CN207418304U - A kind of electron level carbon tetrafluoride gas production high pressure seal - Google Patents
A kind of electron level carbon tetrafluoride gas production high pressure seal Download PDFInfo
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- CN207418304U CN207418304U CN201721459372.6U CN201721459372U CN207418304U CN 207418304 U CN207418304 U CN 207418304U CN 201721459372 U CN201721459372 U CN 201721459372U CN 207418304 U CN207418304 U CN 207418304U
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- sealing cover
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- seal box
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Abstract
The utility model discloses a kind of electron level carbon tetrafluoride gas production high pressure seals, including seal box, raw material reaction kettle and sealing cover, the seal box upper end is equipped with the sealing cover, seal washer is provided on the inside of the sealing cover, described sealing cover one end is provided with sealing cover and fixes bayonet, the seal box upper end is equipped with control valve, the control valve upper end is equipped with raw material ingress pipe one, the control valve upper end is equipped with raw material ingress pipe two, the sealing cover upper end is equipped with control box, the control box is internally provided with 80C51 microcontrollers, power supply is installed inside the control box, the control box upper end is equipped with alarm, reaction kettle firm banking is installed inside the seal box.The apparatus structure is simple, easy to use, device good airproof performance, and can make to generate negative pressure in the seal box under the action of the compression pump, makes the seal box better tightness, safe and reliable strong applicability is convenient for popularization.
Description
Technical field
The utility model is related to carbon tetrafluoride gas to produce correlative technology field, and in particular to a kind of electron level carbon tetrafluoride
Gas generation high pressure seal.
Background technology
Electron level carbon tetrafluoride, alias tetrafluoromethane.It is colourless, non-combustible gas, be most stable of organic compound it
One.When burning with imflammable gas, it can decompose and generate toxic fluoride.Its preparation method is that upper skill is directly fluorinated using activated carbon,
Reactor product evaporates clearly through applying dirt, alkali cleaning, dehydration, can produce the carbon tetrafluoride that purity is 99.99%.It has been in micro- electricity industry
The plasma etching gas of dosage maximum.It is widely used in silicon, oxidation puts forth energy, nitrogenizes the thin-film materials such as brick, phosphorosilicate glass and tungsten
Etching;In electronic device surface clean, manufacture of solar cells, laser technology, low-temperature refrigerant, gas-insulated etc. also people
Amount application.In the production process of electron level carbon tetrafluoride, high pressure seal is a kind of essential device, general height
Pressure sealing device sealing effect unobvious when in use, be easy to cause the leakage of gas, and waste of resource increases production cost.
Utility model content
The purpose of this utility model is that solve the above-mentioned problems and provides a kind of electron level carbon tetrafluoride gas life
Production high pressure seal.
The utility model is achieved through the following technical solutions above-mentioned purpose：
A kind of electron level carbon tetrafluoride gas production high pressure seal, including seal box, raw material reaction kettle and sealing
Lid, the seal box upper end are equipped with the sealing cover, seal washer, described sealing cover one end are provided on the inside of the sealing cover
It is provided with sealing cover and fixes bayonet, the seal box upper end is equipped with control valve, and the control valve upper end is equipped with raw material importing
Guan Yi, the control valve upper end are equipped with raw material ingress pipe two, and the sealing cover upper end is equipped with control box, in the control box
Portion is provided with 80C51 microcontrollers, power supply is equipped with inside the control box, the control box upper end is equipped with alarm, described
Reaction kettle firm banking is installed, the reaction kettle firm banking upper end is equipped with raw material reaction kettle, described close inside seal box
Joint sealing one end is equipped with compression pump, and the seal box bottom is provided with delivery line control valve, and the delivery line control valve lower end is set
It is equipped with reaction gas delivery line.
In said structure, when user is needed using the device, the raw material ingress pipe one and the raw material are imported
The sealing access reaction raw materials ingress pipe of pipe two, the reaction gas export seal of tube is accessed in gas collection case, described in startup
80C51 microcontrollers, the 80C51 microcontrollers control the pressure pump work, and the compression pump is by the air in the seal box
It is discharged by gas-guide tube, the pressure valve is opened when there is gas discharge, internal after the air discharge in the seal box
Pressure is small and atmospheric pressure pressure is big, and under the action of external atmosphere pressure, the sealing cover is by absorption tightly in the seal box
Upper end is sealed against, and the 80C51 microcontrollers control the control valve to open afterwards, reaction raw materials after the control valve is opened
Entered by the raw material ingress pipe one and the raw material ingress pipe two in the raw material reaction kettle, when the reaction raw materials being passed through reach
After amount, the 80C51 microcontrollers control the control valve to close, while the delivery line control valve is controlled to open, by the original
The gas of generation is exported by the reaction gas delivery line inside material reaction kettle.
It is described in order to further improve a kind of use function of electron level carbon tetrafluoride gas production high pressure seal
Sealing cover is fixed bayonet and is fixedly mounted on outside the seal box by way of compression with the sealing cover.
It is described in order to further improve a kind of use function of electron level carbon tetrafluoride gas production high pressure seal
Seal washer is corrosion-resistant, high-temperature and high-presure resistent rubber washer, and is placed in the groove on the inside of the sealing cover.
It is described in order to further improve a kind of use function of electron level carbon tetrafluoride gas production high pressure seal
Sealing cover fixes bayonet and is fixedly mounted on described sealing cover one end by way of clamping, and with the card outside the seal box
The sealing cover is fixed in slot cooperation.
It is described in order to further improve a kind of use function of electron level carbon tetrafluoride gas production high pressure seal
Control valve is mounted by means of bolts on the sealing cover upper end, and the upper end is provided with the raw material ingress pipe one and the raw material
Ingress pipe two, the raw material ingress pipe one and the raw material ingress pipe two are inserted into the raw material reaction kettle, and its end is set
Sealing screw thread is equipped with, is connected with the sealing plug to match.
It is described in order to further improve a kind of use function of electron level carbon tetrafluoride gas production high pressure seal
Compression pump is mounted by means of bolts on the seal box one side, and its air hose is inserted into the seal box, in the pressure
The internal air hose end of pump is provided with pressure valve.
It is described in order to further improve a kind of use function of electron level carbon tetrafluoride gas production high pressure seal
Reaction gas delivery line is threadedly secured in the delivery line control valve lower end by sealing, and its end is provided with sealing spiral shell
Line is connected with the sealing plug to match.
Advantageous effect is：The apparatus structure is simple, easy to use, device good airproof performance, and can be in the pressure
Make to generate negative pressure in the seal box under the action of pump, make the seal box better tightness, safe and reliable strong applicability is convenient for
It promotes.
Description of the drawings
Fig. 1 is a kind of schematic diagram of electron level carbon tetrafluoride gas production high pressure seal described in the utility model；
Fig. 2 is a kind of top view of electron level carbon tetrafluoride gas production high pressure seal described in the utility model；
Fig. 3 is that a kind of right side of the high pressure seal of electron level carbon tetrafluoride gas production described in the utility model regards
Figure.
The reference numerals are as follows：
1st, reaction kettle firm banking；2nd, seal box；3rd, sealing cover fixes bayonet；4th, seal washer；5th, raw material ingress pipe one；
6th, 80C51 microcontrollers；7th, alarm；8th, control box；9th, power supply；10th, raw material ingress pipe two；11st, control valve；12nd, sealing cover；
13rd, raw material reaction kettle；14th, compression pump；15th, reaction gas delivery line；16th, delivery line control valve.
Specific embodiment
The utility model is described in further detail below in conjunction with the accompanying drawings：
As shown in Figs. 1-3, a kind of electron level carbon tetrafluoride gas production high pressure seal, including seal box 2, raw material
Reaction kettle 13 and sealing cover 12,2 upper end of seal box are equipped with sealing cover 12, and 12 inside of sealing cover is provided with seal washer 4, seals
12 one end of lid is provided with sealing cover and fixes bayonet 3, and 2 upper end of seal box is equipped with control valve 11, and 11 upper end of control valve is equipped with original
Expect ingress pipe 1,11 upper end of control valve is equipped with raw material ingress pipe 2 10, and 12 upper end of sealing cover is equipped with control box 8, control box
8 are internally provided with 80C51 microcontrollers 6, and power supply 9 is equipped with inside control box 8, and 8 upper end of control box is equipped with alarm 7, sealing
Reaction kettle firm banking 1 is installed, 1 upper end of reaction kettle firm banking is equipped with raw material reaction kettle 13, seal box 2 one inside case 2
End is equipped with compression pump 14, and 2 bottom of seal box is provided with delivery line control valve 16, and 16 lower end of delivery line control valve is provided with reaction
Gas eduction tube 15.
In said structure, when user is needed using the device, introduce a material into pipe 1 and raw material ingress pipe 2 10 is close
Sealing-in enters reaction raw materials ingress pipe, and reaction gas delivery line 15 is sealed in access gas collection case, starts 80C51 microcontrollers 6,
6 control pressure of 80C51 microcontrollers pump, 14 work, compression pump 14 discharges the air in seal box 2 by gas-guide tube, when there is gas
Pressure valve is opened during discharge, and after the air discharge in seal box 2, internal pressure is small and atmospheric pressure pressure is big, extraneous big
Under the action of air pressure, absorption tightly is sealed against by sealing cover 12 in 2 upper end of seal box, and 80C51 microcontrollers 6 control afterwards
Control valve 11 is opened, and reaction raw materials enter raw material by raw material ingress pipe 1 and raw material ingress pipe 2 10 after control valve 11 is opened
In reaction kettle 13, after the reaction raw materials being passed through enough are measured, 80C51 microcontrollers 6 control control valve 11 to close, while control delivery line
Control valve 16 is opened, and the gas of 13 inside generation of raw material reaction kettle is exported by reaction gas delivery line 15.
In order to further improve a kind of use function of electron level carbon tetrafluoride gas production high pressure seal, seal
Lid 12 is fixed bayonet 3 and is fixedly mounted on outside seal box 2 by way of compression with sealing cover, and seal washer 4 is corrosion-resistant, resistance to
The rubber washer of high temperature and pressure, and be placed in the groove of 12 inside of sealing cover, sealing cover fixes side of the bayonet 3 by clamping
Formula is fixedly mounted on 12 one end of sealing cover, and coordinates with the card slot outside seal box 2 and fix sealing cover 12, and control valve 11 is logical
It crosses bolt and is fixedly mounted on 12 upper end of sealing cover, the upper end is provided with raw material ingress pipe 1 and raw material ingress pipe 2 10, and raw material is led
Enter pipe 1 and raw material ingress pipe 2 10 to be inserted into raw material reaction kettle 13, and its end is provided with sealing screw thread, with matching
Sealing plug is connected, and compression pump 14 is mounted by means of bolts on 2 one side of seal box, and in its air hose insertion seal box 2,
Pressure valve is provided in 14 inside air hose end of compression pump, reaction gas delivery line 15 is threadedly secured in export management and control by sealing
16 lower end of valve processed, and its end is provided with sealing screw thread and is connected with the sealing plug to match.
The basic principle, main feature and advantage of the utility model has been shown and described above.The technical staff of the industry
It should be appreciated that the present utility model is not limited to the above embodiments, the above embodiments and description only describe this
The principle of utility model, on the premise of not departing from the spirit and scope of the utility model, the utility model also has various change
And improvement, these various changes and improvements fall within the scope of the claimed invention.The utility model requires protection scope
It is defined by appending claims and equivalents.
Claims (7)
1. a kind of electron level carbon tetrafluoride gas production high pressure seal, it is characterised in that：It is reacted including seal box, raw material
Kettle and sealing cover, the seal box upper end is equipped with the sealing cover, seal washer is provided on the inside of the sealing cover, described close
Capping one end is provided with sealing cover and fixes bayonet, and the seal box upper end is equipped with control valve, and the control valve upper end is equipped with
Raw material ingress pipe one, the control valve upper end are equipped with raw material ingress pipe two, and the sealing cover upper end is equipped with control box, described
Control box is internally provided with 80C51 microcontrollers, and power supply is equipped with inside the control box, and the control box upper end is equipped with alarm
Device is equipped with reaction kettle firm banking inside the seal box, and the reaction kettle firm banking upper end is equipped with raw material reaction kettle,
Described seal box one end is equipped with compression pump, and the seal box bottom is provided with delivery line control valve, the delivery line control valve
Lower end is provided with reaction gas delivery line.
2. a kind of electron level carbon tetrafluoride gas production high pressure seal according to claim 1, it is characterised in that：
The sealing cover is fixed bayonet and is fixedly mounted on outside the seal box by way of compression with the sealing cover.
3. a kind of electron level carbon tetrafluoride gas production high pressure seal according to claim 1, it is characterised in that：
The seal washer is corrosion-resistant, high-temperature and high-presure resistent rubber washer, and is placed in the groove on the inside of the sealing cover.
4. a kind of electron level carbon tetrafluoride gas production high pressure seal according to claim 1, it is characterised in that：
The sealing cover fixes bayonet and is fixedly mounted on described sealing cover one end by way of clamping, and with outside the seal box
Card slot cooperation the sealing cover is fixed.
5. a kind of electron level carbon tetrafluoride gas production high pressure seal according to claim 1, it is characterised in that：
The control valve is mounted by means of bolts on the sealing cover upper end, and the upper end is provided with the raw material ingress pipe one and described
Raw material ingress pipe two, the raw material ingress pipe one and the raw material ingress pipe two are inserted into the raw material reaction kettle, and its end
Head is provided with sealing screw thread, is connected with the sealing plug to match.
6. a kind of electron level carbon tetrafluoride gas production high pressure seal according to claim 1, it is characterised in that：
The compression pump is mounted by means of bolts on the seal box one side, and its air hose is inserted into the seal box, described
Air hose end is provided with pressure valve inside compression pump.
7. a kind of electron level carbon tetrafluoride gas production high pressure seal according to claim 1, it is characterised in that：
The reaction gas delivery line is threadedly secured in the delivery line control valve lower end by sealing, and is provided in its end close
Envelope screw thread is connected with the sealing plug to match.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721459372.6U CN207418304U (en) | 2017-11-06 | 2017-11-06 | A kind of electron level carbon tetrafluoride gas production high pressure seal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721459372.6U CN207418304U (en) | 2017-11-06 | 2017-11-06 | A kind of electron level carbon tetrafluoride gas production high pressure seal |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207418304U true CN207418304U (en) | 2018-05-29 |
Family
ID=62307364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721459372.6U Active CN207418304U (en) | 2017-11-06 | 2017-11-06 | A kind of electron level carbon tetrafluoride gas production high pressure seal |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207418304U (en) |
-
2017
- 2017-11-06 CN CN201721459372.6U patent/CN207418304U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No. 6, Gongye Road, Jiaoyang industrial concentration zone, Jiaoyang Town, Shanghang County, Longyan City, Fujian Province, 364204 Patentee after: Fujian del Technology Co.,Ltd. Address before: No. 6, Gongye Road, Jiaoyang industrial concentration zone, Jiaoyang Town, Shanghang County, Longyan City, Fujian Province, 364000 Patentee before: FUJIAN DEER TECHNOLOGY CO.,LTD. |