block or monocrystalline for selecting resistivity as 100~300 ohmcms to the technical process of crystal silicon Silicon is expected end to end, through broken, with 1:5 hydrofluoric acid and nitric acid mixed liquor carries out appropriate corrosion, is then in deionized water flushing Neutrality, and dry.Polycrystalline silicon material is installed with silica crucible, appropriate borosilicate is added in, is put into casting furnace, is heated in vacuum state molten Change.About 20 minutes should be kept the temperature after fusing, is then injected into graphite casting die, to get polycrystal silicon ingot after cooling is slowly solidified.It is this Silicon ingot is castable into cube, so as to slice processing squarely solar cell piece, can improve material utilization rate and ease of assembly.Polycrystalline The manufacture craft of silicon solar cell and single crystal silicon solar cell are similar, photoelectric conversion efficiency about 12% or so, slightly less than singly Crystal silicon solar battery, but material manufacture is easy, saves power consumption, total production cost is relatively low, therefore is largely developed.With Technology must improve, and the transfer efficiency of polysilicon can also reach 14% or so at present.
Invention content
In order to meet the needs of actual production, the utility model provides a kind of polysilicon fully-automatic production system, and structure is complete Kind and reasonable design.
Designing scheme is used by the utility model:A kind of polysilicon fully-automatic production system, including polycrystalline silicon raw material Processing unit 1, the processing unit 1 of the polycrystalline silicon raw material includes raw material detection screening machine 2 and raw material cleaning device 3 and original Expect drying device 4, material transport track 5, the material transport track 5 are equipped with after the processing unit 1 of the polycrystalline silicon raw material End be connected on the ingot casting device 6 of polysilicon, the ingot casting device 6 of the polysilicon includes crucible spraying device 7 and takes out true Sky/heating unit 8, the ingot casting device 6 of the polysilicon are equipped with silicon ingot transmission rail 9, the ingot casting device 6 of the polysilicon later End leads to the cutting means 10 of silicon ingot, and the cutting means 10 of the silicon ingot are followed successively by evolution device 11, decaptitating tail apparatus 12, mill Face, facing attachment 13 and glue sticking device 14 and slicing device 15, the cutting means 10 of the silicon ingot are equipped with returning for waste material later The processing unit of receiving apparatus 19 and silicon chip (16), process is followed successively by the degumming of silicon chip/clear before and after the processing unit 16 of the silicon chip Wash/dry packaging, 18 two parts of storage of 17 and silicon chip.
In designing scheme provided by the utility model, the material transport track 5 is located at the processing unit 1 of polycrystalline silicon raw material It is connected between the ingot casting device 6 of polysilicon, and by two-part device.
In designing scheme provided by the utility model, the silicon ingot transmission rail 9 is located at the ingot casting device 6 and silicon of polysilicon Between the cutting means 10 of ingot.
In designing scheme provided by the utility model, the evolution device 11, decaptitating tail apparatus 12, flour milling, facing attachment 13rd, glue sticking device 14 and slicing device 15 are integrally formed the cutting means 10 of silicon ingot for a silicon ingot processing of cutting.
In designing scheme provided by the utility model, the processing unit 1 of the polycrystalline silicon raw material, ingot casting device 6, the silicon of silicon The cutting means 10 of ingot, the processing unit 16 of silicon chip, the packaging of silicon chip, storage 18 and waste material retracting device 19 be a flowing water Linear system is united.
The utility model has the following advantages:
The utility model is structurally consummate, provides a kind of polysilicon fully-automatic production system, designs from polycrystalline silicon raw material to more Whole processing procedures of crystal silicon waste material, reasonable design can meet the needs of actual production.
The utility model is described in further detail below in conjunction with the accompanying drawings.
Description of the drawings
Fig. 1 is the structure chart of polysilicon fully-automatic production system, and the processing unit of 1- polycrystalline silicon raw materials, 2- raw materials, which detect, to be sieved Select machine, 3- raw material cleaning devices, 4- raw material drying devices, 5- material transport tracks, the ingot casting device of 6- polysilicons, the spray of 7- crucibles Coating device, 8- vacuumize/heating unit, 9- silicon ingot transmission rails, the cutting means of 10- silicon ingots, 11- evolution devices, and 12- is gone Device end to end, 13- flour millings, facing attachment, 14- glue sticking devices, 15- slicing devices, the processing unit of 16- silicon chips, 17- silicon chips Degumming/washing/drying, packaging, the storage of 18- silicon chips, the retracting device of 19- waste materials.
