CN207512308U - A kind of Czochralski method mono-crystal furnace extraction hot systems fixture - Google Patents

A kind of Czochralski method mono-crystal furnace extraction hot systems fixture Download PDF

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Publication number
CN207512308U
CN207512308U CN201820259177.7U CN201820259177U CN207512308U CN 207512308 U CN207512308 U CN 207512308U CN 201820259177 U CN201820259177 U CN 201820259177U CN 207512308 U CN207512308 U CN 207512308U
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China
Prior art keywords
mobile device
hot systems
sliding rail
fixture
motor
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CN201820259177.7U
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Chinese (zh)
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张会现
洪东旭
楼刚刚
卲化水
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Qixian County Dongci New Energy Co Ltd
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Qixian County Dongci New Energy Co Ltd
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Abstract

The utility model discloses a kind of Czochralski method mono-crystal furnace extraction hot systems fixtures,Including universal wheel,Pedestal and screw,Pedestal is provided with above the universal wheel,The chassis left side is provided with protective shell a,The utility model designs advantages of simple in structure,Practicability is very high,The design of the universal wheel causes device easy to remove to save manpower,The motor mate gear and nut apparatus etc. can realize the lifting to sliding rail,The mobile device can move left and right on sliding rail,The mobile device cooperation support arm can realize moving left and right for clamp arm,These devices allow the utility model it is multi-faceted work,The mobile device a can drive metal-back to move,Coolant inside the cooling tube can be cooled down by the object that heat transfer clamps needs,The present apparatus is rational in infrastructure,A large amount of manpowers can be saved and waited the time of object cooling,It is very suitable for the gripping of the hot systems device for single crystal growing furnace.

