CN207503947U - A kind of silicon chip detent mechanism - Google Patents

A kind of silicon chip detent mechanism Download PDF

Info

Publication number
CN207503947U
CN207503947U CN201721046649.2U CN201721046649U CN207503947U CN 207503947 U CN207503947 U CN 207503947U CN 201721046649 U CN201721046649 U CN 201721046649U CN 207503947 U CN207503947 U CN 207503947U
Authority
CN
China
Prior art keywords
plate
upstream
limit plate
silicon chip
oval
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201721046649.2U
Other languages
Chinese (zh)
Inventor
张学强
戴军
张建伟
贾宇鹏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RoboTechnik Intelligent Technology Co Ltd
Original Assignee
RoboTechnik Intelligent Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RoboTechnik Intelligent Technology Co Ltd filed Critical RoboTechnik Intelligent Technology Co Ltd
Priority to CN201721046649.2U priority Critical patent/CN207503947U/en
Application granted granted Critical
Publication of CN207503947U publication Critical patent/CN207503947U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The utility model discloses a kind of silicon chip detent mechanism, including:Firm banking;Drive component on firm banking;And the left and right limit assembly on firm banking, wherein, left and right limit assembly includes sliding the left limit plate and right limit plate being coupled on firm banking, left limit plate is parallel with right limit plate and is arranged at intervals to form the placed channel being located between the two, and left limit plate is selectively close to each other or separate under the driving of drive component with right limit plate.According to the utility model, improve silicon wafer horizontal degree and to moderate precision simultaneously, additionally it is possible to the efficiency of positioning centering is improved, so as to further improve production efficiency.

