CN207373405U - A kind of plaster mechanism of ceramic disk processing - Google Patents
A kind of plaster mechanism of ceramic disk processing Download PDFInfo
- Publication number
- CN207373405U CN207373405U CN201721457507.5U CN201721457507U CN207373405U CN 207373405 U CN207373405 U CN 207373405U CN 201721457507 U CN201721457507 U CN 201721457507U CN 207373405 U CN207373405 U CN 207373405U
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- Prior art keywords
- ceramic disk
- chamber
- arm
- transmission belt
- fixed
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- 239000000919 ceramic Substances 0.000 title claims abstract description 57
- 230000007246 mechanism Effects 0.000 title claims abstract description 29
- 239000011505 plaster Substances 0.000 title claims abstract description 17
- 238000012545 processing Methods 0.000 title claims abstract description 16
- 230000005540 biological transmission Effects 0.000 claims abstract description 50
- 238000010438 heat treatment Methods 0.000 claims abstract description 42
- 238000001816 cooling Methods 0.000 claims abstract description 35
- 238000004140 cleaning Methods 0.000 claims abstract description 15
- 239000000498 cooling water Substances 0.000 claims description 6
- 230000005611 electricity Effects 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 2
- 238000013461 design Methods 0.000 abstract description 5
- 238000005201 scrubbing Methods 0.000 abstract description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 7
- 238000004018 waxing Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910003978 SiClx Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000006210 lotion Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000009991 scouring Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Dental Tools And Instruments Or Auxiliary Dental Instruments (AREA)
Abstract
The utility model discloses a kind of plaster mechanisms of ceramic disk processing, including supporting rack, preheating chamber, heating chamber, cooling chamber, transmission arm and electric cabinet, support frame as described above upper right is provided with preheating chamber, and preheating chamber lower inside is fixed with transmission belt, the transmission belt is connected with the transmission belt driving motor being provided on supporting rack, and the header tank to match is installed on the supporting rack below transmission belt, the transmission arm is slidably mounted on rail plate, and is driven above arm and is screwed together with drive screw slip.The plaster mechanism of ceramic disk processing, ceramic disk is scanned using CCD is carried out before chip mounter preheating zone, it can be according to different multiplying, focal length adjusts, the surface appearance of warning in advance ceramic disk, can check that the appearance of ceramic disk includes collapsing angle, rupture with it is dirty, and design automatic ceramic disk scrubbing mechanism in preheating zone, the dirty cleaning of ceramic disk can be strengthened, avoid causing bubble with it is dirty and do over again.
Description
Technical field
The utility model is related to the application fields of brilliant patch, are specially a kind of plaster mechanism of ceramic disk processing.
Background technology
Compared to semi-conducting material, as silicon, germanium, carborundum has superior material property, such as high rigidity, high heat transfer
Property, chemical stability that high electron mobility is become reconciled, therefore, carborundum can be used as third generation semi-conducting material to be used in electronics device
On part, in power device making, can the flat substrate wafer with zero-fault in surface be to influence the brilliant extension that had of outer extension
It is an important factor for layer, the application requirement single-crystal surface ultra-smooth of silicon carbide wafer, zero defect, not damaged, silicon carbide wafer plus
The quality of working medium amount and precision directly influences the performance of its device, for example when wafer surface has tiny flaw, can be transferred to
Epitaxial film and as device critical defect, still, since silicon carbide wafer hardness is only second to diamond, Mohs' hardness
For 9.2, and chemical stability is good, hardly reacted under room temperature with other materials, therefore silicon carbide wafer is processed into carbonization
Silicon wafer monocrystalline is carbon extensively using the major issue that must be solved, the in a semiconductor material most commonly seen material of the third generation
SiClx, gallium nitride, the manufacture craft process of carborundum is complicated, at present, substrate is mainly cut by line, twin grinding, chamfering, high temperature
The main manufacturing procedures such as annealing, patch, the throwing of single side copper, single side CMP, are finally reached the undamaged surface (rough surface of ultra-smooth
Spend Ra≤0.2nm), wherein waxing patch is often ignored part, it is believed that wafer hardness is hard, and waxing will not be because of ceramic disk
Or chip is not clean and influence the flatness after patch, therefore the TTV after polishing is often resulted in, LTV is abnormal, and the country mainly makes now
Waxing patch is done with traditional Sapphire Substrate processing technology, Chang Yinwei, which has pasted chip, has minute bubbles or impurity to generate, at present mostly
Patch is done using solid-state and liquid wax, general is all manually solid state wax form, and automatic board is all liquid wax formal operations, machine
Platform design is divided into ceramic disk heating, and wax is got rid of in chip waxing, patch, ceramic disk cooling and etc. completion, for the ceramics before patch
Disk situation can not be grasped, and often need etc. paste piece just discovery chip back surface dirty the problems such as causing wafer breakage or wafer shift.
