CN207473074U - Semiconductor test machine calibrating installation - Google Patents

Semiconductor test machine calibrating installation Download PDF

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Publication number
CN207473074U
CN207473074U CN201721252434.6U CN201721252434U CN207473074U CN 207473074 U CN207473074 U CN 207473074U CN 201721252434 U CN201721252434 U CN 201721252434U CN 207473074 U CN207473074 U CN 207473074U
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China
Prior art keywords
radio frequency
radio
fixed plate
rotation
test machine
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Active
Application number
CN201721252434.6U
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Chinese (zh)
Inventor
王浩
王刚
程尧
张伟
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Shanghai Semiconductor Semiconductor Co Ltd
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Shanghai Semiconductor Semiconductor Co Ltd
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Priority to CN201721252434.6U priority Critical patent/CN207473074U/en
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Abstract

The utility model discloses a kind of semiconductor test machine calibrating installation, the first segment radio frequency line including power probe, on power probe, the second segment radio frequency line in tester channels and is used to support fixing device with fixed RF line;The fixing device includes firm banking and rotation fixed plate, and a hinged seat is equipped on the firm banking, and one end of the rotation fixed plate is mounted on by fixed pin on hinged seat, and rotation fixed plate can surround hinged seat rotation and fix.Power probe is mounted on by hook on the side wall of test machine in the utility model, radio frequency line is provided with two sections, one fixing device for being used for fixed RF line of centre setting, radio frequency line is enable to be completely in free vacant state, not by external force other foreign objects contact interference, the calibration result for making power probe is more accurate, and the also more convenient dismounting of power probe and radio frequency line.

