CN207365078U - Vent gas treatment tower combustion chamber port cleaning plant and vent gas treatment tower - Google Patents
Vent gas treatment tower combustion chamber port cleaning plant and vent gas treatment tower Download PDFInfo
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- CN207365078U CN207365078U CN201721017680.3U CN201721017680U CN207365078U CN 207365078 U CN207365078 U CN 207365078U CN 201721017680 U CN201721017680 U CN 201721017680U CN 207365078 U CN207365078 U CN 207365078U
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Abstract
The utility model provides a kind of vent gas treatment tower combustion chamber port cleaning plant and vent gas treatment tower.Vent gas treatment tower combustion chamber port cleaning plant includes：The extensible member being arranged on outside port, it can overall elongated and shortening vertically under internal pressure-driven；It is arranged in port, the cleaning piece being connected with extensible member axial direction one end.This vent gas treatment tower combustion chamber port cleaning plant solves the problems, such as the blocking of combustion chamber port.
Description
Technical field
It the utility model is related to field of semiconductor manufacture, more particularly to vent gas treatment tower combustion chamber port cleaning plant and tail
Gas disposal tower.
Background technology
The tail gas of semiconductor epitaxial process is flammable gas, such as CH4、HCl、B2H6、GeH4Deng gas.Usually in tail
Mode in gas disposal tower by burning removes these fuel gas, avoids directly discharging, and pollutes environment.In vent gas treatment mistake
Cheng Zhong, the compound powder for generation of burning can gradually be deposited near ports, cause the blocking of port.Therefore, set at port
Cleaning plant is put, the powder for being deposited in port can be removed, dredges port.
Prior art vent gas treatment tower combustion chamber port cleaning plant includes：Spring, one end of spring and the axis of piston rod
It is connected to one end；The axial other end of piston rod is located at cylinder interior, and is in contact with the inner wall of cylinder.The axial direction of piston rod is another
One end and cylinder inner wall relative motion drive spring in axial direction to move back and forth, and make the other end of spring by powder accumulation area
Adhesive is removed, and then the purpose for preventing port from blocking.But with the growth of cleaning plant working time, piston rod
Frictional force between cylinder constantly increases, and final piston rod is stuck, and can not move back and forth again, it is impossible to solves port and blocks up
The problem of plug, also reduce the exhaust capacity of vent gas treatment tower.
Therefore, the prior art can solve port blocking there is an urgent need for one kind and improve the end of vent gas treatment tower exhaust capacity
Mouth cleaning plant.
Utility model content
The utility model embodiment provides a kind of vent gas treatment tower combustion chamber port cleaning plant and vent gas treatment tower, profit
Cylinder and the mechanical transmissioning piece of piston rod relative motion are replaced with extensible member, solves the blockage problem of port, while is also improved
The exhaust capacity of vent gas treatment tower.
The utility model provides a kind of vent gas treatment tower combustion chamber port cleaning plant, including：It is arranged on outside port
Extensible member, it can overall elongated and shortening vertically under internal pressure-driven；It is arranged in port, with extensible member axial direction one end
The cleaning piece that portion is connected.
Optionally, the side wall of extensible member is foldable structure.
Optionally, further include：It is arranged at the pressure charging valve and relief valve of extensible member axial direction the other end.
Optionally, further include：The lid of extensible member axial direction the other end is arranged at, pressure charging valve and relief valve are arranged at lid
Roof or side wall.
Optionally, further include：With the matched diversion pipe of cleaning piece, diversion pipe is inscribed in the inner wall of port.
Optionally, diversion pipe includes：Spiral stream guidance pipe or oblique diversion pipe.
Optionally, cleaning piece includes：Spring, cleaning rod or cleaning brush.
Optionally, the mode that extensible member axial end portion is connected with cleaning piece includes：It is flexibly connected or is fixedly connected.
Optionally, the axial direction of extensible member, cleaning piece and port is consistent.
The utility model additionally provides a kind of vent gas treatment tower, including：
Any vent gas treatment tower combustion chamber port as previously described cleaning plant；
Combustion chamber below the cleaning plant of vent gas treatment tower combustion chamber port, the locular wall of combustion chamber are provided with and burn
The port of chamber interior connection；
The reference chamber connected by port with the inside of combustion chamber, the other end of extensible member are connected to the interior of reference chamber
Wall；
The device for pressure measurement being arranged at reference chamber air inlet.