Utility model content
The purpose of this utility model is to provide a kind of plaster mechanism of ceramic disk processing, to solve in above-mentioned background technology
The board design of proposition is divided into ceramic disk heating, and wax is got rid of in chip waxing, patch, ceramic disk cooling and etc. completion, for patch
Preceding ceramic disk situation can not be grasped, and often need etc. paste piece just discovery chip back surface is dirty and cause wafer breakage or wafer shift
The problems such as.
To achieve the above object, the utility model provides following technical solution：A kind of plaster mechanism of ceramic disk processing, bag
It includes supporting rack, preheating chamber, heating chamber, cooling chamber, transmission arm and electric cabinet, support frame as described above upper right and is provided with preheating
Room, and preheating chamber lower inside is fixed with transmission belt, the transmission belt and the transmission belt driving motor phase being provided on supporting rack
Connection, and the header tank to match is installed on the supporting rack below transmission belt, the preheating chamber inner right side is fixed with CCD machines
Structure, and CCD mechanisms side is equipped with cleaning solution bucket, the cleaning solution bucket is connected by pipeline with cleaning rag, and is cleaned and smeared
Cloth matches with the ceramic dish structure placed on transmission belt, and heating chamber is provided on adjacent supporting rack on the left of the preheating chamber,
And heating chamber is fixed with the heating dish that lower section carries heating unit, and cooling chamber is provided on the left of the preheating chamber, and is cooled down
Chamber interior is equipped with the cooler pan that lower section carries cooling pipe, and slip is equipped with above the preheating chamber, heating chamber and cooling chamber
Guide rail, and the drive screw being connected with driving motor is installed inside rail plate, the transmission arm is slidably mounted on cunning
On dynamic guide rail, and it is driven above arm and is screwed together with drive screw slip.
Preferably, electric cabinet is installed in the middle part of support frame as described above, and electric cabinet by electrically with CCD mechanisms, driving motor,
Transmission arm, heating unit and transmission belt driving motor are connected together.
Preferably, the transmission belt upper end set inside the preheating chamber is with cleaning the distance between rag with being set on transmission belt
The height for the ceramic disk put matches, and heating dish and cooler pan match with ceramic disk shape size, while ceramic disk and biography
Arm of starting is corresponding.
Preferably, the preheating chamber, heating chamber and cooling chamber are overall structure, and in preheating chamber, heating chamber and cooling chamber
Portion is separated by short partition plate, while fixed rail plate length and preheating chamber, heating above preheating chamber, heating chamber and cooling chamber
The cooler pan and drive belt configuration overall distance length set inside room and cooling chamber matches.
Preferably, the transmission arm is by lifting cylinder, sliding support, arm installing plate, fixed plate, positioner, folder
Block and motor grasping structures collectively constitute, and are driven arm and are slided by fixed sliding support in the middle part of fixed plate with rail plate
It links together, while the fixed lifting cylinder in both sides links together with arm installing plate above fixed plate, the arm peace
Positioner is fixedly arranged in the middle of below loading board, and arm installing plate both sides are hinged with fixture block, while fixture block upper end and fixture block outside
Fixed motor grasping structures are hinged on arm installing plate.
Preferably, the cooling pipe below the cooler pan is linked together by pipeline and cooling water tank, and cooler pan
It is corresponding with fixed cooling water tank position on supporting rack.
Compared with prior art, the beneficial effects of the utility model are：The plaster mechanism of ceramic disk processing, structure setting
Rationally, using CCD scanning ceramic disks are carried out before chip mounter preheating zone, it can adjust according to different multiplying, focal length, warn in advance
Show the surface appearance of ceramic disk, avoid it is unnecessary do over again, can check that the appearance of ceramic disk includes collapsing angle, rupture with dirty,
And design automatic ceramic disk scrubbing mechanism in preheating zone, the dirty cleaning of ceramic disk can be strengthened, avoid causing bubble with it is dirty
And do over again, on the one hand this design can allow ceramic disk to ensure that ceramic disk is clean flawless, avoid because collapsing the abnormal shadow such as angle
Quality is rung, on the other hand can mitigate personnel inspection burden, reduces re-posted problem, improves patch efficiency, reduces patch cost, most
Reach the requirement of chip flatness technology eventually with reducing cost.
