CN207281097U - A kind of precision level regulating device - Google Patents
A kind of precision level regulating device Download PDFInfo
- Publication number
- CN207281097U CN207281097U CN201721080498.2U CN201721080498U CN207281097U CN 207281097 U CN207281097 U CN 207281097U CN 201721080498 U CN201721080498 U CN 201721080498U CN 207281097 U CN207281097 U CN 207281097U
- Authority
- CN
- China
- Prior art keywords
- flat plate
- upper flat
- middle plateform
- displacement
- actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
A kind of precision level regulating device,Including the upper flat plate with fine adjustment function,There is the middle plateform of coarse adjustment,Tablet under mounting seat,1# cross axis mechanisms are connected between the upper flat plate and middle plateform,2# cross axis mechanisms are equipped between middle plateform and lower tablet,Linear actuator,The upper flat plate is equipped with the online position measurement sensors of 1#,Middle plateform is equipped with the online position measurement sensors of 2#,Executing agency's displacement of the lines actuator,Preloading spring,Described preloading spring one end is connected with upper flat plate edge rigid,The other end of preloading spring is rigidly connected with middle plateform,The 1# crosses shaft connection mechanism is rigidly connected by 1# contiguous blocks and upper flat plate,1# crosses shaft connection mechanism is rigidly connected by 2# contiguous blocks and middle plateform,The 2# crosses shaft connection mechanism is rigidly connected by 3# contiguous blocks and middle plateform,2# crosses shaft connection mechanism is rigidly connected by 4# contiguous blocks and lower tablet.Solve the problems, such as that Integral levelling precision is not high and levelling gear stability is insufficient, have the characteristics that stability is good, platform degree of regulation is high, ensure that the degree of regulation for adjusting platform.
Description
Technical field
A kind of precision level regulating device is the utility model is related to, particularly a kind of Electrostatic Suspension Accelerometer Ground Examination
Precision level regulating device is used in test.
Background technology
Electrostatically suspended accelerometer in integral united test, and ground using weight component method carry out range, constant multiplier and
When noise testing is demarcated, it is both needed to ensure acceleration of gravity in accelerometer sensitive axis side using the adjustment of precision level Adjustment Tests platform
To component, ensure that accelerometer is operated in range linear zone.Precision level testing stand angular adjustment precision and system are stablized
Property has very high requirement.
Auto-leveling mechanism some of the prior art employs motor leading screw and adds nut, piezoelectric ceramics or cam mechanism
3 points under bearing member platform or 4 leveling workpiece, but since feed screw nut is there are gap, and piezoelectric ceramics has backlash, cam
Mechanical stability is bad, and therefore, it is difficult to reach very high precision, whole efficiency is not high.
Utility model content
Its purpose of the utility model, which is that, provides a kind of precision level regulating device, and it is not high to solve Integral levelling precision
And levelling gear stability it is insufficient the problem of, have the characteristics that stability is good, platform degree of regulation is high, ensure that adjusting platform
Degree of regulation.
The technical solution realized above-mentioned purpose and taken, a kind of precision level regulating device, including with fine adjustment function
Tablet under upper flat plate, the middle plateform with coarse adjustment, mounting seat, connects 1# cross axles between the upper flat plate and middle plateform
Bindiny mechanism, is equipped with 2# crosses shaft connection mechanism, linear actuator between middle plateform and lower tablet, the upper flat plate is equipped with 1#
Online position measurement sensor, middle plateform are equipped with the online position measurement sensors of 2#, executing agency's displacement of the lines actuator, pretension
Spring, described preloading spring one end are connected with upper flat plate edge rigid, and the other end and the middle plateform of preloading spring are rigidly connected, institute
The 1# crosses shaft connection mechanism stated is rigidly connected by 1# contiguous blocks and upper flat plate, and 1# crosses shaft connection mechanism passes through 2# contiguous blocks
It is rigidly connected with middle plateform, the 2# crosses shaft connection mechanism is rigidly connected by 3# contiguous blocks and middle plateform, 2# cross axles
Bindiny mechanism is rigidly connected by 4# contiguous blocks and lower tablet.
Beneficial effect
The utility model has the following advantages compared with prior art.
