CN207431534U - A kind of laser Machining head - Google Patents

A kind of laser Machining head Download PDF

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Publication number
CN207431534U
CN207431534U CN201721314751.6U CN201721314751U CN207431534U CN 207431534 U CN207431534 U CN 207431534U CN 201721314751 U CN201721314751 U CN 201721314751U CN 207431534 U CN207431534 U CN 207431534U
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China
Prior art keywords
focusing
microscope base
machining head
focus lamp
laser machining
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CN201721314751.6U
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Chinese (zh)
Inventor
陈育钦
万德润
吴昌鹏
宋世宇
邵雨化
官伟
高云峰
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Han s Laser Technology Industry Group Co Ltd
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Han s Laser Technology Industry Group Co Ltd
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Priority to CN201721314751.6U priority Critical patent/CN207431534U/en
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Abstract

The utility model discloses a kind of laser Machining head, including:Mirror assembly is focused on, with focus lamp optical center, for being focused to incoming laser beam;And adjusting part, it is used to that the position of the focusing mirror assembly to be adjusted so that the optical axis of the incoming laser beam can be by the focus lamp optical center, and the optical axis of the incoming laser beam after focusing is perpendicular to focussing plane.The laser Machining head is applicable to the processing of high technology ceramics substrate; it can effectively solve in the prior art because laser beam and phenomena such as not coaxial protective gas after laser beam is not orthogonal to focussing plane or focuses on after focusing on, improve the Laser Processing precision of workpiece to be machined (such as ceramic substrate) and ends cutting quality.

Description

A kind of laser Machining head
Technical field
The utility model is related to technical field of laser processing, and in particular to a kind of laser Machining head.
Background technology
Ceramics are inorganic non-metallic materials with the fastest developing speed at present, it is through people by the same oxygen of various metals, nitrogen or carbon Work synthesis.For ceramic material because its hardness is high, wear-resisting property is good, is just gradually being widely used in circuit substrate, on mobile phone backboard. In actual production processing, tool wear is susceptible to when being processed with traditional CNC to ceramic substrate, the low grade of processing efficiency shows As.Since ceramic substrate is high to laser absorption rate, ceramic substrate and laser beam do not contact between each other during processing, and with laser pair From the influence of graphics processing complexity when ceramic substrate is processed, thus ceramic substrate is processed with laser just slowly by It is widely used in actual production processing.
And it is often had the following problems in existing laser is processed ceramic substrate:
Precision Machining (comprising cutting and line) is carried out to ceramic substrate with laser, often because laser beam does not hang down after focusing on Directly laser beam is not coaxial with protective gas after ceramic substrate or focusing, cause be processed after ceramic substrate at processing due to Stress and radiate it is inconsistent cause phenomena such as slight crack and chipping occur, affect Laser Processing Ceramics substrate machining accuracy and cut Quality is cut, causes waste of material, production efficiency is low.
Utility model content
Problem present in for the above-mentioned prior art, the utility model provide one kind and are applicable to high technology ceramics substrate The laser Machining head of processing can be solved effectively in the prior art because laser beam is not orthogonal to focussing plane or focusing after focusing on Laser beam and phenomena such as not coaxial protective gas afterwards, improve workpiece to be machined (such as ceramic substrate) Laser Processing precision and Ends cutting quality.
It is as follows that the utility model solves the scheme that above-mentioned technical problem is provided:
A kind of laser Machining head is provided, including:
Mirror assembly is focused on, with focus lamp optical center, for being focused to incoming laser beam;
And adjusting part, it is used to that the position of the focusing mirror assembly to be adjusted so that the incoming laser beam Optical axis can be by the focus lamp optical center, and the optical axis of the incoming laser beam after focusing on is perpendicular to focussing plane.
Preferably, the focusing mirror assembly includes:Focus on microscope base;And it is set in the focusing inside the focusing microscope base Mirror.
Preferably, the focusing mirror assembly further includes:Focus lamp retainer ring is set in the focusing microscope base and focus lamp Between, for preventing from relatively moving between the focusing microscope base and focus lamp.
Preferably, the focus lamp seat tool has arc outer wall face, and the arc outer wall face has first curvature;
The adjusting part includes:
Microscope base receiving member is focused on, there are the internal cavities for accommodating the focusing microscope base and focus lamp, and it is described It focuses on and radially offers at least one through hole in the outside wall surface of microscope base receiving member;
Connection component, the arc-shaped inner surface with indent;And the arc-shaped inner surface has torsion;
Curved spring adjustable plate, its one end are fixedly connected with one end of the arc-shaped inner surface, the other end and the arc The other end of inner surface is fixedly connected, and the curved spring adjustable plate has the 3rd curvature;
And adjusting screw, it is abutted after passing through the through hole with the arc outer wall face of the focusing microscope base;
The first curvature and torsion are all higher than the 3rd curvature, and are fixedly connected with the curved spring tune Save plate connection component with it is described focus on microscope base arc outer wall face be flexibly connected so that the curved spring adjustable plate with it is described Point contact occurs for the arc outer wall face for focusing on microscope base.
Preferably, the outside wall surface for focusing on microscope base is equipped with contact plane corresponding with the lead to the hole site, described Adjusting screw abuts after passing through the through hole with the contact plane.
Preferably, there are two the contact planes, and two contact planes are mutually perpendicular to.
Preferably, the curved spring adjustable plate is made of single-leaf spring steel, thickness 0.2-0.4mm.
Preferably, the laser Machining head further includes:Fixed plate is coaxially disposed with the focusing microscope base receiving member, and with The top flexible connection for focusing on microscope base receiving member;
Stud and nut, one end of the stud through the focusing microscope base receiving member outside wall surface, and with institute
The outside wall surface threaded connection for focusing on microscope base receiving member is stated, the other end of the stud is fixedly connected with the nut, The rotation of the stud is realized by rotating the nut, and the focusing microscope base is fixed by the nut
Relative position between receiving member and the fixed plate.