Description of the drawings
Fig. 1 faces expanded schematic diagram for the utility model structure；
Fig. 2 is the utility model structure driven arm schematic diagram.
In figure：1st, supporting rack, 2, ceramic disk, 3, preheating chamber, 4, CCD mechanisms, 5, clean rag, 6, cleaning solution bucket, 7 plus
Hot cell, 8, rail plate, 9, cooling chamber, 10, transmission arm, 11, drive screw, 12, driving motor, 13, cooler pan, 14, cold
But water tank, 15, cooling pipe, 16, electric cabinet, 17, heating dish, 18, heating unit, 19, transmission belt, 20, header tank, 21, pass
Dynamic band driving motor, 22, lifting cylinder, 23, sliding support, 24, arm installing plate, 25, fixed plate, 26, positioner, 27,
Fixture block, 28, motor grasping structures.
Specific embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
It clearly and completely describes, it is clear that the described embodiments are only a part of the embodiments of the utility model rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are without making creative work
All other embodiments obtained shall fall within the protection scope of the present invention.
- 2 are please referred to Fig.1, the utility model provides a kind of technical solution：A kind of plaster mechanism of ceramic disk processing, including
Supporting rack 1, preheating chamber 3, heating chamber 7, cooling chamber 9, transmission arm 10 and electric cabinet 16,1 upper right of supporting rack are provided with pre-
Hot cell 3, and 3 lower inside of preheating chamber is fixed with transmission belt 19, transmission belt 19 and the transmission belt driving electricity being provided on supporting rack 1
Machine 21 is connected, and the header tank 20 to match is equipped on the supporting rack 1 of 19 lower section of transmission belt, and 1 middle part of supporting rack is equipped with
Electric cabinet 16, and electric cabinet 16 by electrically with CCD mechanisms 4, driving motor 12, transmission arm 10, heating unit 18 and transmission
Band driving motor 21 is connected together, and 3 inner right side of preheating chamber is fixed with CCD mechanisms 4, and 4 side of CCD mechanisms is equipped with clearly
Washing lotion bucket 6, cleaning solution bucket 6 are connected by pipeline with cleaning rag 5, and clean rag 5 and the ceramics placed on transmission belt 19
2 structure of disk matches, 19 upper end of transmission belt that the inside of preheating chamber 3 is set with clean the distance between rag 5 on transmission belt 19
The height of the ceramic disk 2 of setting matches, and heating dish 17 and cooler pan 13 match with 2 shape size of ceramic disk, make pottery simultaneously
Porcelain dish 2 is corresponding with transmission arm 10, and heating chamber 7 is provided on the adjacent supporting rack 1 in 3 left side of preheating chamber, and inside heating chamber 7
The heating dish 17 that lower section carries heating unit 18 is fixed with, 3 left side of preheating chamber is provided with cooling chamber 9, and 9 inside installation of cooling chamber
There is the cooler pan 13 that lower section carries cooling pipe 15, preheating chamber 3, heating chamber 7 and 9 top of cooling chamber are equipped with rail plate 8, and
The drive screw 11 being connected with driving motor 12 is installed, preheating chamber 3, heating chamber 7 and cooling chamber 9 are inside rail plate 8
Overall structure, and being separated inside preheating chamber 3, heating chamber 7 and cooling chamber 9 by short partition plate, while preheating chamber 3, heating chamber 7 and cold
But the cooler pan 13 and pass that 9 fixed 8 length of rail plate in top of room is set with preheating chamber 3, heating chamber 7 and 9 inside of cooling chamber
Dynamic 19 structure overall distance length of band matches, and the cooling pipe 15 of 13 lower section of cooler pan is connected by pipeline with cooling water tank 14
Together, and cooler pan 13 is corresponding with fixed 14 position of cooling water tank on supporting rack 1, and transmission arm 10 is slidably mounted on cunning
On dynamic guide rail 8, and be driven 10 top of arm and be screwed together with the slip of drive screw 11, be driven arm 10 by lifting cylinder 22,
Sliding support 23, arm installing plate 24, fixed plate 25, positioner 26, fixture block 27 and motor grasping structures 28 collectively constitute, and
It is fixed simultaneously together with transmission arm 10 is slidably connected by the 25 fixed sliding support 23 in middle part of fixed plate with rail plate 8
The fixed lifting cylinder 22 in 25 top both sides of plate links together with arm installing plate 24, and 24 lower section middle part of arm installing plate is fixed
There is positioner 26, and 24 both sides of arm installing plate are hinged with fixture block 27, while 27 upper end of fixture block is pacified with 27 outside arm of fixture block
Fixed motor grasping structures 28 are hinged in loading board 24.
