CN207528866U - Hall effect tester - Google Patents
Hall effect tester Download PDFInfo
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- CN207528866U CN207528866U CN201721663954.6U CN201721663954U CN207528866U CN 207528866 U CN207528866 U CN 207528866U CN 201721663954 U CN201721663954 U CN 201721663954U CN 207528866 U CN207528866 U CN 207528866U
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Abstract
The utility model discloses a kind of Hall effect tester, tester includes：Console, the console are equipped with lock-in amplifier, switch matrix, DC constant current power supply and field controller；Wherein switch matrix is connect with 4 symmetry electrodes of sample edge to be tested；DC constant current power supply is connect with switch matrix, and electric current is persistently provided for sample to be tested；Lock-in amplifier is connect with switch matrix, and the Hall voltage that acquisition sample to be tested generates simultaneously obtains low interference voltage signal；Sample stage places sample to be tested thereon；Permanent magnet is looped around around sample stage, and is connect with field controller, and permanent magnet and sample stage relative motion generate alternating magnetic field around sample stage.The utility model can realize the automatic test of Hall effect.
Description
Technical field
The utility model is related to Hall effect tester more particularly to a kind of Hall effect surveys for low mobility material
Try instrument and test method.
Background technology
It is tested always using manual mode in Hall effect test at present, a kind of is that the mode of fixed sample panel is revolved manually
Turn magnetic field commutator N poles with S poles, a kind of is that the mode of fixed magnetic field can be manually rotated the completion commutation of sample panel positive and negative.And both
Mode be all manual operation have uncertainty, either the mode of fixed magnetic field still fix sample mode commutate all easily
Sample is touched or hurts in operation, so as to cause measurement error.Therefore seemed using a kind of test method of automatic reverse
It is particularly important.
Hall effect tester is for measuring the carrier concentration of semi-conducting material, mobility, resistivity, Hall system
The important parameters such as number, and these parameters understand semi-conducting material electrology characteristic and must control in advance, therefore are to understand and grind
Study carefully semiconductor devices and the tool of semi-conducting material electrology characteristic indispensability.Other than being used for measuring above-mentioned parameter, it can also sentence
Disconnected type of semiconductor material, it can also be applied to the quality judging of LED epitaxial growth layer, can also be used to judge two in HEMT components
Whether dimensional electron gas forms, and can be also used for the related applications such as the processing procedure auxiliary of solar battery sheet.
The conventional method used in Hall effect tester on the market at present is D.C. magnetic field vanderburg method, direct current Hall
Stick method.This method has long history to the successful measurement of the multiple material including semiconductor.However, low mobility
Material, such as solar cell material, thermoelectric material and organic material narrowband based material, it is difficult to measure in aforementioned manners, i.e.,
Allow to be also error compare it is larger.
Original D.C. magnetic field vanderburg method test process and defect：Vanderburg method measures Hall effect and was proposed in 1958,
Main test process is as follows：
4 symmetrical electrodes are made in sample edge, as shown in Figure 1.
Add positive magnetic field, 1-3 galvanizations at sample both ends, 2-4 surveys voltage vH1, and (electric current flows to 3 from 1 and following equally contains
Justice)；
Positive magnetic field, 3-1 galvanizations are added at sample both ends, 4-2 surveys voltage vH2；
Opposing magnetic field, 1-3 galvanizations are added at sample both ends, 2-4 surveys voltage vH3；
Opposing magnetic field, 3-1 galvanizations are added at sample both ends, 4-2 surveys voltage vH4；
Hall voltage calculates VH=(vH1-vH3+vH2-vH4)/4.
The attached effect in part, E Tinghaosen effects can be eliminated by changing magnetic direction；Changing current direction can eliminate
Potential difference and thermoelectrical potential.
Therefore said program can measure the Hall coefficient of the relatively large sample of mobility.For the smaller sample of mobility
Product cannot then be tested, and main error derives from：
It needs to carry out additive operation when changing magnetic direction.The premise of additive operation is：Forward and reverse magnetic field is equal, in reality
It can not possibly be equal in experiment.
It needs to carry out additive operation when changing current direction.Also need premise：Current value is equal in magnitude, but in practice
Can not possibly be equal, all it is to do approximate processing.