Description

A kind of silicon chip detent mechanism
Technical field
The utility model is related to machinery field, more particularly to a kind of silicon chip detent mechanism.
Background technology
In general, silicon chip of solar cell recipe step is included with next step:1st, making herbs into wool, by silicon chip surface corruption Lose the pattern of pyramid;2nd, it spreads, silicon chip surface forms PN junction;3rd, it etches, the PN junction of silicon chip edge is removed, prevents electricity Pond short circuit;4th, PSG is removed, cleaning silicon chip surface removes silicon dioxide layer;5th, PECVD plates one layer of antireflective coating in silicon chip surface; 6th, printing-sintering, prints electrode and back surface field, and dries sintering.In above-mentioned recipe step, need repeatedly to shift silicon chip, And just need to position the spatial position of silicon chip in transfer process, ensure its centering and levelness, so as to improve silicon chip Processing quality, in the prior art to the centering of silicon chip positioning need human assistance the step of it is more, lead to the degree of automation It is low, centering location efficiency is low, while centering positioning precision it is also limited.In view of this, it is really necessary to develop a kind of silicon chip to determine Position mechanism, to solve the above problems.
Utility model content
For the shortcomings of the prior art, the purpose of this utility model is to provide a kind of silicon chip detent mechanism, Its improve silicon wafer horizontal degree and to moderate precision simultaneously, additionally it is possible to improve positioning centering efficiency, so as to further improve Production efficiency.
In order to realize above-mentioned purpose according to the present utility model and other advantages, a kind of silicon chip detent mechanism is provided, is wrapped It includes:
Firm banking;
Drive component on firm banking;And
Left and right limit assembly on firm banking,
Wherein, left and right limit assembly includes sliding the left limit plate and right limit plate being coupled on firm banking, left limit Plate is parallel with right limit plate and is arranged at intervals to form the placed channel being located between the two, and left limit plate is driving with right limit plate It is selectively close to each other or separate under the driving of dynamic component.
Preferably, drive component includes:
Driving motor;And
The first oval plate being sequentially connected with the power output end of driving motor, periphery is oval,
Wherein, the first oval plate is set on fixed seat and between left limit plate and right limit plate, left limit plate Inside and the inside of right limit plate contact always with the periphery retaining surface of the first oval plate.
Preferably, the bottom inside of left limit plate and the bottom inside of right limit plate have been respectively and fixedly connected with left slider and right cunning Block, firm banking are equipped with left rail plate between left limit plate and right limit plate and right rail plate, left slider and Right sliding block slides with left rail plate and right rail plate be coupled respectively, and the inside of the inside of left slider and right sliding block is always with the The periphery retaining surface contact of one oval plate.
Preferably, the left limit wheel for rolling connection and the right side are respectively equipped at the top of the top of left limit plate and right limit plate Position-limited wheel.
Preferably, the upstream of the placed channel, the side of firm banking are connected with located upstream component.
Preferably, located upstream component includes:
With the upstream pedestal of firm banking Joint;And
Upstream gag lever post on the pedestal of upstream,
Wherein, upstream gag lever post can be on the pedestal of upstream toward polyslip.
Preferably, the first oval plate is equipped with the second oval oval plate of periphery, the second oval plate and driving electricity The power output end of machine is sequentially connected, and the inside of upstream gag lever post contacts always with the periphery retaining surface of the second oval plate, upstream Gag lever post is selectively close to each other under the driving of drive component or far from the placed channel.
Preferably, the long axis of the first oval plate and the long axis of the second oval plate are perpendicular.
Preferably, upstream pedestal is equipped with the upstream rail plate perpendicular to the placed channel, upstream gag lever post Bottom is connected with the upstream sliding block that mating is slided with upstream rail plate, and upstream sliding block is equipped with link block.
Preferably, one end of link block and upstream sliding block Joint, the other end then with the periphery of the second oval plate always Retaining surface contacts, and upstream rail plate and horizontal plane form an angle α.
Compared with prior art, advantage is the utility model:It is in raising silicon wafer horizontal degree and to moderate precision Simultaneously, additionally it is possible to the efficiency of positioning centering is improved, so as to further improve production efficiency.
Description of the drawings
Fig. 1 is the stereogram according to silicon chip detent mechanism described in the utility model;
Fig. 2 is the left view according to silicon chip detent mechanism described in the utility model.
Specific embodiment
The following describes the utility model in further detail with reference to the accompanying drawings, the aforementioned and other mesh of the utility model , feature, aspect and advantage will be apparent, to enable those skilled in the art can be real according to this with reference to specification word It applies.In the accompanying drawings, for clarity, shape and size can be amplified, and identical attached drawing mark will be used in all figures Remember to indicate the same or similar component.In the description, such as " forepart ", " rear portion ", " top ", " lower part ", " top " and The relative terms of " bottom " and its derivative words should be interpreted to refer to then as described in or such as the institute in the attached drawing being discussed The orientation shown.These relative terms are for convenience and are usually not intended to need specifically to be orientated.It is related to attached The term (for example, " connection " and " attachment ") connect, couple etc. refers to that these structures are solid directly or indirectly to one another by intermediate structure Fixed or attachment relationship and movable or rigidly attached or relationship, unless otherwise clearly stating.
With reference to Fig. 1, silicon chip detent mechanism 3 includes:Firm banking 31, drive component 32, left and right limit assembly 34, wherein, Drive component 32 and left and right limit assembly 34 are set on firm banking 31, and left and right limit assembly 34, which includes sliding, is coupled to fixation Left limit plate 341 and right limit plate 342 on pedestal 31, left limit plate 341 it is parallel with right limit plate 342 and be arranged at intervals with Form the placed channel being located between the two, the selectivity under the driving of drive component 32 with right limit plate 342 of left limit plate 341 Ground is close to each other or separate.In a preferred embodiment, one is additionally provided between left limit plate 341 and right limit plate 342 to be used for The article carrying platform (not shown) of silicon chip is carried, thus when left limit plate 341 and right limit plate 342 are close to each other, article carrying platform On silicon chip can be clamped positioning, can will be to be clamped fixed and when left limit plate 341 and right limit plate 342 are located remotely from each other The silicon chip of position is put on article carrying platform.
Referring again to Fig. 1, drive component 32 includes:
Driving motor 321;And
The first oval plate 322 being sequentially connected with the power output end of driving motor 321, periphery is oval,
Wherein, the first oval plate 322 be set on firm banking 31 and positioned at left limit plate 341 and right limit plate 342 it Between, the periphery retaining surface of the inside of left limit plate 341 and the inside of right limit plate 342 always with the first oval plate 322 contacts.When It is left when the inside of left limit plate 341 and the inside of right limit plate 342 are in contact with the longitudinal end peripheral surface of the first oval plate 322 Placed channel between limiting plate 341 and right limit plate 342 is opened, and at this time can be put into the silicon chip of positioning to be clamped;And work as It is left when the inside of left limit plate 341 and the inside of right limit plate 342 are in contact with the short axle end peripheral surface of the first oval plate 322 Limiting plate 341 is close with right limit plate 342 and the two is closest, at this time can position the silicon wafer clamping in placed channel.
Further, the bottom inside of left limit plate 341 and the bottom inside of right limit plate 342 have been respectively and fixedly connected with left slider 3411 and right sliding block 3421, firm banking 31 is equipped with the left rail plate between left limit plate 341 and right limit plate 342 311 and right rail plate 312, left slider 3411 and right sliding block 3421 respectively with left rail plate 311 and right rail plate 312 Periphery retaining surface of the inside of slip mating, the inside of left slider 3411 and right sliding block 3421 always with the first oval plate 322 connects It touches.So that left limit plate 341 and right limit plate 342 can on firm banking 31 Stable sliding.
Further, the top of left limit plate 341 and the top of right limit plate 342 are respectively equipped with the left limit for rolling connection Wheel 3412 and right limit wheel 3422.Left limit wheel 3412 and right limit wheel 3422 can be by left limit plates 341 and right limit plate 342 The face contact force for being applied to silicon chip the right and left becomes rolling contact power, reduces left limit plate 341 with right limit plate 342 to silicon chip Compressing, so as to playing certain protective effect to silicon chip.
Referring again to Fig. 1, the upstream of the placed channel, the side of firm banking 31 are connected with located upstream component 33.
Further, located upstream component 33 includes:
With the upstream pedestal 331 of 31 Joint of firm banking;And
Upstream gag lever post 333 on upstream pedestal 331,
Wherein, upstream gag lever post 333 can be on upstream pedestal 331 toward polyslip.
Referring again to Fig. 1, the first oval plate 322 is equipped with the second oval oval plate 323 of periphery, the second oval plate 323 are sequentially connected with the power output end of driving motor 321, the inside of upstream gag lever post 333 always with the second oval plate 323 Periphery retaining surface contact, upstream gag lever post 333 are selectively close to each other under the driving of drive component 32 or far from described fixed Bit port.So that upstream gag lever post 333 can play the role of the upstream edge of silicon chip limiting and then position.
Further, the long axis of the first oval plate 322 and the long axis of the second oval plate 323 are perpendicular.So that when a left side When the inside of limiting plate 341 and the inside of right limit plate 342 are in contact with the longitudinal end peripheral surface of the first oval plate 322, upstream Longitudinal end peripheral surface of the inside of gag lever post 333 also with the second oval plate 323 is in contact, at this time left limit plate 341 and right limit The upstream of placed channel and placed channel between plate 342 is opened, and at this time can be put into the silicon chip of positioning to be clamped;Work as a left side When the inside of limiting plate 341 and the inside of right limit plate 342 are in contact with the short axle end peripheral surface of the first oval plate 322, upstream The inside of gag lever post 333 is also in contact with the short axle end peripheral surface of the second oval plate 323, at this time left limit plate 341 and right limit The upstream of placed channel and placed channel between plate 342 is closed, and silicon chip can be clamped positioning at this time.
With reference to Fig. 2, upstream pedestal 331 is equipped with the upstream rail plate 334 perpendicular to the placed channel, upstream limiting The bottom of bar 333 is connected with the upstream sliding block 3331 that mating is slided with upstream rail plate 334, and upstream sliding block 3331, which is equipped with, to be connected Connect block 332.
Further, one end of link block 332 and 3331 Joint of upstream sliding block, the other end then with the second oval plate 323 Periphery remain that face contacts, upstream rail plate 334 and horizontal plane form an angle α.In a preferred embodiment, even It connects to roll on one end that block 332 is contacted with the periphery retaining surface of the second oval plate 323 and is connected with upstream pulley 3321, which slides Wheel 3321 keeps rolling surface to contact with the periphery of the second oval plate 323, so as to reduce the abrasion of the second oval plate 323, carries High-durability.In another embodiment, angle α is 30 °.In another embodiment, angle α is 45 °.
Number of devices and treatment scale described herein are the explanations for simplifying the utility model.To the utility model Application, modifications and variations will be readily apparent to persons skilled in the art.
Although the embodiment of the utility model is disclosed as above, it is not limited in institute in specification and embodiment Row use, it can be applied to various fields suitable for the present invention completely, for those skilled in the art, can Easily realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, this practicality It is novel to be not limited to specific details and legend shown and described herein.

