CN207512308U - A kind of Czochralski method mono-crystal furnace extraction hot systems fixture - Google Patents

Abstract

The utility model discloses a heat extraction system fixture for a Czochralski single crystal furnace, which comprises a universal wheel, a base and a screw rod, a base is arranged above the universal wheel, and a protective shell a is arranged on the left side of the base. The utility model has a simple and reasonable structural design and high practicability. The design of the universal wheel makes the device easy to move to save manpower. The motor cooperates with the gear and nut device to realize the lifting of the slide rail. The moving The device can move left and right on the slide rail. The moving device cooperates with the support arm to realize the left and right movement of the clamping arm. These devices enable the utility model to work in multiple directions. The moving device a can drive the metal shell to move, so The coolant inside the cooling tube can cool down the object to be clamped through heat conduction. The device has a reasonable structure and can save a lot of manpower and time for waiting for the object to cool down. It is very suitable for clamping the thermal system device of the single crystal furnace.

Description

An extraction heat system fixture for a Czochralski single crystal furnace

technical field

The utility model relates to the technical field of a single crystal furnace, in particular to a jig for an extraction heat system used in a Czochralski method single crystal furnace.

Background technique

The single crystal furnace is a kind of equipment that melts polycrystalline silicon and other polycrystalline materials with a graphite heater in an inert gas (mainly argon) environment, and grows a dislocation-free single crystal by the Czochralski method. Single crystal silicon is prepared by the Czochralski method. In the process, sometimes it is necessary to take out the middle insulation cylinder of the thermal system and then cool and clean the thermal field.

However, the size of the middle insulation cylinder is large, the graphite material itself and the carbon felt on the outside make the overall weight larger, and there is a high-temperature and fixed graphite heater inside during extraction, so the space that can be grasped is relatively small. In actual production, four tall and strong employees are required to wear high-temperature protective gloves to extract carefully, otherwise it will take a long time to cool down and delay production. Even so, there are still incidents of scalding employees or falling and damaging the middle insulation cylinder, which brings great inconvenience to production. Therefore, those skilled in the art provide a fixture for the extraction heat system for the Czochralski method single crystal furnace to solve the problem. The problems raised in the background art above.

Contents of the invention

The purpose of this utility model is to provide a jig for an extraction heat system for a Czochralski single crystal furnace, so as to solve the problems raised in the above-mentioned background technology.

In order to achieve the above object, the utility model provides the following technical solutions:

An extraction heat system fixture for a Czochralski single crystal furnace, comprising a universal wheel, a base and a screw rod, a base is arranged above the universal wheel, a protective shell a is arranged on the left side of the base, and the protective shell a The left and right ends of the interior are provided with a protective shell b, and the right side of the protective shell a is provided with a motor. The upper surface of a is connected to the screw rod a, the surface of the screw rod a is connected to a nut device, the upper end of the nut device is connected to a slide rail, a moving device is arranged on the left side of the slide rail, a support arm is connected to the bottom of the moving device, and the slide rail The right end of the rail is connected to the mobile device a, the lower end of the mobile device a is connected to a metal shell, the surface of the metal shell is provided with a cooling pipe, the water inlet of the cooling pipe is connected to a water pump, and a water storage tank is provided below the water pump;

The lower end of the support arm is connected to the support shell, the bottom of the support shell is provided with a bottom plate, the left side of the bottom plate is provided with a motor b, the shaft of the motor b is connected to the screw b, and the surface of the screw b is provided with a nut. A clamping arm is arranged on the outside of the nut;

The moving device includes a supporting shell, a motor a and rollers, the inner upper end of the supporting shell is provided with a motor a, the shaft of the motor a is connected to the rollers, and slide rails are arranged outside the rollers.

As a further solution of the utility model: the nut device is designed in an L shape.

As a further solution of the present invention: the slide rail is symmetrically provided with two moving devices front and back.

As a further solution of the utility model: the nut is rotatably connected with the clamping arm.

As a further solution of the utility model: four universal wheels are arranged at the bottom of the base.