1st, it is connected between upper flat plate and middle plateform, middle plateform and lower tablet with cross shaft connection mechanism, is ensure that whole
The stability requirement of system；
2nd, sphere is promoted using displacement of the lines actuator, and then promotes skewback, say the transform linear motion of displacement of the lines actuator
For the circular motion of upper flat plate, whole platform degree of regulation is effectively raised；
3rd, use spring pre-tightening between the upper mounting plate with accurate adjustment, ensure fitting closely for sphere and skewback, ensure
Adjust the degree of regulation of platform；
4th, can long-time stability reliably working.
Brief description of the drawings
The utility model is described in further detail below in conjunction with the accompanying drawings.
Fig. 1 is the structure diagram of the utility model；
Fig. 2 is the structure diagram after the utility model removal upper flat plate and online position measurement sensor.
Embodiment
A kind of precision level regulating device, including have the function of fine adjustment function upper flat plate 1, have coarse adjustment middle plateform 2,
Tablet 3 under mounting seat, as shown in Figure 1 and Figure 2, connect 1# crosses shaft connection mechanism 4 between the upper flat plate 1 and middle plateform 2,
2# crosses shaft connection mechanism 12, linear actuator 11 are equipped between middle plateform 2 and lower tablet 3, the upper flat plate 1 exists equipped with 1#
Line position measurement sensor 14, middle plateform 2 are equipped with the online position measurement sensors 15 of 2#, executing agency's displacement of the lines actuator
10th, preloading spring 9, described 9 one end of preloading spring are connected with 1 edge rigid of upper flat plate, the other end and middle plateform of preloading spring 9
2 rigid connections, the 1# crosses shaft connection mechanism 4 are rigidly connected by 1# contiguous blocks 5a and upper flat plate 1,1# cross axis connections
Mechanism 4 is rigidly connected by 2# contiguous blocks 5b and middle plateform 2, and the 2# crosses shaft connection mechanism 12 passes through 3# contiguous blocks 13a
It is rigidly connected with middle plateform 2,2# crosses shaft connection mechanism 12 is rigidly connected by 4# contiguous blocks 13b and lower tablet 3.
The linear actuator 11 is equipped with 2, and 2 11 one end of linear actuator are installed on lower tablet 3 according to X, Y are orthogonal
On, the other end of 2 linear actuators 11 is connected with 2 ball angle of middle plateform, during the transform linear motion by linear actuator 11 is
The movement in a curve of tablet 2, so as to fulfill the coarse adjustment function of lower platform.
Executing agency's displacement of the lines actuator 10 is equipped with 2, and 2 executing agency's displacement of the lines actuators 10 are put down in being installed on
On plate 2, top and the sphere 7 of executing agency's displacement of the lines actuator 10 are rigidly connected, 10 straight line of executing agency's displacement of the lines actuator
During driving, sphere 7 will be promoted for linear motion on guide rail slide block component 16,7 top of sphere is contacted with skewback 6, so as to promote
Skewback 7 makees circular motion, and skewback 7 is rigidly connected with upper flat plate 2, and then promotes upper flat plate 2 to make circular motion, the executing agency
The step-length of displacement of the lines actuator 10 is 50nm-300nm, has the characteristics that stability is high and precision is high, is realized by the structure
The accurate adjustment function of platform.
Executing agency's displacement of the lines actuator 10, slide block guide rail component 16, sphere 7 and the skewback 6 be according to X, Y just
Orientation installation is handed over, is equidirectional with 11 installation position of linear actuator.
The preloading spring 9 is installed on the both sides of executing agency's displacement of the lines actuator 10, is symmetrically installed, executing agency's line
One end of displacement actuator 10 and upper flat plate 1 are rigidly connected, and the other end and middle plateform 2 of executing agency's displacement of the lines actuator 10 are firm
Property be connected, upper mounting plate adjusting during be in tension all the time, between upper flat plate 1 and middle plateform 2 provide one in advance
Clamp force, ensures that sphere 7 and 6 moment of skewback are in and fit closely state, realizes the accurate adjustment function of upper mounting plate.
The cross shaft connection mechanism 4 includes cross axle, angular contact ball bearing, end cap；The cross axis connection machine
Structure 12 includes cross axle, angular contact ball bearing, end cap.
Liang Zu executing agencies displacement of the lines actuator 10, slide block guide rail component are set between the upper flat plate 1 and middle plateform 2
16th, sphere 7, skewback 6 and the online position sensors 15 of 2#.
The online position measurement sensors 14 of the 1# are equipped with 2, and the online position measurement sensors 14 of 2 1# pass through installation
Support bracket bolt is fixed on upper flat plate 2, is installed according to X, Y orthogonal direction.