Claims (10)

1. a kind of silicon chip detent mechanism (3), which is characterized in that including:
Firm banking (31);
Drive component (32) on firm banking (31);And
Left and right limit assembly (34) on firm banking (31),
Wherein, left and right limit assembly (34) is including sliding the left limit plate (341) and the right limit that are coupled on firm banking (31) Plate (342), left limit plate (341) is parallel with right limit plate (342) and interval setting is led to forming the positioning being located between the two Road, left limit plate (341) are selectively close to each other or separate under the driving of drive component (32) with right limit plate (342).
2. silicon chip detent mechanism (3) as described in claim 1, which is characterized in that drive component (32) includes:
Driving motor (321);And
The first oval plate (322) being sequentially connected with the power output end of driving motor (321), periphery is oval,
Wherein, the first oval plate (322) is on firm banking (31) and positioned at left limit plate (341) and right limit plate (342) between, the inside of left limit plate (341) and the inside of right limit plate (342) periphery with the first oval plate (322) always Retaining surface contacts.
3. silicon chip detent mechanism (3) as claimed in claim 2, which is characterized in that the bottom inside of left limit plate (341) and the right side The bottom inside of limiting plate (342) has been respectively and fixedly connected with left slider (3411) and right sliding block (3421), and firm banking (31) is equipped with Left rail plate (311) and right rail plate (312) between left limit plate (341) and right limit plate (342), left slider (3411) and right sliding block (3421) slides with left rail plate (311) and right rail plate (312) be coupled respectively, left slider (3411) the periphery retaining surface of inside and the inside of right sliding block (3421) always with the first oval plate (322) contacts.
4. silicon chip detent mechanism (3) as claimed in claim 3, which is characterized in that the top of left limit plate (341) and right limit It is respectively equipped at the top of plate (342) and rolls the left limit wheel (3412) of connection and right limit wheel (3422).
5. silicon chip detent mechanism (3) as claimed in claim 2, which is characterized in that the upstream of the placed channel, firm banking (31) side is connected with located upstream component (33).
6. silicon chip detent mechanism (3) as claimed in claim 5, which is characterized in that located upstream component (33) includes:
With the upstream pedestal (331) of firm banking (31) Joint;And
Upstream gag lever post (333) on upstream pedestal (331),
Wherein, upstream gag lever post (333) can be on upstream pedestal (331) toward polyslip.
7. silicon chip detent mechanism (3) as claimed in claim 6, which is characterized in that the first oval plate (322) is in equipped with periphery The second oval plate (323) of ellipse, the second oval plate (323) and the power output end of driving motor (321) are sequentially connected, on Periphery retaining surface of the inside of trip gag lever post (333) always with the second oval plate (323) contacts, and upstream gag lever post (333) is driving It is selectively close to each other or far from the placed channel under the driving of dynamic component (32).
8. silicon chip detent mechanism (3) as claimed in claim 7, which is characterized in that the long axis and second of the first oval plate (322) The long axis of oval plate (323) is perpendicular.
9. silicon chip detent mechanism (3) as claimed in claim 7, which is characterized in that upstream pedestal (331) is equipped with perpendicular to institute The upstream rail plate (334) of placed channel is stated, the bottom of upstream gag lever post (333) is connected with and upstream rail plate (334) The upstream sliding block (3331) of mating is slided, upstream sliding block (3331) is equipped with link block (332).
10. silicon chip detent mechanism (3) as claimed in claim 9, which is characterized in that slided with upstream one end of link block (332) Block (3331) Joint, periphery of the other end then with the second oval plate (323) remain that face contacts, upstream rail plate (334) form an angle α with horizontal plane.
CN201721046649.2U 2017-08-21 2017-08-21 A kind of silicon chip detent mechanism Active CN207503947U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721046649.2U CN207503947U (en) 2017-08-21 2017-08-21 A kind of silicon chip detent mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721046649.2U CN207503947U (en) 2017-08-21 2017-08-21 A kind of silicon chip detent mechanism

