CN207418915U - A kind of thermal-field device for GaAs production - Google Patents
A kind of thermal-field device for GaAs production Download PDFInfo
- Publication number
- CN207418915U CN207418915U CN201721475709.2U CN201721475709U CN207418915U CN 207418915 U CN207418915 U CN 207418915U CN 201721475709 U CN201721475709 U CN 201721475709U CN 207418915 U CN207418915 U CN 207418915U
- Authority
- CN
- China
- Prior art keywords
- heat
- preservation cylinder
- electric heating
- heating tube
- insulation board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910001218 Gallium arsenide Inorganic materials 0.000 title claims abstract description 13
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 238000004321 preservation Methods 0.000 claims abstract description 42
- 238000009413 insulation Methods 0.000 claims abstract description 26
- 238000005485 electric heating Methods 0.000 claims abstract description 19
- 239000000945 filler Substances 0.000 claims abstract description 18
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910002804 graphite Inorganic materials 0.000 claims description 4
- 239000010439 graphite Substances 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 238000005265 energy consumption Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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- Furnace Details (AREA)
Abstract
A kind of thermal-field device for GaAs production, it is related to GaAs production equipment field, including furnace body, heat-preservation cylinder, electric heating tube, crucible bracket, crucible and guide shell, electric heating tube is equipped with for the electrode by electric heating tube connection in circuit, the lower edge of the heat-preservation cylinder is provided with filler ring, the outer of filler ring is connected with lifting rope, the upper edge of the furnace body inside is provided with hook, the upper end of the lifting rope is hung on hook, thermal insulation board is provided with below the heat-preservation cylinder, the lower edge of heat-preservation cylinder is provided with section as trapezoidal annular protrusion, annular protrusion is inserted into the groove on thermal insulation board, circular conical surface is provided on the outside of the electrode, the circular conical surface matches with the conical bore on thermal insulation board, so as to fulfill the positioning to electric heating tube.The utility model is provided with filler ring in heat-preservation cylinder bottom, can sling filler ring together together with heat-preservation cylinder by lifting rope, compared with prior art, can effectively avoid the damage of heat-preservation cylinder.
Description
Technical field
The utility model belongs to GaAs production equipment field more particularly to a kind of thermal field dress for GaAs production
It puts.
Background technology
Thermal-field device is a kind of important equipment applied in gallium arsenide production process, and function is for gallium arsenide
Growth course suitable temperature environment is provided.The structure of thermal-field device generally includes furnace body, heat-preservation cylinder, electric heating tube, crucible
Bracket, crucible and guide shell, when being produced using thermal-field device, it is necessary to after each production cycle by heat-preservation cylinder out of furnace body
It carries away.And in the prior art, the mode of generally use manpower transport will carry away heat-preservation cylinder, and this mode not only occupies more people
Power, and easily heat-preservation cylinder made of graphite is caused to damage.
The content of the invention
The utility model provides a kind of thermal-field device for GaAs production, mentioned above in the background art to solve
Problem.
The technical issues of the utility model solves is realized using following technical scheme：The utility model provides one kind
For the thermal-field device of GaAs production, including furnace body, heat-preservation cylinder, electric heating tube, crucible bracket, crucible and guide shell, electricity adds
Hot cylinder is equipped with for the electrode by electric heating tube connection in circuit, and the lower edge of the heat-preservation cylinder is provided with filler ring, filler ring
Outer be connected with lifting rope, the upper edge of the furnace body inside is provided with hook, and the upper end of the lifting rope is hung on hook, institute
Thermal insulation board is provided with below the heat-preservation cylinder stated, the lower edge of heat-preservation cylinder is provided with section as trapezoidal annular protrusion, annular protrusion
It is inserted into the groove on thermal insulation board, so as to fulfill the fixation to heat-preservation cylinder, circular conical surface is provided on the outside of the electrode, it should
Circular conical surface matches with the conical bore on thermal insulation board, so as to fulfill the positioning to electric heating tube.
The filler ring is made of tungsten.The heat-preservation cylinder and thermal insulation board is made of graphite.
The beneficial effects of the utility model are：
1st, the utility model is provided with filler ring in heat-preservation cylinder bottom, can be hung filler ring together together with heat-preservation cylinder by lifting rope
It rises, compared with prior art, can effectively avoid the damage of heat-preservation cylinder.
2nd, the utility model has added thermal insulation board in prior art basis, and heat preservation effect is can further improve by thermal insulation board
Fruit saves energy consumption.
3rd, heat-preservation cylinder is mounted on thermal insulation board by the utility model using connected structure, makes heat-preservation cylinder and the intact rank of thermal insulation board
It connects, avoids cold bridge effect.
4th, electrode is mounted on by pyramidal structure on thermal insulation board by the utility model, and the assembling of electric heating tube is made more to hold
Easily, positioning is also more accurate.