Galvanization test voltage, vH1=Vh+Vd+Vs+Vo；Vh is Hall voltage, Vd is not equipotential voltage, Vs Seebecks
Voltage, Vo are the sum of other attached effect voltages.Wherein Hall voltage needs voltage to be true, but it only accounts for and measures the thousand of voltage
/ several to a few percent.This, which just needs measurement voltage accuracy of instrument to be at least up to thousand points of positions, can just measure true Hall
Voltage, however present electronic measurement technique is extremely difficult to this requirement, so being easy to a Hall electricity when doing additive operation
Pressure calculates mistake, is most significantly characterized as positive and negative survey instead.
In conclusion the test of D.C. magnetic field vanderburg method is limited in that assumed condition is relatively more, it is difficult to test Hall
Coefficient or the small sample of mobility.
Utility model content
The purpose of this utility model is to provide a kind of Hall effect testers for testing Hall coefficient.
Technical solution is used by the utility model：
A kind of Hall effect tester is provided, including：
Console, the console are equipped with lock-in amplifier, switch matrix, DC constant current power supply and field controller；Wherein
Switch matrix is connect with 4 symmetry electrodes of sample edge to be tested；DC constant current power supply is connect with switch matrix, is sample to be tested
Electric current is persistently provided；Lock-in amplifier is connect with switch matrix, and the Hall voltage that acquisition sample to be tested generates simultaneously obtains low interference
Voltage signal；
Sample stage places sample to be tested thereon；
Permanent magnet is looped around around sample stage, and is connect with field controller, permanent magnet and sample stage relative motion,
Alternating magnetic field is generated around sample stage.
Connect above-mentioned technical proposal, communication control module be additionally provided on the console, with field controller, lock-in amplifier,
DC constant current power supply is all connected with.
Above-mentioned technical proposal is connect, sample stage is fixed, and field controller controls permanent magnet with certain frequency around sample stage
Rotation.
Above-mentioned technical proposal is connect, permanent magnet is fixed, and sample stage is rotated with certain frequency around permanent magnet.
Above-mentioned technical proposal is connect, the permanent magnet includes turntable seat, permanent magnet, magnetic field seat, magnetic field lid and electric rotating machine,
Middle electric rotating machine is fixed on above turntable, and is fixedly connected with magnetic field seat, and entire permanent magnet is driven to rotate；Magnetic field seat is included just
To the upper table and lower table of setting, N poles permanent magnet and S poles permanent magnet, two permanent magnetism are fixed respectively on two workbench
There is air gap between iron, the sample to be tested is placed in the air gap；The top fixed magnet lid of magnetic field seat.
The utility model generate advantageous effect be：Sample to be tested, magnet ring are fixed on the sample stage of the utility model
It is wound on around sample stage, with sample stage relative motion, alternating magnetic field is generated around sample stage, so as to fulfill automatic test.
Further, if fixed sample stage can keep sample face-up, electric rotating machine is automatically performed 360 degree rotation, real
Existing magnetic field N pole makes to test being consistent property, and make test more precise and stable automatically with the automatic reverse of S poles.
Description of the drawings
Below in conjunction with accompanying drawings and embodiments, the utility model is described in further detail, in attached drawing：
Fig. 1 is sample electrode schematic diagram；
Fig. 2 is the Hall effect tester structure diagram of the utility model embodiment；
Fig. 3 is the structure diagram of the utility model embodiment permanent magnet.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention is further described in detail.It should be appreciated that specific embodiment described herein is only explaining this
Utility model is not used to limit the utility model.
The Hall effect tester of the utility model embodiment, as shown in Fig. 2, including：
Console, the console are equipped with lock-in amplifier, switch matrix, DC constant current power supply and field controller；Wherein
Switch matrix is connect with 4 symmetry electrodes of sample edge to be tested；DC constant current power supply is connect with switch matrix, is sample to be tested
Electric current that is suitable and stablizing persistently is provided；Lock-in amplifier is connect with switch matrix, the Hall voltage that acquisition sample to be tested generates
And obtain low interference voltage signal.Lock-in amplifier may filter that attached effect voltage, the not direct current signals such as equipotential voltage, obtain low dry
Voltage signal is disturbed, collects relatively accurate Hall voltage.
