CN207456474U - Cantilever piezoelectric film small-signal sensor - Google Patents

Cantilever piezoelectric film small-signal sensor Download PDF

Info

Publication number
CN207456474U
CN207456474U CN201721563410.2U CN201721563410U CN207456474U CN 207456474 U CN207456474 U CN 207456474U CN 201721563410 U CN201721563410 U CN 201721563410U CN 207456474 U CN207456474 U CN 207456474U
Authority
CN
China
Prior art keywords
overarm brace
piezoelectric film
signal sensor
lower cover
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201721563410.2U
Other languages
Chinese (zh)
Inventor
单华锋
曹辉
陈学刚
於群
王家冬
曹凯敏
郁源
王哲琦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qi Sheng Polytron Technologies Inc
Yangtze Delta Region Institute of Tsinghua University Zhejiang
Original Assignee
Qi Sheng Polytron Technologies Inc
Yangtze Delta Region Institute of Tsinghua University Zhejiang
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qi Sheng Polytron Technologies Inc, Yangtze Delta Region Institute of Tsinghua University Zhejiang filed Critical Qi Sheng Polytron Technologies Inc
Priority to CN201721563410.2U priority Critical patent/CN207456474U/en
Application granted granted Critical
Publication of CN207456474U publication Critical patent/CN207456474U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

The utility model is related to a kind of cantilever piezoelectric film small-signal sensors, including shell, overarm brace, piezoelectric membrane and signal processing circuit, the sealing space that shell is made of upper cover and lower cover, overarm brace is arranged between upper cover and lower cover, overarm brace one end is fixedly connected by a fixed pivot with the lower cover, the other end is vacant state, upper lid is equipped with a contact, the contact is in contact with the free end of overarm brace, for oppressing the free end of overarm brace, piezoelectric membrane is close to one side of the overarm brace towards upper cover.Its advantage is shown as:Closure is formed using bonding between upper and lower covers, half hanging overarm brace and piezoelectric membrane is oppressed by designing a contact on upper lid, piezoelectric membrane is made only to be subject to the vibration pressure of upper cover one side, interference of other the extraneous vibration signals to piezoelectric membrane can be greatly reduced.