Description of the drawings
Fig. 1 is the structure diagram of the utility model；
Fig. 2 is the partial enlarged view at A in Fig. 1.
In figure, 1- furnace bodies, 2- electrodes, 3- heat-preservation cylinders, 4- electric heating tubes, 5- crucibles, 6- lifting ropes, 7- hooks, 8- guide shells,
9- crucible brackets, 10- annular protrusions, 11- circular conical surfaces, 12- filler rings, 13- thermal insulation boards.
Specific embodiment
The utility model is described further below in conjunction with attached drawing：
The present embodiment includes furnace body 1, heat-preservation cylinder 3, electric heating tube 4, crucible bracket 9, crucible 5 and guide shell 8, electric heating tube
4 are equipped with electric heating tube 4 connecting electrode 2 in circuit.Above for universal architecture of the prior art herein no longer
It repeats.
The lower edge of the heat-preservation cylinder 3 is provided with filler ring 12, and the outer of filler ring 12 is connected with lifting rope 6, in the furnace body 1
The upper edge of side is provided with hook 7, and the upper end of the lifting rope 6 is hung on hook 7.The utility model is set in 3 bottom of heat-preservation cylinder
Filler ring 12, filler ring 12 can together be sling, compared with prior art, can effectively avoid heat preservation by lifting rope 6 together with heat-preservation cylinder 3
The damage of cylinder 3.
The lower section of the heat-preservation cylinder 3 is provided with thermal insulation board 13.The utility model has added guarantor in prior art basis
Warm plate 13 can further improve heat insulation effect by thermal insulation board 13, save energy consumption.
The lower edge of heat-preservation cylinder 3 is provided with section as trapezoidal annular protrusion 10, and annular protrusion 10 is inserted on thermal insulation board 13
Groove in, so as to fulfill the fixation to heat-preservation cylinder 3.
Heat-preservation cylinder 3 is mounted on thermal insulation board 12 by the utility model using connected structure, makes heat-preservation cylinder 3 and thermal insulation board 13 complete
Good linking, avoids cold bridge effect, improves heat insulation effect.Electrode 2 is mounted on heat preservation by the utility model by pyramidal structure
On plate 13, it is more prone to the assembling of electric heating tube 4, positioning is also more accurate.
The outside of the electrode 2 is provided with circular conical surface 11, which matches with the conical bore on thermal insulation board 13,
So as to fulfill the positioning to electric heating tube 4.
The filler ring 12 is made of tungsten, has heat safe effect.
The heat-preservation cylinder 3 and thermal insulation board 13 is made of graphite.
Claims (3)
1. a kind of thermal-field device for GaAs production, including furnace body (1), heat-preservation cylinder (3), electric heating tube (4), crucible bracket
(9), crucible (5) and guide shell (8), electric heating tube (4) are equipped with for the electrode by electric heating tube (4) connection in circuit
(2), it is characterised in that：The lower edge of the heat-preservation cylinder (3) is provided with filler ring (12), and the outer of filler ring (12) is connected with lifting rope
(6), the upper edge on the inside of the furnace body (1) is provided with hook (7), and the upper end of the lifting rope (6) is hung on hook (7), institute
Thermal insulation board (13) is provided with below the heat-preservation cylinder (3) stated, the lower edge of heat-preservation cylinder (3) is provided with section as trapezoidal annular protrusion
(10), annular protrusion (10) is inserted into the groove on thermal insulation board (13), described so as to fulfill the fixation to heat-preservation cylinder (3)
Circular conical surface (11) is provided on the outside of electrode (2), which matches with the conical bore on thermal insulation board (13), so as to real
Now to the positioning of electric heating tube (4).
2. a kind of thermal-field device for GaAs production according to claim 1, it is characterised in that：The filler ring
(12) it is made of tungsten.
3. a kind of thermal-field device for GaAs production according to claim 1, it is characterised in that：The heat-preservation cylinder
(3) it is made with thermal insulation board (13) of graphite.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721475709.2U CN207418915U (en) | 2017-11-07 | 2017-11-07 | A kind of thermal-field device for GaAs production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721475709.2U CN207418915U (en) | 2017-11-07 | 2017-11-07 | A kind of thermal-field device for GaAs production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207418915U true CN207418915U (en) | 2018-05-29 |
Family
ID=62308045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721475709.2U Expired - Fee Related CN207418915U (en) | 2017-11-07 | 2017-11-07 | A kind of thermal-field device for GaAs production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207418915U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112126973A (en) * | 2020-09-28 | 2020-12-25 | 四川晶科能源有限公司 | Single crystal growing furnace dismouting device |
-
2017
- 2017-11-07 CN CN201721475709.2U patent/CN207418915U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112126973A (en) * | 2020-09-28 | 2020-12-25 | 四川晶科能源有限公司 | Single crystal growing furnace dismouting device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180529 |