CN207293341U - Single double slide unit transmission mechanisms of driving - Google Patents
Single double slide unit transmission mechanisms of driving Download PDFInfo
- Publication number
- CN207293341U CN207293341U CN201721163891.8U CN201721163891U CN207293341U CN 207293341 U CN207293341 U CN 207293341U CN 201721163891 U CN201721163891 U CN 201721163891U CN 207293341 U CN207293341 U CN 207293341U
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- slide unit
- guide rail
- screw rod
- bindiny mechanism
- cylinder
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Abstract
The utility model provides a kind of double slide unit transmission mechanisms of single driving, more particularly to semiconductor machining machinery transportation art, including guide rail, the first slide unit and the second slide unit, a screw rod is equipped with above guide rail, the both ends of screw rod are rotatablely connected with guide rail, one end of institute's guide rail is equipped with motor, and the drive shaft of motor connects with the end of screw rod；Thread bush is additionally provided with screw rod, the top of thread bush is equipped with the first slide unit, and the side of the first slide unit is located at guide rail and is equipped with the second slide unit, and the second slide unit can be moved back and forth along guide rail；Second slide unit is equipped with bindiny mechanism and cylinder, and cylinder is arranged on the second slide unit；Bindiny mechanism one end connects with the first slide unit activity, and the other end of bindiny mechanism is hinged with the second slide unit, and bindiny mechanism connects with cylinder, and cylinder can drive connection mechanism rotation.The utility model is not only simple in structure, small, and can ensure that the synchronism of transmission.
Description
Technical field
The utility model belongs to semiconductor machining machinery transportation art, and in particular to single double slide unit transmission mechanisms of driving.
Background technology
In semiconductor fabrication processes, the carrying mechanism of wafer is substantially Dual-motors Driving, and a motor is used for carrying
Fill the gaily decorated basket of wafer, after reaching station, then with second motor taken out out of the gaily decorated basket wafer, such transmission mechanism, uses
Dual-motors Driving, not only complicated, organization volume is big, and the control of bi-motor has the nonsynchronous security risk of operation.
For case above, a kind of existing single double slide unit transmission mechanisms of driving of demand, are not only simple in structure, small, and can
Ensure the synchronism of transmission.
Utility model content
The purpose of this utility model provides single driving double slide unit transmission mechanisms, is not only simple in structure, small, and can ensure that
The synchronism of transmission.
The utility model provides following technical solution：
Single double slide unit transmission mechanisms of driving, including guide rail, the first slide unit, screw rod and the second slide unit, the guide rail top are set
There is a screw rod, the both ends of the screw rod are rotatablely connected with the guide rail, and one end of institute's guide rail is equipped with motor, the driving of the motor
Axis connects with the end of the screw rod；Thread bush is additionally provided with the screw rod, the top of the thread bush is equipped with the first slide unit, institute
The side for stating the first slide unit is located at the guide rail and is equipped with the second slide unit, and second slide unit can be moved back and forth along the guide rail；
Second slide unit is equipped with bindiny mechanism and cylinder, and the cylinder is arranged on second slide unit；The bindiny mechanism one
End connects with the first slide unit activity, and the other end of the bindiny mechanism is hinged with second slide unit, and the connection machine
Structure connects with the cylinder, and the cylinder can drive the bindiny mechanism to rotate.
Preferably, the track cross-section is T-shaped, and the lower part both sides of first slide unit and second slide unit are buckled
On the guide rail.
Preferably, the upper surface of the guide rail is equipped with a groove, and the screw rod is arranged in the groove of the guide rail.
Preferably, the both sides of the guide rail are equipped with rack, and first slide unit and second slide unit are arranged on the rack
Inner side.
Preferably, one end of the bindiny mechanism is hook-shaped to be equipped with card slot, the bindiny mechanism above first slide unit
Hook-shaped one end connects with the card slot, and one end that the cylinder can drive the bindiny mechanism hook-shaped is moved upwards.
Preferably, the motor is connected with the screw rod by transmission belt.
The beneficial effects of the utility model：
Compared with traditional Dual-motors Driving, the utility model is driven using single motor, is not only simple in structure, is reduced device
Volume, and can ensure that the synchronism of transmission.
Brief description of the drawings
Attached drawing is used to provide a further understanding of the present invention, and a part for constitution instruction, with this practicality
New embodiment is used to explain the utility model together, does not form the limitation to the utility model.In the accompanying drawings：
Fig. 1 is the utility model front view；
Fig. 2 is the utility model explosive view；
Fig. 3 is the utility model cut-away view.
In figure mark for：1st, guide rail；2nd, the first slide unit；3rd, the second slide unit；4th, motor；5th, screw rod；6 cylinders, conducting wire；7th, machine
Frame；8th, thread bush；9th, bindiny mechanism；10th, card slot.
Embodiment
As shown in Figure 1 to Figure 3, the double slide unit transmission mechanisms of single driving, including guide rail 1, the first slide unit 2 and the second slide unit 3, lead
The top of rail 1 is equipped with a screw rod 5, and both ends and the guide rail 1 of screw rod 5 are rotatablely connected, and one end of institute's guide rail 1 is equipped with motor 4, motor 4
Drive shaft connects with the end of screw rod 5；It is additionally provided with thread bush 8 on screw rod 5, the top of thread bush 8 is equipped with the first slide unit 2, and first
The side of slide unit 2 is located at guide rail 1 and is equipped with the second slide unit 3, and the second slide unit 3 can be moved back and forth along guide rail 1；Set on second slide unit 3
There are bindiny mechanism 9 and cylinder 6, cylinder 6 is arranged on the second slide unit 3；9 one end of bindiny mechanism connects with 2 activity of the first slide unit, even
The other end of connection mechanism 9 and the second slide unit 3 are hinged, and bindiny mechanism 9 connects with cylinder 6, and cylinder 6 can 9 turns of drive connection mechanism
It is dynamic；Drive screw rod 5 to rotate by motor 4, thread bush 8 can be made to drive the first slide unit 2 to move back and forth in the horizontal direction, due to even
Connection mechanism 9 connects the first slide unit 2 with the second slide unit 3, and then makes the second slide unit 3 also follow the first slide unit 2 to move, and passes through gas
The driving of cylinder 6 makes bindiny mechanism 9 be separated with the first slide unit 2, when can make the movement of the first slide unit 2, and 3 remains stationary of the second slide unit；
1 cross section of guide rail is T-shaped, and the lower part both sides of the first slide unit 2 and the second slide unit 3 are buckled on guide rail 1, this structure can ensure that
One slide unit 2 and the second slide unit 3 are smoothly moved along guide rail 1；
Wherein, the upper surface of guide rail 1 is equipped with a groove, and screw rod 5 is arranged in the groove of guide rail 1, can so reduce device
Volume, and security and aesthetics can be lifted；The both sides of guide rail 1 are equipped with rack 1, and the first slide unit 2 and the second slide unit 3 are arranged on machine
The inner side of frame 7, by the guiding role of rack 7, can further make the first slide unit 2 and 3 stable movement of the second slide unit and accurate；Connection
One end of mechanism 9 is hook-shaped, and the top of the first slide unit 2 is equipped with card slot 10, and the hook-shaped one end of bindiny mechanism 9 connects with card slot 10, gas
Cylinder 6 can the hook-shaped one end of drive connection mechanism 9 move upwards, hook-shaped bindiny mechanism 9 is easy to and exact separation；Motor 4 and spiral shell
Bar 5 is connected by transmission belt, and the dynamic band connection response of transmission is fast, resistance is small.
The working method of the utility model：
As shown in Figure 1 to Figure 3, the wafer gaily decorated basket is placed in the top of the second slide unit 2, drives screw rod 5 to rotate by motor 4, can
Thread bush 8 is set to drive the first slide unit 2 to move back and forth in the horizontal direction, since bindiny mechanism 9 is by the first slide unit 2 and the second slide unit 3
Connect, and then make the second slide unit 3 also follow the first slide unit 2 to move, 9 and first slide unit 2 of bindiny mechanism is made by the driving of cylinder 6
Separation, motor continue to drive screw rod 5 to rotate, 3 remains stationary of the second slide unit at this time, and the first slide unit 2 keeps movement, and then by crystalline substance
Wafer in the circle gaily decorated basket is sent out；Compared with traditional Dual-motors Driving, the utility model is driven using single motor, not only structure letter
It is single, reduce device volume, and the movement of the first slide unit and the second slide unit is realized by screw rod 5, it can be ensured that the synchronism of transmission.
The above descriptions are merely preferred embodiments of the present invention, is not intended to limit the present invention, although ginseng
The utility model is described in detail according to previous embodiment, for those skilled in the art, it still can be with
Modify to the technical solution described in foregoing embodiments, or equivalent substitution is carried out to which part technical characteristic.It is all
Within the spirit and principles of the present invention, any modification, equivalent replacement, improvement and so on, should be included in this practicality
Within new protection domain.
Claims (6)
1. single double slide unit transmission mechanisms of driving, it is characterised in that：Including guide rail, the first slide unit, the second slide unit and screw rod,
A screw rod is equipped with above the guide rail, the both ends of the screw rod are rotatablely connected with the guide rail, and one end of institute's guide rail is equipped with
Motor, the drive shaft of the motor connect with the end of the screw rod；
Thread bush is additionally provided with the screw rod, the top of the thread bush is equipped with the first slide unit, the side position of first slide unit
The second slide unit is equipped with the guide rail, second slide unit can be moved back and forth along the guide rail；
Second slide unit is equipped with bindiny mechanism and cylinder, and the cylinder is arranged on second slide unit；The connection machine
Structure one end connects with the first slide unit activity, and the other end of the bindiny mechanism is hinged with second slide unit, and the company
Connection mechanism connects with the cylinder, and the cylinder can drive the bindiny mechanism to rotate.
2. the double slide unit transmission mechanisms of single driving according to claim 1, it is characterised in that：The track cross-section is T-shaped,
The lower part both sides of first slide unit and second slide unit are buckled on the guide rail.
3. the double slide unit transmission mechanisms of single driving according to claim 1, it is characterised in that：The upper surface of the guide rail is equipped with
One groove, the screw rod are arranged in the groove of the guide rail.
4. the double slide unit transmission mechanisms of single driving according to claim 1 or 2, it is characterised in that：The both sides of the guide rail are set
Organic frame, first slide unit and second slide unit are arranged on the inside of the rack.
5. the double slide unit transmission mechanisms of single driving according to claim 1, it is characterised in that：One end of the bindiny mechanism is
It is hook-shaped, card slot is equipped with above first slide unit, the hook-shaped one end of the bindiny mechanism connects with the card slot, and the cylinder can
Move upwards the one end for driving the bindiny mechanism hook-shaped.
6. the double slide unit transmission mechanisms of single driving according to claim 1, it is characterised in that：The motor leads to the screw rod
Transmission belt is crossed to connect.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721163891.8U CN207293341U (en) | 2017-09-12 | 2017-09-12 | Single double slide unit transmission mechanisms of driving |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721163891.8U CN207293341U (en) | 2017-09-12 | 2017-09-12 | Single double slide unit transmission mechanisms of driving |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207293341U true CN207293341U (en) | 2018-05-01 |
Family
ID=62446829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721163891.8U Active CN207293341U (en) | 2017-09-12 | 2017-09-12 | Single double slide unit transmission mechanisms of driving |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207293341U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116922423A (en) * | 2023-07-25 | 2023-10-24 | 上海稷以科技有限公司 | Wafer transmission manipulator system and method |
-
2017
- 2017-09-12 CN CN201721163891.8U patent/CN207293341U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116922423A (en) * | 2023-07-25 | 2023-10-24 | 上海稷以科技有限公司 | Wafer transmission manipulator system and method |
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