CN207294877U - A kind of screening arrangement - Google Patents
A kind of screening arrangement Download PDFInfo
- Publication number
- CN207294877U CN207294877U CN201720358292.5U CN201720358292U CN207294877U CN 207294877 U CN207294877 U CN 207294877U CN 201720358292 U CN201720358292 U CN 201720358292U CN 207294877 U CN207294877 U CN 207294877U
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- CN
- China
- Prior art keywords
- evaporation source
- shielding device
- seal
- screening arrangement
- source pipeline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model discloses a kind of screening arrangement, including evaporation source pipeline and shielding device, the evaporation source pipeline is connected with shielding device by seal, and the seal is rubber seal.The present apparatus is used for the screening arrangement for researching and developing large-scale 2800 super hard nano film coating equipment of DLC, by setting rubber seal, can effectively prevent that evaporation source pipeline heat conduction is fast, cause shielding device heat bad, have the function that guard shield equipment.
Description
Technical field
It the utility model is related to a kind of screening arrangement.
Background technology
At present in some process of producing product, since the hot air temperature that evaporation source produces is high, easily by metal material
Seal quick conductive to shielding device, shielding device heat is bad.
Utility model content
In order to overcome drawbacks described above, the utility model provides a kind of screening arrangement.
The utility model is adopted the technical scheme that to solve its technical problem：
A kind of screening arrangement, including evaporation source pipeline and shielding device, the evaporation source pipeline pass through close with shielding device
Sealing is connected.
The seal is rubber seal.
The beneficial effects of the utility model are：
The present apparatus is used for the screening arrangement for researching and developing large-scale DLC-2800 super hard nanos film coating equipment, by setting rubber
Seal, can effectively prevent that evaporation source pipeline heat conduction is fast, cause shielding device heat bad, have the function that guard shield equipment.
Brief description of the drawings
The utility model is further illustrated with reference to the accompanying drawings and examples.
Fig. 1 is a kind of structure diagram of screening arrangement of the utility model.
Wherein：1st, shielding device；2nd, seal；3rd, evaporation source pipeline.
Embodiment
The utility model is described in further detail below in conjunction with the accompanying drawings.
As shown in Figure 1, a kind of screening arrangement, including evaporation source pipeline 3 and shielding device 1, the evaporation source pipeline 3 is with shielding
Equipment 1 is covered by seal 2 to be connected.The seal 2 is rubber seal.The present apparatus surpasses for researching and developing large-scale DLC-2800
The screening arrangement of hard nano thin-film coating apparatus, by setting rubber seal, can effectively prevent that evaporation source pipeline heat conduction is fast,
Cause shielding device heat bad, have the function that guard shield equipment.
Above-mentioned accompanying drawings and embodiments are merely to illustrate the utility model, and any technical field those of ordinary skill is to it
The appropriate change or modification done, or use other flower pattern instead and make this technical change, it all should be regarded as not departing from this practicality newly
Type patent category.
Claims (2)
1. a kind of screening arrangement, including evaporation source pipeline（3）And shielding device（1）, it is characterised in that：The evaporation source pipeline
（3）With shielding device（1）Pass through seal（2）It is connected.
2. screening arrangement according to claim 1, it is characterised in that：The seal（2）For rubber seal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720358292.5U CN207294877U (en) | 2017-04-07 | 2017-04-07 | A kind of screening arrangement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720358292.5U CN207294877U (en) | 2017-04-07 | 2017-04-07 | A kind of screening arrangement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207294877U true CN207294877U (en) | 2018-05-01 |
Family
ID=62271050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720358292.5U Active CN207294877U (en) | 2017-04-07 | 2017-04-07 | A kind of screening arrangement |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207294877U (en) |
-
2017
- 2017-04-07 CN CN201720358292.5U patent/CN207294877U/en active Active
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Legal Events
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| GR01 | Patent grant |