Description

Semiconductor test machine calibrating installation
Technical field
The utility model belongs to semiconductor detection, and in particular to a kind of semiconductor test machine calibrating installation.
Background technology
There are one calibration steps when engineer debugs semiconductor test machine program, for measuring the damage of power in the line Consumption, being then compensated test to the loss measured by program can smoothly complete.It, will in the loss of test access Power probe is connected by radio frequency line with the access end of this, (this is the situation for testing wherein one access) as shown in Figure 1 After radio-frequency maser is connected with power probe at this time, radio frequency line part will be in free state, when artificially accidentally apply external force or It contacts and may have an impact to test result with other foreign objects, we need to find a method being fixed thus;And Again because radio frequency line is not harder pliable, free state is at, the installation of power probe is also a problem;Calibration step It is rapid only to be used in research and development and debugging, it will not be used in the production after the completion of debugging, therefore we need one calibrating When use, and the calibration module of its space can be reduced to the greatest extent in process of production.
Utility model content
The purpose of this utility model is in view of the deficienciess of the prior art, providing a kind of semiconductor test machine calibration cartridge It puts.
Technical solution:Technical solution is used by the utility model solves the problems, such as:A kind of semiconductor test machine calibration cartridge It puts, the first segment radio frequency line including power probe, on power probe, the second segment radio frequency in tester channels Line and it is used to support fixing device with fixed RF line;The fixing device includes firm banking and rotation fixed plate, One hinged seat is installed, one end of the rotation fixed plate is mounted on hinged seat by fixed pin on the firm banking On, rotation fixed plate can surround hinged seat rotation and fix;One end of the rotation fixed plate is also equipped with radio-frequency maser installing plate, Radio-frequency joint is installed, first radio frequency line and the second radio frequency line are connected respectively on the radio-frequency maser installing plate On radio-frequency joint.
Preferably, the end set of the rotation fixed plate has radio frequency hole, the surrounding and radio-frequency maser in the radio frequency hole Corresponding mounting hole, fixing piece and matched installation of the radio-frequency maser installing plate by setting are provided on installing plate Hole is mounted on the end of rotation fixed plate, and the radio-frequency joint of side is made to pass through radio frequency hole, so that two radio-frequency joints point The both sides of fixed plate Wei Yu not rotated.
Preferably, there are two the radio frequency hole of the described fixed front edge of board of rotation sets altogether, it is respectively mounted on two radio frequency holes There is radio-frequency maser installing plate.
Preferably, being additionally provided with mounting hole on the firm banking, fixing piece is installed in mounting hole, passes through fixation Part and mounting hole fix firm banking.
Preferably, the both sides of the hinged seat are both provided with threaded hole, the direction of the threaded hole is laterally set, and is led to The hinged end of fixed plate is rotated, is equipped in the threaded hole for the ripple pearl screw of fixed rotation fixed plate;Ripple pearl screw Spring and nail pearl are inside provided with, rotation fixed plate can be fixed by tightening inward, and rotation can be consolidated outward by loosening Fixed board restores rotation.
Preferably, hook is additionally provided on the power probe.
Advantageous effect:The utility model has the advantages that:
(1) power probe is mounted on by hook on the side wall of test machine in the utility model, radio frequency line is provided with two Section, centre setting one be used for fixed RF line fixing device, radio frequency line is enable to be completely in free vacant state, not by The contact interference of external force other foreign objects, the calibration result for making power probe is more accurate, and power probe and radio frequency line are also more Add easy to disassemble;
(2) in the utility model the fixing device of radio frequency line using hinged seat and rotation fixed plate come fixed RF line, make Used time rotation fixed plate is placed vertically or oblique placement, then by ripple pearl screw fixed position, the first radio frequency line and second is penetrated Frequency line is respectively connected on the radio-frequency joint of both sides, is when not in use removed two radio frequency lines, rotates fixed plate level It places, overall structure is quick detachable, and the installation and removal of radio frequency line are very convenient, and is not take up larger space.
Description of the drawings
Fig. 1 uses figure for existing semiconductor test machine calibrating installation;
Fig. 2 is the use figure of the utility model;
Fig. 3 is fixture structure exploded view in the utility model;
Fig. 4 is fixing device assembling figure in the utility model.
Specific embodiment
In the following with reference to the drawings and specific embodiments, the utility model is furtherd elucidate, the present embodiment is with the utility model Implemented under premised on technical solution, it should be understood that these embodiments are merely to illustrate the utility model rather than limit this reality With novel range.
As shown in Figure 2, Figure 3 and Figure 4, a kind of semiconductor test machine calibrating installation, including power probe 1, mounted on power It first segment radio frequency line 2 on probe 1, the second segment radio frequency line 3 in tester channels and is used to support and fixes and penetrate The fixing device of frequency line;The fixing device includes firm banking 4 and rotation fixed plate 5, is installed on the firm banking 4 There is a hinged seat 6, one end of the rotation fixed plate 5 is mounted on by fixed pin 7 on hinged seat 6, and rotation fixed plate 5 can enclose It rotates and fixes around hinged seat 6;One end of the rotation fixed plate 5 is also equipped with radio-frequency maser installing plate 8, radio-frequency maser peace Radio-frequency joint 9 is installed, first radio frequency line 2 and the second radio frequency line 3 are connected respectively radio-frequency joint 9 in loading board 8 On.
The end set of the rotation fixed plate 5 has radio frequency hole 10, surrounding and the radio-frequency maser installation in the radio frequency hole 10 Corresponding mounting hole 11, fixing piece 12 and matched peace of the radio-frequency maser installing plate 8 by setting are provided on plate 8 It fills hole 11 and is mounted on the end of rotation fixed plate 5, and the radio-frequency joint 9 of side is made to pass through radio frequency hole 10, so that two are penetrated Frequency connector is located at the both sides of rotation fixed plate 5 respectively.
The radio frequency hole 10 of 5 front end of rotation fixed plate there are two settings, is mounted on penetrating on two radio frequency holes 10 altogether Frequency head installing plate 8;Mounting hole 11 is additionally provided on the firm banking 4, fixing piece 12 is installed in mounting hole 11, by solid Determine part 12 and mounting hole 11 fixes firm banking 4.
The both sides of the hinged seat 6 are both provided with threaded hole 13, and the direction of the threaded hole 13 is laterally set, and leads to rotation The hinged end of fixed plate 5 is equipped in the threaded hole 13 for the ripple pearl screw 14 of fixed rotation fixed plate 5;Ripple pearl spiral shell Spring and nail pearl are provided in silk 14, rotation fixed plate 5 can be fixed by tightening inward, and rotation can be made outward by loosening Turn fixed plate 5 and restore rotation;Hook 15 is additionally provided on the power probe 1.
Power probe is mounted on by hook on the side wall of test machine in the utility model, radio frequency line is provided with two sections, One fixing device for being used for fixed RF line of centre setting, enables radio frequency line to be completely in free vacant state, not by outer The contact interference of power other foreign objects, the calibration result for making power probe is more accurate, and power probe and radio frequency line are also more It is easy to disassemble;
In the utility model the fixing device of radio frequency line using hinged seat and rotation fixed plate come fixed RF line, during use Rotate fixed plate placement or oblique placement, then pass through ripple pearl screw fixed position, the first radio frequency line and the second radio frequency line vertically It being respectively connected on the radio-frequency joint of both sides, when not in use removes two radio frequency lines, rotation fixed plate is horizontal positioned, Overall structure is quick detachable, and the installation and removal of radio frequency line are very convenient, and is not take up larger space.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art For art personnel, under the premise of the utility model principle is not departed from, several improvements and modifications can also be made, these improve and Retouching also should be regarded as the scope of protection of the utility model.

