CN207546096U - Online low concentration chlorine analyzer moisture separator - Google Patents
Online low concentration chlorine analyzer moisture separator Download PDFInfo
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- CN207546096U CN207546096U CN201721378695.2U CN201721378695U CN207546096U CN 207546096 U CN207546096 U CN 207546096U CN 201721378695 U CN201721378695 U CN 201721378695U CN 207546096 U CN207546096 U CN 207546096U
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Abstract
The utility model discloses a kind of online low concentration chlorine analyzer moisture separator, including：Housing, the interior card of housing set partition board, housing are divided into the first separation chamber, the second separation chamber and drip chamber；The top of first separation chamber has air inlet, is obliquely installed the first deflector of polylith on madial wall, the second deflector, T-slot are set on partition board；Second separation chamber top has gas outlet, and polylith third deflector, the 4th deflector are obliquely installed on madial wall；Drip chamber side wall is equipped with discharge outlet, drip chamber interior sealing is arranged with baffle, drip chamber is divided into fluid reservoir and storage salt room, case inside wall sets a waterwheel, waterwheel is located at the underface of the vertical slot least significant end, so that the liquid flowed out in the T-slot drives waterwheel rotation.The utility model have aqueous vapor separation it is more abundant, and dissolve and absorption chlorine ability it is weak, using condense droplet its own gravity drive waterwheel rotate, when the finely dispersed advantageous effect of water body salinity.
Description
Technical field
The utility model is related to chlorine analysis apparatus fields.More specifically, the utility model is related to a kind of online low dense
Spend chlorine analysis instrument moisture separator.
Background technology
Chlorine is a kind of gas with extremely strong chemical affinity, after it is with many material mixings, can corrode container,
Even set off an explosion, meanwhile, the chlorine under normality is a kind of hypertoxic gas, and the respiratory tract and eye nose for being capable of strong impulse people glue
Film or even threat to life in Chemical Manufacture, for the generation prevented accident and the personal safety for ensuring operating personnel, need
Chlorine in tail gas is monitored on-line, discharge standard can be reached with the tail gas for ensureing discharge.Wherein, in tail gas generally
Containing water vapour, water vapour can dissolve chlorine, cause detection error, for the detection of low concentration chlorine,
Influence becomes apparent, therefore during testing and analyzing, it needs to exclude the water vapour in tail gas by moisture separator, how have
Effect excludes water vapour in tail gas, and it is current urgent problem to the dissolving of chlorine in tail gas to reduce water vapour.
Utility model content
One purpose of the utility model is to solve at least the above, and provide the advantages of at least will be described later.
The utility model is to provide a kind of online low concentration chlorine analyzer moisture separator there are one purpose, point
Space two-stage treatment makes aqueous vapor separation more abundant, setting storage salt room, reduces the ability of water body dissolving chlorine, using condensing droplet
Its own gravity drives waterwheel rotation, to stir water body in drip chamber, it is made to be uniformly dispersed.
In order to realize these purposes and other advantages according to the present invention, a kind of online low concentration chlorine analyzer is provided
With moisture separator, including：Housing is cylindric, and card sets partition board straight down in the housing, and the divider height is less than
The body height, the top of the partition board seal affixed, two side ends and case inside wall sealing with the housing tip
It is affixed, the housing is divided into be connected positioned at the first separation chamber of the partition board both sides, the second separation chamber and be located at
The drip chamber of the housing lower end；
Wherein, the top of first separation chamber has air inlet, diagonally downward towards the baffle interval on madial wall
The first deflector of polylith is set, and the one end of first deflector far from first separation chamber is not abutted with the partition board, institute
It states partition board and is respectively provided with the second deflector between arbitrary two piece of first deflector close to the side of first deflector, it is described
Partition board side wall is located at setting T-slot below the first deflector of least significant end, and second deflector and the T-slot are tilted towards
Lower to be set towards first separation chamber madial wall, the T-slot includes circumferential and the partition board and first separation chamber's madial wall
Affixed translot and the vertical slot connected with the translot, the one end of the vertical slot far from the translot is opening-like, and described first
The projection of deflector least significant end vertically downwards is fallen into translot, and first deflector and second deflector edge are perpendicular
Nogata is overlapped to downward projection section；
The top of second separation chamber side wall has gas outlet, tilts upward on madial wall and is set towards the baffle interval
Polylith third deflector is put, the one end of the third deflector far from second separation chamber is not abutted with the partition board, described
Partition board is disposed below being respectively provided with the 4th deflector close to the side of the third deflector, the third deflector and described leads
Flowing plate projection section vertically downwards overlaps, the least significant end of the third deflector and the 4th deflector it is minimum
End is all provided with jagged；
The drip chamber side wall least significant end is located at the gas outlet and is arranged right below discharge outlet, and the drip chamber is interior along separate
The discharge outlet least significant end tilts upward sealing and is arranged with baffle, and the drip chamber is divided into the fluid reservoir being located above and position
In the storage salt room of lower section, the side wall of the storage salt room has retractable feed inlet, with filling chlorinated sodium, institute into the storage salt room
It states baffle and includes the dictyosome layer and filter layer of cloth that from top to bottom set gradually, the case inside wall, which is located above the baffle, to be rotated
One waterwheel is set, and the waterwheel is located at the underface of the vertical slot least significant end, so that the liquid flowed out in the T-slot drives institute
State waterwheel rotation.
Preferably, the volume ratio of first separation chamber and second separation chamber is 1:3.
Preferably, the notch of the least significant end of the third deflector is in the arc similar to the case inside wall shape
Shape, the notch that the least significant end of the 4th deflector is equal is elongated, and one is laid in the notch and is adapted with its shape
Filter plate, the filter plate include：
Container with inner space, the top and bottom of the container include internally positioned filter layer of cloth and are located at
External dictyosome layer, the container top surface have an openable and closable feeding port, filling chlorinated sodium in the container.
Preferably, the madial wall of the housing has groove；
It further includes：Connection component, the connection component include：
Chimeric part, one end are embedded and are fixed in groove, hollow setting in the chimeric part, below sidewalls vertical to
At least two bottoms protrusion is equipped with, distance of the chimeric part top side wall apart from its bottom surface is more than the depth of the groove, small
The shortest distance in its bottom surface of bottom protrusion distance；
Connecting shaft is inserted in the chimeric part, and with the kerve body being adapted with the bottom protrusion；
Capping, lid are located in connecting shaft, and abut to form tubular structure with the chimeric part, and tubular structure is located at institute
The peripheral surface for stating the part outside groove is provided with external screw thread, and the capping medial surface has top protrusion, and the connection, which is drawn up, to be had
The inverted draw cut body being adapted to the top protrusion；
Screw-casing, spiral shell is set on outside tubular structure, with fixed connection shaft；
Wherein, the connecting shaft is located at that one end outside tubular structure is circumferentially arranged fixing groove, with solid with waterwheel rotation
It connects.
Preferably, the partition board, first deflector, second deflector, the third deflector, described
Four deflectors, the T-slot and the connecting shaft are made of polytetrafluoroethylene material.
Preferably, the fixing groove is included along circumferentially disposed a pair of of the L-type plate of the connecting shaft, a pair of of L-type plate mirror image
Setting, one end of one of L-type plate are vertically fixed in the connecting shaft side wall, and the other end is set towards another L-type plate.
Preferably, the waterwheel includes disc frame body, and center has fixed with fixing groove cooperation rotation
Rotating hole, the disc frame body are circumferentially with truncated rectangular pyramids shape and connect liquid bath.
The utility model includes at least following advantageous effect：
Firstth, divide space two-stage treatment (the first separation chamber and the second separation chamber), make aqueous vapor separation more abundant, setting storage salt
Room forms saturated nacl aqueous solution, reduces the ability of water body dissolving chlorine, waterwheel is driven to revolve using droplet its own gravity is condensed
Turn, to stir water body in drip chamber, it is made faster to dissolve sodium chloride and is uniformly dispersed；
Secondth, the first separation chamber carries out primary separation, and water body content is larger, is detached, avoided using small space rapid preliminary
It is excessively dissolved in water body with chlorine is reduced, weakens damage of the water body to chlorine over time and space, increase the accuracy of analysis,
The setting of filter plate makes droplet, directly into sodium chloride solution, reduce water body dissolving chlorine on third deflector and the 4th deflector
Ability, the use of polytetrafluoroethylene material avoids conventional stainless steel material and chlorine adsorbed and leads to measurement error,
And the friction coefficient of polytetrafluoroethylene material is smaller, is rotated convenient for waterwheel relative to connecting shaft.
Part is illustrated to embody by the further advantage, target and feature of the utility model by following, and part will also pass through
Research and practice to the utility model and be understood by the person skilled in the art.
Description of the drawings
Fig. 1 is the structure diagram of online low concentration chlorine analyzer moisture separator described in the utility model；
Fig. 2 is the structure diagram of connection component described in the utility model；
Fig. 3 is the structure diagram of T-slot described in the utility model；
Fig. 4 is the structure diagram of the first deflector described in the utility model；
Fig. 5 is the structure diagram of the second deflector described in the utility model.
Specific embodiment
The following describes the utility model in further detail with reference to the accompanying drawings, to enable those skilled in the art with reference to explanation
Book word can be implemented according to this.
It should be appreciated that such as " having ", "comprising" and " comprising " term used herein do not allot one or more
The presence or addition of a other element or combinations.
As shown in Figs. 1-5, the utility model provides a kind of online low concentration chlorine analyzer moisture separator, including：
Housing 1 is cylindric, and card sets partition board 2 straight down in the housing 1, and 2 height of partition board is less than 1 height of housing,
The top of the partition board 2 and 1 end sealing of housing are affixed, and two side ends and 1 madial wall of housing sealing are affixed, by institute
State housing 1 be divided into be connected positioned at the first separation chamber 3 of 2 both sides of partition board, the second separation chamber 4 and positioned at the shell
The drip chamber 5 of 1 lower end of body；
Wherein, the top of first separation chamber 3 has air inlet 30, diagonally downward towards the partition board 2 on madial wall
Be arranged at intervals polylith the first deflector 31, the one end of first deflector 31 far from first separation chamber 3 not with it is described every
Plate 2 abuts, and the partition board 2 is respectively provided with close to the side of first deflector 31 between arbitrary two piece of first deflector 31
Second deflector 32,2 side wall of partition board are located at the 31 lower section setting T-slot 33 of the first deflector of least significant end, and described second leads
Flowing plate 32 and the T-slot 33 are set towards 3 madial wall of the first separation chamber diagonally downward, and the T-slot 33 includes week
To the translot 330 affixed with 2 and first separation chamber of partition board, 3 madial walls and the vertical slot 331 connected with the translot 330, institute
State that the one end of vertical slot 331 far from the translot 330 is opening-like, 31 least significant end of the first deflector is vertically downwards
Projection is fallen into translot 330, the projection section of first deflector 31 and second deflector 32 vertically downwards
It overlaps；
The top of second separation chamber, 4 side wall has gas outlet 40, is tilted upward on madial wall towards between the partition board 2
Every setting polylith third deflector 41, the one end of the third deflector 41 far from second separation chamber 4 not with the partition board 2
It abuts, the partition board 2 is disposed below being respectively provided with the 4th deflector 42, the third close to the side of the third deflector 41
The projection section of deflector 41 and the deflector vertically downwards overlaps, the least significant end of the third deflector 41 and institute
The least significant end for stating the 4th deflector 42 is all provided with jagged 43；
The 5 side wall least significant end of drip chamber is located at the gas outlet 40 and is arranged right below discharge outlet 50, in the drip chamber 5
Baffle 51 is arranged with along sealing is tilted upward far from 50 least significant end of discharge outlet, the drip chamber 5 is divided to be located above
Fluid reservoir 52 and underlying storage salt room 53, the side wall of the storage salt room 53 there is retractable feed inlet 54, with to described
It stores up in salt room 53 and fills, the baffle 51 includes the dictyosome layer and filter layer of cloth that from top to bottom set gradually, 1 madial wall of housing
One waterwheel 6 of rotary setting above the baffle 51, the waterwheel 6 are located at the underface of 331 least significant end of vertical slot, so that
The liquid flowed out in the T-slot 33 drives the waterwheel 6 to rotate.
In this technical solution, the separation of the first separation chamber 3 and the second separation chamber 4 with partition board 2 for vertical line, partition board 2
Bottom position does housing 1 horizontal tangent acquisition, and horizontal tangent lower section and the space between 1 bottom end of housing are drip chamber 5, such as Fig. 4
Shown, the circumferential madial wall in the first separation chamber 3 of the first deflector 31 agrees with, and is formed to cause air flow through outlet, such as Fig. 5
Shown, 32 one end of the second deflector is connect with partition board 2, and the circumferential inner sidewall part with the first separation chamber 3 agrees with, and is also formed and used
In the outlet caused air flow through, and then S-shaped gas channel is formed in the first diffluence room, similary third deflector 41 and the 4th is led
Flowing plate 42 forms S-shaped gas channel in the second separation chamber 4, and all plugs are equipped with plug on feed inlet 54 and discharge outlet 50, do not use
When encapsulation process, during use, air-flow by air inlet 30 enter the first diffluence room, led by the first deflector 31 and second
The S-shaped gas channel that flowing plate 32 is formed, part water vapour condenses on the first deflector 31 and the second deflector 32, and take advantage of a situation by
Grade is wandered, until in T-slot, and then waterwheel 6 is imported by T-slot, waterwheel 6 is driven to be fallen into drip chamber 5 after rotating, storage salt room 53
Interior sodium chloride is rapidly dissolved in water body, forms the sodium-chloride water solution of saturation, and air-flow moves on, into the second separation chamber 4
It is interior, by the S-shaped gas channel that 41 and the 4th deflector 42 of third deflector is formed, exclude to enter next work by gas outlet 40
Make flow, part water vapour condenses on third deflector 41 and 42 bottom surface of the 4th deflector and top surface, and bottom surface condensation droplet is suitable
Gesture is wandered step by step, and vertex condensation droplet is wandered by notch 43, is wandered to drip chamber 5, using the technical solution, is divided to space two
Grade processing (the first separation chamber 3 and the second separation chamber 4) makes aqueous vapor separation more abundant, and setting storage salt room 53 forms saturated sodium-chloride
Solution reduces the ability of water body dissolving chlorine, waterwheel 6 is driven to rotate using droplet its own gravity is condensed, to stir in drip chamber 5
Water body makes it faster dissolve sodium chloride and is uniformly dispersed.
In another technical solution, the volume ratio of first separation chamber 3 and second separation chamber 4 is 1:3, it uses
The technical solution, the first separation chamber 3 carry out primary separation, and water body content is larger, using small space rapid preliminary detach, avoid and
It reduces chlorine to be excessively dissolved in water body, weakens damage of the water body to chlorine over time and space, increase the accuracy of analysis.
In another technical solution, the notch 43 of the least significant end of the third deflector 41 is in and 1 inside of housing
The similar arc of wall shape, the notch 43 that the least significant end of the 4th deflector 42 is equal is elongated, is applied in the notch 43
If a filter plate 44 being adapted with its shape, the filter plate 44 include：
Container with inner space, the top and bottom of the container include internally positioned filter layer of cloth and are located at
External dictyosome layer, the container top surface have an openable and closable feeding port, filling chlorinated sodium in the container, using the technical side
Case makes droplet, directly into sodium chloride solution, reduce the energy of water body dissolving chlorine on 41 and the 4th deflector 42 of third deflector
Power.
In another technical solution, the madial wall of the housing 1 has groove 10；
It further includes：Connection component 7, the connection component 7 include：
Chimeric part 70, one end are embedded and are fixed in groove 10, hollow setting in the chimeric part 70, below side wall
It is equipped at least two bottom protrusions 71 straight up, distance of the chimeric 70 top side wall of part apart from its bottom surface is more than the groove
10 depth, less than the shortest distance of the bottom protrusion 71 apart from its bottom surface；
Connecting shaft 72 is inserted in the chimeric part 70, and with the kerve body 73 being adapted with the bottom protrusion 71；
Capping 75, lid are located in connecting shaft 72, and form tubular structure, and tubular structure with the chimeric abutting of part 70
The peripheral surface of part outside the groove 10 is provided with external screw thread, and 75 medial surfaces of the capping have top protrusion 76, described
Connection is drawn up with the inverted draw cut body 74 being adapted to the top protrusion 76；
Screw-casing 77, spiral shell is set on outside tubular structure, with fixed connection shaft 72；
Wherein, the connecting shaft 72 is located at that one end outside tubular structure is circumferentially arranged fixing groove 8, to be revolved with waterwheel 6
Turn affixed, it, being capable of fast assembling-disassembling while fixed stability is enhanced using the technical solution.
In another technical solution, the partition board 2, first deflector 31, second deflector 32, described
Three deflectors 41, the 4th deflector 42, the T-slot 33 and the connecting shaft 72 are made of polytetrafluoroethylene material,
Using the technical solution, the use of polytetrafluoroethylene material avoids conventional stainless steel material and chlorine is adsorbed and causes to survey
Error is measured, and the friction coefficient of polytetrafluoroethylene material is smaller, is rotated convenient for waterwheel 6 relative to connecting shaft 72.
In another technical solution, the fixing groove 8 is included along circumferentially disposed a pair of of the L-type plate of the connecting shaft 72
80, a pair of of 80 mirror image of L-type plate setting, one end of one of L-type plate 80 is vertically fixed in 72 side wall of connecting shaft, the other end
It is set towards another L-type plate 80, using the technical solution, two cricoid L-type plates 80 form fixing groove 8.
In another technical solution, the waterwheel 6 includes disc frame body 60, and center has and the fixing groove 8
Cooperation rotates fixed rotating hole, and the disc frame body 60 is circumferentially with truncated rectangular pyramids shape and connects liquid bath 61, using the technical solution,
It is simple and practical in structure.
Number of devices and treatment scale described herein are the explanations for simplifying the utility model.To the utility model
The application of online low concentration chlorine analyzer moisture separator, modifications and variations be to one skilled in the art it is aobvious and
It is clear to.
Although the embodiment of the utility model is disclosed as above, it is not restricted in specification and embodiment
Listed utilization, it can be applied to various fields suitable for the present invention completely, for those skilled in the art,
Other modification is easily implemented, therefore without departing from the general concept defined in the claims and the equivalent scope, this reality
Specific details and legend shown and described herein are not limited to novel.
Claims (7)
1. a kind of online low concentration chlorine analyzer moisture separator, which is characterized in that including：
Housing is cylindric, and card sets partition board straight down in the housing, and the divider height is less than the body height,
The top of the partition board and housing tip sealing are affixed, and two side ends and case inside wall sealing are affixed, by described in
Housing be divided into be connected positioned at the first separation chamber of the partition board both sides, the second separation chamber and positioned at the housing lower end
Drip chamber；
Wherein, the top of first separation chamber has air inlet, is set diagonally downward towards the baffle interval on madial wall
The first deflector of polylith, the one end of first deflector far from first separation chamber are not abutted with the partition board, it is described every
Plate is respectively provided with the second deflector, the partition board close to the side of first deflector between arbitrary two piece of first deflector
Side wall is located at setting T-slot below the first deflector of least significant end, second deflector and the T-slot court diagonally downward
It is set to first separation chamber madial wall, the T-slot includes circumferential affixed with the partition board and first separation chamber's madial wall
Translot and the vertical slot that is connected with the translot, the one end of the vertical slot far from the translot is opening-like, first water conservancy diversion
The projection of plate least significant end vertically downwards is fallen into translot, the vertical side of first deflector and second deflector edge
It is overlapped to downward projection section；
The top of second separation chamber side wall has gas outlet, is tilted upward on madial wall more towards baffle interval setting
Block third deflector, the one end of the third deflector far from second separation chamber are not abutted with the partition board, the partition board
It is disposed below being respectively provided with the 4th deflector, the third deflector and the deflector close to the side of the third deflector
Projection section vertically downwards overlaps, and the least significant end of the least significant end of the third deflector and the 4th deflector is equal
Equipped with notch；
The drip chamber side wall least significant end is located at the gas outlet and is arranged right below discharge outlet, and the drip chamber is interior along far from described
Discharge outlet least significant end tilts upward sealing and is arranged with baffle, under the drip chamber is divided into the fluid reservoir being located above and is located at
The storage salt room of side, the side wall of the storage salt room have retractable feed inlet, with filling chlorinated sodium, the gear into the storage salt room
Plate includes the dictyosome layer and filter layer of cloth that from top to bottom set gradually, and the case inside wall is located at rotary setting above the baffle
One waterwheel, the waterwheel are located at the underface of the vertical slot least significant end, so that the liquid flowed out in the T-slot drives the water
Vehicle rotates.
2. online low concentration chlorine analyzer moisture separator as described in claim 1, which is characterized in that described first point
It is 1 from the volume ratio of room and second separation chamber:3.
3. online low concentration chlorine analyzer moisture separator as described in claim 1, which is characterized in that the third is led
The notch of the least significant end of flowing plate is in the arc similar to the case inside wall shape, and the least significant end of the 4th deflector is equal
Notch is elongated, and a filter plate being adapted with its shape is laid in the notch, and the filter plate includes：
Container with inner space, the top and bottom of the container include internally positioned filter layer of cloth and positioned at outside
Dictyosome layer, the container top surface has openable and closable feeding port, filling chlorinated sodium in the container.
