CN207456474U - Cantilever piezoelectric film small-signal sensor - Google Patents
Cantilever piezoelectric film small-signal sensor Download PDFInfo
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Abstract
Description
技术领域technical field
本实用新型涉及微动传感器结构设计技术领域，具体地说，是一种悬臂梁式压电薄膜微弱信号传感器。The utility model relates to the technical field of micro-motion sensor structure design, in particular to a cantilever beam type piezoelectric film weak signal sensor.
背景技术Background technique
悬臂梁式压电薄膜传感器应用原理为：传感器的上盖与下盖的相对运行，使上盖的支点压迫悬空的横梁支架一端，使横梁支架形成向下弯曲，由于横梁支架具有一定的硬度，向下弯曲的形变均匀，带动紧贴于横梁支架上的压电薄膜均匀形变，从而实现传感器对于生理参数的采集。The application principle of the cantilever beam piezoelectric film sensor is as follows: the relative operation of the upper cover and the lower cover of the sensor makes the fulcrum of the upper cover press one end of the suspended beam bracket to make the beam bracket bend downward. Since the beam bracket has a certain hardness, The downward bending deformation is uniform, and the piezoelectric film close to the beam bracket is uniformly deformed, thereby realizing the collection of physiological parameters by the sensor.
现有传感器结构采用桥梁式的结构，即横梁支架的两端各固定一个支点，当横梁支架弯曲时，两侧固定只有中间部分产生形变，可能存在压电薄膜形变不规则的问题，造成信号失真，影响数据采集的精准度。The existing sensor structure adopts a bridge-type structure, that is, a fulcrum is fixed at both ends of the beam bracket. When the beam bracket is bent, only the middle part of the two sides is fixed and deformed. There may be irregular deformation of the piezoelectric film, resulting in signal distortion. , affecting the accuracy of data collection.
压电薄膜具有柔软易形变的特点，使用过程中很容易收到外界振动的干扰，而现有技术中对于如何避免或减少外界振动干扰的解决方案并没有涉及。Piezoelectric films are soft and easy to deform, and are easily disturbed by external vibrations during use. However, there is no solution for how to avoid or reduce external vibration interference in the prior art.
实用新型内容Utility model content
本实用新型的目的是针对现有技术中的不足，提供一种悬臂梁式压电薄膜微弱信号传感器，能够有效屏蔽外界的振动干扰及其它电磁场干扰，同时保障压电薄膜形变均匀，提高传感器对于生理参数的精度。The purpose of this utility model is to provide a cantilever beam type piezoelectric film weak signal sensor for the deficiencies in the prior art, which can effectively shield external vibration interference and other electromagnetic field interference, and at the same time ensure uniform deformation of the piezoelectric film and improve the sensor’s Accuracy of physiological parameters.
为实现上述目的，本实用新型采取的技术方案是：一种悬臂梁式压电薄膜微弱信号传感器，包括外壳、横梁支架、压电薄膜和信号处理电路，所述外壳是由上盖和下盖组成的密封空间，所述横梁支架设于上盖和下盖之间，所述横梁支架一端通过一个固定支点与所述下盖固定连接，另一端为悬空状态，所述上盖上设有触点，触点与横梁支架的悬空端相接触，用于压迫横梁支架的悬空端，所述压电薄膜紧贴横梁支架。In order to achieve the above object, the technical solution adopted by the utility model is: a cantilever beam type piezoelectric film weak signal sensor, comprising a shell, a beam bracket, a piezoelectric film and a signal processing circuit, the shell is composed of an upper cover and a lower cover The sealed space composed of the beam bracket is set between the upper cover and the lower cover, one end of the beam bracket is fixedly connected with the lower cover through a fixed fulcrum, and the other end is in a suspended state, and the upper cover is provided with a contact point, the contact is in contact with the suspended end of the beam bracket, and is used to press the suspended end of the beam bracket, and the piezoelectric film is close to the beam bracket.