Compared with the prior art, the beneficial effects of the utility model are:

The utility model is simple and reasonable in structural design, convenient and quick to use, and has high practicability. The design of the universal wheel makes the device easy to move to save manpower. lifting, the moving device can move left and right on the slide rail, and the moving device cooperates with the support arm to realize the left and right movement of the clamping arm. These devices enable the utility model to work in multiple directions. The moving device a can Drive the metal shell to move, and the coolant inside the cooling tube can cool down the object to be clamped through heat conduction. This device has a reasonable structure and can save a lot of manpower and time for waiting for the object to cool. It is very suitable for cooling the single crystal furnace. Clamping of system devices.

Description of drawings

FIG. 1 is a schematic structural diagram of a jig for an extraction heat system used in a Czochralski method single crystal furnace.

Fig. 2 is a partially enlarged view of a jig for an extraction heat system used in a Czochralski method single crystal furnace.

Fig. 3 is a schematic structural diagram of a moving device in a fixture of an extraction heat system for a Czochralski method single crystal furnace.

In the figure: 1-universal wheel, 2-base, 3-screw, 4-gear, 5-gear a, 6-screw a, 7-nut device, 8-support arm, 9-moving device, 10- Slide rail, 11-mobile device a, 12-metal shell, 13-cooling pipe, 14-water pump, 15-water storage tank, 16-motor, 17-protective shell a, 18-bearing, 19-protective shell b, 101- Support shell, 102-motor a, 103-roller, 201-housing, 202-bottom plate, 203-rotation shaft, 204-clamping arm, 205-nut, 206-screw b, 207-motor b.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. example. Based on the embodiments of the present utility model, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of the present utility model.

Please refer to Figures 1 to 3. In an embodiment of the present utility model, a jig for an extraction heat system for a Czochralski method single crystal furnace includes a universal wheel 1, a base 2 and a screw rod 3, and the universal wheel 1 is provided with a The base 2, the left side of the base 2 is provided with a protective case a17, the left and right ends of the protective case a17 are provided with a protective case b19, the right side of the protective case a17 is provided with a motor 16, and the shaft of the motor 16 is connected to the wire Rod 3, the left and right sides of the screw rod 3 are connected to the gear 4, the gear 4 is connected to the gear a5, the upper surface of the gear a5 is connected to the screw rod a6, the surface of the screw rod a6 is connected to the nut device 7, and the nut device 7 The upper end is connected to the slide rail 10, the left side of the slide rail 10 is provided with a mobile device 9, the support arm 8 is connected to the bottom of the mobile device 9, the right end of the slide rail 10 is connected to the mobile device a11, and the lower end of the mobile device a11 is connected to the metal shell 12. A cooling pipe 13 is provided on the surface of the metal shell 12, the water inlet of the cooling pipe 13 is connected to a water pump 14, and a water storage tank 15 is provided below the water pump 14;

The lower end of the support arm 8 is connected to the support shell 101, the bottom of the support shell 101 is provided with a base plate 202, the left side of the base plate 202 is provided with a motor b207, the shaft of the motor b207 is connected to the screw rod b206, and the surface of the screw rod b206 is A nut 205 is provided, and a clamping arm 204 is provided outside the nut 205;

The moving device 9 includes a supporting shell 101 , a motor a102 and a roller 103 . The upper end of the supporting shell 101 is provided with a motor a102 .

The working principle of the utility model is:

The utility model relates to a jig for extracting heat system of a Czochralski single crystal furnace. The device is used to clamp the heat system device of a single crystal furnace. The design of the universal wheel 1 makes the device easy to move. The motor 16 cooperates with the gear 4 and the nut device 7 to realize the lifting of the slide rail 10, the moving device 9 can move left and right on the slide rail, and the moving device 9 cooperates with the support arm 8 to realize the left and right movement of the clamping arm 204, The motor b207 cooperates with the nut 205 and the screw rod b206 to realize the clamping arm 204 to clamp the object, the moving device a11 can drive the metal shell 12 to move, and the cooling liquid inside the cooling pipe 13 can pass heat conduction to the object to be clamped. The object is cooled. The structure of the device is reasonable, which can save a lot of manpower and the time of waiting for the object to cool down. It is very suitable for clamping the thermal system device of the single crystal furnace.

