CN2074023U

CN2074023U - Pressure-relief vacuum ingressive device

Info

Publication number: CN2074023U
Application number: CN 90209351
Authority: CN
Inventors: 钱石南; 刘万波; 刘泽文; 阚娅
Original assignee: University of Science and Technology of China USTC
Current assignee: University of Science and Technology of China USTC
Priority date: 1990-06-29
Filing date: 1990-06-29
Publication date: 1991-03-27

Abstract

The utility model provides a pressure-relief vacuum ingressive device, relating to the technical field of vacuum. The device uses a corrugated pipe to guide the motion to a working vacuum chamber. One side of the corrugated pipe is the working vacuum chamber, and the other side is positioned in coarse sealed environment and communicated with a pressure-relief device. When the utility model works, the utility model can form the low vacuum, and thus, the differential pressure of the inner wall and the outer wallof the corrugated pipe can be reduced in great range. As a consequence, the utility model is favorable to the motion of ingressive components. The pressure-relief vacuum ingressive device has flexible action and short response time. The device can be widely used for executing various motions in the vacuum environment.

Description

Pressure-relief vacuum ingressive device

The utility model provides a kind of atmospheric vacuum gatherer that subtracts, and relates to the vacuum technique field.

Carry out motion in the vacuum environment, utilize the scalability of corrugated tube or other to be out of shape usually and realize.The motion actuating unit of importing vacuum of the prior art, the pressure reduction of corrugated tube inside and outside wall is very big, the also corresponding increase of its deformation resistance.According to calculating, when corrugated tube one side is a vacuum, when opposite side was atmosphere, the corrugated tube of diameter phi 30 axially had been subjected to the 7kg atmospheric pressure.Therefore, during the motion of this device in carrying out vacuum, must overcome very strong atmospheric pressure simultaneously, cause efficient low, and usually can the delayed response time.Use steel wire and balance bob to come balancing Atmospheric pressure on the hot university of the University of Wisconsin-Madison Synchrotron Radiation, though solved stress problems, the inertia of hammer can influence movement velocity.Use spring to overcome the stability problem that pressure can influence speed.These two kinds of structures all have loaded down with trivial details, the not compact shortcoming of structure.

The purpose of this utility model is to overcome deficiency of the prior art, improves the structure of existing apparatus, and the motion actuating unit of the very little importing vacuum of a kind of resistance own is provided.

The utility model is the existing improvement that imports the vacuum movement actuating unit.It includes drive system, imports part and corrugated tube, it is characterized in that the one side in the inside and outside wall of described corrugated tube is in the working vacuum chamber, and another side is in the thick sealed environment, and this thick sealed environment and another reliever are connected.Described reliever can be a special use or dual-purpose aspiration pump.When reliever is worked, can guarantee to be in the low vacuum state in the thick sealed environment, thereby reduce the pressure differential of corrugated tube inside and outside wall greatly, make it flexible convenient.When the importing part is subjected to drive system to drive the do motion, the corrugated tube that is connected with it promptly stretches or distortion thereupon, the action piece that is connected in bellows end has also just produced motion, and whole implementation does not have powerful gas pressure, so the motion of action piece is more flexible, light.

Drive system described in the utility model can be used linear stepping motor, and its main shaft directly is connected with importing part rigidity; Or the last suitable mechanical transmission mechanism of electric rotary machine configuration, so that import the motion that part has rectilinear motion, swing or other form.This mechanical transmission mechanism can be gear, rack gear, the transmission of nut screw mandrel, perhaps is crank block, crank idler wheel mechanism etc.Can also use the power-actuated mechanical hook-up of total man, for example, rotate handwheel as the driving that rotatablely moves with hand.For the implementation procedure robotization, used stepper motor can be by system controlled by computer.When concrete structure designs, drive system is included in the thick sealed environment, power lead and umbilical cable line are therefrom drawn, to control.When having movement parts to reach the ambient atmosphere space in the thick sealed environment, seal is used in its contact position, and in the hope of the gap minimum, it is minimum to leak gas.

Be further described below in conjunction with embodiment and accompanying drawing:

Fig. 1 is a schematic block diagram of the present utility model.Among the figure, 1 is drive system.2 for leading human body, and 3 is corrugated tube, and 4 is the working vacuum chamber, and 5 is thick sealed environment, and 6 is action piece, and 7 is passage, and 8 is reliever, and 9 is seal.Dotted line is the situation that includes drive system in the thick sealed environment of expression among the figure.

Fig. 2 is the structural representation that is used for synchrotron radiation etching system exposure shutter action device.Among the figure, 11 is rotating stepper motor, and 12 for importing bar, and 13 is seal, and 14 is shutter disk, and 15 is the working vacuum chamber, and 16 is the reliever interface, and 17 is rolling bearing, and 18 is driving lever.

Fig. 3 is Fig. 2 A-A cutaway view Amplified image.Among the figure, 19 is coupling shaft, and 20 is packing ring, and 21 is nut.

In this embodiment, when motor 11 rotates, the driving lever 18 that drive is connected on its main shaft rotates, the face of inside casing up and down of rolling bearing 17 outer rings and driving lever 18 movingly, bearing inner race is installed on the axle 19, is rigidly connected with importing bar by nut 21, thereby makes motor movement pass to the importing bar, motor is converted to the rectilinear motion up and down that imports bar, makes the shutter disk that is connected in the lower end that imports bar open or close light path.

This device has that motion is flexibly light, and the resistance of motion is little, the efficient height, and compact conformation, the characteristics such as easily manufactured, and can realize that fast vacuum imports, can be widely used in the motion of carrying out in the various vacuum environments.

Claims

1, a kind of reduced vacuum gatherer, it includes drive system 1, imports part 2 and corrugated tube 3, it is characterized in that the one side in the inside and outside wall of described corrugated tube is in the working vacuum chamber 4, another side is in the thick sealed environment 5, and this thick sealed environment 5 is connected with reliever 8.

2, vacuum gatherer according to claim 1 is characterized in that described drive system 1 can be included in the thick sealed environment 5.

3, vacuum gatherer according to claim 1 is characterized in that described reliever 8 is special use or dual-purpose aspiration pump.

4, vacuum gatherer according to claim 1 is characterized in that described drive system 1 can be a linear stepping motor, or rotary stepped machine configuration mechanical transmission mechanism, also can be hand-driven mechanical hook-up.