进一步地，所述上盖和下盖之间构成一体式结构，使外壳内部形成密封的箱式空间。或者所述上盖和下盖之间通过硅胶垫粘合，使外壳中间形成内部密封空间。Further, an integral structure is formed between the upper cover and the lower cover, so that a sealed box-like space is formed inside the casing. Alternatively, the upper cover and the lower cover are glued together by a silicone pad, so that an inner sealed space is formed in the middle of the shell.
进一步地，上述形成密封空间的外壳实现电磁屏蔽作用，可以采用两种设计方案：第一，外壳采用具有电磁屏蔽作用的材料制成；第二，外壳内部表面设电磁屏蔽层，电磁屏蔽层由具备电磁屏蔽作用的材料制成。Further, the casing forming the above-mentioned sealed space realizes the electromagnetic shielding effect, and two design schemes can be adopted: first, the casing is made of a material with electromagnetic shielding effect; second, an electromagnetic shielding layer is provided on the inner surface of the casing, and the electromagnetic shielding layer is made of Made of materials with electromagnetic shielding effect.
进一步地，所述横梁支架由硬质材料制成。硬质材料的横梁支架弯曲形变均匀，可以带动紧贴其上的压电薄膜产生均匀的形变。Further, the beam bracket is made of hard material. The beam support made of hard material has uniform bending deformation, which can drive the piezoelectric film close to it to generate uniform deformation.
进一步地，所述信号处理电路集成于PCB板上，该PCB板固设于下盖上。Further, the signal processing circuit is integrated on the PCB, and the PCB is fixed on the lower cover.
进一步地，所述上盖上触点至少设有一个，根据实际应用情况可以采用矩阵式排列在上盖上设置多个触点。Further, at least one contact is provided on the upper cover, and a plurality of contacts can be provided on the upper cover in a matrix arrangement according to actual application conditions.
进一步地，所述上盖和下盖之间粘合处设有硅胶，用于封闭上盖和下盖之间的缝隙同时配合上盖和下盖之间的相对运动。Further, the bonding place between the upper cover and the lower cover is provided with silica gel, which is used to close the gap between the upper cover and the lower cover and cooperate with the relative movement between the upper cover and the lower cover.
进一步地，所述触点为柱体结构或椎体结构。Further, the contact is a column structure or a pyramid structure.
本实用新型优点在于：The utility model has the advantages that:
1、本实用新型通过在上盖上设计触点压迫半悬空的横梁支架与压电薄膜，使压电薄膜只受到上盖一侧的振动压力，可大大减少外界其他振动信号对压电薄膜的干扰。1. The utility model compresses the semi-suspended beam bracket and the piezoelectric film by designing contacts on the upper cover, so that the piezoelectric film is only subjected to the vibration pressure on one side of the upper cover, which can greatly reduce the impact of other external vibration signals on the piezoelectric film. interference.
2、本实用新型通过采用上下盖之间粘合形成封闭外壳，增强传感器的抗干扰性能。2. The utility model enhances the anti-interference performance of the sensor by bonding the upper and lower covers to form a closed shell.
附图说明Description of drawings
图1为第一实施例中本实用新型传感器内部结构示意图；Fig. 1 is a schematic diagram of the internal structure of the utility model sensor in the first embodiment;
图2为第二实施例中本实用新型传感器一体式外壳结构示意图；Fig. 2 is a schematic diagram of the structure of the integrated sensor of the utility model in the second embodiment;
图3为第三实施例中本实用新型传感器外壳上下盖粘合结构示意图；Fig. 3 is a schematic diagram of the bonding structure of the upper and lower covers of the sensor housing of the present invention in the third embodiment;
图4为第四实施例中本实用新型传感器外壳上下盖粘合结构示意图。Fig. 4 is a schematic diagram of the bonding structure of the upper and lower covers of the sensor housing of the present invention in the fourth embodiment.
