CN207530300U - A kind of Gao Zhongying Er:YAG laser - Google Patents
A kind of Gao Zhongying Er:YAG laser Download PDFInfo
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- CN207530300U CN207530300U CN201721747305.4U CN201721747305U CN207530300U CN 207530300 U CN207530300 U CN 207530300U CN 201721747305 U CN201721747305 U CN 201721747305U CN 207530300 U CN207530300 U CN 207530300U
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Abstract
The utility model discloses a kind of Gao Zhongying Er:YAG laser, including LD arrays, Er:YAG crystal, TEC temperature control modules, cylindrical lens, LD speculums, cooling heat sink, heat dispersion heat sink, thermal insulation layer, total reflective mirror, outgoing mirror, Full-reflection mirror seat, output microscope base, optical mount；Er:YAG crystal one side sets cylindrical lens, another side setting LD speculums, and LD arrays pump after being collimated by cylindrical lens, Er:The upper and lower surfaces middle section setting cooling heat sink of YAG crystal, end is then compressed by heat dispersion heat sink, is TEC temperature control modules and thermal insulation layer between cooling heat sink and heat dispersion heat sink；Full-reflection mirror seat, output microscope base, heat dispersion heat sink bottom surface are installed in optical mount.This kind of laser utilizes optical mirror plane higher temperature environment using LD profile pumps and TEC cooling technologies, avoids influence of the steam to laser device reliability, realizes high power, Gao Zhongying operating.
Description
Technical field
The utility model is related to a kind of Er:YAG solid state lasers, specially a kind of semiconductor laser（LD）Pumping high repeated frequency
Er:YAG solid state lasers are suitably applied laser medicine industry, belong to laser technology field.
Background technology
Er-doped YAG laser（Er:YAG laser）It is a kind of critically important laser light source, emits 2.94 μm
The mid-infrared laser of wavelength is in hydroxyapatite OH-And the most strong absworption peak of hydrone（Absorption coefficient 12000cm-1）, 2.94 μ
Thermal damage's depth only has 3-5 microns when the erbium laser and function of organization of m wavelength, very high for carrying out laser surgey precision.Separately
Outer rare-earth-doped fluoride ZBLAN optical fiber or germanium dioxide at present（GeO2）Optical fiber technology reaches its maturity, and erbium laser can pass through
Optical fiber transmits, therefore has very good application prospect in medical field.Traditional erbium laser uses lamp pumping mode, no
But efficiency is very low, and since a large amount of thermal accumlation, laser output power and pulse recurrence frequency are very restricted,
The new demand of laser medicine is not adapted to.Er:YAG laser is in the most strong absworption peak of hydrone, if Er:YAG laser crystal and
Resonator mirror optical surface has slight condensation vapor, then can generate fatal damage, therefore prevent Er:YAG laser optical surface
Steam problem be concerning Er:The important content of YAG laser reliability service.Patent CN 203813197U disclose a kind of LD
The er-doped laser of profile pump, but common water-cooling pattern certainly will generate great adverse effect to its reliability.
Utility model content
The purpose of this utility model provides a kind of Gao Zhongying Er aiming at background technology described problem:YAG laser,
This kind of laser utilizes optical mirror plane higher temperature environment using LD profile pumps and TEC cooling technologies, avoids steam pair
Er is realized in the influence of laser device reliability:The high power of YAG laser, Gao Zhongying operating.
The utility model use technical solution be：
A kind of Gao Zhongying Er:YAG laser, including LD arrays, Er:YAG crystal, TEC temperature control modules, cylindrical lens, LD are anti-
Mirror, cooling heat sink, heat dispersion heat sink, thermal insulation layer, total reflective mirror, outgoing mirror, Full-reflection mirror seat, output microscope base, optical mount are penetrated,
The Er:The one side setting cylindrical lens of YAG crystal, the Er:The another side setting LD of YAG crystal reflects
Mirror, the laser of LD arrays output collimated by cylindrical lens after from Er:YAG crystal on side face is to Er:YAG crystal is pumped,
The Er:The upper and lower surfaces middle section setting cooling heat sink of YAG crystal, the Er:The upper and lower surfaces end of YAG crystal
It is then compressed by heat dispersion heat sink, is TEC temperature control modules and thermal insulation layer between the cooling heat sink and heat dispersion heat sink；The total reflective mirror leads to
It crosses optical cement to be bonded on Full-reflection mirror seat, the outgoing mirror is bonded in by optical cement on output microscope base, forms laserresonator；
The Full-reflection mirror seat, output microscope base, heat dispersion heat sink bottom surface are installed in optical mount.
Wherein, the LD arrays are the pulse LD arrays that operation wavelength is 976nm.
Wherein, the total reflective mirror is the fused silica glass for plating 2.94 μm of high-reflecting films, and the outgoing mirror is saturating for 2.94 μm of parts of plating
Penetrate the YAG eyeglasses of film.
Wherein, temperature sensor is further included, the temperature sensor is arranged in optical mount.