The utility model is simple and reasonable in structural design, convenient and quick to use, and has high practicability. The design of the universal wheel makes the device easy to move to save manpower. lifting, the moving device can move left and right on the slide rail, and the moving device cooperates with the support arm to realize the left and right movement of the clamping arm. These devices enable the utility model to work in multiple directions. The moving device a can Drive the metal shell to move, and the coolant inside the cooling tube can cool down the object to be clamped through heat conduction. This device has a reasonable structure and can save a lot of manpower and time for waiting for the object to cool. It is very suitable for cooling the single crystal furnace. Clamping of system devices.

It is obvious to those skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, no matter from all points of view, the embodiments should be regarded as exemplary and non-restrictive, and the scope of the present invention is defined by the appended claims rather than the above description, so it is intended to fall within the scope of the claims All changes within the meaning and range of equivalents of the required elements are included in the present invention. Any reference sign in a claim should not be construed as limiting the claim concerned.

In addition, it should be understood that although this specification is described according to implementation modes, not each implementation mode only contains an independent technical solution, and this description in the specification is only for clarity, and those skilled in the art should take the specification as a whole , the technical solutions in the various embodiments can also be properly combined to form other implementations that can be understood by those skilled in the art.

Claims (5)

1. a kind of Czochralski method mono-crystal furnace extraction hot systems fixture, including universal wheel (1), pedestal (2) and screw (3), feature It is, pedestal (2) is provided with above the universal wheel (1), protective shell a (17), the protection are provided on the left of the pedestal (2) The internal left and right ends of shell a (17) are provided with protective shell b (19), and motor (16), the electricity are provided on the right side of the protective shell a (17) Machine (16) axle portion connection wire rod (3), screw (3) the right and left surface connection gear (4), gear (4) the connection gear a (5), gear a (5) the upper surface connection wire rod a (6), screw a (6) surface attaching nut's device (7), the nut dress (7) upper end connecting sliding rail (10) is put, mobile device (9) is provided on the left of the sliding rail (10), is connected below the mobile device (9) Support arm (8) is connect, sliding rail (10) the right end connection mobile device a (11), mobile device a (11) lower end connects metal-back (12), metal-back (12) surface is provided with cooling tube (13), and cooling tube (13) the water inlet connection water pump (14) is described Water tank (15) is provided with below water pump (14)；

Support arm (8) the lower end connection supporting shell (101), supporting shell (101) bottom is provided with bottom plate (202), described Motor b (207), motor b (207) the axle portion connection wire rod b (206), the screw b (206) are provided on the left of bottom plate (202) Surface is provided with nut (205), and clamp arm (204) is provided with outside the nut (205)；

The mobile device (9) includes supporting shell (101), motor a (102) and idler wheel (103), and the supporting shell (101) is internal Upper end is provided with motor a (102), and motor a (102) the axle portion connection idler wheel (103), the idler wheel (103) is external to be provided with Sliding rail (10).

A kind of 2. Czochralski method mono-crystal furnace according to claim 1 extraction hot systems fixture, which is characterized in that the nut Device (7) design is L-shaped.

A kind of 3. Czochralski method mono-crystal furnace according to claim 1 extraction hot systems fixture, which is characterized in that the sliding rail (10) mobile device (9) there are two being symmetrical arranged before and after.

A kind of 4. Czochralski method mono-crystal furnace according to claim 1 extraction hot systems fixture, which is characterized in that the nut (205) it is rotatablely connected with clamp arm (204).

A kind of 5. Czochralski method mono-crystal furnace according to claim 1 extraction hot systems fixture, which is characterized in that the pedestal (2) there are four universal wheels (1) for bottom setting.