Sample stage places sample to be tested thereon；
Permanent magnet is looped around around sample stage, and is connect with field controller, permanent magnet and sample stage relative motion,
Alternating magnetic field is generated around sample stage, so as to make sample to be tested that Hall effect occur.
Communication control module is additionally provided on the console, is connected with field controller, lock-in amplifier, DC constant current power supply
It connects.The signal that console is sent out mainly is converted into the signal that instrument can identify by communication control module；Field controller controls magnetic
Field conversion direction；Lock-in amplifier is acquired with frequency voltage signal；DC constant current power supply exports stable DC stream.
As shown in figure 3, permanent magnet includes turntable seat 1, permanent magnet 2, magnetic field seat 3, magnetic field lid 4 and electric rotating machine 5, wherein revolving
Rotating motor 5 is fixed on 1 top of turntable seat, and is fixedly connected with magnetic field seat 3, and entire permanent magnet 2 is driven to rotate；Magnetic field seat 3 wraps
The upper table and lower table of face setting are included, fixes N poles permanent magnet and S poles permanent magnet on two workbench respectively, two
There is air gap between permanent magnet, the sample to be tested is placed in the air gap；The top fixed magnet lid 4 of magnetic field seat.
Fixed sample stage can keep sample face-up, and electric rotating machine is automatically performed 360 degree rotation, realize magnetic field N pole with S
Pole automatic reverse makes to test being consistent property, and make test more precise and stable automatically.
Communication control module is computer software, the deflecting of Comprehensive Control magnetic field, electric current output and commutation, voltage signal acquisition and
The calculating of Hall coefficient.Instruction is inputted on computer software, signal passes to instrument by data line, the one or more on instrument
Corresponding component starts orderly function, then acquires signal and passes computer back, Hall system is calculated to these data analyses in software
Several results.Magnetic field deflecting, electric current output and commutation, voltage signal acquisition and Hall coefficient can be write in software in advance to calculate
Carrying out practically sequence and step, start acquisition on software, instrument can be straight according to being run step by step the step of software programming
Result is obtained to the end.
Further, sample stage is fixed, and field controller control permanent magnet is rotated with certain frequency around sample stage.
Can also permanent magnet it is fixed, sample stage is rotated with certain frequency around permanent magnet.
The Hall effect test method of the utility model embodiment includes the following steps：
A) 4 symmetrical electrodes are made at sample to be tested edge, as shown in Figure 1；
B) at sample to be tested both ends, the two poles of the earth of a pair of of permanent magnet (can be symmetrically fixed on sample to be tested by addition sinusoidal magnetic field
Both ends, and rotated according to certain rate), 1-3 galvanizations are made by switch matrix adjusting, 2-4 is measured by lock-in amplifier
Between voltage vH1 (lock-in amplifier is measured in magnetic field same frequency voltage)；
C) sinusoidal magnetic field is added at sample to be tested both ends, 3-1 galvanizations is made by switch matrix adjusting, 4-2 surveys voltage vH2
(lock-in amplifier is measured in magnetic field same frequency voltage)；
D) Hall voltage VH=(vH1-vH2)/2 is calculated；
E) only change size of current, repeat step b, c, d, obtain multigroup measurement data.
F) it is fitted according to institute's galvanization and the Hall voltage data calculated and calculates Hall coefficient.
Main technical advantage：Alternating magnetic field can generate alternation Hall voltage, however attached effect voltage, not equipotential voltage
Direct current signal is considered as Deng other interference voltages, then the voltage signal of low interference is obtained using lock-in amplifier, it can be direct
Most of attached effect voltages are eliminated, i.e., are not occurred in voltage vH1 vH2 are measured, it, can be with so as to avoid the problem that conventional method
Measure low Hall voltage or the sample of low mobility.Specifically, lock-in amplifier detection alternating signal, only to measured signal sheet
Body and have a response with frequency, relevant signal with it, attached effect voltage, not the interference voltages signal such as equipotential voltage will be filtered or
Person says and is not collected that thus eliminating the need most of attached effect voltages, and what lock-in amplifier obtained is the smaller electricity of interference
Press signal, i.e., the voltage signal of low interference.The sample of low Hall voltage or low mobility, the voltage signal of generation is faint, by
The error for interfering generation is larger, and the utility model eliminates the interference of most of voltage signals, can detect more accurate low
The voltage signal of Hall voltage or low mobility, so as to achieve the purpose that measure low Hall voltage or low-resistivity sample.