4. online low concentration chlorine analyzer moisture separator as described in claim 1, which is characterized in that the housing
Madial wall has groove；
It further includes：Connection component, the connection component include：
Chimeric part, one end are embedded and are fixed in groove, hollow setting in the chimeric part, and sidewalls vertical is set upwards below
There is at least two bottoms protrusion, distance of the chimeric part top side wall apart from its bottom surface is more than the depth of the groove, less than institute
State the shortest distance of bottom its bottom surface of protrusion distance；
Connecting shaft is inserted in the chimeric part, and with the kerve body being adapted with the bottom protrusion；
Capping, lid are located in connecting shaft, and abut to form tubular structure with the chimeric part, and tubular structure is positioned at described recessed
The peripheral surface of part outside slot is provided with external screw thread, and the medial surface that covers has top protrusion, and the connection, which is drawn up, to be had and institute
State the inverted draw cut body of top protrusion adaptation；
Screw-casing, spiral shell is set on outside tubular structure, with fixed connection shaft；
Wherein, the connecting shaft is located at that one end outside tubular structure is circumferentially arranged fixing groove, affixed to be rotated with waterwheel.
5. online low concentration chlorine analyzer moisture separator as claimed in claim 4, which is characterized in that the partition board,
First deflector, second deflector, the third deflector, the 4th deflector, the T-slot and described
Connecting shaft is made of polytetrafluoroethylene material.
6. online low concentration chlorine analyzer moisture separator as claimed in claim 4, which is characterized in that the fixing groove
Including along circumferentially disposed a pair of of the L-type plate of the connecting shaft, a pair of of L-type plate mirror image is set, and one end of one of L-type plate is vertical
The connecting shaft side wall is fixed in, the other end is set towards another L-type plate.
7. online low concentration chlorine analyzer moisture separator as claimed in claim 6, which is characterized in that the waterwheel packet
Disc frame body is included, center has rotates fixed rotating hole with fixing groove cooperation, and the disc frame body is circumferentially set
There is truncated rectangular pyramids shape to connect liquid bath.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721378695.2U CN207546096U (en) | 2017-10-24 | 2017-10-24 | Online low concentration chlorine analyzer moisture separator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721378695.2U CN207546096U (en) | 2017-10-24 | 2017-10-24 | Online low concentration chlorine analyzer moisture separator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207546096U true CN207546096U (en) | 2018-06-29 |
Family
ID=62673764
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721378695.2U Active CN207546096U (en) | 2017-10-24 | 2017-10-24 | Online low concentration chlorine analyzer moisture separator |
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| Country | Link |
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| CN (1) | CN207546096U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110652825A (en) * | 2019-11-08 | 2020-01-07 | 广东佳德环保科技有限公司 | System for removing dioxin in flue gas |
| CN112090217A (en) * | 2020-09-21 | 2020-12-18 | 华海清科股份有限公司 | Water-gas separation device and chemical mechanical polishing system |
| CN112604383A (en) * | 2020-11-13 | 2021-04-06 | 北京北方华创微电子装备有限公司 | By-product treatment device of semiconductor process equipment and semiconductor process equipment |
-
2017
- 2017-10-24 CN CN201721378695.2U patent/CN207546096U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110652825A (en) * | 2019-11-08 | 2020-01-07 | 广东佳德环保科技有限公司 | System for removing dioxin in flue gas |
| CN112090217A (en) * | 2020-09-21 | 2020-12-18 | 华海清科股份有限公司 | Water-gas separation device and chemical mechanical polishing system |
| CN112604383A (en) * | 2020-11-13 | 2021-04-06 | 北京北方华创微电子装备有限公司 | By-product treatment device of semiconductor process equipment and semiconductor process equipment |
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Address after: 537100 Block 10, Xijiang Industrial Park, Guigang City, Guangxi Zhuang Autonomous Region Patentee after: Guangxi Hua Chao Electric Applicance Co., Ltd Address before: 537100 north the Guangxi Zhuang Autonomous Region Gangbei District, Guigang City root Township Road 324 line bamboo Wei Road Patentee before: Guangxi Hua Chao Electric Applicance Co., Ltd |