CN207347650U - A device for ion dust removal of vacuum coating workpiece - Google Patents

Abstract

The invention discloses a device for ion dust removal of vacuum coating workpieces, comprising a dust removal box, air intake components and exhaust components are respectively arranged on both sides of the dust removal box, the air intake components and exhaust components are both connected to the dust removal box and form a wind flow channel, the air intake components can generate ion wind and send it into the dust removal box along the wind flow channel; a plurality of heating devices are fixedly arranged on the inner side wall of the dust removal box, the heating devices are used to dry the water vapor of the ion wind sent into the dust removal box and/or the vacuum coating workpiece placed in the dust removal box; a driving device is arranged at the bottom/top of the dust removal box, the driving device is connected to a workpiece hanger placed in the dust removal box, the driving device can drive the workpiece hanger to rotate and drive the workpiece to rotate, cooperate with the air intake component to send air and the heating device to heat to complete the ion electrostatic dust removal and drying of the workpiece. The device of the invention has a simple structure, low manufacturing cost, low use and maintenance cost, high dust removal efficiency, and can improve the yield rate of vacuum coating products.

Description

A device for ion dust removal of vacuum coating workpiece

technical field

The utility model relates to the technical field of vacuum coating product processing, in particular to a device for ion dust removal of vacuum coating workpieces.

Background technique

In the industrial production using the vacuum ion coating method, the degree of dust pollution control is an important link to ensure and improve product quality. Generally speaking, dust pollution can be divided into vacuum indoor pollution and vacuum outdoor pollution. As for the common vacuum outdoor pollution, there are many pollution factors, mainly including the cleanliness of the production environment, the temperature and humidity of the environment, the control of the type of materials in the production process, and the control of the time of each production link; because there are many factors, it is difficult to control , dust pollution is difficult to avoid.

In order to solve the above-mentioned problems in the production process, the occurrence of the above-mentioned problems can be controlled and solved to a large extent by using the dust-free workshop and the dust-free process in the existing technology; however, the disadvantages of using the dust-free workshop and the dust-free process are: Large equipment investment, high operation and maintenance costs. For small and medium-sized vacuum coating enterprises, especially some small vacuum coating enterprises, expensive equipment investment and operation and maintenance costs are unbearable for small and medium-sized enterprises; therefore, the problem of dust pollution outside the vacuum chamber has long been affecting vacuum One of the important factors of ion plating product quality.

Based on this, the creators of this work combined their own production needs to design a device for ion dust removal of vacuum coating workpieces, hoping to use this device to remove dust from workpieces before entering the vacuum chamber, thereby improving the quality of vacuum ion coating products , At the same time, save the cost of production equipment.

Utility model content

The technical problem to be solved by the utility model is to provide a device for ion dust removal of vacuum coating workpieces in view of the defects in the existing design technology. The device has simple structure, low manufacturing cost, low use and maintenance cost, and high dust removal efficiency. , and can improve the yield rate of vacuum coating products.

In order to solve the above-mentioned technical problems, the technical scheme adopted by the utility model is as follows: a device for ion dust removal of vacuum coating workpieces, including a dust removal box, and the two sides of the dust removal box are respectively provided with an air inlet assembly and an exhaust assembly , the air inlet assembly and the exhaust assembly are all connected with the dust removal box and form a wind flow channel, the air inlet assembly can generate ion wind and send it into the dust removal box along the wind flow channel; the dust removal box A number of heating devices are fixed on the inner wall, and the heating devices are used to dry the water vapor of the ion wind sent into the dust removal box and/or to dry the vacuum coating workpiece placed in the dust removal box; the dust removal box A driving device is installed on the bottom/top of the dust removal box, and the driving device is connected to a workpiece hanger placed in the dust removal box. The driving device can drive the workpiece hanger to rotate and drive the workpiece to rotate, and cooperate with the air inlet assembly to send The wind and the heating device heat to complete the ion electrostatic dust removal and drying of the workpiece.

As a further elaboration to the above-mentioned technical scheme:

In the above technical solution, the air inlet assembly includes several air inlet passages arranged in the vertical direction of the dust removal box, and each of the air inlet passages includes an air inlet pipe, an air filter and an ion fan; the air inlet The air filter is installed in the air duct close to the air inlet, the end of the air inlet pipe away from the air inlet is connected to the air inlet of the ion fan, and the air outlet of the ion fan is connected to the The air inlet hole on the side wall of the dust removal box; the ion fan extracts the external air flowing along the air inlet pipe and filtered by the air filter to form clean ion wind and send it into the dust removal box.

Further, the air intake assembly includes two air intake passages.

Further, the air filter is a plate primary filter.

Further, the ion fan is an axial flow ion fan.

In the above technical solution, the heating device is an electric heating rod or a linear heater.

In the above technical solution, the exhaust assembly includes at least two axial flow fans, one end of each axial flow fan is connected to the air outlet hole formed on the side wall of the dust removal box, and the other end is connected to the exhaust air through the air pipe. pipe; each of the axial flow fans extracts the air in the dust removal box and discharges it along the air pipe and exhaust pipe.

In the above technical solution, the driving device is an electric motor, and the rotating shaft of the electric motor extends vertically into the dust removal box and is connected with the rotating shaft of the workpiece hanger through a flange matching bearing. The rotating shaft rotates relative to the dust removal box, thereby driving the workpiece hanger and the vacuum coating workpiece to rotate.

The beneficial effects of the utility model are: the device of the utility model has simple structure, low manufacturing cost, low use and maintenance cost, and the time required for a single dust removal is short (less than 10 minutes), which can save equipment cost input and reduce production cost; at the same time; The device is used to remove dust from the vacuum coating workpiece before entering the vacuum chamber of the vacuum coating machine, which can reduce the defect rate of the workpiece caused by dust pollution outside the vacuum chamber.

Description of drawings

Fig. 1 is the structural representation of the utility model.

In the figure, 001. Work piece, 1. Dust removal box, 101. Air inlet hole, 102. Air outlet hole; 2. Air inlet component, 21. Air inlet pipe, 22. Air filter, 23. Ion fan, 211. Air inlet; 3. Exhaust assembly, 31. Axial fan, 32. Air pipe, 33. Exhaust pipe; 4. Heating device; 5. Driving device; 6. Workpiece hanger; 7. Flange; 8. Bearing .

Detailed ways

Below in conjunction with accompanying drawing, the utility model is described in further detail.

The embodiments described by referring to the figures are exemplary and are intended to explain the present application and should not be construed as limiting the present application. In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Orientation or position indicated by "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. The relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the application and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, therefore It should not be construed as a limitation of the application. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present application, "several" and "multiple" mean two or more, unless otherwise specifically defined. In this application, unless otherwise clearly specified and limited, the terms "installation", "connection", "connection", "fixation" and other terms should be interpreted in a broad sense, for example, it can be a fixed connection or a detachable connection , or integrally connected; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediary, and it can be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in this application according to specific situations. In this application, unless otherwise expressly specified and limited, a first feature being "on" or "under" a second feature may include direct contact between the first and second features, or include the first and second features Not in direct contact but through another characteristic contact between them. Moreover, "above", "above" and "above" the first feature on the second feature include that the first feature is directly above and obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. "Below", "under" and "under" the first feature to the second feature include that the first feature is directly above and obliquely above the second feature, or simply means that the first feature has a lower horizontal height than the second feature.

Accompanying drawing 1 has illustrated a kind of concrete embodiment of the present utility model. In this embodiment, it is desired to design a device for dust removal before vacuum coating workpieces enter the vacuum chamber, thereby improving the quality of vacuum ion coating products. Referring to accompanying drawing 1, a kind of device that is used for vacuum coating workpiece ion dedusting, it comprises dust removal box body 1, and the two sides of described dust removal box body 1 are respectively provided with air intake assembly 2 and exhaust assembly 3, and described air intake assembly Both the component 2 and the exhaust component 3 are in communication with the dust removal box 1 and form a wind flow channel, and the air inlet component 2 can generate ion wind and send it into the dust removal box 1 along the wind flow channel; the wind flow channel is the external air Enter/exit the channel of the dust removal box 1, and by placing the workpiece 001 to be coated on the air flow channel (the air flow channel belongs to the inner cavity of the dust removal box 1), cooperate with the air intake of the air inlet component 2 and generate ion wind. The workpiece is subjected to ion electrostatic dust removal, and the exhaust assembly 3 discharges the ion wind/air after the ion electrostatic dust removal of the workpiece out of the dust removal box 1, so as to ensure the cleanliness of the ion wind in the dust removal box 1 and avoid secondary contamination of the workpiece. Secondary pollution: several heating devices 4 are fixed on the inner wall of the dust removal box 1, and in this embodiment, the heating devices 4 can be selected from electric heating rods and linear heaters (for example: coil heaters) , the heating device 4 is installed around the inner cavity of the dust removal box 1, and a plurality of heating assemblies cooperate to heat the inner cavity of the dust removal box 1, thereby removing and/or Dry the vacuum coating workpiece 001 placed in the dust removal box 1; a drive device 5 is installed on the bottom/top of the dust removal box 1, and in this embodiment, the drive device 5 is assembled in the dust removal box 1 The bottom of the drive device 5 is connected to a workpiece hanger 6 placed in the dust removal box 1; in this embodiment, the drive device 5 is a motor, and the rotation shaft of the motor extends vertically into the The dust removal box 1 is connected with the rotating shaft of the workpiece hanger 6 through the flange 7 and the bearing 8. In practice, the workpiece 001 is hung on the workpiece hanger 6, and the motor drives the rotating shaft relative to the dust removal box. The body 1 rotates, thereby driving the workpiece hanger 6 and the vacuum coating workpiece 001 to rotate. At the same time, cooperate with the air inlet assembly 2 to supply air and the heating device 4 to complete the ion electrostatic dust removal and drying of the workpiece 001.

Referring to accompanying drawing 1, in this embodiment, the air inlet assembly 2 includes several air inlet passages arranged in the vertical direction of the dust removal box 1, and in this embodiment, one side of the dust removal box 1 is provided with There are two air inlet passages. In practice, the number of air inlet passages can be set according to the volume of the dust removal box 1 and the demand for air intake, and each of the air inlet passages includes an air inlet pipe 21, an air filter 22 and Ion fan 23, in this embodiment, the air filter 22 is a plate-type primary filter, the ion fan 23 is an axial flow ion fan, and the air filter 22 is installed in the air inlet pipe 21 near the air inlet 211 of the air inlet pipe 21, the end of the air inlet pipe 21 away from the air inlet is docked with the air inlet of the ion fan 23, and the air outlet of the ion fan 23 is docked at The air inlet hole 101 on the side wall of the dust removal box 1; when the air inlet assembly 2 supplies air, the ion fan 23 extracts the air that flows along the air inlet pipe 21 and is filtered and dusted by the air filter 22. The external air is sent into the inner cavity of the dust removal box 1 as clean ionized wind; the exhaust assembly 3 includes at least two axial flow fans 31, and one end of each axial flow fan 31 is connected to the dust removal box body. 1 The air outlet hole 102 on the side wall is docked, and the other end is connected to the exhaust pipe 33 through the air pipe 32; And the exhaust pipe 33 is discharged. It should be noted that, in this embodiment, the dust removal box body 1 is also provided with a control box (not numbered in the accompanying drawings) for controlling the ion electrostatic dust removal of the device. The heating device 4 and the driving device 5 are electrically connected, and the control box can control the speed of the ion fan 23 and the axial flow fan 31, thereby controlling the speed of the air intake/exhaust air, thereby controlling the speed of the wind/air flowing along the air flow channel. At the same time, the control box can also pass through the heating time of the heating device 4 and the rotating speed at which the driving device 5 drives the workpiece hanger 6 to rotate.

The above is only a preferred embodiment of the utility model, and does not limit the utility model in any form. Although the utility model is disclosed as above with the preferred embodiment, it is not used to limit the utility model. Anyone who is familiar with the utility model Professional technicians, without departing from the scope of the technical solution of the present utility model, should use the technical content disclosed above to make some changes or modify equivalent embodiments with equivalent changes, but if they do not depart from the technical solution of the present utility model, according to The utility model technology refers to any simple modification, equivalent change and modification made to the above embodiments, which all belong to the scope of the utility model technical solution.

Claims (8)

1. A kind of 1. device for vacuum coating workpiece ion dedusting, it is characterised in that:Including dust-removing box, the dust-removing box Two sides be respectively equipped with air intake assembly and gas deflation assembly, the air intake assembly and gas deflation assembly are connected with dust-removing box and structure Into airflow channel, the air intake assembly can produce ion wind and be sent into the dust-removing box along the airflow channel;The dedusting Some heating units are installed with the madial wall of babinet, the heating unit is used for the ion wind to removing water feeding dust-removing box Aqueous vapor and/or the vacuum coating workpiece drying being opposite in dust-removing box;The bottom/top of the dust-removing box is installed on a drive Dynamic device, driving device drive connection one are placed in the work hanger of the dust-removing box, and the driving device can drive workpiece Hanger rotates and drives workpiece to rotate, and coordinates the ion of the air intake assembly air-supply and heating devices heat completion to workpiece Electrostatic precipitation and drying.
2. A kind of 2. device for vacuum coating workpiece ion dedusting according to claim 1, it is characterised in that:It is described into Wind component is included in some air intake passages that the dust-removing box vertical direction is set, and each air intake passage includes inlet air Pipe, air filter and ion blower;The air filter is installed at its air inlet position in the blast pipe, it is described End air inlet then with the ion blower of the blast pipe away from its air inlet docks, and the air outlet docking of the ion blower is opened Make the air inlet hole on the dust-removing box side wall;The ion blower, which is extracted, to be flowed along the blast pipe and through the air mistake The extraneous air of filter dust removal by filtration and the ion wind feeding dust-removing box for forming cleaning.
3. A kind of 3. device for vacuum coating workpiece ion dedusting according to claim 2, it is characterised in that:It is described into Wind component includes two air intake passages.
4. A kind of 4. device for vacuum coating workpiece ion dedusting according to claim 3, it is characterised in that:The sky Air filter is roughing-efficiency plate filter.
5. A kind of 5. device for vacuum coating workpiece ion dedusting according to claim 3, it is characterised in that:It is described from Sub- wind turbine is axial-flow type ion blower.
6. A kind of 6. device for vacuum coating workpiece ion dedusting according to claim 1, it is characterised in that:It is described to add Hot charging is set to electrically heated rod or linear heater.
7. A kind of 7. device for vacuum coating workpiece ion dedusting according to claim 1, it is characterised in that:The row Pneumatic module includes at least two axial flow wind turbine, and each axial flow blower one end is with opening exhaust vent pair of the system on the dust-removing box side wall Connect, the other end connects exhaust pipe by air hose;Each axial flow blower extracts the air in the dust-removing box and by its edge Air hose and the exhaust pipe discharge.
8. A kind of 8. device for vacuum coating workpiece ion dedusting according to claim 1, it is characterised in that:The drive Dynamic device is motor, and the rotation axis of the motor vertically stretches into the dust-removing box and by flange fitted bearing and institute The shaft connection of work hanger is stated, shaft is rotated relative to the dust-removing box described in the electric-motor drive, so as to drive described Work hanger and vacuum coating workpiece rotary motion.