Change electric current duplicate measurements, multigroup electric current and Hall voltage finally carried out data fitting, systematic error can be eliminated,
Predominantly eliminate the system temperature difference.
It should be understood that for those of ordinary skills, can be improved or converted according to the above description,
And all these modifications and variations should all belong to the protection domain of the appended claims for the utility model.
Claims (5)
1. a kind of Hall effect tester, which is characterized in that including：
Console, the console are equipped with lock-in amplifier, switch matrix, DC constant current power supply and field controller；Wherein switch
Matrix is connect with 4 symmetry electrodes of sample edge to be tested；DC constant current power supply is connect with switch matrix, is continued for sample to be tested
Electric current is provided；Lock-in amplifier is connect with switch matrix, and the Hall voltage that acquisition sample to be tested generates simultaneously obtains low interference voltage
Signal；
Sample stage places sample to be tested thereon；
Permanent magnet is looped around around sample stage, and is connect with field controller, permanent magnet and sample stage relative motion, in sample
Alternating magnetic field is generated around platform.
2. Hall effect tester according to claim 1, which is characterized in that Communication Control mould is additionally provided on the console
Block is all connected with field controller, lock-in amplifier, DC constant current power supply.
3. Hall effect tester according to claim 1, which is characterized in that sample stage is fixed, field controller
Control permanent magnet is rotated with certain frequency around sample stage.
4. Hall effect tester according to claim 1, which is characterized in that permanent magnet is fixed, and sample stage is with one
Determine frequency to rotate around permanent magnet.
5. Hall effect tester according to claim 1, which is characterized in that the permanent magnet includes turntable seat, permanent magnetism
Iron, magnetic field seat, magnetic field lid and electric rotating machine, wherein electric rotating machine are fixed on above turntable, and are fixedly connected with magnetic field seat, are driven
Entire permanent magnet rotation；Magnetic field seat includes the upper table and lower table of face setting, and N is fixed respectively on two workbench
Pole permanent magnet and S poles permanent magnet have air gap between two permanent magnets, and the sample to be tested is placed in the air gap；The top of magnetic field seat
Portion's fixed magnet lid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721663954.6U CN207528866U (en) | 2017-12-04 | 2017-12-04 | Hall effect tester |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721663954.6U CN207528866U (en) | 2017-12-04 | 2017-12-04 | Hall effect tester |
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| CN207528866U true CN207528866U (en) | 2018-06-22 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107728036A (en) * | 2017-12-04 | 2018-02-23 | 武汉嘉仪通科技有限公司 | Hall effect tester and method of testing |
| CN110632509A (en) * | 2019-10-10 | 2019-12-31 | 湖北航天技术研究院计量测试技术研究所 | Hall switch test tool and test method |
| CN113341196A (en) * | 2021-04-13 | 2021-09-03 | 电子科技大学 | High-flux micro-area electrical property detection system and method based on Van der pol method |
| CN113805123A (en) * | 2021-08-12 | 2021-12-17 | 电子科技大学 | Magnetic induction current signal generating and detecting device |
-
2017
- 2017-12-04 CN CN201721663954.6U patent/CN207528866U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107728036A (en) * | 2017-12-04 | 2018-02-23 | 武汉嘉仪通科技有限公司 | Hall effect tester and method of testing |
| CN110632509A (en) * | 2019-10-10 | 2019-12-31 | 湖北航天技术研究院计量测试技术研究所 | Hall switch test tool and test method |
| CN113341196A (en) * | 2021-04-13 | 2021-09-03 | 电子科技大学 | High-flux micro-area electrical property detection system and method based on Van der pol method |
| CN113805123A (en) * | 2021-08-12 | 2021-12-17 | 电子科技大学 | Magnetic induction current signal generating and detecting device |
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