Optionally, further include：Control device, device for pressure measurement are connected by control device with extensible member.
Optionally, device for pressure measurement includes：Pointer pressure gauge or digital manometric instrument.
Optionally, vent gas treatment tower includes multiple ports, and each port is provided with the cleaning of vent gas treatment tower combustion chamber port
Device.
Optionally, lid, pressure charging valve and relief valve are located at the outside of reference chamber.
Compared with prior art, had the advantage that in the embodiment of the utility model：
Vent gas treatment tower combustion chamber port provided by the utility model cleaning plant includes：It is arranged on flexible outside port
Part, it can overall elongated and shortening vertically under internal pressure-driven；It is arranged in port, with extensible member axial direction one end phase
Cleaning piece even.Extensible member need not occur to clear up the port being blocked such as the relative motion between piston rod and cylinder, avoid
Occur in the prior art piston rod by the stuck phenomenon of cylinder.Solve the problems, such as port blocking, improve vent gas treatment tower row
The ability of gas.In addition, after occurring without the problem of being stuck, the time of device normal work increases, and saves maintenance and more changes the outfit
The time put, improve work efficiency.
Further, it is inscribed in the inner wall of port with the matched diversion pipe of cleaning piece, diversion pipe.Diversion pipe to tail gas into
Enter combustion chamber to carry out stablizing water conservancy diversion, avoid the occurrence of tail gas causes admission line to tail between combustion chamber in port because flowing confusion
The unstable phenomenon of atmospheric pressure.In addition, tail gas stablizes water conservancy diversion prevents diffusion of the compound powder to port into combustion chamber, keep away
Exempt from powder bonding and reduce effective air inlet area in port inner wall, reduce quantity of the powder in port lower part accumulation bonding.
Brief description of the drawings
Fig. 1 is cuing open for the utility model first embodiment vent gas treatment tower combustion chamber port cleaning plant and vent gas treatment tower
Face figure；
Fig. 2 is the profile of the utility model embodiment diversion pipe in axial direction；
Fig. 3 is cuing open for the utility model second embodiment vent gas treatment tower combustion chamber port cleaning plant and vent gas treatment tower
Face figure.
Embodiment
It is stuck as it was previously stated, piston rod easily occurs in port art cleaning plant, vent gas treatment tower exhaust capacity is weak
The problems such as.
It has been investigated that the reason for causing the above problem is：The compound powder of burning generation can enter cylinder guidance groove
With the transmission space of piston rod, increase the frictional force of relative motion, with the continuous accumulation of powder, cylinder and piston bar is opposite to be transported
Dynamic frictional force further increases, and piston rod is eventually stuck.It is proposed replaces piston rod with the extensible member that integral telescopic moves
With the scheme of cylinder, can solve the above problems.
It has also been found that, tail gas is more chaotic in port flowing, causes port pressure unstable after further research.Meanwhile
There is adhesive because tail gas will also result in port inner wall in port flowing confusion, reduce effective air inlet area.The utility model
It can solve the problems, such as that above-mentioned port pressure is unstable, effective admission area reduces at the same time.
In order to solve this problem, the utility model provides a kind of port cleaning plant, including：Extensible member is set, is passed through
Extensible member internal gas pressure is controlled, extensible member can be along its axial integral telescopic, it is not necessary to relative motion occurs with component, you can
Realize the elongation and shortening of extensible member, instead of the mechanical driving device that cylinder and piston rod mutually move.
Further, diversion pipe is set in port inner wall, avoids gas and flow chaotic state at port, ensure that and be
The stabilization for inner exhaust gas pressure of uniting.
The various exemplary embodiments of the utility model are described in detail now with reference to attached drawing.It is to be understood that unless in addition
Illustrate, component and the positioned opposite of step that otherwise illustrates in these embodiments, numerical expression and numerical value should not be by
It is interpreted as the limitation to the scope of the utility model.
Moreover, it will be appreciated that for the ease of description, the size of all parts shown in attached drawing is not necessarily according to reality
The proportionate relationship on border is drawn, such as some layers of thickness or width can amplify relative to other layers.
The description to exemplary embodiment is merely illustrative below, in any sense all not as new to this practicality
Type and its application or any restrictions used.
Here may be not discussed in detail for technology, method and apparatus known to person of ordinary skill in the relevant, but
In the case of applicable these technologies, method and apparatus, these technologies, method and apparatus should be considered as one of this specification
Point.