Description

A kind of Czochralski method mono-crystal furnace extraction hot systems fixture
Technical field
The utility model is related to a kind of single crystal growing furnace technical field, specifically a kind of Czochralski method mono-crystal furnace extraction hot systems press from both sides Tool.
Background technology
Single crystal growing furnace be one kind in inert gas (based on argon gas) environment, with graphite heater by polycrystalline materials such as polysilicons Fusing, and use the equipment of Grown by CZ Method dislocation-free monocrystalline, in vertical pulling method prepares monocrystalline silicon technology, need sometimes taking-up hot systems Middle heat-preservation cylinder after thermal field is cooled down and is cleared up.
But middle heat preservation cylinder size is big, graphite material itself so that overall weight is larger plus the carbon felt of outside, extracts in addition When inside also have the graphite heater in high temperature, stationary state, the space that can be captured is smaller.In actual production, 4 are needed The big employee of a height power dresses high temperature protection gloves and carefully extracts, and otherwise just needs to cool down for a long time, delays production run.I.e. Make in this way, still there is scald employee or middle heat-preservation cylinder to fall the event of damage, to bring greatly inconvenience therefore to production, therefore Those skilled in the art provide a kind of Czochralski method mono-crystal furnace extraction hot systems fixture, to solve to propose in above-mentioned background technology The problem of.
Invention content
The purpose of this utility model is to provide a kind of Czochralski method mono-crystal furnace extraction hot systems fixture, to solve the above-mentioned back of the body The problem of being proposed in scape technology.
To achieve the above object, the utility model provides following technical solution:
A kind of Czochralski method mono-crystal furnace extraction hot systems fixture, including universal wheel, pedestal and screw, above the universal wheel Pedestal is provided with, the chassis left side is provided with left and right ends inside protective shell a, the protective shell a and is provided with protective shell b, institute It states and is provided with motor, the motor axle portion connection wire rod, screw the right and left surface connection gear, institute on the right side of protective shell a State gear connection gear a, the gear a upper surfaces connection wire rod a, screw a surfaces attaching nut's device, the nut dress Upper end connecting sliding rail is put, mobile device is provided on the left of the sliding rail, support arm, the sliding rail are connected below the mobile device Right end connection mobile device a, the mobile device a lower ends connect metal-back, and the metal-back surface is provided with cooling tube, described Cooling tube water inlet connects water pump, and water tank is provided with below the water pump;
The support arm lower end connects supporting shell, and the supporting shell bottom is provided with bottom plate, is provided on the left of the bottom plate Motor b, the motor b axle portion connection wire rods b, the screw b surfaces are provided with nut, clamping are provided with outside the nut Arm;
The mobile device includes supporting shell, motor a and idler wheel, and the supporting shell inner upper end is provided with motor a, described Motor a axle portions connect idler wheel, and sliding rail is provided with outside the idler wheel.
As further program of the utility model:The nut apparatus design is L-shaped.
As the utility model further scheme:Mobile device there are two being symmetrical arranged before and after the sliding rail.
As the utility model further scheme:The nut is rotatablely connected with clamp arm.
As the utility model further scheme:There are four universal wheels for the base bottom setting.
Compared with prior art, the beneficial effects of the utility model are:
The utility model designs advantages of simple in structure, uses easy to operate, and practicability is very high, and described ten thousand Design to wheel causes device easy to remove to save manpower, and the motor mate gear and nut apparatus etc. can be realized to cunning The lifting of rail, the mobile device can move left and right on sliding rail, and the mobile device cooperation support arm can realize clamping Arm moves left and right, these devices allow the utility model it is multi-faceted work, the mobile device a can drive Metal-back moves, and the coolant inside the cooling tube can be cooled down by the object that heat transfer clamps needs, this dress Put it is rational in infrastructure, can save a large amount of manpowers and wait object cooling time, be very suitable for for single crystal growing furnace hot systems fill The gripping put.
Description of the drawings
Fig. 1 is the structure diagram that a kind of Czochralski method mono-crystal furnace extracts hot systems fixture.
Fig. 2 is the partial enlarged view that a kind of Czochralski method mono-crystal furnace extracts hot systems fixture.
Fig. 3 is the structure diagram that a kind of Czochralski method mono-crystal furnace extracts mobile device in hot systems fixture.
In figure:1- universal wheels, 2- pedestals, 3- screws, 4- gears, 5- gear a, 6- screw a, 7- nut apparatus, 8- supports Arm, 9- mobile devices, 10- sliding rails, 11- mobile devices a, 12- metal-back, 13- cooling tubes, 14- water pumps, 15- water tanks, 16- Motor, 17- protective shell a, 18- bearing, 19- protective shell b, 101- supporting shell, 102- motor a, 103- idler wheel, 201- housings, 202- bottom plates, 203- rotary shafts, 204- clamp arms, 205- nuts, 206- screw b, 207- motors b.
Specific embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out It clearly and completely describes, it is clear that the described embodiments are only a part of the embodiments of the utility model rather than whole Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are without making creative work All other embodiments obtained shall fall within the protection scope of the present invention.
Please refer to Fig.1~3, in the utility model embodiment, a kind of Czochralski method mono-crystal furnace extraction hot systems fixture, including Universal wheel 1, pedestal 2 and screw 3,1 top of universal wheel are provided with pedestal 2, and 2 left side of pedestal is provided with protective shell a17, Left and right ends are provided on the right side of protective shell b19, the protective shell a17 and are provided with motor 16, the electricity inside the protective shell a17 16 axle portion connection wire rod 3 of machine, 3 the right and left surface connection gear 4 of screw, the 4 connection gear a5 of gear, the gear A5 upper surfaces connection wire rod a6, screw a6 surfaces attaching nut's device 7, the 7 upper end connecting sliding rail 10 of nut apparatus, institute It states 10 left side of sliding rail and is provided with mobile device 9, the 9 lower section connection support arm 8 of mobile device, 10 right end of the sliding rail connection moves Dynamic device a11, the mobile device a11 lower ends connect metal-back 12, and 12 surface of metal-back is provided with cooling tube 13, described 13 water inlet of cooling tube connects water pump 14, and 14 lower section of water pump is provided with water tank 15;
8 lower end of support arm connects supporting shell 101, and 101 bottom of supporting shell is provided with bottom plate 202, the bottom plate 202 left sides are provided with motor b207, and the motor b207 axle portion connection wire rods b206, the screw b206 surfaces are provided with nut 205, clamp arm 204 is provided with outside the nut 205;
The mobile device 9 includes supporting shell 101, motor a102 and idler wheel 103, and 101 inner upper end of supporting shell is set Motor a102 is equipped with, the motor a102 axle portions connect idler wheel 103, sliding rail 10 is provided with outside the idler wheel 103.
The operation principle of the utility model is:
The utility model is related to a kind of Czochralski method mono-crystal furnace extraction hot systems fixture, the present apparatus is used for the heat to single crystal growing furnace System and device is gripped, and the design of the universal wheel 1 so that device is easy to remove, 16 mate gear 4 of motor and nut Device 7 etc. can realize the lifting to sliding rail 10, and the mobile device 9 can move left and right on sliding rail, the mobile device 9 Cooperation support arm 8 can realize moving left and right for clamp arm 204, and the motor b207 attaching nuts 205 and screw b206 can be with Realize 204 grip objects of clamp arm, the mobile device a11 can drive metal-back 12 to move, inside the cooling tube 13 Coolant can be cooled down by the object that heat transfer clamps needs, and the present apparatus is rational in infrastructure, can save a large amount of manpowers With the time of waiting object cooling, it is very suitable for for the gripping to single crystal growing furnace hot systems device.
The utility model designs advantages of simple in structure, uses easy to operate, and practicability is very high, and described ten thousand Design to wheel causes device easy to remove to save manpower, and the motor mate gear and nut apparatus etc. can be realized to cunning The lifting of rail, the mobile device can move left and right on sliding rail, and the mobile device cooperation support arm can realize clamping Arm moves left and right, these devices allow the utility model it is multi-faceted work, the mobile device a can drive Metal-back moves, and the coolant inside the cooling tube can be cooled down by the object that heat transfer clamps needs, this dress Put it is rational in infrastructure, can save a large amount of manpowers and wait object cooling time, be very suitable for for single crystal growing furnace hot systems fill The gripping put.
It is obvious to a person skilled in the art that the utility model is not limited to the details of above-mentioned exemplary embodiment, and And in the case of the spirit or essential attributes without departing substantially from the utility model, it can realize that this practicality is new in other specific forms Type.Therefore, in all respects, the present embodiments are to be considered as illustrative and not restrictive, this practicality is new The range of type is indicated by the appended claims rather than the foregoing description, it is intended that by containing in the equivalent requirements of the claims is fallen All changes in justice and range are embraced therein.Any reference numeral in claim should not be considered as limitation Involved claim.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should It considers the specification as a whole, the technical solutions in each embodiment can also be properly combined, forms those skilled in the art The other embodiment being appreciated that.

Claims (5)

1. a kind of Czochralski method mono-crystal furnace extraction hot systems fixture, including universal wheel (1), pedestal (2) and screw (3), feature It is, pedestal (2) is provided with above the universal wheel (1), protective shell a (17), the protection are provided on the left of the pedestal (2) The internal left and right ends of shell a (17) are provided with protective shell b (19), and motor (16), the electricity are provided on the right side of the protective shell a (17) Machine (16) axle portion connection wire rod (3), screw (3) the right and left surface connection gear (4), gear (4) the connection gear a (5), gear a (5) the upper surface connection wire rod a (6), screw a (6) surface attaching nut's device (7), the nut dress (7) upper end connecting sliding rail (10) is put, mobile device (9) is provided on the left of the sliding rail (10), is connected below the mobile device (9) Support arm (8) is connect, sliding rail (10) the right end connection mobile device a (11), mobile device a (11) lower end connects metal-back (12), metal-back (12) surface is provided with cooling tube (13), and cooling tube (13) the water inlet connection water pump (14) is described Water tank (15) is provided with below water pump (14);
Support arm (8) the lower end connection supporting shell (101), supporting shell (101) bottom is provided with bottom plate (202), described Motor b (207), motor b (207) the axle portion connection wire rod b (206), the screw b (206) are provided on the left of bottom plate (202) Surface is provided with nut (205), and clamp arm (204) is provided with outside the nut (205);
The mobile device (9) includes supporting shell (101), motor a (102) and idler wheel (103), and the supporting shell (101) is internal Upper end is provided with motor a (102), and motor a (102) the axle portion connection idler wheel (103), the idler wheel (103) is external to be provided with Sliding rail (10).
A kind of 2. Czochralski method mono-crystal furnace according to claim 1 extraction hot systems fixture, which is characterized in that the nut Device (7) design is L-shaped.
A kind of 3. Czochralski method mono-crystal furnace according to claim 1 extraction hot systems fixture, which is characterized in that the sliding rail (10) mobile device (9) there are two being symmetrical arranged before and after.
A kind of 4. Czochralski method mono-crystal furnace according to claim 1 extraction hot systems fixture, which is characterized in that the nut (205) it is rotatablely connected with clamp arm (204).
A kind of 5. Czochralski method mono-crystal furnace according to claim 1 extraction hot systems fixture, which is characterized in that the pedestal (2) there are four universal wheels (1) for bottom setting.
CN201820259177.7U 2018-02-14 2018-02-14 A kind of Czochralski method mono-crystal furnace extraction hot systems fixture Active CN207512308U (en)

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CN201820259177.7U CN207512308U (en) 2018-02-14 2018-02-14 A kind of Czochralski method mono-crystal furnace extraction hot systems fixture

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108677445A (en) * 2018-07-03 2018-10-19 安徽依采妮纤维材料科技有限公司 A kind of clothing multiple laundry treating apparatus
CN109989105A (en) * 2019-04-08 2019-07-09 苏州优晶光电科技有限公司 A kind of electric-resistivity method silicon carbide crystal growing equipment
CN110512288A (en) * 2019-09-10 2019-11-29 大同新成新材料股份有限公司 A kind of thermal field crucible attemperator and its application method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108677445A (en) * 2018-07-03 2018-10-19 安徽依采妮纤维材料科技有限公司 A kind of clothing multiple laundry treating apparatus
CN109989105A (en) * 2019-04-08 2019-07-09 苏州优晶光电科技有限公司 A kind of electric-resistivity method silicon carbide crystal growing equipment
CN110512288A (en) * 2019-09-10 2019-11-29 大同新成新材料股份有限公司 A kind of thermal field crucible attemperator and its application method

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