Description

Cantilever piezoelectric film small-signal sensor
Technical field
The utility model is related to jogging sensor structure-design technique fields, are a kind of cantilever piezoelectrics specifically Film small-signal sensor.
Background technology
Cantilever piezoelectric thin film sensor application principle is:The upper cover of sensor and the relative motion of lower cover, make upper cover Fulcrum oppress hanging overarm brace one end, be bent downwardly overarm brace formation, due to overarm brace have it is certain hard Degree, reclinate deformation is uniform, the piezoelectric membrane homogeneous deformation being close on overarm brace is driven, so as to fulfill sensor pair In the acquisition of physiological parameter.
Existing sensor structure uses the structure of bridge type, i.e. the both ends of overarm brace are each to fix a fulcrum, works as crossbeam During bracket bent, both sides, which are fixed, only has center section to generate deformation, it is understood that there may be the irregular problem of piezoelectric membrane deformation causes Distorted signals influences the precision of data acquisition.
Piezoelectric membrane has the characteristics that soft easy deformation, and the interference of extraneous vibration is easily received during use, and shows Have in technology and do not related to for how to avoid or reduce the solution of extraneous vibration interference.
Utility model content
The purpose of this utility model is for deficiency of the prior art, provides a kind of faint letter of cantilever piezoelectric film Number sensor can effectively shield extraneous vibration interference and other interference of electromagnetic field, while ensure that piezoelectric membrane deformation is uniform, Improve precision of the sensor for physiological parameter.
To achieve the above object, the technical scheme adopted by the utility model is that:A kind of faint letter of cantilever piezoelectric film Number sensor, including shell, overarm brace, piezoelectric membrane and signal processing circuit, the shell is made of upper cover and lower cover Sealing space, the overarm brace be arranged between upper cover and lower cover, described overarm brace one end by a fixed pivot with The lower cover is fixedly connected, and the other end is vacant state, and the upper lid is equipped with contact, contact and the free end phase of overarm brace Contact, for oppressing the free end of overarm brace, the piezoelectric membrane is close to overarm brace.
Further, formula structure is integrally formed between the upper cover and lower cover, enclosure is made to form the box sky of sealing Between.Or bonded between the upper cover and lower cover by silicagel pad, make to form interior sealed space among shell.
Further, the shell of above-mentioned formation sealing space realizes electromagnetic shielding action, and two kinds of designing schemes may be employed: First, shell uses the material with electromagnetic shielding action to be made;Second, housing internal surface sets electro-magnetic screen layer, electromagnetic screen Layer is covered to be made of the material for possessing electromagnetic shielding action.
Further, the overarm brace is made of hard material.The overarm brace Bending Deformation of hard material is uniform, can The piezoelectric membrane being close to thereon to be driven to generate uniform deformation.
Further, the signal processing circuit is integrated on pcb board, which is fixedly arranged on lower lid.
Further, matrix form row may be employed according to practical situations at least provided with one in the upper cover upper contact It is listed on lid and multiple contacts is set.
Further, bonding place is equipped with silica gel between the upper cover and lower cover, for the seam between closed above and lower cover Gap coordinates the relative motion between upper cover and lower cover simultaneously.
Further, the contact is column structure or vertebral body structure.
The utility model advantage is:
1st, the utility model oppresses half hanging overarm brace and piezoelectric membrane by designing contact on upper lid, makes piezoelectricity Film is only subject to the vibration pressure of upper cover one side, can greatly reduce interference of other the extraneous vibration signals to piezoelectric membrane.
2nd, the utility model forms closure by using bonding between upper and lower covers, enhances the anti-interference of sensor Energy.
Description of the drawings
Fig. 1 is the utility model sensor internal structure diagram in first embodiment;
Fig. 2 is the utility model sensor integrated casing structure diagram in second embodiment;
Fig. 3 is the utility model sensor outer housing upper and lower covers glued construction schematic diagram in 3rd embodiment;
Fig. 4 is the utility model sensor outer housing upper and lower covers glued construction schematic diagram in fourth embodiment.
Reference numeral and component involved in attached drawing is as follows:
1. outer casing upper cover, 2. shell lower covers, 3. overarm braces, 4. piezoelectric membranes, 5. fixed pivots,
6. contact, 7.PCB plates, 8. shell upper and lower covers bonding places.
Specific embodiment
The concrete structure of the utility model is described below in conjunction with the accompanying drawings, as shown in attached drawing 1-4, cantilever piezoelectric Film small-signal sensor structure includes:Shell, overarm brace, piezoelectric membrane and signal processing circuit, shell by upper cover and Lower cover forms, and the overarm brace is arranged between upper cover and lower cover, and lower lid is equipped with the fixed pivot for fixed cross beam stent, Upper lid is equipped with the contact to connect with overarm brace, and signal processing circuit is integrated on pcb board, and pcb board is fixedly arranged on shell lower cover On.