Wherein, the Full-reflection mirror seat, output microscope base, heat dispersion heat sink bottom surface and optical mount junction are provided with thermal conductive silicon
Fat, to improve joint face thermal conductivity.
Wherein, the Er:YAG crystal is web crystal, and 2.94 μm of anti-reflection films are plated in end face.
The operation principle of the utility model is：The pulse laser of the 976nm wavelength of LD array emitters is collimated by cylindrical mirror
From side to strip Er:YAG crystal is pumped, and the pump light not being completely absorbed is reflected back Er by LD speculums:YAG crystal
Secondary pumping is carried out, improves pumping efficiency and uniformity；Er:YAG crystal generates population inversion under the conditions of pulse pump, leads to
Cross the laser that resonator exports 2.94 mum wavelengths；LD arrays and Er:The waste heat of YAG crystal is freezed by TEC temperature control modules, because
Heat dispersion heat sink, optical mount and Full-reflection mirror seat, the heat transfer for exporting microscope base, Er:YAG crystal end, total reflective mirror and outgoing mirror are all
The higher temperature of versus environmental is in, avoids damage of the steam to optical surface；Optical mount set temperature sensor, can be according to temperature
Degree needs to set the specific heat load of laser entirety.
The beneficial effects of the utility model are：
1. being pumped using pulse LD, efficiency is not only increased compared to lamp pumping, while improves pulse recurrence frequency and defeated
Go out power, meet new laser medicine demand；
2. directly being cooled down with TEC temperature control modules, no-cooling-water in laser optics structure, be conducive to reduce steam
Influence to laser optical face；
3. using heat dispersion heat sink, optical mount and Full-reflection mirror seat, the heat transfer of output microscope base and thermal diffusion, make Er:YAG
Crystal end, total reflective mirror and outgoing mirror are at the higher temperature of versus environmental, avoid damage of the steam to optical surface.
In conclusion LD pumping high repeated frequencies Er can ensure that by technical solution disclosed in the utility model:YAG laser
For a long time, reliable operating.
Description of the drawings
Fig. 1 is a kind of Gao Zhongying Er of the utility model:YAG laser structure diagram；
Fig. 2 is a kind of Gao Zhongying Er of the utility model:YAG laser structural profile illustration；
Fig. 3 is a kind of Gao Zhongying Er of the utility model:YAG laser pumping configuration schematic diagram.
In figure：
1-outgoing mirror, 2-cylindrical lens, 3-Er:YAG crystal, 4-LD arrays, 5-thermal insulation layer, 6-total reflective mirror, 7-complete
Anti- microscope base, 8-optical mount, 9-heat dispersion heat sink, 10-cooling heat sink, 11-TEC temperature control modules, 12-LD speculums, 13-
Temperature sensor, 14-output microscope base.
Specific embodiment
The implementation of technical solution is described in further detail below in conjunction with the accompanying drawings：
As shown in Figures 1 to 3, a kind of Gao Zhongying Er described in the utility model:YAG laser, including LD arrays 4, Er:
YAG crystal 3, TEC temperature control modules 11, cylindrical lens 2, LD speculums 12, cooling heat sink 10, heat dispersion heat sink 9, thermal insulation layer 5, total reflective mirror
6th, outgoing mirror 1, Full-reflection mirror seat 7, output microscope base 14, optical mount 8, temperature sensor 13 form.
Wherein Er:YAG crystal 3 be web crystal, specification 4 × 4 × 60（mm）, 2.94 μm of anti-reflection films, the Er are plated in end face:
The one side setting cylindrical lens 2 of YAG crystal 3, the Er:The another side setting LD speculums 12 of YAG crystal 3, it is LD gusts described
The laser that row 4 export collimated by cylindrical lens 2 after from Er:3 side of YAG crystal is to Er:YAG crystal 3 is pumped, Er:YAG is brilliant
3 upper and lower surfaces middle section of body sets cooling heat sink 10, the Er:The end of the upper and lower surfaces of YAG crystal 3 is by heat dissipation heat
Heavy 9 portion compresses, each end about 6mm length is by 9 portion compresses of heat dispersion heat sink.It is between cooling enthusiasm 10 and heat dispersion heat sink 9
TEC temperature control modules 11 and thermal insulation layer 5,5 thickness 3mm of thermal insulation layer；LD arrays 4 laser output power 180W, wavelength 976nm pass through
From side to Er after the collimation of cylindrical lens 2:YAG crystal 3 is pumped, and the pump light not being completely absorbed is reflected by LD speculums 12
Return Er:YAG crystal 3 carries out secondary pumping, improves pumping efficiency and uniformity；Total reflective mirror 6 is the quartz for plating 2.94 μm of high-reflecting films
Eyeglass, outgoing mirror 1 are the YAG eyeglasses for plating 2.94 μm of fractional transmission films, and transmissivity 20%, the total reflective mirror 6 passes through optics glue sticking
On Full-reflection mirror seat 7, the outgoing mirror 1 is bonded in by optical cement on output microscope base 14, forms laserresonator, total reflective mirror 6
There is good heat exchange with Full-reflection mirror seat 7, outgoing mirror 1 has good heat exchange with output microscope base 14.Full-reflection mirror seat 7, outgoing mirror
Seat 14,9 bottom surface of heat dispersion heat sink are connected with optical mount 8, and improve joint face thermal conductivity, laser works with heat-conducting silicone grease
When, each optical surface is in higher temperature, effectively prevents because steam is by 2.94 mum wavelength laser damages；It is set in optical mount 8
Temperature sensor 13 is put, can be needed to set the specific heat load of laser entirety according to temperature.
The Er assembled by the relevant technologies described above:YAG laser when pump power is 180W, exports 2.94 μm
Wavelength laser 20W, repetition rate 40Hz.
Finally it should be noted that：Described embodiment is only the reality of some embodiments of the present application rather than whole
Apply example.Based on the embodiment in the application, those of ordinary skill in the art are obtained without making creative work
Every other embodiment, shall fall in the protection scope of this application.
Claims (6)
1. a kind of Gao Zhongying Er:YAG laser, which is characterized in that including LD arrays (4), Er:YAG crystal (3), TEC temperature control moulds
It is block (11), cylindrical lens (2), LD speculums (12), cooling heat sink (10), heat dispersion heat sink (9), thermal insulation layer (5), total reflective mirror (6), defeated
Appearance (1), Full-reflection mirror seat (7), output microscope base (14), optical mount (8),
The Er:The one side setting cylindrical lens (2) of YAG crystal (3), the Er:The another side setting LD of YAG crystal (3)
Speculum (12), the laser of the LD arrays (4) output collimated by cylindrical lens (2) after from Er:YAG crystal (3) side is to Er:
YAG crystal (3) is pumped, the Er:The upper and lower surfaces middle section setting cooling heat sink (10) of YAG crystal (3), it is described
Er:The upper and lower surfaces end of YAG crystal (3) is then compressed by heat dispersion heat sink (9), the cooling heat sink (10) and heat dispersion heat sink
(9) it is TEC temperature control modules (11) and thermal insulation layer (5) between；The total reflective mirror (6) is bonded in Full-reflection mirror seat (7) by optical cement
On, the outgoing mirror (1) is bonded in by optical cement on output microscope base (14), forms laserresonator；The Full-reflection mirror seat
(7), output microscope base (14), heat dispersion heat sink (9) bottom surface are installed in optical mount (8).
2. a kind of Gao Zhongying Er according to claim 1:YAG laser, which is characterized in that the LD arrays (4) are work
Make the pulse LD arrays that wavelength is 976nm.
3. a kind of Gao Zhongying Er according to claim 1:YAG laser, which is characterized in that the total reflective mirror (6) is plating
The fused silica glass of 2.94 μm of high-reflecting films, the outgoing mirror (1) are the YAG eyeglasses for plating 2.94 μm of fractional transmission films.
4. a kind of Gao Zhongying Er according to claim 1:YAG laser, which is characterized in that further include temperature sensor
(13), the temperature sensor (13) is arranged in optical mount (8).
5. a kind of Gao Zhongying Er according to claim 1:YAG laser, which is characterized in that the Full-reflection mirror seat (7), defeated
Go out microscope base (14), heat dispersion heat sink (9) bottom surface and optical mount (8) junction and be provided with heat-conducting silicone grease, to improve joint face thermal conductivity
Rate.
6. a kind of Gao Zhongying Er according to claim 1:YAG laser, which is characterized in that the Er:YAG crystal (3)
For web crystal, 2.94 μm of anti-reflection films are plated in end face.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721747305.4U CN207530300U (en) | 2017-12-14 | 2017-12-14 | A kind of Gao Zhongying Er:YAG laser |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721747305.4U CN207530300U (en) | 2017-12-14 | 2017-12-14 | A kind of Gao Zhongying Er:YAG laser |
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| CN207530300U true CN207530300U (en) | 2018-06-22 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114361916A (en) * | 2021-11-30 | 2022-04-15 | 中国电子科技集团公司第十一研究所 | Heat sink structural part for laser and laser with heat sink structural part |
| WO2023097497A1 (en) * | 2021-11-30 | 2023-06-08 | 华为技术有限公司 | Light source module, detection device and terminal device |
-
2017
- 2017-12-14 CN CN201721747305.4U patent/CN207530300U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114361916A (en) * | 2021-11-30 | 2022-04-15 | 中国电子科技集团公司第十一研究所 | Heat sink structural part for laser and laser with heat sink structural part |
| WO2023097497A1 (en) * | 2021-11-30 | 2023-06-08 | 华为技术有限公司 | Light source module, detection device and terminal device |
| CN114361916B (en) * | 2021-11-30 | 2023-12-26 | 中国电子科技集团公司第十一研究所 | Heat sink structural part for laser and laser with heat sink structural part |
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