Publications (1)

Publication Number Publication Date
CN207503947U true CN207503947U (en) 2018-06-15

Family

ID=62496243

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201721046649.2U Active CN207503947U (en) 2017-08-21 2017-08-21 A kind of silicon chip detent mechanism

Country Status (1)

Country Link
CN (1) CN207503947U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107658255A (en) * 2017-08-21 2018-02-02 罗博特科智能科技股份有限公司 A kind of silicon chip detent mechanism
CN111627853A (en) * 2020-07-30 2020-09-04 清华大学 Wafer centering device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107658255A (en) * 2017-08-21 2018-02-02 罗博特科智能科技股份有限公司 A kind of silicon chip detent mechanism
CN107658255B (en) * 2017-08-21 2023-08-25 罗博特科智能科技股份有限公司 Silicon wafer positioning mechanism
CN111627853A (en) * 2020-07-30 2020-09-04 清华大学 Wafer centering device

Similar Documents

Publication Publication Date Title
CN207503947U (en) A kind of silicon chip detent mechanism
CN101879680B (en) Cylinder cover positioning and clamping device in the process of finish-milling top surface of cylinder cover
CN106938734A (en) A kind of Portable box that electric armour clamp can be positioned
CN207116399U (en) A kind of silicon chip batch transferring device
CN207503942U (en) A kind of silicon chip puts middle device
CN103839861B (en) Repeatedly chromatography alignment methods for the thin grid of solar cell surface
CN107424949A (en) A kind of silicon chip puts middle device
EP1995778A3 (en) Method for stacking integrated circuits and resultant device
CN207293571U (en) A kind of graphite frame carrier high accuracy handling device
CN103728067B (en) Resistance strain gauge for stress analysis
CN107658255A (en) A kind of silicon chip detent mechanism
WO2002005326A3 (en) Robotic end effector provided with wafer supporting pads elastically mounted
CN207508114U (en) A kind of hinge-type interconnects component one-time-shaped mould
CN107472911A (en) A kind of graphite frame carrier high accuracy handling device
CN102501692A (en) Adsorption device for jade carving equipment
CN202233388U (en) Belt buckle with cut tobacco grinding device
CN207097795U (en) A kind of plug-in sheet machine
CN207067374U (en) A kind of voltage monitoring instrument calibrating installation
CN202155022U (en) Sliding plate with adjustable torque force
CN215609292U (en) Universal game handle with self-locking structure
CN206719800U (en) A kind of Portable box that electric armour clamp can be positioned
CN210985167U (en) HDMI core wire processing automaton
CN205396148U (en) U type pole collection vehicle
CN210194034U (en) Etching platform structure of electric etching machine
CN211607459U (en) Simple seedling cuttage tool

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant