CN207351335U - A kind of device of definite monocrystalline pole cut point - Google Patents
A kind of device of definite monocrystalline pole cut point Download PDFInfo
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- CN207351335U CN207351335U CN201721210810.5U CN201721210810U CN207351335U CN 207351335 U CN207351335 U CN 207351335U CN 201721210810 U CN201721210810 U CN 201721210810U CN 207351335 U CN207351335 U CN 207351335U
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Abstract
The utility model discloses a kind of device of definite monocrystalline pole cut point, including：First tablet and the second tablet, first tablet is square plate, second tablet is regular polygon tablet, second tablet is used for when the diagonal of first tablet and the diagonal of end face are parallel to each other and in the same plane, when deflection angle is spent for preset deflection angle, determine that the projection on the end surface of straight line where the radius of second tablet and the intersection point of the circumference of the end face are cut point, cooperated by the first tablet and the second tablet, you can fast and accurately determine the cut point on the end face of monocrystalline pole.The apparatus structure of the utility model is simple, easily fabricated, and can fast and accurately determine cut point, improves work efficiency, and improves the single crystal seed availability that cutting obtains, and thus single crystal seed is more preferable into the class monocrystalline quality grown.
Description
Technical field
Class single crystal technology field is the utility model is related to, more particularly to a kind of device of definite monocrystalline pole cut point.
Background technology
Class single crystal technology is the technique based on polycrystalline cast ingot, and appearance and the equal single crystal-like of electrical property are obtained using single crystal seed
Polysilicon chip.Class monocrystalline is grown since single crystal seed position, therefore the laying of single crystal seed is the class for influencing to grow up to
One of key factor of monocrystalline quality.During single crystal seed shop fixtures, shop fixtures meeting is carried out using the class single crystal seed of square
When casting class monocrystalline, substantial amounts of dislocation is produced in the seam crossing of single crystal seed.
To solve the above problems, during single crystal seed shop fixtures, generally using the single crystal seed for the setting that forms an angle
Shop fixtures is carried out, compared to the shop fixtures of zero deflection angle, the dislocation density of single crystal seed reduces more than 70%.
But obtain the single crystal seed with certain deflection angle, it is necessary to confirm deflection angle on single crystal seed end face
Spend and determine that the knife under the deflection angle cuts open a little.It is usually to be confirmed according to the crest line of monocrystalline pole in the end face of pole at present
Central point, is calculated using fixed angle model or Pythagorean theorem, determines that knife cuts open a little successively on end face, and adjacent knife is cutd open a little
After line, carry out knife and cut open.Although this method can obtain the single crystal seed with certain deflection angle, troublesome in poeration, work
It is low to make efficiency, and precision is insufficient, reduces the quality of the class monocrystalline of growth.
Utility model content
The purpose of this utility model is to provide a kind of device of definite monocrystalline pole cut point, solves and monocrystalline pole is cut
When cutting, precision deficiency, the problem of work efficiency is low, realize and quick and precisely determine cut point, and the monocrystalline after the cutting obtained
Seed crystal, which can grow up, the more preferable class monocrystalline of quality.
In order to solve the above technical problems, the utility model provides a kind of device of definite monocrystalline pole cut point, including：
First tablet and the second tablet, first tablet are square plate, and second tablet is put down for regular polygon
Plate；Second tablet is arranged on first tablet, the central point line institute of first tablet and second tablet
Straight line perpendicular to first tablet and second tablet；Second tablet is used to work as the diagonal of first tablet
The diagonal of line and end face square is parallel to each other and in same perpendicular, when deflection angle is spent for preset deflection angle, really
The projection of straight line on the end surface and the intersection point of the circumference of the end face where the radius of fixed second tablet are to cut
Cutpoint；Wherein, end face square be on the end face of monocrystalline pole to be cut, four crest lines of monocrystalline side face of round rod and
The intersection point of the end face is sequentially connected the square of composition；The deflection angle is the straight line where the radius of first tablet
Angle between the straight line where the radius of second tablet.
Wherein, the radius length of first tablet and the radius length of second tablet are equal to the radius of the end face
Length.
Wherein, first tablet is the adjustable square plate of length of side size, and second tablet is adjustable for length of side size
Regular polygon plate.
Wherein, first tablet includes central square plate and square frame, and the square border has square
Inside casing, the central square plate are removably mounted on the square border inside casing；It is just more that second tablet includes center
Side shape plate and regular polygon frame, the polygon frame have regular polygon inside casing, and the center regular polygon plate is detachable
Ground is installed on the regular polygon frame inside casing.
Wherein, the radius of the radius of first tablet and second tablet is less than the radius of the end face, and described the
Each vertex of one tablet and second tablet is provided with pointer along radial direction.
Wherein, second tablet is square plate.
Wherein, further include：Reading pointer and protractor；
The reading pointer is arranged on second tablet backwards to the surface of first tablet, the reading pointer and institute
The diagonal for stating the first tablet is parallel to each other and in same perpendicular；The protractor is arranged on second tablet and described
Between reading pointer, and the central point of the origin of the protractor and second tablet overlaps, start-finish line and described second flat
The radius of plate overlaps.
Wherein, the protractor is the protractor that metrics range is 360 degree.
Wherein, angle amplifier is provided with the reading pointer, to amplify the measurement reading on the protractor
The angle value of number pointer position.
Wherein, further include：Fixing device, is arranged on first tablet, so as to which first tablet is fixed on institute
State on end face.
A kind of device of definite monocrystalline pole cut point provided by the utility model, when determining cut point, Neng Gougen
Each cut quickly is determined according to projection of the straight line where the radius of the second tablet on the end face of monocrystalline pole to be cut
The position of cutpoint, work efficiency are high.In addition, on the end face of monocrystalline pole, four crest lines of monocrystalline pole and end face have four
Intersection point, after being connected with straightway between four intersection points, forms a square in end face, passes through the first tablet of square
Diagonal is parallel with the diagonal of end face square and in same perpendicular, has also determined that the central point of the first tablet
On the central axis of monocrystalline pole, and the line at the center of the first tablet and the center of the second tablet is perpendicular to the first tablet
With the second tablet, so as to ensure that the first plate center and the second plate center all on the central axis of monocrystalline pole, relatively
In in the prior art, determine the center of circle of fixed angle model in monocrystalline using the center of circle of fixed angle model and the center of end face
This point on the central axis of pole and point determine the mode of position, and the utility model is by the first tablet and single-wafer
This face knead dough of rod determines the mode of position, enables to definite result more accurate.And can be at the same time in the utility model
Determine the position of all cut points, and without determining one by one, under the premise of result is accurate, improve work efficiency.
Device provided by the utility model, can fast and accurately determine cut point, and using simple, work efficiency is high,
The single crystal seed more standard that device according to the present utility model obtains, improves the quality of class monocrystalline.
Brief description of the drawings
For clearer explanation the utility model embodiment or the technical solution of the prior art, below will to embodiment or
Attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, drawings in the following description are only
Some embodiments of the utility model, for those of ordinary skill in the art, without creative efforts,
Other attached drawings can also be obtained according to these attached drawings.
Fig. 1 provides the structural representation of the device of order wafer rod cut point really for a kind of specific embodiment of the utility model
Figure；
Fig. 2 is the structure diagram of crest line on monocrystalline pole in the utility model；
Fig. 3 is the structure diagram of the end face of monocrystalline pole in the utility model；
Fig. 4 is a kind of structure diagram of the first tablet in specific embodiment in the utility model；
Fig. 5 provides the structural representation of the device of order wafer rod cut point really for the utility model another specific embodiment
Figure；
In attached drawing, 1 for the first tablet, 2 be the second tablet, 3 be monocrystalline pole, 4 be crest line, 5 be end face, 6 be end face just
It is square, 7 be square plate centered on square frame, 8,9 be the first tablet pointer, 10 be the second tablet pointer, 11 be angulation
Device, 12 are reading pointer.
Embodiment
In order to make those skilled in the art more fully understand the utility model, below in conjunction with the accompanying drawings and it is embodied
The utility model is described in further detail for mode.Obviously, described embodiment is only the utility model part
Embodiment, instead of all the embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not doing
Go out all other embodiments obtained under the premise of creative work, shall fall within the protection scope of the present invention.
Please refer to Fig.1, Fig. 2 and Fig. 3, Fig. 1 provide order wafer rod really for a kind of specific embodiment of the utility model and cut
The structure diagram of the device of cutpoint, Fig. 2 are the structure diagram of crest line on monocrystalline pole in the utility model, and Fig. 3 is this practicality
Single-wafer plane rod end schematic diagram in new embodiment, with reference to Fig. 1, the device can include：
First tablet 1 and the second tablet 2, first tablet 1 are square plate, and second tablet 2 is just polygon
Shape tablet；
Second tablet 2 is arranged on first tablet 1, the center of first tablet 1 and second tablet 2
Straight line where point line is perpendicular to first tablet 1 and second tablet 2；
There are four crest lines 4 on the side of monocrystalline pole 3 to be cut, the end face 5 of every crest line 4 and monocrystalline pole 3
All there are an intersection point, four intersection points can be sequentially connected, an end face square 6 is formed in end face 5.In definite single-wafer
During the cut point of rod 3, usually said deflection angle refers to, the intersection point of a certain bar crest line 4 and end face 5 and the closely intersection point are most
The near cut point circle center line connecting with end face 5 respectively, the angle between this two lines section as need the monocrystalline seed cut
Brilliant deflection angle.Therefore, in actually definite cut point, it can be reference with end face square 6, determine relative to end face
Four vertex of square 6 have the cut point of certain deflection angle.
In measurement, the first tablet 1 is fitted on the end face 5 of monocrystalline pole 3, the diagonal of the first tablet 1 and end face
The diagonal of square 6 is parallel to each other and thinks in same perpendicular, in the utility model that the end face 5 of monocrystalline pole 3 is
In horizontal plane, using the first tablet 1 end face square 6 can be replaced to be used as reference at this time.
For regular polygon, the line on central point and vertex is the radius of regular polygon, with the half of the second tablet 2
Angle between straight line where footpath and the straight line where the radius of the first tablet 1 is mutual as the first tablet 1 and the second tablet 2
The radius of first tablet 1 of the normative reference of the reference standard of deflection, here as deflection angle and the radius of the second tablet 2,
The radius where two vertex closest on the first tablet 1 and the second tablet 2 is usually chosen, but in the utility model
It is not limited to that, can is the straight line where the first tablet 1 and second tablet 2 any one radius, the first tablet 1 and second
The deflection angle for the single crystal seed that deflection angle between tablet 2 can be cut as needed does angle and converts to obtain, this is not
Influence the realization of the utility model.When the deflection angle between the second tablet 2 and the first tablet 1 is spent for preset deflection angle, the
Projection of the straight line on the end face 5 and the intersection point of the circumference of end face 5 where the radius of two tablets 2 are cut point.
Specifically, in practical applications, the thickness of the first tablet 1 and the second tablet 2 can be relatively small, the first tablet 1
Fit with the end face 5 of monocrystalline pole 3, then the gap between the second tablet 2 and end face 5 is relatively small, it becomes possible to more accurate
The radius for determining the second tablet 2 where projection of the straight line on the end face 5 and the position of the intersection point of the circumference of end face 5
Put.
In the prior art, measured using the model of fixed angle in end face 5, be the angle top with fixed angle model
Point and the central point of end face 5 overlap, to fix the angle vertex of measurement model as reference, relative to definite angle vertex and end face
5 central points, the mode error whether this definite two points overlap is very big, as with reference to each cutting determine one by one
Point tolerance is also very big, the angular deviation finally determined in actual mechanical process 2 to 5 degree angular ranges, it is and each
Cut point needs to determine one by one, and work efficiency is low, cumbersome.
The utility model is bonded using the first tablet 1 and end face 5, by the diagonal of the first tablet 1 and end face just
Position relationship between square 6 diagonal, you can determine whether the central point in two faces overlaps, so as to determine that first is flat
Plate 1 can be used as a kind of more accurate reference planes, it is thus determined that cut point it is also more accurate, and can determine at the same time more
A cut point, work efficiency higher.
It is further to note that, it is necessary to which the deflection angle of the single crystal seed obtained is generally fixed in actual production
Certain is several, therefore, in the utility model, can interfix between the first tablet 1 and the second tablet 2, the first tablet 1
And the second deflection angle between tablet 2 is fixed as predetermined deflection angle.First tablet 1 can also be relative to the second tablet 2
It is rotatable, it is straight where the line between central point of the central shaft chosen between the first tablet 1 and the second tablet 2
Line, and the straight line, when needing to cut the class single crystal seed of different deflection angles, is incited somebody to action perpendicular to the first tablet 1 and the second tablet 2
Second tablet 2 rotates to corresponding angle.
Based on above-described embodiment, in the another specific embodiment of the utility model, can include：The radius of first tablet 1
Length and the radius length of the second tablet 2 are equal to the radius length of end face 5, at this time, the size of the first tablet 1 and end face square
6 size is identical, in actual application, it is only necessary to by the lower surface of the first tablet 1 and the weight completely of end face square 6
Conjunction, and subpoint of each vertex of the second tablet 2 on the circumference of end face 5 is cut point.
, can be to this in order to the monocrystalline pole 3 different for determining a variety of 5 sizes of end face in this present embodiment
Embodiment is further improved, including：
First tablet 1 is the adjustable square plate of length of side size, and second tablet 2 is adjustable just for length of side size
Polygonal panel.It can make first according to suitable first tablet, 1 size of size adjusting and 2 size of the second tablet of monocrystalline pole 3
The radius of the radius of tablet 1 and the second tablet 2 is equal with the radius size of the end face 5 of monocrystalline pole 3 to be cut all the time so that
The device of the utility model can be in order to the cut point of definite various various sizes of monocrystalline poles 3.
It is considered that in production application, since certain that the size of monocrystalline pole 3 is generally fixed is several, for this reason, this
Embodiment can be improved further, please refer to Fig.4, and Fig. 4 is the first tablet 1 in a kind of specific embodiment in the utility model
Structure diagram, can include：
First tablet 1 includes central square plate 8 and square frame 7, and square border has square inner frame, center side
Shape plate is removably mounted on square border inside casing；When the 8 diameter phase of 5 diameter of end face and central square plate of monocrystalline pole 3
Deng square frame 7 being disassembled using central square plate 8 as the first tablet 1, when 3 diameter of monocrystalline pole and just
7 outer peripheral catercorner length of square border is equal, central square plate 8 is installed on square 7 inside casing position of frame, with two
The structure that person combines is as the first tablet.
It should be noted that being not limited only to only one square frame 7 in the utility model, the first tablet can be more
The tablet of a length of side is sequentially increased square frame 7 and a central square tablet be combined with each other stroke, as needed selection
Be the square frame 7 of quantity, so as to obtain various various sizes of first tablets 1.
Similarly, the second tablet 2 includes center regular polygon plate and regular polygon frame, and polygon frame has regular polygon
Inside casing, center regular polygon plate are removably mounted on the regular polygon frame inside casing, the principle and first of the second tablet 2
Tablet 1 is identical, is not repeating herein.
In order to realize the device for using a utility model, it is possible to for determining the monocrystalline pole of multiple and different sizes
3 cut point, the utility model additionally provide another specific embodiment, refer to Fig. 5, and Fig. 5 is another specific for the utility model
Embodiment provides the structure diagram of the device of 3 cut point of order wafer rod really, can include：
The radius of the radius of first tablet 1 and the second tablet 2 is less than the radius of end face 5, the first tablet 1 and the second tablet 2
Each vertex radial direction is provided with pointer.
When the first tablet pointer 9 is overlapped in the diagonal of the projection on the end face 5 of monocrystalline pole 3 and end face square 6,
It can determine that the diagonal of the first tablet 1 and the diagonal of end face square 6 are parallel to each other and in same perpendicular, together
Reason, can determine cut point according to projection of the second tablet pointer 10 on end face 5.
Based on above-mentioned any embodiment, in a kind of specific embodiment of the utility model, can include：
Second tablet 2 is square plate, and in actual application, the concrete shape of the second tablet 2 is as needed
Determined by the shape of the class single crystal seed of cutting, when needing to cut the class single crystal seed of square, the second tablet 2 is pros
Shape tablet, when needing to cut the class single crystal seed of regular hexagon, the second tablet 2 is orthohexagonal tablet.In practical application mistake
Cheng Zhong, the situation of the class single crystal seed of general cutting square are relatively more.
Based on above-mentioned any embodiment, in the another specific embodiment of the utility model, further include：
Reading pointer 12 and protractor 11；Reading pointer 12 is arranged on table of second tablet 2 backwards to first tablet 1
Face, the protractor 11 are arranged between second tablet 2 and the reading pointer 12, and the origin of protractor 11 and described
The central point of second tablet 2 overlaps.One end of reading pointer 12 and 11 origin of protractor can be fixed in the second tablet 2
Heart position, reading pointer 12 and protractor 11 can be independently rotary fixation, and with 2 Pivot axle phase of the second tablet
Together, when determining cut point, reading pointer 12 and protractor 11 are rotated to the position of needs.
And the mode being more highly preferred to is, 11 and second tablet 2 of protractor is interfixed, and the zero degree line of protractor 11 and
The radius of second tablet 2 overlaps, and 12 and first tablet of reading pointer, 1 relative position keeps interfixing, and the first tablet 1
Diagonal is parallel to each other and in same perpendicular, and when determining cut point, protractor 11 is fixed on the second tablet 2, with
The second tablet 2 and rotate to preset deflection angle degree, and reading pointer 12 is first flat in the scale indicated on protractor 11
Deflection angle angle value between 1 and second tablet 2 of plate.
In order to faster determine the deflection angle between the first tablet 1 and the second tablet 2, the present embodiment may be used also
Further to improve, including：Protractor 11 is the protractor 11 that metrics range is 360 degree.
For the deflection angle for improving the precision of definite cut point it is necessary to ensure between the first tablet 1 and the second tablet 2
Accuracy, therefore, the present embodiment can also be improved further, can be included：
Angle amplifier is provided with reading pointer 12, the position of amplifier should be fittingly disposed at 119 scale value of protractor
Position, to amplify the scale value indicated by the reading pointer 12 on protractor 11, read more accurately angle value.
Based on above-mentioned any embodiment, in the another specific embodiment of the utility model, can also include：
Fixing device, is arranged on the first tablet 1, but when being determined cut point, the first tablet 1 is adjusted to suitable
Behind position, the first tablet 1 is fixed by fixing device, avoids when rotating the second tablet 2 or is determining cutting point process
In, the first tablet 1 is moved, and causes the cut point inaccuracy finally determined.
Each embodiment is described by the way of progressive in this specification, what each embodiment stressed be and other
The difference of embodiment, between each embodiment identical similar portion mutually referring to.
The foregoing description of the disclosed embodiments, enables professional and technical personnel in the field to realize or new using this practicality
Type.A variety of modifications to these embodiments will be apparent for those skilled in the art, determine herein
The General Principle of justice can be realized in other embodiments without departing from the spirit or scope of the present utility model.Cause
This, the utility model is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein
The most wide scope consistent with features of novelty.
Claims (10)
- A kind of 1. device of definite monocrystalline pole cut point, it is characterised in that including：First tablet and the second tablet, first tablet are square plate, and second tablet is regular polygon tablet；Second tablet is arranged on first tablet, the central point line institute of first tablet and second tablet Straight line perpendicular to first tablet and second tablet；Second tablet is used for when the diagonal of first tablet and the diagonal of end face square are parallel to each other and same In one perpendicular, when deflection angle is spent for preset deflection angle, determine the straight line where the radius of second tablet described Projection and the intersection point of the circumference of the end face on end face are cut point；Wherein, end face square be on the end face of monocrystalline pole to be cut, four crest lines of monocrystalline side face of round rod and The intersection point of the end face is sequentially connected the square of composition；The deflection angle is the straight line where the straight line and the radius of second tablet where the radius of first tablet Between angle.
- 2. device according to claim 1, it is characterised in that the radius length of first tablet and second tablet Radius length be equal to the end face radius length.
- 3. the apparatus of claim 2, it is characterised in that first tablet is the adjustable square of length of side size Plate, second tablet are the adjustable regular polygon plate of length of side size.
- 4. device according to claim 3, it is characterised in that first tablet includes central square plate and square Frame, the square border have square inner frame, and the central square plate is removably mounted on the square border inside casing On；Second tablet includes center regular polygon plate and regular polygon frame, and the polygon frame has in regular polygon Frame, the center regular polygon plate are removably mounted on the regular polygon frame inside casing.
- 5. device according to claim 1, it is characterised in that the half of the radius of first tablet and second tablet Footpath is less than the radius of the end face, and each vertex of first tablet and second tablet is provided with finger along radial direction Pin.
- 6. device according to any one of claims 1 to 5, it is characterised in that second tablet is square plate.
- 7. device according to any one of claims 1 to 5, it is characterised in that further include：Reading pointer and protractor；The reading pointer is arranged on second tablet backwards to the surface of first tablet, the reading pointer and described The diagonal of one tablet is parallel to each other and in same perpendicular；The protractor is arranged between second tablet and the reading pointer, and the origin of the protractor and described The central point of two tablets overlaps, and the radius of zero degree line and second tablet overlaps.
- 8. device according to claim 7, it is characterised in that the protractor is the protractor that metrics range is 360 degree.
- 9. device according to claim 8, it is characterised in that angle amplifier is provided with the reading pointer, so as to Amplify the angle value of the measurement reading pointer position on the protractor.
- 10. device according to any one of claims 1 to 5, it is characterised in that further include：Fixing device, is arranged on described On first tablet, so as to which first tablet is fixed on the end surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721210810.5U CN207351335U (en) | 2017-09-19 | 2017-09-19 | A kind of device of definite monocrystalline pole cut point |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721210810.5U CN207351335U (en) | 2017-09-19 | 2017-09-19 | A kind of device of definite monocrystalline pole cut point |
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| Publication Number | Publication Date |
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| CN207351335U true CN207351335U (en) | 2018-05-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721210810.5U Active CN207351335U (en) | 2017-09-19 | 2017-09-19 | A kind of device of definite monocrystalline pole cut point |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110341061A (en) * | 2019-08-06 | 2019-10-18 | 赛维Ldk太阳能高科技(新余)有限公司 | A kind of cutting method and application of single crystal seed |
| CN110587835A (en) * | 2019-09-24 | 2019-12-20 | 上海集成电路研发中心有限公司 | Cutting method of grating silicon wafer |
-
2017
- 2017-09-19 CN CN201721210810.5U patent/CN207351335U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110341061A (en) * | 2019-08-06 | 2019-10-18 | 赛维Ldk太阳能高科技(新余)有限公司 | A kind of cutting method and application of single crystal seed |
| CN110587835A (en) * | 2019-09-24 | 2019-12-20 | 上海集成电路研发中心有限公司 | Cutting method of grating silicon wafer |
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