If attached drawing 1 is in first embodiment, in the cantilever piezoelectric film small-signal sensor of the utility model Portion's structure diagram.In the embodiment, 3 one end of overarm brace between outer casing upper cover 1 and shell lower cover 2 is set up in by one Fixed pivot 5 is fixedly connected with the shell lower cover 2, and the other end is vacant state.3 free end of overarm brace and outer casing upper cover 1 On contact 6 be in contact, contact 6 is used to oppress the free end of overarm brace 3, and overarm brace 3 is made to be bent downwardly deformation.Crossbeam branch Frame 3 is made of hard materials such as phenolic resin, and with there is piezoelectric membrane 4 to be bonded to each other, piezoelectric membrane 4 can be arranged on overarm brace 3 The one side towards outer casing upper cover 1 of overarm brace 3 can also be arranged on towards the one side of shell lower cover 2.The crossbeam branch of hard material Frame 3 is bent downwardly by the compressing of contact 6, since its hard material characteristic so that deformation is uniform, so as to drive the piezoelectricity being close to thereon Film 4 generates uniform deformation, is conducive to improve the precision of sensor.For the fixed branch of 3 fixing end of fixed cross beam stent Point 5 and pcb board 7 are all fixed on shell lower cover 2, and the two can also be separately fixed at shell lower cover 2 with unitary design Different position.The signal processing circuit of sensor is integrated on pcb board 7, the not hanging end in contact with overarm brace 3 of pcb board 7, Interference is generated so as to avoid or reduce extraneous vibration or electromagnetic field.
Contact 6 on outer casing upper cover 1 closely touches in structure with overarm brace 3, to ensure that overarm brace 3 believes vibration Number sensibility, usual contact 6 is column structure, and cylinder bottom surface is bonded 3 surface of overarm brace completely, it is preferable that designs contact 6 For vertebral body structure, the vertex of centrum tightly touches 3 surface of overarm brace, also further enhances the sensitivity of sensor.This specification is attached The situation for being provided only with a contact 6 is illustrated in figure, further, the contact 6 on outer casing upper cover 1 can have multiple or even can With array arrangement on outer casing upper cover 1.
Since piezoelectric membrane has the characteristics that softness is also easy to produce deformation, as the sensor structure of first embodiment actually makes Its anti-interference can reach product quality requirement in, therefore in the second embodiment of the utility model, such as 2 institute of attached drawing Show, shell mechanism makes enclosure form the case of sealing using formula structure is integrally formed between outer casing upper cover 1 and shell lower cover 2 Formula space.Such shell mechanism has the effect of shielding Hz noise, can be subject to the external world in the process to avoid working sensor Vibration or the interference of external electromagnetic field.
Further, can make between outer casing upper cover 1 and shell lower cover 2 to ensure the sealing antivibration effect of shell simultaneously Relative motion is not obstructed, and structure bonded to each other is set between outer casing upper cover 1 and shell lower cover 2, and the two bonding place uses silica gel It is attached.Outer casing upper cover 1 and shell lower cover 2 are respectively opposite U-shaped or hemispherical, and the two, which is mutually covered to close, forms having for shell The structure of sealed inner.Sensor outer housing upper and lower covers glued construction such as the utility model in 3 3rd embodiment of attached drawing shows It shown in intention, is fitted closely between 8 outer casing upper cover 1 of shell upper and lower covers bonding place and shell lower cover 2, centre uses silicagel pad by two Person bonds.Silica gel has good antivibration effectiveness in vibration suppression, in order to further improve the vibration resistance of sensor, as attached drawing 4 the 4th is real It applies shown in the sensor outer housing upper and lower covers glued construction schematic diagram of the utility model in example, on 8 shell of shell upper and lower covers bonding place It is completely separated with falope ring between lid 1 and shell lower cover 2, it will not contact with each other between outer casing upper cover 1 and shell lower cover 2 completely logical It crosses falope ring to be sealed, can preferably improve the effect of the shielding interference of sensor.
In practice, the shielding measure of sensor has very important shadow for sensor mass and using effect It rings.Especially for small-signal sensor, good shielding measure can improve the accuracy of sensor signal.The utility model Sensor outer housing using enclosed space can realize shielding extraneous vibration interference effect, done to further shield electromagnetism Disturb, eliminate circuit present in power frequency electromagnetic field interference, the shell of the utility model can be made of electromagnetic shielding material or Surface is equipped with electro-magnetic screen layer to person inside the housing, and electro-magnetic screen layer is made of the material for possessing electromagnetic shielding action.This practicality The preparation of new shell or battery shielded layer is mixed preferably by the one or several kinds in materials described below:
(1) ferrimagnet, such as iron magnetic conduction conducting metal;
(2) nonmagnetic material, such as by the processed aluminium of electroplating surface permeability magnetic material, it is preferred to electroplate permeability magnetic material For electronickelling etc.;
(3) nonmetallic materials of conductive magneto-conductive material are mixed;
(4) the common nonmetallic materials (such as ABS plastic) for being plated or coated with conductive magneto-conductive material are passed through on surface;
(5) battery shielding layer choosing copper foil, is attached at housing internal surface.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art Art personnel on the premise of the utility model principle is not departed from, can also make several improvement and supplement, these are improved and supplement Also it should be regarded as the scope of protection of the utility model.