Specific embodiment
Below in conjunction with the utility model attached drawing and specific designing scheme, to the designing scheme in the utility model embodiment Be clearly and completely described, it is clear that described embodiment be only the utility model part of the embodiment rather than Whole embodiments.Based on the embodiment in the utility model patent, those of ordinary skill in the art are not paying creativeness All other embodiments obtained under the premise of labour belong to the range of this patent protection.
Embodiment 1
As shown in Fig. 1 polysilicon fully-automatic production system construction drawings, a kind of polysilicon fully-automatic production system, including polycrystalline The processing unit 1 of silicon raw material, the processing unit 1 of the polycrystalline silicon raw material include raw material detection screening machine 2 and raw material cleaning device 3 And raw material drying device 4, the processing unit 1 of the polycrystalline silicon raw material are equipped with material transport track 5, the material transport later The end of track 5 is connected on the ingot casting device 6 of polysilicon, and the ingot casting device 6 of the polysilicon includes 7 He of crucible spraying device / heating unit 8 is vacuumized, silicon ingot transmission rail 9, the ingot casting of the polysilicon are equipped with after the ingot casting device 6 of the polysilicon 6 end of device leads to the cutting means 10 of silicon ingot, and the cutting means 10 of the silicon ingot are followed successively by evolution device 11, decaptitating tail apparatus 12, flour milling, facing attachment 13 and glue sticking device 14 and slicing device 15, the cutting means 10 of the silicon ingot are equipped with waste material later Retracting device 19 and silicon chip processing unit (16), process is followed successively by the de- of silicon chip before and after the processing unit 16 of the silicon chip The packaging of glue/washing/drying 17 and silicon chip, 18 two parts of storage.
The material transport track 5 is located between the processing unit 1 of polycrystalline silicon raw material and the ingot casting device 6 of polysilicon, and Two-part device is connected.
The silicon ingot transmission rail 9 is located between the ingot casting device 6 of polysilicon and the cutting means 10 of silicon ingot.
The evolution device 11, decaptitating tail apparatus 12, flour milling, facing attachment 13, glue sticking device 14 and slicing device 15 are The cutting means 10 of one silicon ingot processing of cutting overall structure silicon ingot.
The processing of the processing unit 1 of the polycrystalline silicon raw material, the ingot casting device 6 of silicon, the cutting means 10 of silicon ingot, silicon chip fills Put 16, silicon chip packaging, storage 18 and waste material retracting device 19 be a pipeline system.
System is in application, raw material detection screening machine and raw material in processing unit of the polycrystalline silicon raw material through polycrystalline silicon raw material are clear The detection screening of cleaning device and raw material drying device after cleaning and drying, passes through material transport orbit transports to polysilicon Ingot casting device is sprayed in crucible spraying device, then vacuumize/heating unit vacuumized and heated to ingot furnace Silicon ingot is generated, silicon ingot is transferred to the cutting means of silicon ingot by silicon ingot transmission rail, respectively by evolution device, goes to fill end to end Put, flour milling, facing attachment and glue sticking device and slicing device silicon ingot is carried out evolution, go end to end, flour milling and chamfering, viscose glue, Slicing treatment obtains product to crystalline silicon wafer, and silicon chip passes through degumming/washing/drying work of the silicon chip in the processing unit of silicon chip Sequence is handled, and the product of final inspection qualification enters the packaging of silicon chip, storage process completes the processing of finished product, in process Retracting device of the waste material of generation through waste material is recycled.
The utility model is structurally consummate, provides a kind of polysilicon fully-automatic production system, designs from polycrystalline silicon raw material to more Whole processing procedures of crystal silicon waste material, reasonable design can meet the needs of actual production.
Every technical staff's notice:Although the utility model describes according to above-mentioned specific embodiment, this The invention thought of utility model is not limited to that patent, and any repacking with the utility model thought will all be included in this specially In sharp scope of patent protection.

Claims (5)

1. a kind of polysilicon fully-automatic production system, which is characterized in that the processing unit (1) including polycrystalline silicon raw material is described more The processing unit (1) of crystal silicon raw material includes raw material detection screening machine (2) and raw material cleaning device (3) and raw material drying device (4), material transport track (5) is equipped with after the processing unit (1) of the polycrystalline silicon raw material, the material transport track (5) End is connected on the ingot casting device (6) of polysilicon, the ingot casting device (6) of the polysilicon including crucible spraying device (7) and / heating unit (8) is vacuumized, silicon ingot transmission rail (9), the polysilicon are equipped with after the ingot casting device (6) of the polysilicon Ingot casting device (6) end lead to the cutting means (10) of silicon ingot, the cutting means (10) of the silicon ingot are followed successively by evolution device (11), decaptitating tail apparatus (12), flour milling, facing attachment (13) and glue sticking device (14) and slicing device (15), the silicon ingot Cutting means (10) after be equipped with the retracting device (19) of waste material and the processing unit (16) of silicon chip, the processing of the silicon chip fills Process is followed successively by degumming/washing/drying (17) of silicon chip and the packaging of silicon chip, storage (18) two parts before and after putting (16).
A kind of 2. polysilicon fully-automatic production system according to claim 1, which is characterized in that the material transport track (5) between the processing unit of polycrystalline silicon raw material (1) and the ingot casting device (6) of polysilicon, and two-part device is connected Get up.
A kind of 3. polysilicon fully-automatic production system according to claim 1, which is characterized in that the silicon ingot transmission rail (9) between the ingot casting device of polysilicon (6) and the cutting means (10) of silicon ingot.
A kind of 4. polysilicon fully-automatic production system according to claim 1, which is characterized in that the evolution device (11), decaptitating tail apparatus (12), flour milling, facing attachment (13), glue sticking device (14) and slicing device (15) are cut out for a silicon ingot Cut the cutting means (10) of processing overall structure silicon ingot.
5. a kind of polysilicon fully-automatic production system according to claim 1, which is characterized in that the polycrystalline silicon raw material Processing unit (1), the ingot casting device (6) of silicon, the cutting means (10) of silicon ingot, the processing unit (16) of silicon chip, the packaging of silicon chip, The retracting device (19) for being put in storage (18) and waste material is a pipeline system.
CN201721533526.1U 2017-11-16 2017-11-16 A kind of polysilicon fully-automatic production system Expired - Fee Related CN207567379U (en)

Priority Applications (1)

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CN201721533526.1U CN207567379U (en) 2017-11-16 2017-11-16 A kind of polysilicon fully-automatic production system

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Application Number Priority Date Filing Date Title
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110329558A (en) * 2019-06-10 2019-10-15 浙江晶盛机电股份有限公司 A kind of silicon material sorted and packaged production line
CN113013066A (en) * 2021-03-01 2021-06-22 昆山基侑电子科技有限公司 Automatic recovery device for wafer cleaning

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110329558A (en) * 2019-06-10 2019-10-15 浙江晶盛机电股份有限公司 A kind of silicon material sorted and packaged production line
CN113013066A (en) * 2021-03-01 2021-06-22 昆山基侑电子科技有限公司 Automatic recovery device for wafer cleaning
CN113013066B (en) * 2021-03-01 2023-12-15 昆山基侑电子科技有限公司 Automatic recovery device for wafer cleaning

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