附图中涉及的附图标记和组成部分如下所示：The reference signs and components involved in the accompanying drawings are as follows:
1.外壳上盖，2.外壳下盖，3.横梁支架， 4.压电薄膜，5.固定支点，1. Shell upper cover, 2. Shell lower cover, 3. Beam bracket, 4. Piezoelectric film, 5. Fixed fulcrum,
6.触点，7.PCB板，8.外壳上下盖粘合处。6. Contacts, 7. PCB board, 8. Bonding of the upper and lower covers of the shell.
具体实施方式Detailed ways
下面结合附图对本实用新型的具体结构进行描述，如附图1-4所示，悬臂梁式压电薄膜微弱信号传感器结构包括：外壳、横梁支架、压电薄膜和信号处理电路，外壳由上盖和下盖组成，所述横梁支架设于上盖和下盖之间，下盖上设有用于固定横梁支架的固定支点，上盖上设有与横梁支架相接的触点，信号处理电路集成于PCB板上，PCB板固设于外壳下盖上。The specific structure of the utility model is described below in conjunction with the accompanying drawings. As shown in the accompanying drawings 1-4, the structure of the cantilever beam type piezoelectric film weak signal sensor includes: a shell, a beam bracket, a piezoelectric film and a signal processing circuit. The shell consists of the upper Composed of a cover and a lower cover, the beam bracket is arranged between the upper cover and the lower cover, the lower cover is provided with a fixed fulcrum for fixing the beam bracket, the upper cover is provided with contacts connected with the beam bracket, and the signal processing circuit Integrated on the PCB board, and the PCB board is fixed on the lower cover of the shell.
如附图1为第一实施例中的，本实用新型的悬臂梁式压电薄膜微弱信号传感器内部结构示意图。该实施例中，架设于外壳上盖1和外壳下盖2之间的横梁支架3一端通过一个固定支点5与所述外壳下盖2固定连接，另一端为悬空状态。横梁支架3悬空端与外壳上盖1上的触点6相接触，触点6用于压迫横梁支架3的悬空端，使横梁支架3向下弯曲形变。横梁支架3由酚醛树脂等硬质材料制成，横梁支架3与有压电薄膜4相互贴合，压电薄膜4可以设于横梁支架3的朝向外壳上盖1的一侧也可以设于朝向外壳下盖2的一侧。硬质材料的横梁支架3受触点6压迫向下弯曲，由于其硬质材质特性使得形变均匀，从而带动紧贴其上的压电薄膜4产生均匀的形变，有利于提高传感器的精准度。用于固定横梁支架3固定端的固定支点5与PCB板7都固定在外壳下盖2上，两者可以一体式设计也可以分别固定在外壳下盖2的不同位置。传感器的信号处理电路集成于PCB板7上，PCB板7不与横梁支架3的悬空端接触，从而避免或减少外界振动或电磁场产生干扰。Figure 1 is a schematic diagram of the internal structure of the cantilever beam piezoelectric film weak signal sensor of the present invention in the first embodiment. In this embodiment, one end of the beam bracket 3 erected between the upper casing cover 1 and the lower casing cover 2 is fixedly connected with the lower casing cover 2 through a fixed fulcrum 5 , and the other end is suspended. The suspended end of the crossbeam support 3 is in contact with the contact 6 on the upper cover 1 of the housing, and the contact 6 is used to press the suspended end of the crossbeam support 3 to bend and deform the crossbeam support 3 downward. The beam bracket 3 is made of hard materials such as phenolic resin, and the beam bracket 3 and the piezoelectric film 4 are attached to each other. The piezoelectric film 4 can be arranged on the side of the beam bracket 3 facing the upper cover 1 of the housing or on the side facing One side of the shell lower cover 2. The beam bracket 3 made of hard material bends downward under the pressure of the contact 6, and due to its hard material characteristics, the deformation is uniform, thereby driving the piezoelectric film 4 close to it to produce uniform deformation, which is beneficial to improving the accuracy of the sensor. Both the fixed fulcrum 5 and the PCB board 7 used to fix the fixed end of the crossbeam bracket 3 are fixed on the shell lower cover 2, and both can be designed in one piece or fixed at different positions of the shell lower cover 2 respectively. The signal processing circuit of the sensor is integrated on the PCB 7, and the PCB 7 is not in contact with the suspended end of the beam bracket 3, thereby avoiding or reducing interference from external vibration or electromagnetic field.