Claims (10)

1. a kind of cantilever piezoelectric film small-signal sensor, including shell, overarm brace, piezoelectric membrane and signal processing Circuit, which is characterized in that the sealing space that the shell is made of upper cover and lower cover, the overarm brace are arranged on upper cover under Between lid, described overarm brace one end is fixedly connected by a fixed pivot with the lower cover, and the other end is vacant state, institute Lid is stated equipped with contact, contact is in contact with the free end of overarm brace, for oppressing the free end of overarm brace, the pressure Conductive film is close to overarm brace.
2. a kind of cantilever piezoelectric film small-signal sensor according to claim 1, which is characterized in that on described Formula structure is integrally formed between lid and lower cover, enclosure is made to form the box space of sealing.
3. a kind of cantilever piezoelectric film small-signal sensor according to claim 1, which is characterized in that on described It is bonded between lid and lower cover by silicagel pad, makes to form inner space among shell.
4. a kind of cantilever piezoelectric film small-signal sensor according to claim 1, which is characterized in that described outer Shell interior surface is equipped with electro-magnetic screen layer.
5. a kind of cantilever piezoelectric film small-signal sensor according to claim 1, which is characterized in that described outer Shell is made of electromagnetic shielding material.
A kind of 6. cantilever piezoelectric film small-signal sensor according to claim 1, which is characterized in that the horizontal stroke Boom support is made of hard material.
A kind of 7. cantilever piezoelectric film small-signal sensor according to claim 4 or 5, which is characterized in that institute It states signal processing circuit to be integrated on pcb board, which is fixedly arranged on lower lid.
8. a kind of cantilever piezoelectric film small-signal sensor according to claim 1, which is characterized in that on described Contact is covered at least provided with one.
9. a kind of cantilever piezoelectric film small-signal sensor according to claim 3, which is characterized in that on described Bonding place is equipped with silica gel between lid and lower cover, coordinates simultaneously between upper cover and lower cover for the gap between closed above and lower cover Relative motion.
10. a kind of cantilever piezoelectric film small-signal sensor according to claim 1, which is characterized in that described Contact is column structure or vertebral body structure.
CN201721563410.2U 2017-11-21 2017-11-21 Cantilever piezoelectric film small-signal sensor Active CN207456474U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721563410.2U CN207456474U (en) 2017-11-21 2017-11-21 Cantilever piezoelectric film small-signal sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721563410.2U CN207456474U (en) 2017-11-21 2017-11-21 Cantilever piezoelectric film small-signal sensor

Publications (1)

Publication Number Publication Date
CN207456474U true CN207456474U (en) 2018-06-05

Family

ID=62277544

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201721563410.2U Active CN207456474U (en) 2017-11-21 2017-11-21 Cantilever piezoelectric film small-signal sensor

Country Status (1)

Country Link
CN (1) CN207456474U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109770884A (en) * 2019-01-31 2019-05-21 传世未来(北京)信息科技有限公司 Vibrating sensor and fetal rhythm monitoring device for organism vibration detection

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109770884A (en) * 2019-01-31 2019-05-21 传世未来(北京)信息科技有限公司 Vibrating sensor and fetal rhythm monitoring device for organism vibration detection

Similar Documents

Publication Publication Date Title
CN108061563A (en) Cantilever piezoelectric film small-signal sensor
CN207456474U (en) Cantilever piezoelectric film small-signal sensor
CN107613069A (en) Housing unit, side switch module and mobile terminal
CN108430017A (en) A kind of sound-producing device and electronic equipment
WO2019133644A1 (en) Back volume free sensor package
CN203691741U (en) Grounding structure of flexible circuit board
CN108966103A (en) MEMS microphone package method, structure and electronic product
CN103230270B (en) A kind of capacitance electrode for detecting driver's electrocardiosignal
CN204377143U (en) The encapsulating structure of micro-electro-mechanical microphone
CN212486787U (en) MEMS microphone and electronic equipment
CN205488235U (en) Structure is drawn forth to piezoelectric membrane electrode
CN106783805A (en) Radio frequency multi-chip package and shielding circuit
CN110519979A (en) A kind of flexible electromagnetic shielding band with wideband shield effectiveness
CN208653638U (en) A kind of modified very low frequencies micro-vibration signal inductor
CN205754730U (en) A kind of encapsulating structure of mike
CN201418145Y (en) Microphone
CN211049345U (en) Electrode paste assembly
CN201294630Y (en) Anti-interference capacitance microphone
CN204376891U (en) Water proof type sound radio frequency module and electronic apparatus
WO2020038436A1 (en) Improved extremely-low-frequency micro-vibration signal sensor
CN103153034B (en) Anti-electromagnetic interference elastic sheet
CN201601943U (en) Transparent electrostatic shield
CN215648070U (en) Anti-interference auxiliary instrument for color ultrasound
CN206479193U (en) Compressional wave detects sonac
CN217654541U (en) Ultrasonic sensor with built-in shielding on front end face

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant