CN205782005U - A kind of packaging device of electron level Silicon chloride. - Google Patents
A kind of packaging device of electron level Silicon chloride. Download PDFInfo
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- CN205782005U CN205782005U CN201620415867.8U CN201620415867U CN205782005U CN 205782005 U CN205782005 U CN 205782005U CN 201620415867 U CN201620415867 U CN 201620415867U CN 205782005 U CN205782005 U CN 205782005U
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- diaphragm valve
- corrugated tube
- storage tank
- packaging device
- silicon chloride
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Abstract
The utility model discloses the packaging device of a kind of electron level Silicon chloride., including storage tank, it is characterized in that: described storage tank is provided with diaphragm valve three, diaphragm valve four, described diaphragm valve three other end is connected with corrugated tube one, and described corrugated tube one other end is connected with diaphragm valve one and diaphragm valve two respectively；Described diaphragm valve four other end is connected with corrugated tube two；Being provided with pipeline in described storage tank (17) to be connected with diaphragm valve five, described diaphragm valve five other end is connected with corrugated tube three, and described corrugated tube three is connected to each and fills electric capacity.The packaging device of a kind of electron level Silicon chloride. that this utility model provides, integrates clean, seals, packaging device that residual liquid processes.
Description
Technical field
This utility model relates to Silicon chloride. subpackage (filling) field, particularly to the packaging device of a kind of electron level Silicon chloride..
Background technology
Electron level Silicon chloride. is as one of the source material of ald SiO 2, Silicon chloride. is that one is colourless, has corrosivity simultaneously, suffocative stink, meets steam and produces hydrogen chloride, it is necessary to ensure that when it is canned that system is positive confinement, otherwise can produce security incident.The quality of deposition thin film can be had a direct impact by the purity of Silicon chloride. simultaneously.
And for example Patent publication No is the retracting device that CN201735306U discloses a kind of Tetrahydrofuran tail gas, including washing tail gas recycling can and centrifugal pump, is provided with the packing layer with Pall ring filling in washing tail gas recycling can.Washing tail gas recycling can is connected to rectifying column top, receive the tail gas containing oxolane of rectifying column discharge, it is also connected to rectification section, receive rich in 1, the liquid phase material of 4-butanediol is as cleaning mixture, contain tail gas and the cleaning mixture counter current contacting of oxolane at packing layer, oxolane substantial amounts of in tail gas is dissolved in inside cleaning mixture.Retracting device simple in construction of the present utility model, practicality, input cost is relatively low, greatly reduces the waste of oxolane, reduces the unit consumption of product, reduces the three waste discharge of factory simultaneously.And for example Patent publication No is that CN204522964U discloses a kind of room temperature and directly prepares the device of gallium trichloride-tetrahydrofuran solution; feed by arranging hydrogen chloride steel cylinder; retort is stirred reaction and dissolves; gallium trichloride-tetrahydrofuran solution of obtaining of reaction is prepared for alkyl gallium through discharge valve discharging, and connects nitrogen tube in condenser overhead and lead to nitrogen and whole reaction is carried out protection be passed into alkaline solution absorption tank；This device in reaction simultaneously, and can realize immediately being dissolved in product oxolane, and from dissolving two different flow processs, the production of conventional gallium trichloride is incorporated in same device realization.By the technical program, when obtaining identical gallium trichloride product, it is to avoid conventional pyroreaction；Simultaneously because preparation and dissolving are incorporated in the operation of same unit, improve production efficiency, reduce production cost.
Utility model content
In order to overcome above-mentioned the deficiencies in the prior art, this utility model provides the packaging device of a kind of electron level Silicon chloride..The packaging device of a kind of electron level Silicon chloride., including storage tank, described storage tank is provided with diaphragm valve three, diaphragm valve four, and described diaphragm valve three other end is connected with corrugated tube one, and described corrugated tube one other end is connected with diaphragm valve one and diaphragm valve two respectively；Described diaphragm valve four other end is connected with corrugated tube two；It is provided with pipeline in described storage tank to be connected with diaphragm valve five, described diaphragm valve five other end is connected with corrugated tube three, described corrugated tube three other end respectively with corrugated tube four, corrugated tube five, corrugated tube six, corrugated tube seven connects, described corrugated tube four, described corrugated tube five, described corrugated tube six, described corrugated tube seven other end is connected respectively in diaphragm valve six, diaphragm valve seven, diaphragm valve, diaphragm valve nine, described diaphragm valve six, described diaphragm valve seven, described diaphragm valve eight, described diaphragm valve nine other end is connected respectively in filling electric capacity one, fill electric capacity two, fill electric capacity three, fill electric capacity four.
Preferably, it is provided with Pressure gauge between described corrugated tube one, described diaphragm valve one and described diaphragm valve two.
Preferably, described tank bottom is provided with electronic scale.
Preferably, described storage tank both sides are provided with handle.
Preferably, the pipeline being connected with described diaphragm valve five leads in described storage tank inner bottom part.
By using this device, not only achieve the sealing subpackage of electron level Silicon chloride., the simultaneously application of hundred grade working tables, it is to avoid environment is to the contamination of product in filling process.
Accompanying drawing explanation
Fig. 1 is the packaging device structural representation of this utility model a kind of electron level Silicon chloride.；
Detailed description of the invention
Below in conjunction with detailed description of the invention, it is further elucidated with this utility model, it should be understood that following detailed description of the invention is merely to illustrate this utility model rather than limits scope of the present utility model.
Embodiment 1
As shown in the figure, this utility model provides the packaging device of a kind of electron level Silicon chloride., including storage tank 17, it is provided with electronic scale 23 bottom described storage tank 17, described storage tank 17 both sides are provided with handle 24, described storage tank 17 is provided with diaphragm valve 33, diaphragm valve 44, described diaphragm valve 33 other end is connected with corrugated tube 1, described corrugated tube 1 other end is connected with diaphragm valve 1 and diaphragm valve 22 respectively, is provided with Pressure gauge 22 between described corrugated tube 1, described diaphragm valve 1 and described diaphragm valve 22；Described diaphragm valve 44 other end is connected with corrugated tube 2 11；nullIt is provided with pipeline in described storage tank 17 to be connected with diaphragm valve 55，The pipeline being connected with described diaphragm valve 55 leads in described storage tank 17 inner bottom part，Described diaphragm valve 55 other end is connected with corrugated tube 3 12，Described corrugated tube 3 12 other end respectively with corrugated tube 4 13、Corrugated tube 5 14、Corrugated tube 6 15、Corrugated tube 7 16 connects，Described corrugated tube 4 13、Described corrugated tube 5 14、Described corrugated tube 6 15、Described corrugated tube 7 16 other end is connected respectively in diaphragm valve 66、Diaphragm valve 77、Diaphragm valve 8、Diaphragm valve 99，Described diaphragm valve 66、Described diaphragm valve 77、Described diaphragm valve 88、Described diaphragm valve 99 other end is connected respectively in filling electric capacity 1、Fill electric capacity 2 19、Fill electric capacity 3 20、Fill electric capacity 4 21，Described packaging device fills and carries out in 100 grade working tables.
nullSilicon chloride. is transferred in storage tank (17) by corrugated tube two (11) and diaphragm valve four (4)，It is placed on electronic scale (23)，By electronic scale (23) it can be observed how the amount filled，Diaphragm valve one (1) connects vacuum pump，Diaphragm valve two (2) connects nitrogen，Carry out taking out and fill displacement pipeline atmosphere，By observing Pressure gauge 22、Storage tank 17 internal gas pressure is maintained at 0.02-0.05 MPa，Silicon chloride. passes through diaphragm valve five (5)、Diaphragm valve six (6)、Diaphragm valve seven (7)、Diaphragm valve eight (8)、Diaphragm valve nine (9) and corrugated tube three (12)、Corrugated tube four (13)、Corrugated tube five (14)、Corrugated tube six (15)、Corrugated tube seven (16) fills respectively and is filling electric capacity one (18)、Fill electric capacity two (19)、Fill electric capacity three (20)、Fill in electric capacity four (21)，In filling process，Corrugated tube seven (16) right rear end connects nitrogen protection，Fill complete，Pipe-line system residual Silicon chloride.，It is extracted in liquid nitrogen cold trap by vacuum pump.
In addition to the implementation, this utility model can also have other embodiments.The technical scheme that all employing equivalents or equivalent transformation are formed, all falls within the protection domain of this utility model requirement.
Claims (5)
1. the packaging device of an electron level Silicon chloride., including storage tank (17), it is characterized in that: described storage tank (17) is provided with diaphragm valve three (3), diaphragm valve four (4), described diaphragm valve three (3) other end is connected with corrugated tube one (10), and described corrugated tube one (10) other end is connected with diaphragm valve one (1) and diaphragm valve two (2) respectively；Described diaphragm valve four (4) other end is connected with corrugated tube two (11)；nullIt is provided with pipeline in described storage tank (17) to be connected with diaphragm valve five (5)，Described diaphragm valve five (5) other end is connected with corrugated tube three (12)，Described corrugated tube three (12) other end respectively with corrugated tube four (13)、Corrugated tube five (14)、Corrugated tube six (15)、Corrugated tube seven (16) connects，Described corrugated tube four (13)、Described corrugated tube five (14)、Described corrugated tube six (15)、Described corrugated tube seven (16) other end is connected respectively in diaphragm valve six (6)、Diaphragm valve seven (7)、Diaphragm valve (8)、Diaphragm valve nine (9)，Described diaphragm valve six (6)、Described diaphragm valve seven (7)、Described diaphragm valve eight (8)、Described diaphragm valve nine (9) other end is connected respectively in filling electric capacity one (18)、Fill electric capacity two (19)、Fill electric capacity three (20)、Fill electric capacity four (21).
The packaging device of a kind of electron level Silicon chloride. the most according to claim 1, it is characterised in that: it is provided with Pressure gauge (22) between described corrugated tube one (10), described diaphragm valve one (1) and described diaphragm valve two (2).
The packaging device of a kind of electron level Silicon chloride. the most according to claim 1, it is characterised in that: described storage tank (17) bottom is provided with electronic scale (23).
The packaging device of a kind of electron level Silicon chloride. the most according to claim 1, it is characterised in that: described storage tank (17) both sides are provided with handle (24).
The packaging device of a kind of electron level Silicon chloride. the most according to claim 1, it is characterised in that: the pipeline being connected with described diaphragm valve five (5) leads in described storage tank (17) inner bottom part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620415867.8U CN205782005U (en) | 2016-05-10 | 2016-05-10 | A kind of packaging device of electron level Silicon chloride. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620415867.8U CN205782005U (en) | 2016-05-10 | 2016-05-10 | A kind of packaging device of electron level Silicon chloride. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205782005U true CN205782005U (en) | 2016-12-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620415867.8U Active CN205782005U (en) | 2016-05-10 | 2016-05-10 | A kind of packaging device of electron level Silicon chloride. |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107320991A (en) * | 2017-08-15 | 2017-11-07 | 苏州普耀光电材料有限公司 | A kind of distillation system pressure equaliser of trimethyl gallium |
-
2016
- 2016-05-10 CN CN201620415867.8U patent/CN205782005U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107320991A (en) * | 2017-08-15 | 2017-11-07 | 苏州普耀光电材料有限公司 | A kind of distillation system pressure equaliser of trimethyl gallium |
| CN107320991B (en) * | 2017-08-15 | 2023-06-13 | 苏州普耀光电材料有限公司 | Pressure balancing device of trimethyl gallium rectification system |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220222 Address after: 215600 Wuxin village, yangshe Town, Zhangjiagang City, Suzhou City, Jiangsu Province (north side of Zhangyang Road) Patentee after: SINOCOMPOUND CATALYSTS CO.,LTD. Address before: 215600 Zhangjiagang Economic Development Zone, Suzhou, Jiangsu Province Patentee before: SUZHOU FORNANO ELECTRONIC TECHNOLOGY Co.,Ltd. |