It should be noted that similar label and letter represent similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined or illustrates in attached drawing, then it need not be further discussed in the explanation of subsequent attached drawing.
First embodiment.
Please refer to Fig.1 and Fig. 2.
Please refer to Fig.1, the utility model first embodiment vent gas treatment tower combustion chamber port cleaning plant and vent gas treatment
Tower.
Vent gas treatment tower combustion chamber port cleaning plant includes：The extensible member 210 being arranged on outside port 102, it is in inside
Can overall elongated and shortening vertically under pressure-driven；It is arranged in port 102, is connected with the axial one end of extensible member 210
Cleaning piece 103.
The axial elongation of extensible member 210 is subject to the size of 210 internal gas pressure of extensible member to control with shortening.Specifically,
In the embodiment of the utility model, when 210 internal gas pressure of extensible member increases, extensible member 210 is axially elongated；When stretching
When 210 internal gas pressure of contracting part reduces, extensible member 210 shortens vertically.It will be evident that extensible member 210 is played as cleaning piece 103
The effect of reciprocating motion power is provided.
The side wall of extensible member 210 is foldable structure, and foldable structure can make extensible member 210 flexible.Inside extensible member 210
When pressure increases, foldable structure can be unfolded, and the volume increase of extensible member 210, extends extensible member 210；When in extensible member 210
When portion's pressure reduces, foldable structure can fold, and the volume of extensible member 210 reduces, and shortens extensible member 210.
Powder accumulation area 101 is the region that proximal port 102 is leaned on positioned at the inside of combustion chamber.Compound powder after exhaust combustion
Last easily accumulation is bonded in powder accumulation area 101.
Cleaning piece 103 is used for the adhesive for clearing up powder accumulation area 101, dredges port 102.The axial direction side of cleaning piece 103
To consistent with the telescopic direction of extensible member 210.In Fig. 1, the axial direction of cleaning piece 103 refers to cleaning piece 103 over its length
Direction.One end of cleaning piece 103 is connected with 210 end of extensible member, and the other end is used for the bonding for removing powder accumulation area 101
Thing.
Cleaning piece 103 includes with the mode that extensible member 210 is connected：It is flexibly connected or is fixedly connected, does not have herein
Body limits.Specifically, in the utility model embodiment, cleaning piece 103 is flexibly connected with extensible member 210.Herein, activity connects
The mode connect such as hinge connection, that is, 103 relative telescopic part 210 of cleaning piece can freely swing after connecting.
It should be noted that one end of cleaning piece 103 is not specifically limited with the position that 210 end of extensible member is connected,
In the other embodiment of the utility model, as long as one end of cleaning piece 103 and the connection of 210 end of extensible member meet extensible member
210 telescopic direction is consistent with the axial direction of cleaning piece 103, and cleaning piece 103 can be along extensible member with extensible member 210
The condition of 210 telescopic direction synchronous reciprocating movement.
Cleaning piece 103 includes：Spring, cleaning rod or cleaning brush.Specifically, in the utility model embodiment, cleaning piece
103 be spring.Compared with cleaning rod, cleaning brush, spring more light and flexible.
In the utility model embodiment, extensible member 210, cleaning piece 103 are consistent with the axial direction of port 102.
In the utility model embodiment, extensible member 210 further includes：It is arranged at the increasing of the axial the other end of extensible member 210
Pressure valve 211 and relief valve 212.Control 210 internal pressure of extensible member is turned on and off by pressure charging valve 211 or relief valve 212
Increase or reduction.
Wherein, pressure charging valve 211 is used to control gas to flow into or stop flow into extensible member 210.When pressure charging valve 211 is opened,
Gas flows into extensible member 210, so that 210 internal gas pressure of extensible member increases, extensible member 210 extends.
Relief valve 212 is used to control the gas inside extensible member 210 to flow out or stop outflow extensible member 210.Work as relief valve
During 212 unlatching, the gas outflow extensible member 210 inside extensible member 210, so that 210 internal gas pressure of extensible member reduces, stretches
Contracting part 210 shortens.
It should be noted that the shape of pressure charging valve 211 and relief valve 212, position relationship, size do not do specific limit
System, in the other embodiment of the utility model, as long as can meet the condition for controlling the elongation of extensible member 210 with shortening.