Operation principle：When using the plaster mechanism that the ceramic disk is processed, ceramic disk 2 is placed on transmission belt 19 first
On, and transmission belt 19 is fixed together with transmission belt driving motor 21, ceramic disk 2 is by transmission belt 19 by CCD mechanisms 4
It is scanned, checks ceramic disk 2 using the portrait of different multiplying, ceramic disk 2 is allow, which to confirm in advance, zero defect, detects simultaneously
After finishing, the scouring rag 5 for being connected with cleaning solution bucket 6 is set by 3 inside of preheating chamber, and cleaning rag 5 can be dustless etc. according to difference
Grade is adjusted with cleanliness requirements, and it is dirty to make effectively to remove ceramic disk, and driving motor 12, which promotes, to be driven arm 10 and move,
Positioner 26 carries out accurately aligning ceramic disk 2, and transmission arm 10 promotes arm installing plate 24 downwards by lifting cylinder 22
Movement, while by motor grasping structures 28 fixture block 27 is promoted to grip ceramic disk 2, ceramic disk 2 is made to enter adding in heating chamber 7
In hot plate 17, by electric cabinet 16 heating unit 18 is controlled to be heated, heating is completed by being driven arm 10 by ceramic disk 2
The cooler pan 13 that gripping is entered in cooling chamber 9 carries out cooling treatment, works here it is the plaster mechanism that the ceramic disk is processed
Whole process.
While there has been shown and described that the embodiment of the utility model, for the ordinary skill in the art,
It is appreciated that in the case where not departing from the principle of the utility model and spirit can these embodiments be carried out with a variety of variations, repaiied
Change, replace and modification, the scope of the utility model are defined by the appended claims and the equivalents thereof.
Claims (6)
1. a kind of plaster mechanism of ceramic disk processing, including supporting rack (1), preheating chamber (3), heating chamber (7), cooling chamber (9), biography
It starts arm (10) and electric cabinet (16), it is characterised in that：Support frame as described above (1) upper right is provided with preheating chamber (3), and preheats
Room (3) lower inside is fixed with transmission belt (19), the transmission belt (19) and the transmission belt driving electricity being provided on supporting rack (1)
Machine (21) is connected, and the header tank (20) to match, the preheating chamber are equipped on the supporting rack (1) below transmission belt (19)
(3) inner right side is fixed with CCD mechanisms (4), and CCD mechanisms (4) side is equipped with cleaning solution bucket (6), the cleaning solution bucket (6)
It is connected by pipeline with cleaning rag (5), and cleans rag (5) and ceramic disk (2) the structure phase placed on transmission belt (19)
It matches, is provided with heating chamber (7) on the left of the preheating chamber (3) on adjacent supporting rack (1), and is fixed with inside heating chamber (7)
Lower section carries the heating dish (17) of heating unit (18), and cooling chamber (9), and cooling chamber (9) are provided on the left of the preheating chamber (3)
Inside is equipped with the cooler pan (13) that lower section carries cooling pipe (15), the preheating chamber (3), heating chamber (7) and cooling chamber (9)
Top is equipped with rail plate (8), and is equipped with the drive screw being connected with driving motor (12) inside rail plate (8)
(11), the transmission arm (10) is slidably mounted on rail plate (8), and is driven above arm (10) and drive screw (11)
Slip is screwed together.
2. a kind of plaster mechanism of ceramic disk processing according to claim 1, it is characterised in that：In support frame as described above (1)
Portion is equipped with electric cabinet (16), and electric cabinet (16) by electrically with CCD mechanisms (4), driving motor (12), transmission arm
(10), heating unit (18) and transmission belt driving motor (21) are connected together.
3. a kind of plaster mechanism of ceramic disk processing according to claim 1, it is characterised in that：In the preheating chamber (3)
Transmission belt (19) upper end that portion is set is with cleaning rag the distance between (5) and the ceramic disk (2) that is set on transmission belt (19)
Highly match, and heating dish (17) and cooler pan (13) match with ceramic disk (2) shape size, at the same ceramic disk (2) with
It is corresponding to be driven arm (10).
4. a kind of plaster mechanism of ceramic disk processing according to claim 1, it is characterised in that：The preheating chamber (3) adds
Hot cell (7) and cooling chamber (9) are overall structure, and inside preheating chamber (3), heating chamber (7) and cooling chamber (9) by short partition plate every
It opens, while fixed rail plate (8) length and preheating chamber (3) above preheating chamber (3), heating chamber (7) and cooling chamber (9), adds
The cooler pan (13) and transmission belt (19) structure overall distance length set inside hot cell (7) and cooling chamber (9) matches.
5. a kind of plaster mechanism of ceramic disk processing according to claim 1, it is characterised in that：The transmission arm (10)
By lifting cylinder (22), sliding support (23), arm installing plate (24), fixed plate (25), positioner (26), fixture block (27) and
Motor grasping structures (28) collectively constitute, and be driven arm (10) by fixed sliding support (23) in the middle part of fixed plate (25) with
Rail plate (8) is slidably connected together, while the fixed lifting cylinder in both sides (22) is installed with arm above fixed plate (25)
Plate (24) links together, and positioner (26), and arm installing plate are fixedly arranged in the middle of below the arm installing plate (24)
(24) both sides are hinged with fixture block (27), while fixture block (27) upper end and fixed electricity on fixture block (27) outside arm installing plate (24)
Machine grasping structures (28) are hinged.
6. a kind of plaster mechanism of ceramic disk processing according to claim 1, it is characterised in that：Under the cooler pan (13)
The cooling pipe (15) of side is linked together by pipeline and cooling water tank (14), and solid on cooler pan (13) and supporting rack (1)
Fixed cooling water tank (14) position is corresponding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721457507.5U CN207373405U (en) | 2017-11-06 | 2017-11-06 | A kind of plaster mechanism of ceramic disk processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721457507.5U CN207373405U (en) | 2017-11-06 | 2017-11-06 | A kind of plaster mechanism of ceramic disk processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207373405U true CN207373405U (en) | 2018-05-18 |
Family
ID=62334081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721457507.5U Active CN207373405U (en) | 2017-11-06 | 2017-11-06 | A kind of plaster mechanism of ceramic disk processing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207373405U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108918276A (en) * | 2018-07-03 | 2018-11-30 | 上海曙赢新材料有限公司 | A kind of ceramic material intensity detecting device of the new material exploitation convenient for picking and placing |
| CN110610879A (en) * | 2019-09-27 | 2019-12-24 | 江西兆驰半导体有限公司 | Bear automatic wax equipment of conveying of pottery dish of LED wafer down |
-
2017
- 2017-11-06 CN CN201721457507.5U patent/CN207373405U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108918276A (en) * | 2018-07-03 | 2018-11-30 | 上海曙赢新材料有限公司 | A kind of ceramic material intensity detecting device of the new material exploitation convenient for picking and placing |
| CN108918276B (en) * | 2018-07-03 | 2021-02-12 | 南通恩普热能技术有限公司 | New material development is with ceramic material intensity detection device of getting and putting of being convenient for |
| CN110610879A (en) * | 2019-09-27 | 2019-12-24 | 江西兆驰半导体有限公司 | Bear automatic wax equipment of conveying of pottery dish of LED wafer down |
| CN110610879B (en) * | 2019-09-27 | 2023-11-24 | 江西兆驰半导体有限公司 | Automatic ceramic disc conveying and waxing equipment for bearing LED wafers |
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| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240605 Address after: 410000 No. 399, Changxing Road, Changsha hi tech Development Zone, Changsha City, Hunan Province Patentee after: Hunan San'an Semiconductor Co.,Ltd. Country or region after: China Address before: 362211 enterprise operation center building, Jiangpu community, Chendai Town, Jinjiang City, Quanzhou City, Fujian Province Patentee before: FUJIAN NORSTEL MATERIAL TECHNOLOGIES Co.,Ltd. Country or region before: China |