Embodiment
The present apparatus includes having the function of the lower platform of coarse adjustment and has the function of the upper mounting plate of accurate adjustment.Wherein, there is coarse adjustment work(
The lower platform of energy includes the 2# crosses of middle plateform 2, lower tablet 3, online position measurement sensor, connection middle plateform 2 and lower tablet 3
Shaft connection mechanism 12, lower platform adjustment actuating mechanism linear actuator；Have the function of accurate adjustment upper mounting plate include upper flat plate 1, in
Tablet 2, online position measurement sensor, the 1# crosses shaft connection mechanism 4 for connecting upper flat plate 1 and middle plateform 2, upper mounting plate are adjusted and held
Row mechanism assembly and preloading spring component.
The cross shaft connection mechanism includes cross axle, angular contact ball bearing and end cap, two cross shaft connection mechanisms
It is rigidly connected respectively by four connection block assemblies with corresponding two tablets.
Have the function of that accurate adjustment upper mounting plate executing agency includes executing agency's displacement of the lines actuator 10, sphere 7, skewback 6 and leads
Rail slide block assembly 16, wherein 10 bolt of executing agency's displacement of the lines actuator are fixed on middle plateform 2, and top connects with the rigidity of sphere 7
Connect, 7 bolt of sphere is fixed on guide rail slide block component 16, and 6 bolt of skewback is fixed on upper flat plate 1.
Preloading spring 9 is rigidly connected with upper flat plate and lower tablet, is symmetrically mounted on 10 liang of executing agency's displacement of the lines actuator
Side.
Online position measurement sensor, executing agency's displacement of the lines actuator 10, sphere 7, skewback 6, guide rail slide block component 16
It is 2 with 11 quantity of linear actuator and is installed on according to X, Y-axis orthogonal direction on corresponding upper flat plate 1 and middle plateform 2,
Angle is 90 °.
11 bottom of linear actuator is rigidly connected with lower tablet 3, and top is connected with middle plateform 2 with spherical hinge.
As shown in Figure 1 and Figure 2, the present apparatus include have the function of fine adjustment function upper flat plate 1, with coarse adjustment middle plateform 2,
Tablet 3 under mounting seat, the 1# crosses shaft connection mechanism 4 of connection upper flat plate 1 and middle plateform 2, connection middle plateform and lower tablet
The online position measurement sensor 14 of 2# crosses shaft connection mechanism 12,1# and the online position measurement sensors 15 of 2#, executing agency's line
Displacement actuator 10 and linear actuator 11, preloading spring 9 and guide rail slide block component 16.
In the present embodiment, upper flat plate 1, middle plateform 2 and lower tablet 3 are circle, using two groups of cross shaft connection mechanisms
Upper flat plate 1 and middle plateform 2, middle plateform 2 and lower tablet 3 are connected respectively by contiguous block, composition has the function of accurate adjustment
Upper mounting plate and the lower platform with fine adjustment function.Two groups of cross shaft assemblies are respectively installed at the center of upper mounting plate and lower platform.
In the precision level regulating device of the present invention, the executing agency with the lower platform of coarse adjustment is linear actuator
11,11 bottom of linear actuator is rigidly connected with lower tablet, and top and middle plateform flexural pivot chain link, linear actuator 11 drive
When, push directly on middle plateform and make circular motion, realize the coarse adjustment function of lower platform.Middle plateform X, Y orthogonal direction is mounted with two
The online position measurement sensors 15 of 2#, thereby may be ensured that the on-line implement measurement of leveling positional information.
In the present apparatus, the executive module with the upper mounting plate of accurate adjustment is executing agency's displacement of the lines actuator 10, sphere
7th, skewback 6 and slide block guide rail component 16 form, and top and the sphere 7 of executing agency's displacement of the lines actuator 10 are rigidly connected, and perform
During mechanism displacement of the lines 10 linear drives of actuator, sphere 7 will be promoted for linear motion on guide rail slide block component 16, sphere 7 pushes up
End is contacted with skewback 6, so as to promote skewback 7 to make circular motion, skewback 7 is rigidly connected with upper flat plate 1, and then promotes upper flat plate 1
Make circular motion, by two groups of spring pre-tightenings 9 installed in 10 both sides of executing agency's displacement of the lines actuator, upper flat plate X, Y are orthogonal
Direction is mounted with the online position measurement sensors 14 of two 1#, thereby may be ensured that the on-line implement measurement of leveling positional information.
Two groups of executive modules are installed according to X, Y orthogonal direction, realize that X, Y horizontal direction are adjusted.
Horizontal coarse adjustment and the accurate adjustment function in two direction of X, Y, leveling machine more of the prior art can be realized by the present apparatus
For structure, using the teaching of the invention it is possible to provide the levelling effect of high accuracy and high efficient and reliable.
Claims (8)
1. a kind of precision level regulating device, including the upper flat plate with fine adjustment function（1）, there is the middle plateform of coarse adjustment
（2）, tablet under mounting seat（3）, it is characterised in that the upper flat plate（1）And middle plateform（2）Between connect 1# cross axis connections
Mechanism（4）, middle plateform（2）With lower tablet（3）Between be equipped with 2# cross shaft connection mechanisms（12）, linear actuator（11）, it is described
Upper flat plate（1）It is equipped with the online position measurement sensors of 1#（14）, middle plateform（2）It is equipped with the online position measurement sensors of 2#
（15）, executing agency's displacement of the lines actuator（10）, preloading spring（9）, the preloading spring（9）One end and upper flat plate（1）Edge
Rigid connection, preloading spring（9）The other end and middle plateform（2）Rigid connection, the 1# cross shaft connection mechanisms（4）Pass through
1# contiguous blocks（5a）With upper flat plate（1）Rigid connection, 1# cross shaft connection mechanisms（4）Pass through 2# contiguous blocks（5b）With middle plateform
（2）Rigid connection, the 2# cross shaft connection mechanisms（12）Pass through 3# contiguous blocks（13a）With middle plateform（2）Rigid connection, 2#
Cross shaft connection mechanism（12）Pass through 4# contiguous blocks（13b）With lower tablet（3）Rigid connection.
A kind of 2. precision level regulating device according to claim 1, it is characterised in that the linear actuator（11）
Equipped with 2,2 linear actuators（11）One end is installed on lower tablet according to X, Y are orthogonal（3）On, 2 linear actuators（11）'s
The other end and middle plateform（2）Ball angle is connected, by linear actuator（11）Transform linear motion be middle plateform（2）Camber line fortune
It is dynamic, so as to fulfill the coarse adjustment function of lower platform.
3. a kind of precision level regulating device according to claim 1, it is characterised in that executing agency's displacement of the lines promotees
Dynamic device（10）Equipped with 2,2 executing agency's displacement of the lines actuators（10）Installed in middle plateform（2）On, executing agency's displacement of the lines promotees
Dynamic device（10）Top and sphere（7）Rigid connection, executing agency's displacement of the lines actuator（10）During linear drives, sphere will be promoted
（7）In guide rail slide block component（16）Upper for linear motion, sphere（7）Top and skewback（6）Contact, so as to promote skewback（6）Make
Circular motion, skewback（6）With upper flat plate（2）Rigid connection, and then promote upper flat plate（2）Make circular motion, the executing agency
Displacement of the lines actuator（10）Step-length be 50nm-300nm.
A kind of 4. precision level regulating device according to claim 1 or 3, it is characterised in that executing agency's line
Displacement actuator（10）, slide block guide rail component（16）, sphere（7）And skewback（6）It is to be installed according to X, Y orthogonal orientation, it is and straight
Line drive（11）Installation position is equidirectional.
A kind of 5. precision level regulating device according to claim 1, it is characterised in that the preloading spring（9）Peace
Mounted in executing agency's displacement of the lines actuator（10）Both sides, be symmetrically installed, executing agency's displacement of the lines actuator（10）One end with
Upper flat plate（1）It is rigidly connected, executing agency's displacement of the lines actuator（10）The other end and middle plateform（2）It is rigidly connected, upper flat
Platform is to be in tension all the time during adjusting, in upper flat plate（1）And middle plateform（2）Between provide a pretightning force, ensure
Sphere（7）And skewback（6）Moment is in and fits closely state, realizes the accurate adjustment function of upper mounting plate.
A kind of 6. precision level regulating device according to claim 1, it is characterised in that the 1# cross axis connection machines
Structure（4）Including cross axle, angular contact ball bearing, end cap；The 2# cross shaft connection mechanisms（12）Including cross axle, angular contact
Ball bearing, end cap.
A kind of 7. precision level regulating device according to claim 1, it is characterised in that the upper flat plate（1）With in
Tablet（2）Between Liang Zu executing agencies displacement of the lines actuator is set（10）, slide block guide rail component（16）, sphere（7）, skewback（6）
And the online position sensors of 2#（15）.
A kind of 8. precision level regulating device according to claim 1, it is characterised in that the online position measurements of the 1#
Sensor（14）Equipped with 2,2 online position measurement sensors of 1#（14）Upper flat plate is fixed on by mounting bracket bolt（2）
On, installed according to X, Y orthogonal direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721080498.2U CN207281097U (en) | 2017-08-28 | 2017-08-28 | A kind of precision level regulating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721080498.2U CN207281097U (en) | 2017-08-28 | 2017-08-28 | A kind of precision level regulating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207281097U true CN207281097U (en) | 2018-04-27 |
Family
ID=61983729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721080498.2U Expired - Fee Related CN207281097U (en) | 2017-08-28 | 2017-08-28 | A kind of precision level regulating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207281097U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107859830A (en) * | 2017-12-14 | 2018-03-30 | 九江精密测试技术研究所 | Precision level adjusting means is used in a kind of Electrostatic Suspension Accelerometer Ground Examination test |
| CN109655469A (en) * | 2018-12-27 | 2019-04-19 | 深圳市燕麦科技股份有限公司 | A kind of the docking test device and its docking test method of flexible circuit board |
| CN112756996A (en) * | 2020-12-29 | 2021-05-07 | 中国科学院长春光学精密机械与物理研究所 | Six-degree-of-freedom adjusting device |
-
2017
- 2017-08-28 CN CN201721080498.2U patent/CN207281097U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107859830A (en) * | 2017-12-14 | 2018-03-30 | 九江精密测试技术研究所 | Precision level adjusting means is used in a kind of Electrostatic Suspension Accelerometer Ground Examination test |
| CN109655469A (en) * | 2018-12-27 | 2019-04-19 | 深圳市燕麦科技股份有限公司 | A kind of the docking test device and its docking test method of flexible circuit board |
| CN112756996A (en) * | 2020-12-29 | 2021-05-07 | 中国科学院长春光学精密机械与物理研究所 | Six-degree-of-freedom adjusting device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107859830A (en) | Precision level adjusting means is used in a kind of Electrostatic Suspension Accelerometer Ground Examination test | |
| CN207281097U (en) | A kind of precision level regulating device | |
| CN103252761A (en) | Long-stroke two-dimensional nano worktable system with angle compensation function | |
| KR102275786B1 (en) | Bearing testing machine | |
| CN201247155Y (en) | Test bench for steering frame characteristic parameter | |
| CN203245845U (en) | Large stroke two-dimensional nanometer work table system with angle compensation function | |
| CN105881585A (en) | Counterbalancing Linkage Mechanism | |
| CN107867414B (en) | Twelve-degree-of-freedom spacecraft simulator docking performance test device | |
| CN105599922B (en) | A kind of 1/6g low gravitations balance erecting by overhang | |
| CN103085992A (en) | Spatial microgravity simulation experiment system | |
| CN1550434A (en) | Integrated large glass handling system | |
| SE0901338A1 (en) | Adjustable bracket in structures | |
| CN101241307A (en) | Levelling focusing mechanism possessing great stroke control function | |
| CN1975365A (en) | Rail vehicle truck parameter measuring table | |
| CN102556372A (en) | Semi-active six-degree-of-freedom simulation device | |
| CN107144251B (en) | Automatic force application apparatus and method for the measurement of air bearing rotor gyro dynamic pressure motor gap | |
| CN108051199B (en) | Rocker-arm test stand for performance of linear electromechanical actuator | |
| US7762145B2 (en) | Method for measuring bending moments on a joint and measurement arrangement for performing the method | |
| CN1745310B (en) | Wrist joint for positioning a test head | |
| CN113649966A (en) | Product positioning device | |
| CN104070518B (en) | A kind of Three-degree-of-freeprecision precision adjustment device based on eccentric structure | |
| CN114911019B (en) | Six-degree-of-freedom pose precision adjusting device and method for optical element | |
| CN116620576A (en) | Zero gravity environment simulation device and method capable of compensating additional mass inertia force | |
| CN107664923B (en) | Micro-motion stage for photoetching motion stage system and control method thereof | |
| CN110736596A (en) | portable excitation system for simulating rail operation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180427 Termination date: 20180828 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |