CN207331039U - A kind of mask piece, mask plate, film deposition equipment - Google Patents
A kind of mask piece, mask plate, film deposition equipment Download PDFInfo
- Publication number
- CN207331039U CN207331039U CN201721399214.6U CN201721399214U CN207331039U CN 207331039 U CN207331039 U CN 207331039U CN 201721399214 U CN201721399214 U CN 201721399214U CN 207331039 U CN207331039 U CN 207331039U
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- China
- Prior art keywords
- mask
- mask piece
- mask plate
- thickening layer
- piece body
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000008021 deposition Effects 0.000 title claims abstract description 13
- 230000008719 thickening Effects 0.000 claims abstract description 27
- 239000000758 substrate Substances 0.000 claims description 28
- 239000010408 film Substances 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 13
- 238000000151 deposition Methods 0.000 claims description 11
- 239000007769 metal material Substances 0.000 claims description 9
- 239000004642 Polyimide Substances 0.000 claims description 5
- 229920001721 polyimide Polymers 0.000 claims description 5
- 229910001374 Invar Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 238000000427 thin-film deposition Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 description 5
- 238000005538 encapsulation Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000004026 adhesive bonding Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
Abstract
The embodiment of the utility model provides a kind of mask piece, mask plate, film deposition equipment, is related to display technology field, can improve mask plate shade phenomenon.A kind of mask piece, including mask piece body, the mask piece body include at least one opening area；The mask piece further includes the thickening layer being arranged on the mask piece body.
Description
Technical field
It the utility model is related to display technology field, more particularly to a kind of mask piece, mask plate, film deposition equipment.
Background technology
OLED (Organic Light-Emitting Diode, organic electroluminescent LED) display panel, by having
The autonomous luminescence display of machine layer, since backlight is not required, it has a faster response time, and with angle of visibility is big, contrast
Spend high, light-weight, low-power consumption, can be easily made the features such as flexibility, it is considered to be most have the display device of development potentiality at present.
For OLED display panel, its encapsulation technology is more crucial, there is cover-plate type encapsulation and TFE (Thin at present
Film Encapsulation, thin-film package) two kinds, since TFE is applicable to flexible display apparatus, obtain extensively
Application.
TFE techniques use mask plate deposition film on substrate, so as to form encapsulated layer, but technique can generally exist and cover
Diaphragm plate shade phenomenon, i.e. the encapsulated layer of formation can grow into the region of covering below mask plate, so as to influence properties of product.
Utility model content
The embodiment of the utility model provides a kind of mask piece, mask plate, film deposition equipment, can improve mask plate shade
Phenomenon.
To reach above-mentioned purpose, the embodiment of the utility model adopts the following technical scheme that：
First aspect, there is provided a kind of mask piece, including mask piece body, the mask piece body include at least one opening
Area；The mask piece further includes the thickening layer being arranged on the mask piece body.
Preferably, the mask piece body includes multiple open regions.
Optionally, the thickening layer is arranged between the short side of mask piece body and the open region that short side is close.
Optionally, the thickness of the thickening layer is in the range of 0.1~0.375mm.
Optionally, the thickening layer is structure as a whole with the mask piece body.
Further, the material of the mask piece includes metal material.
Optionally, the material of the thickening layer includes polyimides；The material of the mask piece body includes metal material.
Optionally, the metal material includes invar alloy.
Second aspect, there is provided a kind of mask plate, including frame, and described in the first aspect being fixed on the frame
Mask piece.
The third aspect, there is provided a kind of film deposition equipment, including：Chamber, be arranged at the indoor microscope carrier of the chamber and mask
Plate fixed component；The microscope carrier, for carrying the substrate of pending thin film deposition；The mask plate fixed component, for fixing
Mask plate described in second aspect.
The embodiment of the utility model provides a kind of mask piece, mask plate, film deposition equipment, by mask piece body
Upper setting thickening layer so that using the mask plate for including the mask piece, the mask plate is with being placed in when forming film layer on substrate
The gap between substrate on microscope carrier is reached unanimity on the whole in height, so as to improve mask plate shade phenomenon.
Brief description of the drawings
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, drawings in the following description are only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, other attached drawings can also be obtained according to these attached drawings.
Fig. 1 is a kind of schematic top plan view of mask piece provided by the utility model wherein one side；
Fig. 2 is a kind of schematic top plan view of mask piece another side provided by the utility model；
Fig. 3 be in Fig. 1 AA ' to schematic cross-sectional view；
Fig. 4 is common mask plate and is placed between the substrate on microscope carrier that there are the schematic diagram in larger gap；
Fig. 5 is mask plate provided by the utility model and the schematic diagram in the gap being placed between the substrate on microscope carrier；
Fig. 6 is a kind of schematic diagram of film deposition equipment provided by the utility model.
Reference numeral：
100- mask pieces；10- mask piece bodies；11- open regions；20- thickening layers；30- microscope carriers；40- substrates；50- is common
Mask plate；60- chambers；70- mask plate fixed components.
Embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are without making creative work
All other embodiments obtained, shall fall within the protection scope of the present invention.
The utility model embodiment provides a kind of mask plate, including frame, and the mask piece being fixed on the frame.
Wherein, the mask piece 100 that the utility model embodiment provides, as shown in Figure 1, Figure 2 and Figure 3, including mask piece sheet
Body 10, the mask piece body 10 include at least one opening area 11；The mask piece 100, which further includes, is arranged at mask piece body
Thickening layer 20 on 10.
Occur one of mask plate shade phenomenon the reason is that, using common mask plate, (i.e. the mask piece of the mask plate is in face
Same plane is in substrate side) when forming film on substrate, the surface of the microscope carrier of bearing substrate is not exclusively same flat
On face, and other regions can be less than in subregion, difference in height occur, so that when common mask plate is bonded with substrate, always
It can may result in there are certain gap, and when gap reach a certain height and occur serious mask plate shade phenomenon.
It should be noted that first, the shape and size of open region 11 should be according to the shape of film layer to be formed on substrate
Depending on shape and size.
Exemplary, the shape and size of open region 11 may correspond to the shape and size of the encapsulated layer of oled substrate.
Second, it will be understood by those skilled in the art that thickening layer 20 should be arranged at the non-opening portion of mask piece body 10
That is shield portions, and it is located at frame side.
Wherein, the setting position for thickening layer 20 and thickness, the microscope carrier that can be placed according to matched substrate
Depending on, i.e. the setting position of thickening layer 20 is corresponding with a lower height of region of microscope carrier, its thickness may depend on the height of microscope carrier
, so that when the mask piece 100 of the utility model is applied to mask plate, it is somebody's turn to do with respect to the difference in height in other regions lower region
Mask plate and the gap being placed between the substrate on microscope carrier are integrally reached unanimity in height.
By setting thickening layer 20 on mask piece body 10 so that use the mask plate for including the mask piece 100 in base
When film layer is formed on plate, the mask plate and the gap being placed between the substrate on microscope carrier are reached unanimity on the whole in height,
So as to improve mask plate shade phenomenon.
Since in order to improve production efficiency, the preparation of each tunic layer is typically carried out on a big glass substrate,
Then multiple small substrates for different product are formed by cutting again, it is preferred, therefore, that as depicted in figs. 1 and 2, it is described to cover
Diaphragm body 10 includes multiple open regions 11.
It is understood that an open region 11 is used for the film layer on the substrate after one cutting of formation.
For the thin film encapsulation processes of OLED, after encapsulated layer is formed using common mask plate deposition film, actual process
Test finds that the mask plate shade phenomenon near the short side of substrate is more serious than the mask plate shade phenomenon of intermediate region.It is former to study carefully it
Cause, as shown in figure 4, find the surface of the microscope carrier 30 of bearing substrate 40, the low shape in high both sides among presentation on long side direction,
Common mask plate 50 is so resulted in when being bonded with substrate 40, larger gap is occurring (two in Fig. 4 close to the region of short side
Region between the dotted line of side), so as to cause substrate 40 close to the mask plate shade phenomenon in the region of short side than more serious.
Based on this, as shown in Fig. 2, can be leaned on by the way that the thickening layer 20 to be arranged to the short side of mask piece body 10 with short side
Between near open region 11, to reduce the height in above-mentioned gap (as shown in Figure 5).
Since edge region can improve mask plate shade phenomenon, so that the substrate 40 can be applied to narrow frame
OLED display.
On this basis, find that the thickness of thickening layer 20 in the range of 0.1~0.375mm, can be solved preferably by surveying
The mask plate shade phenomenon that certainly substrate 40 occurs close to the region of short side, nor other regions can be caused mask plate the moon occur
Shadow phenomenon.
Based on above-mentioned, optionally, thickening layer 20 is structure as a whole with mask piece body 10.
It is understood that when thickening layer 20 and mask piece body 10 are structure as a whole, mask piece body 10 and thicken
The material identical of layer 20.
In the case, preparing the technique of mask piece 100 can be：On one block of mask piece base material, first pass through gluing,
After exposure, development, open region 11 is etched；And then after secondary gluing, exposure, development, by its in addition to thickening layer 20 to be formed
He falls segment thickness by region etch, and the thickness is identical with the thickness of thickening layer 20, so as to form thickening layer in the region not etched
20。
Further, the material of the mask piece 100 includes metal material.
Optionally, the material of thickening layer 20 includes polyimides (PI)；The material of mask piece body 10 includes metal material
Material.
Since polyimides has certain caking property and high temperature resistant, it can be as the material of thickening layer 20.
Preferably, the metal material can include invar alloy.
The utility model embodiment also provides a kind of film deposition equipment, as shown in fig. 6, including：Chamber 60, be arranged at chamber
Microscope carrier 30 and mask plate fixed component 70 in room 60；Microscope carrier 30, for carrying the substrate 40 of pending thin film deposition；Mask plate
Fixed component 70, for fixing the mask plate of the utility model embodiment offer.
After forming film layer on the substrate 40 by the film deposition equipment, mask plate, shade phenomenon can be improved.
The above, is only specific embodiment of the present utility model, but the scope of protection of the utility model is not limited to
In this, any one skilled in the art can readily occur in change in the technical scope that the utility model discloses
Or replace, it should be covered within the scope of the utility model.Therefore, the scope of protection of the utility model should be with the power
Subject to the protection domain that profit requires.
Claims (10)
1. a kind of mask piece, it is characterised in that including mask piece body, the mask piece body includes at least one opening area；
Further include the thickening layer being arranged on the mask piece body.
2. mask piece according to claim 1, it is characterised in that the mask piece body includes multiple open regions.
3. mask piece according to claim 1, it is characterised in that the thickening layer be arranged at the short side of mask piece body with
Between the close open region of short side.
4. according to claim 1-3 any one of them mask pieces, it is characterised in that the thickness of the thickening layer 0.1~
In the range of 0.375mm.
5. mask piece according to claim 1, it is characterised in that the thickening layer is integrated knot with the mask piece body
Structure.
6. mask piece according to claim 5, it is characterised in that the material of the mask piece includes metal material.
7. mask piece according to claim 1, it is characterised in that the material of the thickening layer includes polyimides；
The material of the mask piece body includes metal material.
8. the mask piece according to claim 6 or 7, it is characterised in that the metal material includes invar alloy.
A kind of 9. mask plate, it is characterised in that including frame, and any one of claim 1-8 being fixed on the frame
The mask piece.
A kind of 10. film deposition equipment, it is characterised in that including：Chamber, be arranged at the indoor microscope carrier of the chamber and mask plate is consolidated
Determine component；
The microscope carrier, for carrying the substrate of pending thin film deposition；
The mask plate fixed component, for fixing the mask plate described in claim 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721399214.6U CN207331039U (en) | 2017-10-26 | 2017-10-26 | A kind of mask piece, mask plate, film deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721399214.6U CN207331039U (en) | 2017-10-26 | 2017-10-26 | A kind of mask piece, mask plate, film deposition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207331039U true CN207331039U (en) | 2018-05-08 |
Family
ID=62362861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721399214.6U Expired - Fee Related CN207331039U (en) | 2017-10-26 | 2017-10-26 | A kind of mask piece, mask plate, film deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207331039U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110055492A (en) * | 2019-04-09 | 2019-07-26 | 深圳市华星光电技术有限公司 | A kind of exposure mask piece shaped structure |
| CN112376015A (en) * | 2020-11-09 | 2021-02-19 | 京东方科技集团股份有限公司 | Mask and manufacturing method thereof, display substrate and manufacturing method thereof |
-
2017
- 2017-10-26 CN CN201721399214.6U patent/CN207331039U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110055492A (en) * | 2019-04-09 | 2019-07-26 | 深圳市华星光电技术有限公司 | A kind of exposure mask piece shaped structure |
| CN112376015A (en) * | 2020-11-09 | 2021-02-19 | 京东方科技集团股份有限公司 | Mask and manufacturing method thereof, display substrate and manufacturing method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180508 |