Claims (6)

1. a kind of semiconductor test machine calibrating installation, it is characterised in that:Including power probe (1), on power probe (1) The first radio frequency line (2), the second radio frequency line (3) in tester channels and being used to support consolidates with fixed RF line Determine device;The fixing device includes firm banking (4) and rotation fixed plate (5), and the firm banking is equipped on (4) One hinged seat (6), by fixed pin (7) on hinged seat (6), rotation is fixed for one end of the rotation fixed plate (5) Plate (5) can surround hinged seat (6) rotation and fix;One end of the rotation fixed plate (5) is also equipped with radio-frequency maser installing plate (8), radio-frequency joint (9), first radio frequency line (2) and the second radio frequency line are installed on the radio-frequency maser installing plate (8) (3) it is connected respectively on radio-frequency joint (9).
2. a kind of semiconductor test machine calibrating installation according to claim 1, it is characterised in that:The rotation fixed plate (5) end set has radio frequency hole (10), is provided in the surrounding in the radio frequency hole (10) and radio-frequency maser installing plate (8) corresponding Mounting hole (11), the radio-frequency maser installing plate (8) are pacified by the fixing piece (12) and matched mounting hole (11) of setting Mounted in the end of rotation fixed plate (5).
3. a kind of semiconductor test machine calibrating installation according to claim 2, it is characterised in that:The rotation fixed plate (5) there are two the radio frequency hole (10) of front end is set altogether, radio-frequency maser installing plate (8) is mounted on two radio frequency holes (10).
4. a kind of semiconductor test machine calibrating installation according to claim 1, it is characterised in that:The firm banking (4) mounting hole (11) is additionally provided on, fixing piece (12) is installed in mounting hole (11), passes through fixing piece (12) and mounting hole (11) it is firm banking (4) is fixed.
5. a kind of semiconductor test machine calibrating installation according to claim 1, it is characterised in that:The hinged seat (6) Both sides be both provided with threaded hole (13), the direction of the threaded hole (13) is laterally set, and leads to being hinged for rotation fixed plate (5) End, the threaded hole (13) is interior to be equipped with for the ripple pearl screw (14) of fixed rotation fixed plate (5).
6. a kind of semiconductor test machine calibrating installation according to claim 1, it is characterised in that:The power probe (1) hook (15) is additionally provided on.
CN201721252434.6U 2017-09-27 2017-09-27 Semiconductor test machine calibrating installation Active CN207473074U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721252434.6U CN207473074U (en) 2017-09-27 2017-09-27 Semiconductor test machine calibrating installation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721252434.6U CN207473074U (en) 2017-09-27 2017-09-27 Semiconductor test machine calibrating installation

Publications (1)

Publication Number Publication Date
CN207473074U true CN207473074U (en) 2018-06-08

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Application Number Title Priority Date Filing Date
CN201721252434.6U Active CN207473074U (en) 2017-09-27 2017-09-27 Semiconductor test machine calibrating installation

Country Status (1)

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CN (1) CN207473074U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107561471A (en) * 2017-09-27 2018-01-09 上海旻艾信息科技有限公司 A kind of semiconductor test machine calibrating installation
CN111781431A (en) * 2020-07-13 2020-10-16 芝纶自动化科技(上海)有限公司 Testing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107561471A (en) * 2017-09-27 2018-01-09 上海旻艾信息科技有限公司 A kind of semiconductor test machine calibrating installation
CN111781431A (en) * 2020-07-13 2020-10-16 芝纶自动化科技(上海)有限公司 Testing device

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