外壳上盖1上的触点6在结构上与横梁支架3紧密相触，以保证横梁支架3对振动信号的敏感性，通常触点6为柱体结构，柱体底面完全贴合横梁支架3表面，优选地，触点6设计为椎体结构，椎体的顶点紧触横梁支架3表面，也进一步增强传感器的灵敏性。本说明书附图中展示了仅设有一个触点6的情形，进一步地，外壳上盖1上的触点6可以有多个，甚至可以阵列排布于外壳上盖1上。The contact 6 on the upper cover 1 of the shell is in close contact with the beam bracket 3 in structure to ensure the sensitivity of the beam bracket 3 to vibration signals. Usually, the contact 6 is a column structure, and the bottom surface of the column is completely attached to the beam bracket 3 On the surface, preferably, the contact point 6 is designed as a vertebral body structure, and the apex of the vertebral body closely touches the surface of the beam bracket 3, which further enhances the sensitivity of the sensor. The accompanying drawings of this specification show the situation that only one contact 6 is provided. Further, there may be multiple contacts 6 on the upper cover 1 of the housing, or even arranged in an array on the upper cover 1 of the housing.
由于压电薄膜具有柔软易产生形变的特点，如第一实施例的传感器结构在实际使用中其抗干扰性能不能达到产品质量要求，因此在本实用新型的第二实施例中，如附图2所示，外壳结构采用外壳上盖1和外壳下盖2之间构成一体式结构，使外壳内部形成密封的箱式空间。这样的外壳结构具有屏蔽工频干扰的效果，可以避免传感器工作过程中受到外界振动或外部电磁场的干扰。Since the piezoelectric film is soft and easy to deform, the anti-interference performance of the sensor structure in the first embodiment cannot meet the product quality requirements in actual use, so in the second embodiment of the present invention, as shown in Figure 2 As shown, the shell structure adopts an integrated structure formed between the upper shell cover 1 and the lower shell cover 2, so that a sealed box-like space is formed inside the shell. Such a housing structure has the effect of shielding power frequency interference, and can prevent the sensor from being interfered by external vibration or external electromagnetic field during the working process.
进一步地，为保证外壳的密封抗振效果同时又能使外壳上盖1和外壳下盖2之间的相对运动不受阻，外壳上盖1和外壳下盖2之间设为互相粘合的结构，两者粘合处采用硅胶进行连接。外壳上盖1和外壳下盖2分别为相对的U型或半球形，两者相盖合构成外壳的具有密封内部空间的结构。如附图3第三实施例中本实用新型的传感器外壳上下盖粘合结构示意图所示，外壳上下盖粘合处8外壳上盖1和外壳下盖2之间紧密贴合，中间采用硅胶垫将两者粘合。硅胶具有良好的抗振减振效果，为了进一步提高传感器的抗振性，如附图4第四实施例中本实用新型的传感器外壳上下盖粘合结构示意图所示，外壳上下盖粘合处8外壳上盖1和外壳下盖2之间用硅胶环完全隔开，外壳上盖1和外壳下盖2之间不会相互接触完全通过硅胶环进行密封，可以更好的改善传感器的屏蔽干扰的效果。Further, in order to ensure the sealing and anti-vibration effect of the housing and at the same time make the relative movement between the upper housing cover 1 and the lower housing cover 2 unimpeded, the upper housing cover 1 and the lower housing cover 2 are set as a mutually bonded structure , the joints of the two are connected by silica gel. The casing upper cover 1 and the casing lower cover 2 are respectively U-shaped or hemispherical, and the two are combined to form a structure with a sealed inner space of the casing. As shown in the schematic diagram of the bonding structure of the upper and lower covers of the sensor housing of the present invention in the third embodiment of the accompanying drawing 3, the joint between the upper and lower covers of the housing 8 is tightly bonded between the upper cover 1 of the housing and the lower cover 2 of the housing, and a silicone pad is used in the middle Glue the two together. Silica gel has a good anti-vibration and vibration-reducing effect. In order to further improve the vibration resistance of the sensor, as shown in the schematic diagram of the bonding structure of the upper and lower covers of the sensor shell of the utility model in the fourth embodiment of the accompanying drawing 4, the bonding position of the upper and lower covers of the shell is 8 The upper cover 1 of the housing and the lower cover 2 of the housing are completely separated by a silicone ring, and the upper cover 1 and the lower cover 2 of the housing will not contact each other and are completely sealed by the silicone ring, which can better improve the shielding interference of the sensor Effect.
在实际运用中，传感器的屏蔽措施对于传感器质量和使用效果具有非常重要的影响。尤其是对于微弱信号传感器，好的屏蔽措施可以提高传感器信号的准确度。本实用新型的传感器外壳采用封闭式空间可以实现屏蔽外界振动干扰的效果，为了进一步屏蔽电磁干扰，消除电路中存在的工频电磁场的干扰，本实用新型的外壳可以用电磁屏蔽材料制成，或者在外壳内部表面设有电磁屏蔽层，电磁屏蔽层由具备电磁屏蔽作用的材料制成。本实用新型的外壳或者电池屏蔽层的制备，优选地采用下述材料中的一种或者几种混合：In practical application, the shielding measure of the sensor has a very important influence on the quality and use effect of the sensor. Especially for weak signal sensors, good shielding measures can improve the accuracy of sensor signals. The sensor shell of the utility model adopts a closed space to realize the effect of shielding external vibration interference. In order to further shield electromagnetic interference and eliminate the interference of the power frequency electromagnetic field existing in the circuit, the shell of the utility model can be made of electromagnetic shielding material, or An electromagnetic shielding layer is provided on the inner surface of the shell, and the electromagnetic shielding layer is made of materials with electromagnetic shielding effect. The preparation of the shell or battery shielding layer of the present utility model preferably adopts one or more mixtures of the following materials:
(1)铁磁性材料，如铁等导磁导电金属；(1) Ferromagnetic materials, such as iron and other magnetic and conductive metals;
(2)非磁性金属材料，如经过表面电镀导磁材料处理过的铝等，电镀导磁材料优选为电镀镍等；(2) Non-magnetic metal materials, such as aluminum, etc., which have been treated with surface electroplating magnetically permeable materials, and the electroplated magnetically permeable materials are preferably electroplated nickel, etc.;
(3)参杂导电导磁材料的非金属材料；(3) Non-metallic materials mixed with conductive and magnetic materials;
(4)表面经过电镀或涂覆导电导磁材料的普通非金属材料(如ABS塑料)；(4) Ordinary non-metallic materials (such as ABS plastic) whose surface is electroplated or coated with conductive and magnetic materials;
(5)电池屏蔽层选用铜箔，贴附于外壳内部表面。(5) The battery shielding layer is made of copper foil, which is attached to the inner surface of the shell.
以上所述仅是本实用新型的优选实施方式，应当指出，对于本技术领域的普通技术人员，在不脱离本实用新型原理的前提下，还可以做出若干改进和补充，这些改进和补充也应视为本实用新型的保护范围。The above is only a preferred embodiment of the utility model, it should be pointed out that for those of ordinary skill in the art, without departing from the principle of the utility model, some improvements and supplements can also be made, and these improvements and supplements are also It should be regarded as the protection scope of the present utility model.
Claims (10)
Priority Applications (1)
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| CN109770884A (en) * | 2019-01-31 | 2019-05-21 | 传世未来（北京）信息科技有限公司 | Vibration sensor and fetal heart rate monitoring device for biological vibration detection |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109770884A (en) * | 2019-01-31 | 2019-05-21 | 传世未来（北京）信息科技有限公司 | Vibration sensor and fetal heart rate monitoring device for biological vibration detection |
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