In the other embodiment of the utility model, flowing in and out the gas of extensible member 210 includes：Air or indifferent gas
Body, herein and is not specifically limited.Specifically, in the utility model embodiment, the gas of extensible member 210 is flowed in and out
For air.Because air cost is relatively low, it is easy to obtain.
In the utility model embodiment, the cleaning plant specific course of work in vent gas treatment tower combustion chamber port includes：
When pressure charging valve 211 is opened, and relief valve 212 is closed, gas flows into extensible member 210, and 210 internal gas pressure of extensible member increases,
Extensible member 210 extends, so as to drive cleaning piece 103 to be moved by port 102 to 100 internal direction of combustion chamber, and then clears up powder
Adhesive at last accumulation area 101.When pressure charging valve 211 is closed, and relief valve 212 is opened, the gas outflow inside extensible member 210
Extensible member 210,210 internal gas pressure of extensible member reduce, and extensible member 210 shortens, so as to drive cleaning piece 103 to pass through port
102 move to away from the direction inside combustion chamber 100.So far, vent gas treatment tower combustion chamber port cleaning plant completes once
Clear up the process of adhesive.
In the utility model embodiment, vent gas treatment tower combustion chamber port cleaning plant further includes：Setting and cleaning piece
103 matched diversion pipes 301.Diversion pipe 301 is inscribed in the inner wall of port 102.
Herein, it is inscribed and refers to：Diversion pipe 301 and the inner wall of port 102 are closely coupled.The effect of diversion pipe 301 is
The water conservancy diversion stablized to the tail gas for entering combustion chamber 100 by port 102, avoids tail gas chaotic by being flowed during port 102.
Herein, it is engaged and refers to：The size of diversion pipe 301 and the size dimension of cleaning piece 103 are adapted.Because cleaning
Part 103 can be moved back and forth by diversion pipe 301, so the size of cleaning piece 103 should be slightly less than the size of diversion pipe 301, energy
Enough ensure that cleaning piece 103 can smoothly be moved back and forth in the inside of diversion pipe 301.
Please refer to Fig.2, diversion pipe 301.
Diversion pipe 301 includes：Spiral stream guidance pipe or oblique diversion pipe.The type of diversion pipe 301 is according in diversion pipe 301
The structures shape of wall fuisw rib 302.Spiral stream guidance pipe refers to the fuisw rib 302 of its inner wall helically type.Oblique diversion pipe is
The fuisw rib 302 for referring to its inner wall is linear pattern, and certain angle is presented relative to the axial direction of diversion pipe 301 in fuisw rib 302
Inclination, i.e., it is oblique.Specifically, in the utility model embodiment, diversion pipe 301 is spiral stream guidance pipe.
Diversion pipe 301 is tubular structure.Outer protrusion forms edge, diversion pipe 301 laterally for one end of 301 tube wall of diversion pipe
It is fixed on by edge on port 102." L " type is presented in 301 section of diversion pipe with borderline structure, please refers to Fig.2.
In the utility model embodiment, the space between 301 inner wall stream muscle 302 of diversion pipe is diversion trench 303.Tail gas passes through
When crossing diversion pipe 301 into combustion chamber 100, tail gas is under certain flow velocity along 303 helical flow of diversion trench.In outflow port
During 102 entrance combustion chamber 100, tail gas remains the state of stable helical flow.Compared with being not provided with diversion pipe 301, setting is led
After flow tube 301, tail gas can more stably enter combustion chamber 100, avoid tail gas from flowing confusion at port 102, cause tail
The unstable phenomenon of atmospheric pressure occurs.
The number of 301 inner wall fuisw rib 302 of diversion pipe, rotation angle, direction of rotation, height, width will according to tail gas into
Tolerance is rationally designed, and is not specifically limited here.Specifically, in the utility model embodiment, 301 inner wall of diversion pipe
302 numbers of fuisw rib be one.
It should be noted that in the other embodiment of the utility model, when cleaning piece 103 does not move back and forth, cleaning piece
103 can also be located at the outside of port 102, be not particularly limited here, as long as meeting cleaning piece 103 when moving back and forth
The condition of the adhesive in powder accumulation area 101 can be cleared up.
Second embodiment.
Please refer to Fig.3, the utility model second embodiment vent gas treatment tower combustion chamber port cleaning plant and vent gas treatment
Tower.
Except also being wrapped with the like configurations described in first embodiment, vent gas treatment tower combustion chamber port cleaning plant
Include：The lid 213 of the axial the other end of extensible member 210 is arranged at, pressure charging valve 411 and relief valve 412 are arranged at the top of lid 213
Wall or side wall.
One end of lid 213 is connected with the sealing of extensible member 210.The shape of lid 213, size dimension are not specifically limited,
As long as when pressure charging valve 411 and relief valve 412 are turned off, the inside of extensible member 210 is in sealing state.411 He of pressure charging valve
Relief valve 412 can be arranged on the roof or side wall of lid 213.
Need exist for illustrating, in the utility model embodiment, the connection mode of extensible member 210 and cleaning piece 103, position
Put relation and working method is identical with first embodiment, refer to first embodiment, therefore not to repeat here.
The position relationship of pressure charging valve 411 and relief valve 412, shape, size are not particularly limited.And pressure charging valve 411
Effect with relief valve 412 is consistent with the first embodiment of the utility model, refer to first embodiment, is not described in detail here.
3rd embodiment.
The utility model embodiment additionally provides a kind of vent gas treatment tower.
As shown in figure 3, vent gas treatment tower includes：
Previously described any type vent gas treatment tower combustion chamber port cleaning plant；
Combustion chamber 100 below the cleaning plant of vent gas treatment tower combustion chamber port, the locular wall of combustion chamber 100 are provided with
The port 102 connected with the inside of combustion chamber 100；
The reference chamber 200 connected by port 102 with the inside of combustion chamber 100, the other end of extensible member 210 are connected to
The inner wall of reference chamber 200；
The device for pressure measurement 107 being arranged at 200 air inlet of reference chamber.
Herein, it is necessary to which explanation, as shown in Figure 1, in the utility model embodiment, port 102 is air inlet.Often
A combustion chamber 100 can have multiple ports 102.It is provided with the same time at each port 102 at the tail gas of the utility model embodiment
Li Ta combustion chambers port cleaning plant.
Combustion chamber 100 is the place of exhaust combustion.It is provided with the locular wall of combustion chamber 100 and its internal port connected
102, tail gas enters inside combustion chamber 100 by port 102.
Reference chamber 200 be tail gas entry port 102 before a region.Reference chamber 200 passes through port 102 and combustion chamber
It is connected inside 100.The other end of extensible member 210 is fixedly connected on the inner wall of reference chamber 200.Herein, it is fixedly connected
Mode is such as bolted or screw-threaded coupling.
In the utility model embodiment, extensible member 210 is extended and shortened inside reference chamber 200, pressure charging valve
211st, relief valve 212 and lid 213 are outside reference chamber 200.
Device for pressure measurement 107 is used for measuring the pressure of reference chamber inner exhaust gas.In the utility model embodiment, pressure is surveyed
Amount device 107 includes：Pointer pressure gauge or digital manometric instrument.
It should be noted that in the other embodiment of the utility model, device for pressure measurement 107 can also be arranged on ginseng
The other positions of room 200 are examined, as long as can meet the condition for measuring 200 inner exhaust gas pressure of reference chamber.
In the utility model embodiment, vent gas treatment tower further includes：Control device (not shown).
Pressure upper limit value and threshold pression value are set with control device.Control device includes：
Acquisition module, acquisition module can obtain the 200 inside tail gas pressure of reference chamber that device for pressure measurement 107 measures
Value；
Judgment module, judgement comparison is carried out by the pressure value got and the pressure upper limit value of setting with threshold pression value,
Export judging result；
Instruction module, by judging result, produces instruction, by the unlatching for instructing control pressure charging valve 211 and relief valve 212
With closing.
In the utility model embodiment, device for pressure measurement 107 is connected by control device with extensible member 210.Even
Connecing mode includes being electrically connected.
Specifically, in the utility model embodiment, vent gas treatment tower combustion chamber port cleaning plant is in vent gas treatment tower
On operation principle include：The tail gas of epitaxy technique is burnt by reference to room 200 and port 102 into combustion chamber 100.Tail gas fires
Powder accumulation area 101 can be gradually bonded in by burning the compound powder of generation, caused port 102 to block, reduced effective air inlet face
Product.And tail gas still with original flow by port 102 enter combustion chamber 100 when, can cause 200 inner exhaust gas pressure of reference chamber increase
Greatly, i.e., 107 pressure registration of device for pressure measurement increases, the pressure value that control device obtains at device for pressure measurement 107
Increasing.When 107 registration of device for pressure measurement increases to certain numerical value, i.e., when port 102 is obstructed to a certain degree, it is necessary to
The adhesive in powder accumulation area 101 is cleared up, dredges port 102.At this time, the pressure value that control device judges to obtain reaches or surpasses
The pressure upper limit numerical value set is gone out, control device produces instruction, and pressure charging valve 211 is opened in control, and (relief valve 212, which is in, closes shape
State).Gas flows into extensible member 210, and the increase of 210 internal pressure of extensible member, extensible member 210 extends, so as to drive 103 edge of cleaning piece
It is axial to be moved to combustion chamber, the adhesive in powder accumulation area 101 is removed, port 102 is dredged, and exhaust gas flow is unobstructed.
At this time, 200 inner exhaust gas pressure of reference chamber reduces, and 107 registration of device for pressure measurement reduces, and control device is from device for pressure measurement
The pressure value obtained at 107 is also reducing.At this time, the pressure value that control device judges to get is reduced to the lower limit of setting
Pressure, control device sends instruction control and closes pressure charging valve 211, while opens relief valve 212,210 internal gas stream of extensible member
Go out extensible member 210,210 internal pressure of extensible member reduces, and extensible member 210 shortens, so as to drive cleaning piece 103 to be axially distant from combustion
Burn the movement of room direction.When extensible member 210 foreshortens to original position before extending, control device sends instruction control closing and lets out
Pressure valve 212 (pressure charging valve 211 is also at closed mode).So far, extensible member 210 and cleaning piece 103 complete and once clear up port
102 reciprocating motion.
It should be noted that in the other embodiment of the utility model, extensible member 210 and cleaning piece 103 can be every
Regular time carries out a synchronous reciprocating movement, clears up port 102.
In the utility model embodiment, prior art piston bar 104 and cylinder are replaced with 210 integral telescopic of extensible member
105 modes mutually moved realize reciprocating motion, avoid the occurrence of the phenomenon that piston rod 104 is stuck in the prior art, solve
Port blockage problem.
According to the utility model embodiment, spiral stream guidance caused by the spiral rule of 301 inner wall fuisw rib 302 of diversion pipe
Effect, avoids the state that tail gas flows confusion at port 102, ensure that the stabilization of 200 inner exhaust gas pressure of reference chamber, avoid
The false alarm of device for pressure measurement 107.Meanwhile the spiral stream guidance state of tail gas also prevents compound powder to port 102
Diffusion, reduce effective air inlet area so as to avoid 102 inner wall adhesive compound powder of port, substantially increase exhaust
Ability.
The flowing that tail gas is stablized decreases the quantity that powder bonds in powder accumulation area 101, reduces powder accumulation
Speed so that extensible member 210 and the adjacent interval of the reciprocation time twice increase of cleaning piece 103.At present, piston in the prior art
Bar and the adjacent reciprocation time twice of cleaning piece are spaced in 90s or so.And embodiment according to the present utility model, extensible member
210 and the adjacent run duration of the synchronous reciprocating twice interval of cleaning piece 103 be more than or equal to 300s.Synchronous reciprocating has moved frequency drop
It is low, the service life of device is also extended, while reduce the time of plant maintenance, improve vent gas treatment efficiency.
The following table shows the prior art and the utility model one embodiment device for pressure measurement after a period of operation
The situation of change of 107 registrations：
As seen from the above table, the prior art works 20 days after maintenance, and 107 registration of device for pressure measurement, which becomes, turns to 600Pa, work
Just need to carry out new full maintenance after making 25 days.And the embodiment of the utility model works 20 days after maintenance, pressure measurement dress
It is only 20Pa to put the change of 107 registrations, and after working 40 days, 107 registration of device for pressure measurement, which becomes, turns to 100Pa.And adjacent tie up twice
The time interval of shield is more than or equal to 60 days, greatlys save the cost of maintenance, improves work efficiency.
210 integral telescopic of the utility model embodiment extensible member drives the reciprocating motion of cleaning piece 103, instead of easily by card
Dead piston rod and cylinder mechanical transmission structure, fundamentally solve the blockage problem of port 102.In addition, spiral stream guidance pipe
It can realize tail gas spiral stream guidance, avoid the mix that tail gas flows at port 102, substantially increase exhaust capacity.
Meanwhile the speed of powder bonding is reduced, the stabilization of pressure in system is maintained, is avoided caused by pressure oscillation is excessive by mistake
Alarm, has saved maintenance cost, has improved work efficiency.
Although some specific embodiments of the utility model are described in detail by example, this area
It is to be understood by the skilled artisans that above example merely to illustrate, rather than in order to limit the scope of the utility model.This
Field it is to be understood by the skilled artisans that can not depart from the scope of the utility model and spirit in the case of, to above example
Modify.The scope of the utility model is defined by the following claims.
Claims (13)
- A kind of 1. vent gas treatment tower combustion chamber port cleaning plant, it is characterised in that including：The extensible member being arranged on outside the port, it can overall elongated and shortening vertically under internal pressure-driven；It is arranged in the port, the cleaning piece being connected with the extensible member axial direction one end.
- 2. vent gas treatment tower combustion chamber port according to claim 1 cleaning plant, it is characterised in that the extensible member Side wall is foldable structure.
- 3. vent gas treatment tower combustion chamber port according to claim 1 cleaning plant, it is characterised in that further include：Set Pressure charging valve and relief valve in described extensible member axial direction the other end.
- 4. vent gas treatment tower combustion chamber port according to claim 3 cleaning plant, it is characterised in that further include：Set Lid in described extensible member axial direction the other end, the pressure charging valve and the relief valve are arranged at roof or the side of the lid Wall.
- 5. vent gas treatment tower combustion chamber port according to claim 1 cleaning plant, it is characterised in that further include：With institute The matched diversion pipe of cleaning piece is stated, the diversion pipe is inscribed in the inner wall of the port.
- 6. vent gas treatment tower combustion chamber port according to claim 5 cleaning plant, it is characterised in that the diversion pipe bag Include：Spiral stream guidance pipe or oblique diversion pipe.
- 7. vent gas treatment tower combustion chamber port according to claim 1 cleaning plant, it is characterised in that the cleaning piece bag Include：Spring, cleaning rod or cleaning brush.
- 8. vent gas treatment tower combustion chamber port according to claim 1 cleaning plant, it is characterised in that the extensible member axis Include to end with the mode that the cleaning piece is connected：It is flexibly connected or is fixedly connected.
- 9. vent gas treatment tower combustion chamber port according to claim 1 cleaning plant, it is characterised in that the extensible member, The cleaning piece is consistent with the axial direction of the port.
- A kind of 10. vent gas treatment tower, it is characterised in that including：Any vent gas treatment tower combustion chamber port cleaning plant in claim 1-9；Combustion chamber below the cleaning plant of the vent gas treatment tower combustion chamber port, the locular wall of the combustion chamber be provided with The port of the combustion chamber connection；The reference chamber connected by the port with the inside of the combustion chamber, the other end of the extensible member are fixedly connected on The inner wall of the reference chamber；The device for pressure measurement being arranged at the reference chamber air inlet.
- 11. vent gas treatment tower according to claim 10, it is characterised in that further include：Control device, the pressure measurement Device is connected by the control device with the extensible member.
- 12. vent gas treatment tower according to claim 10, it is characterised in that the device for pressure measurement includes：Pointer pressure Power meter or digital manometric instrument.
- 13. vent gas treatment tower according to claim 10, it is characterised in that the vent gas treatment tower includes multiple ends Mouthful, each port is provided with vent gas treatment tower combustion chamber port cleaning plant.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721017680.3U CN207365078U (en) | 2017-08-15 | 2017-08-15 | Vent gas treatment tower combustion chamber port cleaning plant and vent gas treatment tower |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721017680.3U CN207365078U (en) | 2017-08-15 | 2017-08-15 | Vent gas treatment tower combustion chamber port cleaning plant and vent gas treatment tower |
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| Publication Number | Publication Date |
|---|---|
| CN207365078U true CN207365078U (en) | 2018-05-15 |
Family
ID=62423100
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721017680.3U Active CN207365078U (en) | 2017-08-15 | 2017-08-15 | Vent gas treatment tower combustion chamber port cleaning plant and vent gas treatment tower |
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| Country | Link |
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| CN (1) | CN207365078U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111149786A (en) * | 2020-01-14 | 2020-05-15 | 冯振兴 | A irrigate machine for afforestation |
-
2017
- 2017-08-15 CN CN201721017680.3U patent/CN207365078U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111149786A (en) * | 2020-01-14 | 2020-05-15 | 冯振兴 | A irrigate machine for afforestation |
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