Preferably, the laser Machining head further includes:
Focus lamp seat support member, with the fixed plate, focus on microscope base receiving member and be coaxially disposed, and with the focusing microscope base The bottom flexible connection of receiving member;
Cutting head is connected with the lower face of the focus lamp seat support member, and coaxial with the focus lamp seat support member It sets;
And gas-tpe fitting, it is used to input protective gas;
The optical axis of incoming laser beam after focusing and the protective gas keep coaxial in the exit of the cutting head.
Preferably, the roughness of contact surface of the focus lamp seat support member with focusing on microscope base receiving member is 0.8 μm, described The roughness for focusing on contact surface of the microscope base with focusing on microscope base receiving member is 0.8 μm.
Effect caused by technical solutions of the utility model:
The utility model can ensure that the laser beam after focusing on can be perpendicular to focus surface, and act on workpiece to be processed (such as Ceramic substrate etc.) on, make workpiece to be processed (such as ceramic substrate) two lateral stresses at laser processing groove consistent, be not in treat Workpieces processing (such as ceramic substrate) causes chipping, slight crack etc. no because two lateral stress of groove slot is inconsistent and two sidewinds are inconsistent Good phenomenon is conducive to improve workpiece to be processed (such as ceramic substrate) Laser Processing precision and ends cutting quality.
Description of the drawings
Fig. 1 is the structure diagram of the laser Machining head in embodiment one;
Fig. 2 is the front view of the laser Machining head in embodiment one;
Fig. 3 is the sectional view of the laser Machining head in embodiment one;
Fig. 4 is the top view of the adjusting part and focusing mirror assembly in embodiment one;
Fig. 5 is the structure diagram of the adjusting part and focusing mirror assembly in embodiment one;
Fig. 6 is the structure diagram of the curved spring adjustable plate in embodiment one;
Fig. 7 is the convex lens light beam focusing principle figure in embodiment one;
Fig. 8 is the structure diagram of the focusing microscope base in embodiment one.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation Example, is further elaborated the utility model.It should be appreciated that specific embodiment described herein is only used to explain The utility model is not used to limit the utility model.
Embodiment one:
The laser Machining head of the utility model includes:
Mirror assembly is focused on, with focus lamp optical center, for being focused to incoming laser beam;
And adjusting part, it is used to that the position of the focusing mirror assembly to be adjusted so that the incoming laser beam Optical axis can be by the focus lamp optical center, and the optical axis of the incoming laser beam after focusing on is perpendicular to focussing plane.The present embodiment In, the laser Machining head can be used for carrying out Precision Machining to high technology ceramics substrate.
Specifically, as shown in Figs. 1-3, laser Machining head includes:Fixed plate 1, focus on microscope base receiving member 2, focus on microscope base 3, Focus lamp seat support member 4, cutting head 5, stud 6, nut 7, gas-tpe fitting 8, adjusting screw 9 (visible with reference to Fig. 4), focus lamp 10th, focus lamp retainer ring 11 (visible with reference to Fig. 5), curved spring adjustable plate 12 (visible with reference to Fig. 5) and connection component 13.
The fixed plate 1 is coaxially disposed with the focusing microscope base receiving member 2, and with the top of the focusing microscope base receiving member 2 End flexible connection;
One end of the stud 6 focuses on microscope base receiving member through the outside wall surface for focusing on microscope base receiving member 2, and with described 2 outside wall surface is threadedly coupled, and the other end of the stud 6 is fixedly connected with the nut 7, is realized by rotating the nut 7 The rotation of the stud 6 so that the outer surface of the nut 7 and the focusing microscope base receiving member 2 and fixed plate 1 supports, and leads to It crosses the nut 7 and fixes the relative position focused between microscope base receiving member 2 and the connection component 13.
Focus lamp seat support member 4 and the fixed plate 1 focus on microscope base receiving member 2 and are coaxially disposed, and with the focusing microscope base The bottom flexible connection of receiving member 2;Cutting head 5 is connected with the lower face of the focus lamp seat support member 4, and with the focus lamp Seat support member 4 is coaxially disposed;Gas-tpe fitting 8 is then used to input protective gas;And optical axis and the institute of the incoming laser beam after focusing on It states protective gas and keeps coaxial in the exit of the cutting head 5.
In addition, to ensure fitting closely for joint face, the focus lamp seat support member 4 is with focusing on connecing for microscope base receiving member 2 The roughness of contacting surface is 0.8 μm.
As illustrated in figures 4-5, the focusing mirror assembly includes:Focus on microscope base 3;And it is set in inside the focusing microscope base Focus lamp 10.Preferably, the focusing mirror assembly further includes focus lamp retainer ring 11, is set in the focusing microscope base 3 with gathering Between burnt mirror 10, for preventing from relatively moving between the focusing microscope base 3 and focus lamp 10.
In addition, the focusing microscope base 3 has arc outer wall face W1, and the arc outer wall face W1 has first curvature;It is poly- Burnt microscope base receiving member 2, connection component 13, curved spring adjustable plate 12 and adjusting screw 9 then form the adjusting part.
Specifically, focusing on microscope base receiving member 2 has the internal cavities for accommodating the focusing microscope base 3 and focus lamp 10 A (as shown in Figure 1), and at least one through hole 21 is radially offered (such as Fig. 1 institutes in the outside wall surface for focusing on microscope base receiving member 2 Show);The microscope base 3 and the roughness of the contact surface of focusing microscope base receiving member 2 of focusing on is 0.8 μm;
Connection component 13 has the arc-shaped inner surface W2 of indent;And the arc-shaped inner surface W2 has torsion;
Curved spring 12 one end of adjustable plate is fixedly connected with one end of the arc-shaped inner surface W2, the other end and the arc The other end of inner surface W2 is fixedly connected, and the curved spring adjustable plate 12 has the 3rd curvature;In the present embodiment, such as Fig. 6 Shown, the curved spring adjustable plate 12 is made of single-leaf spring steel, and thickness is 0.2-0.4mm (being preferably 0.3mm);
Adjusting screw 9 abuts after then passing through the through hole 21 with the arc outer wall face W1 of the focusing microscope base 3;
The first curvature and torsion are all higher than the 3rd curvature, and are fixedly connected with the curved spring tune The connection component 13 for saving plate 12 is flexibly connected (being such as connected by pin) with the arc outer wall face W1 of the focusing microscope base 3, makes Point contact occurs for the arc outer wall face W1 for obtaining the curved spring adjustable plate 12 and the focusing microscope base 3.
Fig. 7 is laser beam focus schematic diagram.Principle is converged according to convex lens light beam, it is not changed by the laser beam of optical center The direction of propagation.As shown in a in Fig. 7, incoming laser beam passes through convex lens perpendicular to focussing plane and incoming laser beam optical axis Optical center, the laser beam after convergence is perpendicular to focussing plane;As shown in fig. 7b, incoming laser beam perpendicular to focussing plane but enters Laser beam optical axis is penetrated not by the optical center of convex lens, the laser beam after convergence is not orthogonal to focussing plane.
In the utility model, the adjusting screw 9 and it is described focusing microscope base 3 between, curved spring adjustable plate 12 with focus on It is point contact between the arc outer wall face W1 of microscope base 3, and curved spring adjustable plate 12 has certain elasticity.For example, can be with The adjusting screw 9 is rotated clockwise the focusing microscope base 3 to be promoted to carry out small size displacement, it is made to squeeze the curved spring tune Saving plate 12 so that the curved spring adjustable plate 12 deforms upon, conversely, counterclockwise after turning adjusting screw 9, then it is described curved Elastic adjusting plate 12 promotes the focusing microscope base 3 to move by the restoring force of its own, is focused on it is possible thereby to easily adjust Any position of the microscope base 3 in 10 plane of focus lamp, it is ensured that incoming laser beam optical axis perpendicular to focussing plane and can pass through focusing Mirror optical center so that the laser beam after focusing is acted perpendicularly on workpiece (such as ceramic substrate).
Further, it is the more fine adjusting position for focusing on microscope base 3, such as Fig. 1, shown in 8, the focusing microscope base 3 outside wall surface is equipped with contact plane 31 corresponding with 21 position of through hole, and the adjusting screw 9 passes through the through hole 21 It is abutted afterwards with the contact plane 31.In the present embodiment, there are two the contact planes 31, and two 31 phases of contact plane It is mutually vertical.
In conclusion the utility model can reach following advantageous effect:
1. focusing on the position for effectively adjusting focus lamp can be reached in mirror plane, make incoming laser beam optical axis perpendicular to focusing Plane and by the optical center of focus lamp, after so can guarantee focusing laser beam perpendicular acting on workpiece (such as ceramic substrate), Two lateral stresses are consistent at laser processing groove, are not in that workpiece (such as ceramic substrate) is led because two lateral stress of groove slot is inconsistent Cause the bad phenomenons such as chipping, slight crack.
2. the position of focus lamp can effectively be adjusted, make after focusing laser beam optical axis and protective gas in cutting head exit It keeps coaxial, is conducive to make to be irradiated with a laser two sidewind of ceramic substrate and is consistent, be conducive to workpiece to be machined (such as ceramic base Plate etc.) heat dissipation;
3. simple in structure, easy to operate, of low cost, good processing stability, be particularly advantageous to high technology ceramics substrate into Row line effectively increases the precision and effect of Laser Processing Ceramics substrate.
The above is only the preferred embodiment of the present invention, is not intended to limit the utility model, all in this practicality Within new spirit and principle, any modifications, equivalent replacements and improvements are made should be included in the guarantor of the utility model Within the scope of shield.

Claims (10)

1. a kind of laser Machining head, which is characterized in that including:
Mirror assembly is focused on, with focus lamp optical center, for being focused to incoming laser beam;
And adjusting part, it is used to that the position of the focusing mirror assembly to be adjusted so that the light of the incoming laser beam Axis can be by the focus lamp optical center, and the optical axis of the incoming laser beam after focusing is perpendicular to focussing plane.
2. laser Machining head as described in claim 1, which is characterized in that the focusing mirror assembly includes:
Focus on microscope base;And it is set in the focus lamp inside the focusing microscope base.
3. laser Machining head as claimed in claim 2, which is characterized in that the focusing mirror assembly further includes:
Focus lamp retainer ring is set between the focusing microscope base and focus lamp, for preventing the focusing microscope base with focusing on It is relatively moved between mirror.
4. laser Machining head as claimed in claim 2, which is characterized in that the focus lamp seat tool has arc outer wall face, and institute Arc outer wall face is stated with first curvature;
The adjusting part includes:
Microscope base receiving member is focused on, there is the internal cavities for accommodating the focusing microscope base and focus lamp, and the focusing At least one through hole is radially offered in the outside wall surface of microscope base receiving member;
Connection component, the arc-shaped inner surface with indent;And the arc-shaped inner surface has torsion;
Curved spring adjustable plate, its one end are fixedly connected with one end of the arc-shaped inner surface, the other end and table in the arc The other end in face is fixedly connected, and the curved spring adjustable plate has the 3rd curvature;
And adjusting screw, it is abutted after passing through the through hole with the arc outer wall face of the focusing microscope base;
The first curvature and torsion are all higher than the 3rd curvature, and are fixedly connected with the curved spring adjustable plate Connection component be flexibly connected with the arc outer wall face of the focusing microscope base so that the curved spring adjustable plate and the focusing Point contact occurs for the arc outer wall face of microscope base.
5. laser Machining head as claimed in claim 4, which is characterized in that the outside wall surface for focusing on microscope base is equipped with leads to described The corresponding contact plane in hole site, the adjusting screw abut after passing through the through hole with the contact plane.
6. laser Machining head as claimed in claim 5, which is characterized in that there are two the contact planes, and is connect described in two Tactile plane is mutually perpendicular to.
7. laser Machining head as claimed in claim 4, which is characterized in that the curved spring adjustable plate is single-leaf spring steel Into thickness 0.2-0.4mm.
8. laser Machining head as claimed in claim 4, which is characterized in that the laser Machining head further includes:
Fixed plate is coaxially disposed with the focusing microscope base receiving member, and is flexibly connected with the top of the focusing microscope base receiving member;
Stud and nut, one end of the stud through the focusing microscope base receiving member outside wall surface, and with the focusing microscope base The outside wall surface of receiving member is threadedly coupled, and the other end of the stud is fixedly connected with the nut,
Realize the rotation of the stud by rotating the nut, and by the nut fix the focusing microscope base receiving member with Relative position between the fixed plate.
9. laser Machining head as claimed in claim 8, which is characterized in that the laser Machining head further includes:
Focus lamp seat support member is coaxially disposed with the fixed plate, focusing microscope base receiving member, and is accommodated with the focusing microscope base The bottom flexible connection of part;
Cutting head is connected with the lower face of the focus lamp seat support member, and is coaxially disposed with the focus lamp seat support member;
And gas-tpe fitting, it is used to input protective gas;
The optical axis of incoming laser beam after focusing and the protective gas keep coaxial in the exit of the cutting head.
10. laser Machining head as claimed in claim 9, which is characterized in that the focus lamp seat support member is held with focusing on microscope base Receive part contact surface roughness for 0.8 μm, the roughness of the contact surface with focusing on microscope base receiving member that focuses on microscope base is 0.8 μm。
CN201721314751.6U 2017-10-12 2017-10-12 A kind of laser Machining head Active CN207431534U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721314751.6U CN207431534U (en) 2017-10-12 2017-10-12 A kind of laser Machining head

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Application Number Priority Date Filing Date Title
CN201721314751.6U CN207431534U (en) 2017-10-12 2017-10-12 A kind of laser Machining head

Publications (1)

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CN207431534U true CN207431534U (en) 2018-06-01

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116608774A (en) * 2023-07-18 2023-08-18 宁德时代新能源科技股份有限公司 Method for detecting residual thickness of notch of structural part, thickness detection equipment and detection device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116608774A (en) * 2023-07-18 2023-08-18 宁德时代新能源科技股份有限公司 Method for detecting residual thickness of notch of structural part, thickness detection equipment and detection device
CN116608774B (en) * 2023-07-18 2024-05-14 宁德时代新能源科技股份有限公司 Method for detecting residual thickness of notch of structural part, thickness detection equipment and detection device

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